EP2597313A3 - High speed rotor for a vacuum pump - Google Patents

High speed rotor for a vacuum pump Download PDF

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Publication number
EP2597313A3
EP2597313A3 EP12191948.4A EP12191948A EP2597313A3 EP 2597313 A3 EP2597313 A3 EP 2597313A3 EP 12191948 A EP12191948 A EP 12191948A EP 2597313 A3 EP2597313 A3 EP 2597313A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
high speed
speed rotor
sleeve
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP12191948.4A
Other languages
German (de)
French (fr)
Other versions
EP2597313A2 (en
EP2597313B1 (en
Inventor
Matthias Mädler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to JP2012256006A priority Critical patent/JP6017278B2/en
Publication of EP2597313A2 publication Critical patent/EP2597313A2/en
Publication of EP2597313A3 publication Critical patent/EP2597313A3/en
Application granted granted Critical
Publication of EP2597313B1 publication Critical patent/EP2597313B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/60—Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/603—Composites; e.g. fibre-reinforced

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die Erfindung betrifft einen schnell drehenden Rotor (10) für eine Vakuumpumpe (2), welcher eine erste Hülse (16) und eine Tragstruktur (14; 60) umfasst. Um die vakuumtechnische Leistungsfähigkeit zu steigern, wird vorgeschlagen, dass innerhalb der ersten Hülse (16) eine zweite Hülse (18) angeordnet ist und erste und zweite Hülse einen Verbund bilden.

Figure imgaf001
The invention relates to a fast rotating rotor (10) for a vacuum pump (2) comprising a first sleeve (16) and a support structure (14; 60). In order to increase the vacuum technical efficiency, it is proposed that a second sleeve (18) is arranged inside the first sleeve (16) and first and second sleeve form a composite.
Figure imgaf001
EP12191948.4A 2011-11-26 2012-11-09 High speed rotor for a vacuum pump Active EP2597313B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012256006A JP6017278B2 (en) 2011-11-26 2012-11-22 High-speed rotor for vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102011119506A DE102011119506A1 (en) 2011-11-26 2011-11-26 Fast rotating rotor for a vacuum pump

Publications (3)

Publication Number Publication Date
EP2597313A2 EP2597313A2 (en) 2013-05-29
EP2597313A3 true EP2597313A3 (en) 2014-11-12
EP2597313B1 EP2597313B1 (en) 2018-07-25

Family

ID=47227516

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12191948.4A Active EP2597313B1 (en) 2011-11-26 2012-11-09 High speed rotor for a vacuum pump

Country Status (3)

Country Link
EP (1) EP2597313B1 (en)
JP (1) JP6017278B2 (en)
DE (1) DE102011119506A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013207269A1 (en) 2013-04-22 2014-10-23 Pfeiffer Vacuum Gmbh Stator element for a Holweckpumpstufe, vacuum pump with a Holweckpumpstufe and method for producing a stator element for a Holweckpumpstufe
DE202013006436U1 (en) * 2013-07-17 2014-10-22 Oerlikon Leybold Vacuum Gmbh Rotor element for a vacuum pump
DE202013009462U1 (en) * 2013-10-28 2015-01-29 Oerlikon Leybold Vacuum Gmbh Carrier element for tubular elements of a Holweck stage
DE102014100622A1 (en) * 2014-01-21 2015-07-23 Pfeiffer Vacuum Gmbh Method for producing a rotor assembly for a vacuum pump and rotor assembly for a vacuum pump
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
EP3611381B1 (en) * 2018-08-13 2023-10-04 Pfeiffer Vacuum Gmbh Method for producing a vacuum pump

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1408237A1 (en) * 2002-10-11 2004-04-14 Alcatel Turbomolecular pump
GB2420379A (en) * 2004-11-18 2006-05-24 Boc Group Plc Vacuum pump having a motor combined with an impeller
JP2009108752A (en) * 2007-10-30 2009-05-21 Edwards Kk Vacuum pump
EP2722528A1 (en) * 2011-06-16 2014-04-23 Edwards Japan Limited Rotor and vacuum pump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19632375A1 (en) 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gas friction pump
FR2783883B1 (en) * 1998-09-10 2000-11-10 Cit Alcatel METHOD AND DEVICE FOR AVOIDING DEPOSITS IN A TURBOMOLECULAR PUMP WITH MAGNETIC OR GAS BEARING
GB0424199D0 (en) * 2004-11-01 2004-12-01 Boc Group Plc Vacuum pump
JP5763660B2 (en) * 2010-09-28 2015-08-12 エドワーズ株式会社 Exhaust pump

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1408237A1 (en) * 2002-10-11 2004-04-14 Alcatel Turbomolecular pump
GB2420379A (en) * 2004-11-18 2006-05-24 Boc Group Plc Vacuum pump having a motor combined with an impeller
JP2009108752A (en) * 2007-10-30 2009-05-21 Edwards Kk Vacuum pump
EP2722528A1 (en) * 2011-06-16 2014-04-23 Edwards Japan Limited Rotor and vacuum pump

Also Published As

Publication number Publication date
EP2597313A2 (en) 2013-05-29
DE102011119506A1 (en) 2013-05-29
JP2013113300A (en) 2013-06-10
EP2597313B1 (en) 2018-07-25
JP6017278B2 (en) 2016-10-26

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