EP2580474A1 - Micro pompe a onde progressive ultra sonore pour liquide - Google Patents
Micro pompe a onde progressive ultra sonore pour liquideInfo
- Publication number
- EP2580474A1 EP2580474A1 EP11727252.6A EP11727252A EP2580474A1 EP 2580474 A1 EP2580474 A1 EP 2580474A1 EP 11727252 A EP11727252 A EP 11727252A EP 2580474 A1 EP2580474 A1 EP 2580474A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- micro pump
- blade
- piezoelectric
- transducers
- pump according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 24
- 239000000463 material Substances 0.000 claims abstract description 16
- 230000005284 excitation Effects 0.000 claims abstract description 11
- 229910052751 metal Inorganic materials 0.000 claims abstract description 9
- 239000002184 metal Substances 0.000 claims abstract description 9
- 230000000750 progressive effect Effects 0.000 claims description 25
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 4
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 4
- -1 PolyDiMethylSiloxane Polymers 0.000 claims description 3
- 239000006096 absorbing agent Substances 0.000 claims description 3
- 230000035939 shock Effects 0.000 claims description 3
- 238000004026 adhesive bonding Methods 0.000 claims description 2
- 230000000284 resting effect Effects 0.000 abstract description 2
- 239000012530 fluid Substances 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 6
- 230000009471 action Effects 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 3
- 230000002441 reversible effect Effects 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 229910000737 Duralumin Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 210000001015 abdomen Anatomy 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009533 lab test Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical class C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 1
- 230000002572 peristaltic effect Effects 0.000 description 1
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000012163 sequencing technique Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
- F04B17/003—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/006—Micropumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
- F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
Definitions
- the present invention relates to a liquid ultrasonic progressing ultrasonic wave pump, whose activation is based on the use of two piezoelectric linear transducers, at least one being used as a piezoelectric linear actuator.
- piezoelectric transducers relies on the property of certain materials, such as quartz, synthetic ceramics or PZTs (Titano-lead zirconate), to electrically polarize under the action of a mechanical stress, and vice versa to deform under the action of an electric field.
- This reciprocal phenomenon known as the reverse piezoelectric effect, is widely used to make actuators.
- a possible linear structure of transverse progressive wave micro-pump generated by means of piezoelectric actuators is described in US 5,961,298.
- the structure consists essentially of a stack of two rectangular plates tightly clamped against each other and sealingly placed between an inlet and an outlet of a chamber of the pump.
- One of the plates is preferably fixed, while the other plate is excited by a series of piezoelectric actuators distributed on one face of the plate opposite the interface between the two plates, over the entire length of the interface. .
- Each actuator is composed of two pairs
- B10026WO actuators electrically powered by sinusoidal signals in phase quadrature, each member being itself constituted by two linear piezoelectric elements, one able to expand under the action of the control signal, the other adapted to to contract under the action of this same control signal.
- the arrangement of the actuators along the entire length of the interface, the choice of the control signals and the sequencing of these signals make it possible to locally deform the plate so as to create between the two plates a closed cavity accommodating the fluid. moving from the inlet to the outlet of the pump, in the direction of propagation of the traveling wave.
- the present invention aims to overcome the above disadvantages by providing a micro pump structure for liquid using a reduced number of piezoelectric elements and offering good flexibility of use.
- micro ultrasonic progressive wave pump for the displacement of a liquid, characterized in that it comprises:
- a flexible metal blade each end portion of which rests on one of the two piezoelectric linear transducers;
- B10026WO - Excitation means for exciting at least the piezoelectric linear transducer located near the inlet of the micro pump so that it generates a transverse vibration in the blade and the channel in a progressive wave moving towards the output of the micro pump.
- the piezoelectric linear transducer located near the output of the micro pump is used as a damper for the transverse vibration.
- it is advantageously connected to a load RL whose resistance and inductance are chosen so as to reduce, or even cancel, the reflection of the progressive wave.
- the piezoelectric linear transducer located near the inlet is preferably positioned at 7 ⁇ / 8 of the end closest to the blade, ⁇ being the length of the progressive wave, whereas the piezoelectric linear transducer located near the exit is positioned at ⁇ / 8 + ⁇ / 2 ⁇ said left end, n being a positive integer.
- the two piezoelectric transducers are used as vibrators so as to excite two consecutive modes of vibration of the blade.
- the excitation means preferably simultaneously excite the two piezoelectric linear transducers, one with a first sinusoidal electrical signal at an intermediate frequency with respect to the frequencies of the two consecutive modes of vibration, the other with a second signal. sinusoidal electric at the same intermediate frequency, but in phase quadrature with the first signal.
- the sealed channel is preferably attached to the blade by gluing.
- the sealed channel is a PolyDiMethylSiloxane film.
- the two piezoelectric transducers are Langevin structures.
- FIG. 1 schematically illustrates an elevational view of a micro pump according to the invention
- FIG. 2 represents the shape of the progressive wave generated in the blade according to the principles of the invention
- FIG. 3 represents a piezoelectric linear transducer according to a Langevin structure
- FIG. 4 illustrates an improvement of the previous Langevin structure, particularly adapted to the micro pump according to the invention
- FIG. 5 illustrates a first way of exciting the micro pump according to the invention
- FIG. 6 shows a partially exploded view, the structure of a demonstrator used to validate the operation of the micro pump according to the invention.
- the simplification of the micro pump according to the invention compared to the known prior art is based on experimental studies and laboratory tests that have validated not only the fact that it is possible to create a wave in a progressive wave.
- a micro pump 1 for a liquid essentially comprises two piezoelectric linear transducers 2 and 3, a flexible metal blade 4 resting on the two transducers 2 and 3 connecting them, and a sealed channel 5 of deformable material for transporting the liquid between an inlet E and an outlet of this channel 5.
- the assembly preferably rests on a base 6 of a high acoustic impedance material, so as to avoid that vibrations are transported to the through this base.
- An electronic module 7 connected to the two piezoelectric linear transducers 2 and 3 comprises the excitation means of these transducers.
- the transducers 2 and 3 are used to generate, in the blade 4, a transverse wave moving along the blade from the transducer 2 to the transducer 3.
- FIG. 2 illustrates various curves representing, at five successive instants, the pace of this wave.
- the wave thus generated is a periodic function at the resonant frequency of the
- linear piezoelectric transducers of the Langevin structure type, or other structures known in the German terminology "Tonpilz”, are preferably used.
- These structures essentially comprise at least two piezoelectric ceramics 20 clamped and prestressed between two metal masses, an upper mass 21 and a lower mass 22, by means of a fastening element such as a metal screw 23.
- the metal masses 21 and 22 serve firstly to protect the ceramics 20, and secondly, to calibrate the acoustic transducer thus formed at a predetermined frequency.
- a sinusoidal electrical signal is applied to the two ceramics 20, they are deformed by contraction.
- FIG. 4 illustrates a conical shape of the upper mass 21 particularly adapted to fulfill the two aforementioned objectives.
- the lower mass 22 is preferably made of a heavy and rigid material, such as tungsten or steel, which is not very conducive to the propagation of vibrations. Conversely, the material for the upper mass 21
- B10026WO is preferably light and flexible, such as aluminum, to provide a low acoustic impedance and promote the propagation of vibration towards the top of the structure.
- the materials used for the different elements of the micro-pump 1, the dimensions in particular of the blade 4 and the channel 5, the type of linear transducers used, and their positioning relative to the blade must be correctly chosen according to the application. envisaged, the common principle of one application to another being the generation of a mechanical vibration through the transducers which is transmitted with the least possible losses to the blade 4 in the form of a progressive wave moving between the inlet and outlet, and which allows the displacement of a certain amount of liquid at a given speed between the inlet and the outlet of the micro pump.
- the pumping performance will depend essentially on the specific characteristics of the progressive wave that can be generated in the blade, such as the wave frequency, its wave number and its amplitude. However, these characteristics are intimately related to the dynamic characteristics of the piezoelectric transducers. The exact choice of the transducers is thus conditioned by a prior knowledge of the amplitude and the frequency of deformation that one wishes to obtain at the level of the blade, and consequently in the fluid transport channel.
- transducer 2 and 3 can be used to generate the traveling wave: According to a first possible implementation shown diagrammatically in FIG. 5, only the transducer located near the input of the channel, here the transducer 2, is used as a vibrator, the transducer 3 being used as a shock absorber of the vibration. To do this, the excitation means 7 of the transducer 2 will apply, on this
- the B10026WO transducer a periodic supply voltage, preferably sinusoidal.
- the transducer 2 then acts as a wave generator, the blade 4 is the electrical transmission line, and the transducer 3 represents the load of this line.
- the latter is connected for example to a circuit RL having a resistor R in parallel with an inductance L.
- the values R and L are chosen so as to adapt the load to the acoustic impedance of the blade.
- the wave propagates in the blade without any reflection (ideal case) or a negligible reflection at the transition between the blade and the transducer 3 comes to affect the progressive nature of the wave.
- the transducers 2 and 3 must be correctly positioned relative to the blade 4 so as to allow impedance matching.
- ⁇ represents the length of the progressive wave
- the transducer 2 used as vibrator must be positioned preferably at ⁇ / S of the left end of the blade 4, while the transducer 3 used as damper must be positioned at ⁇ / 8 + ⁇ / 2 ⁇ this same left end, expression in which n is a positive integer.
- the operation of the micro pump is easily reversible taking care to use the same transducers 2 and 3.
- the excitation means 7 will excite the transducer 3, while the transducer 2 will be used as shock absorber.
- Input E and output S are then reversed in relation to those shown in the figures.
- the two transducers 2 and 3 are used as vibrators so as to excite two consecutive modes of vibration of the blade 4. More precisely, knowing that a pure progressive wave is the sum of two standing waves offset 90 ° both in time and in space, the excitation means 7 will simultaneously excite the two piezoelectric linear transducers 2 and 3, one with a first sinusoidal electrical signal at an intermediate frequency with respect to frequencies of the two consecutive vibration modes, the other with a second sinusoidal electrical signal at the same frequency
- the resulting vibration then consists of a progressive wave of variable amplitude and phase velocity.
- the position of the transducers 2 and 3 along the blade must be precisely identified so as to effectively obtain a progressive wave.
- u (x, t) D l [s (y n x) ⁇ cos (y "x)] cos t) + D 2 [sm (y n + 1 x) - cos (y n + i x)] s (Stt) + D 3 [sin (Y " +1 x) - cos (y” +1 x)] cos ⁇ t) + D 4 [s (y "x) - cos ⁇ j n x)] sin ⁇ at)
- x is the position along the blade
- y n and y n + 1 represents the wave number of two consecutive modes
- ⁇ is the intermediate frequency applied
- Z3 ⁇ 4 to D 4 are constants depending on the excitation frequency, the material used for the blade 4, the boundary conditions and the position of the transducers.
- micro pump is reversible by reversing the manner of exciting each of the transducers 2 and 3.
- Blade 4 With regard to the flexible metal blade 4, the choice of the metallic material used, in particular its density and its elasticity coefficient, and the length, width and thickness dimensions of the blade must be adjusted according to the wavelength. , the frequency and the amplitude of the progressive wave that one wishes to obtain. Blade 4 must meet the three criteria below:
- the material used for the blade must be a good acoustic conductor, since it is to transmit, ideally integrally, the vibration generated by the piezoelectric transducers;
- the acoustic impedance of the blade at the excitation frequency must correspond to that of the piezoelectric transducers 2 and 3, which conditions in particular the dimensions of the blade in length, width and thickness.
- the blade must also be dimensioned so that the resulting weight of the channel carrying the fluid is negligible in comparison with the transverse forces generated by the blade, so as not to disturb the progression of the wave.
- the base 6 must offer a low conduction of acoustic waves, again to promote the transmission of vibrations generated by the transducer 2 (vibrator-damper mode), or by the two transducers 2 and 3 (vibrator mode). vibrator) to the blade 4.
- This can be achieved by various means, including the choice of a material with low acoustic conduction.
- it can be ensured that the acoustic impedance of the base 6 is much greater than the acoustic impedance of the blade 4. Knowing that the acoustic impedance Z 0 can be defined by the relation:
- the channel 5 must be made of a sufficiently deformable material so that the deformation on its wall in contact with the blade 4 induced by the progressive wave effectively causes the displacement of the liquid.
- the sealed channel may for example be made in the form of a PDMS film
- a demonstrator illustrated schematically in FIG. 6 has been made to validate the operation of the micro pump according to the principles indicated above.
- two commercially available Langevin transducers with resonant frequencies of 28 kHz have been used by adding aluminum cones adapted to the resonant frequency of the transducers in the upper part.
- the blade 5 of the demonstrator was made of aluminum (duralium).
- the sealed channel (not shown in Figure 6) incorporates at its ends two tanks respectively at its entrance and exit. It confines the liquid to be transported and carries out the interface with the blade.
- the micro pump according to the invention has all the advantages associated with its (piezoelectric) technology, in particular the absence of a radiated magnetic field and the absence of a moving part at the level of the actuators.
- the micro pump according to the invention has a channel covering the entire fluid and allows to actuate channels whose deformation will generate flow contrary to the known techniques of the prior art. The results of the study showed that it was not necessary to generate a wave whose amplitude would correspond to the height of the channel to allow the delivery of the liquid, unlike the teaching of US 5,961,298.
- the optimal dimensions of the different constituents of the micro pump can be determined for each application envisaged using a numerical modeling.
- the entire upper part of the pump according to the invention is here released.
- the assembly can thus be easily equipped with sensors allowing an operation that adapts to variations in the behavior of the pump.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1054496A FR2960922B1 (fr) | 2010-06-08 | 2010-06-08 | Micro pompe a onde progressive ultrasonore pour liquide |
PCT/FR2011/051159 WO2011154634A1 (fr) | 2010-06-08 | 2011-05-23 | Micro pompe a onde progressive ultra sonore pour liquide |
Publications (1)
Publication Number | Publication Date |
---|---|
EP2580474A1 true EP2580474A1 (fr) | 2013-04-17 |
Family
ID=43513646
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP11727252.6A Withdrawn EP2580474A1 (fr) | 2010-06-08 | 2011-05-23 | Micro pompe a onde progressive ultra sonore pour liquide |
Country Status (4)
Country | Link |
---|---|
US (1) | US20130243627A1 (fr) |
EP (1) | EP2580474A1 (fr) |
FR (1) | FR2960922B1 (fr) |
WO (1) | WO2011154634A1 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103967759A (zh) * | 2014-05-18 | 2014-08-06 | 辽宁工程技术大学 | 一种压电片内置式的超声水泵 |
CN106153694A (zh) * | 2015-03-31 | 2016-11-23 | 宁波大学 | 采用pdms为基片材料的亚型猪流感检测用芯片装置 |
CN105020121B (zh) * | 2015-07-24 | 2017-03-01 | 浙江大学 | 声驱动微型泵 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59147888A (ja) * | 1983-02-09 | 1984-08-24 | Canon Inc | 振動子の駆動による進行波ポンプ |
US6720710B1 (en) * | 1996-01-05 | 2004-04-13 | Berkeley Microinstruments, Inc. | Micropump |
US5961298A (en) * | 1996-06-25 | 1999-10-05 | California Institute Of Technology | Traveling wave pump employing electroactive actuators |
EP1380265A1 (fr) * | 2002-07-11 | 2004-01-14 | Olympus Optical Corporation Limited | Appareil pour le traitement de calculs |
JP2009117344A (ja) * | 2007-10-15 | 2009-05-28 | Sanyo Electric Co Ltd | 流体移送装置及びこれを具えた燃料電池 |
GB0804739D0 (en) * | 2008-03-14 | 2008-04-16 | The Technology Partnership Plc | Pump |
-
2010
- 2010-06-08 FR FR1054496A patent/FR2960922B1/fr not_active Expired - Fee Related
-
2011
- 2011-05-23 WO PCT/FR2011/051159 patent/WO2011154634A1/fr active Application Filing
- 2011-05-23 US US13/701,859 patent/US20130243627A1/en not_active Abandoned
- 2011-05-23 EP EP11727252.6A patent/EP2580474A1/fr not_active Withdrawn
Non-Patent Citations (2)
Title |
---|
None * |
See also references of WO2011154634A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO2011154634A1 (fr) | 2011-12-15 |
FR2960922B1 (fr) | 2013-04-19 |
FR2960922A1 (fr) | 2011-12-09 |
US20130243627A1 (en) | 2013-09-19 |
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