EP2532895B1 - Pompe à vide avec des paliers disposés à un côté - Google Patents

Pompe à vide avec des paliers disposés à un côté Download PDF

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Publication number
EP2532895B1
EP2532895B1 EP20110004566 EP11004566A EP2532895B1 EP 2532895 B1 EP2532895 B1 EP 2532895B1 EP 20110004566 EP20110004566 EP 20110004566 EP 11004566 A EP11004566 A EP 11004566A EP 2532895 B1 EP2532895 B1 EP 2532895B1
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EP
European Patent Office
Prior art keywords
bearing plate
rotor shafts
drive
housing
motor
Prior art date
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Active
Application number
EP20110004566
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German (de)
English (en)
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EP2532895A1 (fr
Inventor
Jürgen Dr. Dirscherl
Frank Dr. Gitmans
Gerhard Rüster
Markus Prasse
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Vacuubrand GmbH and Co KG
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Vacuubrand GmbH and Co KG
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Priority to EP13002962.2A priority Critical patent/EP2642127B1/fr
Priority to EP20110004566 priority patent/EP2532895B1/fr
Publication of EP2532895A1 publication Critical patent/EP2532895A1/fr
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C17/00—Arrangements for drive of co-operating members, e.g. for rotary piston and casing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02—Arrangements of bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/02—Liquid sealing for high-vacuum pumps or for compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0078—Fixing rotors on shafts, e.g. by clamping together hub and shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/045—Heating; Cooling; Heat insulation of the electric motor in hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/20—Manufacture essentially without removing material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/20—Manufacture essentially without removing material
    • F04C2230/23—Manufacture essentially without removing material by permanently joining parts together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/20—Manufacture essentially without removing material
    • F04C2230/24—Manufacture essentially without removing material by extrusion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/60—Assembly methods
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/60—Assembly methods
    • F04C2230/601—Adjustment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/402—Plurality of electronically synchronised motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/51—Bearings for cantilever assemblies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/50—Bearings
    • F04C2240/52—Bearings for assemblies with supports on both sides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/02—Light metals
    • F05C2201/021—Aluminium

Definitions

  • the invention relates to a vacuum pump, preferably with a pumping speed of less than 50 m 3 / h, with a screw pump unit with two helical, intermeshing rotors in a suitably shaped pump chamber of a screw pump stator having a suction side with an inlet and a pressure side with an outlet , and with a two-shaft synchronous drive with two magnetized, non-contacting cylinders which are mounted on the rotor bearing rotor shafts and synchronize them in opposite directions due to their mutual magnetic interaction, and one or more, the two magnetized cylinder surrounding windings of a motor stator, the magnetic fields traveling through suitable current supply generate such that the two magnetized cylinders and thus the rotor shafts rotate in opposite directions synchronously, the bearing of the two rotor shafts being provided only on the drive, in particular therefore no bearing the remote from the drive side of the pump chamber is present.
  • the invention thus relates to a vacuum pump with a screw pump unit running oil-free and non-contact in the pump chamber.
  • a vacuum pump is regularly provided for a final vacuum range 10 2 Pa to 10 -2 Pa (fine vacuum).
  • membrane vacuum pumps are very advantageous because the pumping chamber is hermetically separated from the drive range by the gas-tight clamped membrane. Due to the limited compression ratio and the normally operated only by the gas flow valves, however, pressures below 50 Pa are difficult to achieve.
  • screw vacuum pumps short: screw pumps
  • two helical rotors mesh with each other without contact in a suitably shaped pump chamber of a screw pump stator, so that their counter rotation rotates gas from an inlet to an outlet.
  • Screw pumps An advantage of screw pumps is a high possible compression, as screw pumps can be built intrinsically multi-stage, because each thread acts as a stage. Screw pumps thus offer the possibility of achieving a good final vacuum with only one pair of rotors.
  • the EP 0 811 766 B1 shows a vacuum pump with two screw pump units and in between the drive of the rotor shafts, which serve for both screw pump units as a carrier of the helical, intermeshing rotors. Both pairs of rotors are each mounted on the fly.
  • Abrasive seals are disadvantageous because they wear. Gap seals with labyrinth and external purge gas supply are complex, require a lot of space and require an external purge gas supply. For the typical use of conventional, large-scale screw pumps, for example in production plants, this is not a significant problem. Even with this aspect, however, different requirements arise for compact screw pumps with a pumping speed below 50 m 3 / h.
  • the drive of the rotors in two-shaft pumps (such as Roots, claw and screw pumps), for example, by two synchronously running motors or by a means for driving and synchronizing the rotors from a single drive shaft such as a transmission.
  • Mechanical transmissions are large, noisy, expensive and heavy, and require sealing the gear lubricant out and to the pump chamber.
  • Conventional known drives with two motors, which are synchronized electronically, are expensive due to the necessary precise angle measurement and control electronics and are worthwhile, at best, for very large screw pumps.
  • a vacuum pump with a screw pump unit and such a two-shaft synchronous drive shows the DE 195 22 560 A1 from which the present invention starts.
  • the rotor shafts are provided with cooperating gears, which cause the synchronization of the rotor shafts or in addition to an electronic synchronization enable emergency synchronization.
  • Each rotor shaft is connected to a rotor of a drive motor whose stator is arranged in a motor housing.
  • the gears of the known vacuum pump can also serve as pulser discs, which are scanned by sensors. These sensors are connected to a control device which monitors the respective rotational position of the rotors relative to a desired value and corrects them via the drive. It is a synchronization of the rotors by electronic means.
  • a transmission may also be designed as a so-called magnetic transmission.
  • the synchronization of the two rotor shafts takes place by contactless passing cylinders, disks or the like ..
  • the associated cylinders are kept in synchronization. Since the cylinders do not touch, a magnetic gearbox runs quietly, free of wear and lubricant. The disadvantage is that between the cylinders high magnetic attraction forces must act.
  • a synchronous two-shaft drive with magnetized cylinders on the rotor shafts carrying rotor is very compact and therefore very suitable for vacuum pumps with low flow rate of less than 50 m 3 / h. It is disadvantageous if the drive and the bearings are in the area touched by the conveyed gas are located. Such a construction is disadvantageous for many applications, as gases with a certain dust or vapor content or even corrosive gases and vapors often have to be conveyed. Even if the vapors are not corrosive per se, they can in condensed form, for example, damage the bearings by washing out the bearing greases or causing rusting of the bearings. Even pumping out containers filled with ambient air may cause the humidity in the vacuum pump to cause further consequential damage.
  • the pressure side of the screw pump - at the atmospheric pressure prevails - to put on the drive side, and to keep the storage / drive range to atmospheric pressure, so that on the drive side no sliding seals - apart from lubricant seals within the bearing - are required and a good cooling of the two-shaft synchronous motor is possible. Since, however, due to the flying bearing of the rotors and on the gas inlet side no rotary joints and thus no sliding seals are required, it is possible to design the entire pump for virtually non-contact operation of the rotors. Such a pump contains no wearing parts per se. It can be practically called maintenance-free.
  • a compact construction of the type described above places considerable demands on the precision of the bearing and on the orientation of the rotors.
  • the dimensions of the total pump are correspondingly small, so that the allowable gaps between the rotors and the housing are extremely narrow. They are typically only in the range 0.02 mm to 0.07 mm. Accordingly, the rotors have to be guided extremely precisely, the screw pump stator must be aligned correctly relative to the rotors, and the angular orientation of the rotors relative to one another must be exactly adjustable.
  • purge gas supplies as described above. This is helpful on the drive side not only for protecting the drive and storage area of the pump from pumped media, but also for cooling the gas and screws in the area of the pressure end of the screw. In this area a large part of the compression heat is released. By the gas delivery device permanently cool purge gas is conveyed past this area, so that hot gas is discharged and the area is cooled.
  • the teaching of the present invention is based on the problem arising from the DE 195 22 560 A1 Known vacuum pump with a screw pump unit in such a way and further develop that it can be made compact and precise guidance of the rotors or rotor shafts allows, but they can be manufactured and assembled despite the resulting high demands on the manufacturing accuracy of the components with conventional manufacturing methods.
  • a vacuum pump with the features of claim 1. This is preferably a vacuum pump with a pumping speed of less than 50 m 3 / h.
  • the screw pump according to the invention has a bearing of the two rotor shafts, for example in radial or thrust ball bearings.
  • the rotor shafts each have a so-called fixed bearing in which an outer ring fixedly mounted in the housing and an inner ring fixed to the rotor shaft, and a so-called floating bearing, in which an outer ring and / or inner ring is mounted axially displaceable to the housing or to the rotor shaft.
  • Such an arrangement is advantageous to provide i.a. to compensate for the different thermal expansions of rotor shafts and housing parts.
  • the two fixed bearings are arranged closer to the pump chamber, so that the rotor shafts are guided here with the least possible play.
  • the two movable bearings are housed according to the invention on the side facing away from the pumping chamber side of the pump, wherein the floating bearings have an axial bias by means of resilient elements in order to achieve a backlash-free operation.
  • the spring force acts parallel and in the same direction as the gas force on the rotors at final vacuum, so that under varying suction - and thus changing gas forces on the rotors - the rotors can not be moved axially within the bearing clearance.
  • This arrangement ensures an exact and play-free guidance of the rotor shafts, a compensation of the thermal expansion of the rotor shafts and housing parts, a cheap and easy installation and the ability to disassemble the drive-side mounting without much effort, for example, for a repair.
  • the magnetized cylinders of the drive are arranged on the rotor shafts in each case between rotor shaft bearings spaced apart from one another.
  • the vacuum pump is constructed so that between the drive and the pump chamber, a one-piece or multi-part housing bearing shield is provided, which receives a respective bearing of the two rotor shafts.
  • the respective fixed bearing Preferably, the respective fixed bearing.
  • the bearings of the rotor shafts in this housing bearing shield are preferably arranged on the side facing away from the pump chamber of the housing bearing shield.
  • a one-piece or multi-part motor bearing plate each receiving a further bearing of the two rotor shafts, preferably the respective floating bearing with the biasing arrangement described above by means of resilient elements.
  • Between the two is the lentenpumpenstator, so the component of the pump housing, which forms the suction chamber.
  • the cylinders of the two-shaft synchronous drive are advantageously arranged between the bearings of the two rotor shafts, so that the occurring magnetic forces can be transmitted with a short path into the bearings.
  • the construction of the vacuum pump according to the invention makes it possible to dispense with grinding seals as far as possible or completely.
  • the housing bearing shield has means for exact alignment of the screw pump stator on one side and a motor bearing shield on the other side.
  • the position of the motor bearing plate to the housing bearing shield determines the orientation of the two rotors, since in these elements, the bearing of the rotor shafts takes place. These must run exactly parallel to each other and centrally in the screw pump stator.
  • the screw pump stator must therefore be aligned exactly centric and parallel to the alignment of the housing bearing shield and the motor end shield.
  • the housing bearing shield is preferably designed so that at least a part of this alignment determining mechanical means at the same time serves for the exact positioning of the screw pump stator and the motor end shield.
  • these mechanical elements are designed so that their formation - for example by machining the housing bearing shield - from one side, i. can be done without rotation of the housing bearing shield during the formation of these mechanical elements.
  • this mechanical means is in line with the receiving bores for the rotor shaft bearings.
  • these mechanical elements in the form of a pinning thus the holes for the pins are arranged in a line with the two shaft bearing bores, so that the machining device must be moved from one hole to the next in one direction only. The precision is further improved and the demands on the processing machine are reduced. At the same time, the travel paths of the processing machine are minimized in this arrangement.
  • Such an arrangement also implies that the corresponding elements, such as pin bores, in the counterparts of the housing bearing shield, that is the engine bearing shield and the screw pump stator, are in line with the bearing bores in the engine bearing shield or with the main axis of the pump chamber, with corresponding advantages the production of these components.
  • both rotor shafts each have two axially spaced-apart bearings
  • the axial spacing of these rotor shaft bearings is 0.3 times to 2 times, preferably 0.05 times to 1.5 times, the free length the rotor waves in the pump chamber is.
  • the lateral spacing of the axes of rotation of the rotor shafts is a measure of the compact construction of the vacuum pump according to the invention.
  • the vacuum pump according to the invention is a very compact screw pump unit Has.
  • the lateral spacing of the axes of rotation of the rotor shafts is 20 mm to 100 mm, preferably 25 mm to 60 mm.
  • the upper limit of the lateral distances of the rotor shafts is assigned to the upper limit of the pumping speed for the vacuum pumps according to the invention.
  • a typical value for an exemplary vacuum pump according to the invention has a lateral spacing of the axes of rotation of the rotor shafts of about 40 mm at a pumping speed of about 10 m 3 / h.
  • the vacuum pump on the drive side even further simplify and optimize their dimensional stability, that you a motor stator comprehensive motor housing together with the housing bearing plate cup-shaped executes one piece and attaches only the engine mount plate separately.
  • the motor bearing plate together with the motor stator comprehensive motor housing together pot-shaped run in one piece and then connect this cup-shaped unit with the housing bearing plate, in particular spigot (see the above explanations of a preferred variant of the vacuum pump according to the invention).
  • Fig. 1 This consists essentially of a screw pump unit 2, a drive part 3 and an intermediate housing bearing plate 4.
  • the screw pump unit 2 here has two mutually engaged helical rotors 5, 5 ', in this case in one piece represented with the rotor shafts 6, 6 '.
  • the rotors 5, 5 ' run without contact in a screw pump stator 7 with an essentially 8-shaped pump chamber 7 "and cooling ribs 36.
  • the pump chamber 7" is closed off by a cover 8 having an inlet 9. Due to the counter-synchronous rotation of the two rotors 5, 5 ', gas is conveyed from the inlet 9 to an outlet 10 (not shown here) on the drive side of the rotors 5, 5'.
  • the drive part 3 has non-contact magnetized cylinders 11, 11 '.
  • a motor stator 12 surrounds the magnetized cylinders 11, 11 'in an essentially 8-shaped manner.
  • the existing of a permanent magnet material with suitable properties cylinder 11, 11 ' are suitably magnetized, so that their magnetic interaction causes the synchronization of the two rotor shafts 6, 6' in the form of a magnetic transmission.
  • the winding contained in the motor stator 12 (not shown separately) can be energized by a suitable controller (not shown), so that the magnetized cylinder 11, 11 '- and thus the rotor shafts 6, 6' and the rotors 5, 5 '- in offset in opposite synchronous rotation.
  • the rotor shafts 6, 6 ' have no bearings in the region of the pump chamber 7 ", but rather a first bearing pair 13, 13' is accommodated in the housing bearing shield 4.
  • These bearings 13, 13 'are seated in bearing bores 14, 14' ie outer rings of the bearings 13, 13 'are fixed in the bearing bores 14, 14', and inner rings are fixedly mounted on the rotor shafts 6, 6 'A second bearing pair 15, 15' is mounted in bearing bores 16, 16 ', which are in a motor bearing plate 17 shown in one piece here are arranged.
  • the axial distance between the bearings 13, 15 or 13 ', 15' assigned to a rotor shaft 6 or 6 ' is similar to the free rotor wavelength (protruding into the pump chamber 7 from the bearings 13, 13').
  • the second bearing 15, 15 ' are designed as a floating bearing. In the case shown here sit respective outer rings of the bearings 15, 15 'axially displaceable but with little play in the bearing bores 16, 16', wherein springs 18, 18 ', the bearings 15, 15' suitably bias, so that the storage and thus the Rotor shafts 6, 6 'run free of play.
  • the springs 18, 18 ' press the bearings 15, 15' and thus the rotor shafts 6, 6 'with the rotors 5, 5' in the direction of the inlet 9.
  • the gas force acts on the Rotors 5, 5 'due to the pressure difference from the inlet 9 to the outlet 10 in the same direction as the spring force.
  • the bearings 13, 13 ' are provided on the side facing away from the pump chamber 7 "side of the housing bearing plate 4, and between these bearings 13, 13' and the pump chamber 7" no sliding seals are present.
  • these means in the form of pins 19, 19 'and 20, 20', which sit in exactly mounted holes 21, 21 'executed.
  • the illustrated and preferred embodiment shows in Fig. 1 in that here the drive 3 has a motor housing 17 'comprising the motor stator 12, which in this case is designed in one piece with the motor bearing plate 17 in the form of a cup.
  • the motor bearing plate 17 In addition to the precisely machined contact surfaces for screw pump stator 7 and motor bearing plate 17 on the housing bearing plate 4, the pinnacles 19, 20, 21 ensure the exact alignment of the motor bearing plate 17 - and thus on the bearing of the rotor shafts 6, 6 '.
  • the holes 21, 21' are arranged continuously and thus introduced from one side into the housing bearing plate 4.
  • these holes 21, 21 ' are in line with the bearing bores 14, 14 'executed (in the direction of view parallel to the rotor shafts, see also Fig. 2 and 4 ), so that in the manufacture of the housing bearing plate 4, the machining device for attaching this crucial for the alignment of the rotor shafts 6, 6 'of the screw pump stator 7 and the motor bearing plate 17 elements must be moved only in one dimension.
  • the vacuum pump can be very compact, with few parts and comparatively easy to manufacture and assemble.
  • gas delivery devices 22, 22 ' which are mounted on the rotor shafts 6, 6' and by their rotation suck gas from feeds 23 for purge gas and blow in the direction of the pump chamber 7.
  • conveyed medium should be kept away from the storage / drive area
  • the purge gas stream constantly supplies cool gas to the hot region at the pressure-side end of the rotors 5, 5 ', and the gas which is particularly heated by the compression is permanently exchanged and the pump chamber 7 "is cooled from the inside.
  • markings are provided on the end faces of the rotors 5, 5 ', which allow the exact alignment of the rotors 5, 5' during pump assembly without manual alignment.
  • the holders of the magnetized cylinders 11, 11 'each consist of a first soft-magnetic, substantially cylindrical portion 26, 26', on which the magnetized cylinders 11, 11 'are fixed, for example by gluing.
  • the power transmission from the inner parts 27, 27 'of the brackets for the magnetized cylinders 11, 11' on the rotor shafts 6, 6 ' takes place in the illustrated and preferred embodiment by means of at least one tolerance ring 29, 29', each in a suitable groove the associated rotor shaft 6, 6 'is arranged.
  • tolerance ring 29, 29 ' Results in a press fit of the inner parts 27, 27' on the rotor shaft 6, 6 'and thus a rotationally fixed connection.
  • This can be done by means of a suitable device, for example with the aid of markings on the rotors 5, 5 ', which indicate the exact alignment of the screw threads.
  • the preassembled units of the outer parts 26, 26' with the cylinders 11, 11 'and the inner parts 27, 27' are mounted on the rotor shafts 6, 6 '.
  • the outer parts 26, 26 ' can still easily be rotated on the inner parts 27, 27' at this time, so that the magnetized cylinders 11, 11 'can align relative to each other (north to south pole).
  • the cylinders 11, 11 'with their own brackets, namely the outer parts 26, 26' for example by screwing on the inner parts 27, 27 ', fixed.
  • Fig. 1 one sees only one fixing screw 30, 30 'of the screw connections on the two rotor shafts 6, 6'. More details can be seen in Fig. 4 , the Stim view from the drive side with removed motor housing 17, 17 'and motor end plate 17.
  • the fixing screws 30, 30' are provided with disc-shaped plates 31, 31 '(washers) for power distribution.
  • Fig. 2b shows a cut in Fig. 1 identified with II-II. It can be seen here the structure of the brackets for the magnetized cylinders 11, 11 'very well. Inside are the rotor shafts 6, 6 '. On these are the there permanently arranged inner cylindrical parts 27, 27 'of the holder. Coaxially arranged thereon are the outer parts 26, 26 ', which then in turn support the magnetized cylinders 11, 11'.
  • the second magnetized cylinder can then be aligned and fixed relative to the first magnetized cylinder by means of its adjustable holder.
  • Fig. 2a shows a further embodiment, compared to the in Fig. 1 and Fig. 2b illustrated embodiment with respect to the holder of the magnetized cylinder 11, 11 'is modified.
  • brackets 32, 32 'of the magnetized cylinder 11, 11' which are provided for the purpose of correct assembly already from the outset with marks 33, 33 'in the form of transverse notches.
  • the advantage of such a construction lies in the smaller number of individual components of the brackets. However, the assembly only with alignment of the notches 33, 33 'is somewhat more difficult.
  • Fig. 3a and 3b show schematic exterior views of the vacuum pump 1 according to the invention with the main external components housing bearing shield 4, engine mounting plate 17 and motor housing 17 'and screw pump stator 7, once from the drive side ( Fig. 3a ) and once from the pump chamber side ( Fig. 3b , Ribs 36 partially cut off) ago.
  • Fig. 3a Incidentally stud bolts 17 ", with which the cup-shaped motor housing 17 'integral with the motor bearing plate 17 is fastened to the housing bearing shield 4.
  • a suitable cooling air flow generated for example by a fan (not shown), which is axially parallel in the extension of the rotor shafts 6, 6 'on the motor bearing plate 17 and blows on the engine mounting plate 17, air flows through the openings 34 in the motor housing 17' and there cools the magnetized cylinder 11, 11 'on the rotor shafts 6, 6' and the motor stator 12, wherein the cooling air can also flow through the gap between the magnetized cylinders 11, 11 'and the motor stator 12.
  • the housing bearing plate 4 to the motor bearing plate 17 matching openings 35 so that the cooling air can flow through there.
  • the cooling air thus the drive 3 and the housing bearing plate 4 are effectively cooled.
  • the cooling air flow is dimensioned so that a part thereof passes outside on the engine mount plate 17, on the housing bearing shield 4 and on the screw pump stator 7 and thus also cools these components. Possibly. Means are provided to direct the flow of cooling air along the pump.
  • the openings 34 in the engine mount plate 17 at the same time allow access to the brackets of the cylinder 11, 11 'and their fasteners 30, 30', if present.
  • the screw pump stator 7 is designed as an extruded profile made of an aluminum alloy and that the extruder profile forming the screw pump stator 7 has longitudinal grooves and / or external means 36 for improved heat transfer to the ambient air, for example.
  • the means 36 for improved heat transfer to the ambient air which are referred to here, cooling fins 36 extending in the longitudinal direction of the screw pump stator 7 are concerned in the illustrated exemplary embodiment.
  • the illustrated embodiment is preferably a vacuum pump with a capacity of about 10 m 3 / h.
  • the lateral distance of the axes of rotation of the rotor shafts 6, 6 ' is about 40 mm.
  • the lateral spacing of the axes of rotation of the rotor shafts 6, 6 ' is at most 100 mm. Values below 20 mm for this lateral distance are difficult to realize.
  • the vacuum pump according to the invention is very compact. It is particularly suitable for laboratory applications.
  • Longitudinal rib cooling fins 7
  • Stator pump stator 7 " suction chamber 8th End cover 9 inlet 10 outlet 11, 11 ' magnetized cylinder 12 motor stator 13, 13 ' 1st bearing of 6, 6 ' 14, 14 ' 1st bearing bore 15, 15 ' 2nd bearing of 6, 6 ' 16, 16 ' 2nd bearing bore 17

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (8)

  1. Pompe à vide, de préférence comprenant une capacité d'aspiration inférieure à 50 m3/h, comprenant une unité de pompe à vis (2) avec deux rotors hélicoïdaux (5 ; 5') en prise mutuelle dans un espace de déplacement (7") d'un stator de pompe à vis (7) qui présente un côté aspiration avec une entrée (9) et un côté pression avec une sortie (10), et
    comprenant un entraînement synchrone à deux arbres (3) avec deux cylindres (11, 11'), qui sont fixés sur des arbres de rotor (6, 6') supportant les rotors (5, 5'), pouvant être synchronisés en sens inverse par les deux cylindres (11, 11'), et un ou plusieurs enroulements d'un stator de moteur (12) entourant les deux cylindres (11, 11'),
    le support sur palier des deux arbres de rotor (6, 6') n'étant prévu que sur l'entraînement (3), c'est-à-dire qu'aucun support sur palier n'est prévu du côté de l'espace de déplacement (7'') éloigné de l'entraînement (3) et
    le côté pression de l'unité de pompe à vis (2) étant situé du côté de l'espace de déplacement (7'') tourné vers l'entraînement (3) et le support sur palier des arbres de rotor (6, 6') et l'entraînement (3) étant soumis à la pression atmosphérique,
    caractérisée en ce que
    les deux cylindres (11, 11') sont aimantés et ne sont pas en contact,
    les arbres de rotor (6, 6') peuvent être synchronisés en sens inverse suite à une interaction magnétique mutuelle des deux cylindres (11, 11'),
    par alimentation électrique des enroulements du stator de moteur (12), des champs magnétiques variables peuvent être générés et de ce fait les deux cylindres (11, 11') et par conséquent les arbres de rotor (6, 6') peuvent être entraînés en rotation de manière synchrone en sens inverse,
    les deux arbres de rotor (6, 6') présentent chacun un palier fixe (13, 13'), dans lequel une bague extérieure est montée fixement dans un boîtier et une bague intérieure est montée fixement sur l'arbre de rotor (6, 6'), ainsi qu'un palier fou respectif (15, 15') dans lequel une bague extérieure et/ou une bague intérieure est montée de manière déplaçable axialement par rapport au boîtier ou par rapport à l'arbre de rotor (6, 6'),
    les paliers fixes (13, 13') sont disposés plus près de l'espace de déplacement (7'') que les paliers fous (15, 15'),
    les paliers fous (15, 15') présentent une précontrainte axiale au moyen d'éléments à ressort (18, 18') et
    les éléments à ressort (18, 18') sont disposés de telle sorte que la force de ressort agisse parallèlement et dans la même direction que la force de gaz sur les rotors (5, 5') au vide limite.
  2. Pompe à vide selon la a revendication 1, caractérisée en ce que
    les cylindres aimantés (11, 11') sont disposés sur les arbres de rotor (6, 6') à chaque fois entre les paliers fixes (13, 13') et les paliers fous (15, 15') espacés axialement les uns des autres.
  3. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce
    qu'entre l'entraînement (3) et l'espace de déplacement (7'') est prévu un flasque de palier de boîtier (4) d'une seule pièce ou en plusieurs parties, lequel reçoit les paliers fixes (13, 13') des deux arbres de rotor (6, 6'),
    du côté de l'entraînement est prévu un flasque de palier de moteur (17) d'une seule pièce ou en plusieurs parties, lequel reçoit les paliers fous (15, 15') des deux arbres de rotor (6, 6') et
    de préférence les paliers fixes (13, 13') des arbres de rotor (6, 6') sont disposés dans le flasque de palier de boîtier (4) du côté du flasque de palier de boîtier (4) opposé à l'espace de déplacement (7'').
  4. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce
    qu'entre l'entraînement (3) et l'espace de déplacement (7'') est disposé un flasque de palier de boîtier (4) d'une seule pièce ou en plusieurs parties, et du côté de l'entraînement est disposé un flasque de palier de moteur (17) d'une seule pièce ou en plusieurs parties,
    des moyens (19) pour le positionnement du stator de pompe à vis (7) et des moyens (20) pour le positionnement du flasque de palier de moteur (17) sont prévus sur le flasque de palier de boîtier (4) et
    le flasque de palier de boîtier (4) est conçu de telle sorte qu'au moins une partie de ces moyens (19, 20) serve simultanément au positionnement du stator de pompe à vis (7) et du flasque de palier de moteur (17).
  5. Pompe à vide selon la revendication 4, caractérisée en ce
    qu'au moins une partie des moyens (19, 20) pour le positionnement simultané du stator de pompe à vis (7) et du flasque de palier de moteur (17) se compose de goupilles (19, 20) qui viennent en prise dans des alésages (21), les alésages (21) étant de préférence disposés dans le flasque de palier de boîtier (4) et étant réalisés plus préférablement sous forme d'alésages traversants.
  6. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce que la distance axiale entre les paliers fixes, (13, 13') et les paliers fous (15, 15') vaut 0,3 fois, à 2 fois, de préférence 0,5 fois à 1,5 fois la longueur libre des arbres de rotor (6, 6') dans l'espace de déplacement (7'').
  7. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce que la distance latérale des axes de rotation des arbres de rotor (6, 6') vaut 20 mm à 100 mm, de préférence 25 mm à 60 mm.
  8. Pompe à vide selon l'une quelconque des revendications précédentes, caractérisée en ce que l'entraînement (3) présente un boîtier de moteur (17') comprenant le stator de moteur (12) et en ce que le boîtier de moteur (17') est réalisé d'une seule pièce en forme de pot conjointement avec le flasque de palier de boîtier (4) ou, de préférence, avec le flasque de palier de moteur (17).
EP20110004566 2011-06-06 2011-06-06 Pompe à vide avec des paliers disposés à un côté Active EP2532895B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP13002962.2A EP2642127B1 (fr) 2011-06-06 2011-06-06 Pompe à vide avec des paliers disposés à un côté
EP20110004566 EP2532895B1 (fr) 2011-06-06 2011-06-06 Pompe à vide avec des paliers disposés à un côté

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Application Number Priority Date Filing Date Title
EP20110004566 EP2532895B1 (fr) 2011-06-06 2011-06-06 Pompe à vide avec des paliers disposés à un côté

Related Child Applications (2)

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EP13002962.2A Division-Into EP2642127B1 (fr) 2011-06-06 2011-06-06 Pompe à vide avec des paliers disposés à un côté
EP13002962.2A Division EP2642127B1 (fr) 2011-06-06 2011-06-06 Pompe à vide avec des paliers disposés à un côté

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Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103062057B (zh) * 2013-01-06 2015-11-25 南通大学 一种螺杆式真空泵
DE102014104161A1 (de) 2014-03-26 2015-10-01 Pfeiffer Vacuum Gmbh Wälzkolbenvakuumpumpe
DE202014007298U1 (de) * 2014-09-12 2015-12-16 Vacuubrand Gmbh + Co Kg Gasdruckmessvorichtung
DE102015213527A1 (de) * 2015-07-17 2017-01-19 Leybold Gmbh Pumpensystem
DE102016211260A1 (de) * 2016-06-23 2017-12-28 Leybold Gmbh Vakuumpumpen-Rotorgehäuse, Vakuumpumpen-Gehäuse sowie Verfahren zur Herstellung eines Vakuumpumpen-Rotorgehäuses
DE102016112555B4 (de) 2016-07-08 2021-11-25 Pierburg Pump Technology Gmbh Kfz-Hilfsaggregat-Vakuumpumpe
CN106050664A (zh) * 2016-08-05 2016-10-26 北京朗禾科技有限公司 一种复合转子真空泵
WO2018024050A1 (fr) * 2016-08-05 2018-02-08 北京朗禾科技有限公司 Dispositif de transmission à deux arbres à rotor composite à deux moteurs
CN106151031A (zh) * 2016-09-30 2016-11-23 北京艾岗科技有限公司 一种无油螺杆空压机
CN107786051B (zh) * 2017-11-23 2023-08-29 苏州工业职业技术学院 一种浮动定位机壳铆压工装
EP3499040B1 (fr) * 2017-12-15 2020-03-25 Pfeiffer Vacuum Gmbh Pompe à vide à vis
JP7141332B2 (ja) * 2018-12-28 2022-09-22 株式会社荏原製作所 真空ポンプ装置
DE102020103384A1 (de) * 2020-02-11 2021-08-12 Gardner Denver Deutschland Gmbh Schraubenverdichter mit einseitig gelagerten Rotoren
DE102020119335A1 (de) * 2020-03-31 2021-09-30 Vacuubrand Gmbh + Co Kg Elektromotor und Vakuumpumpe
CN111946616A (zh) * 2020-08-05 2020-11-17 蚌埠艾普压缩机制造有限公司 一种压缩机双螺杆结构
CN114033678A (zh) * 2021-12-03 2022-02-11 北京航天石化技术装备工程有限公司 无润滑油脂窜漏的高洁净度电动回转容积泵及工作方法
CN114483576A (zh) * 2022-03-01 2022-05-13 绍兴威格隆泵业有限公司 外联式磁力驱动双螺杆泵

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2503020A1 (de) * 1975-01-25 1976-07-29 Wikotool Syst Tech Maschbau Drehkolbenmaschine sowie verfahren zu ihrer herstellung
JPS6117191U (ja) * 1984-07-04 1986-01-31 株式会社神戸製鋼所 スクリユ圧縮機
FR2638786B1 (fr) * 1988-11-07 1990-12-07 Cit Alcatel Pompe roots multietagee et procede de montage d'une telle pompe
SE8904359L (sv) * 1989-12-22 1991-06-23 Opcon Autorotor Ab Skruvkompressor foer foerbraenningsmotorer
JPH04178143A (ja) 1990-11-07 1992-06-25 Sumitomo Special Metals Co Ltd 一体型２軸同期駆動モーター
DE19522560A1 (de) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Vakuumpumpe mit einem Paar innerhalb eines axial durchströmten Schöpfraums umlaufender Verdrängerrotoren
JP3432679B2 (ja) * 1996-06-03 2003-08-04 株式会社荏原製作所 容積式真空ポンプ
GB2336038B (en) * 1998-04-02 2002-04-24 Brook Motors Ltd Electrical machine
US6139298A (en) * 1998-07-08 2000-10-31 Hokuetsu Industries Co., Ltd. Shaft structure in screw rotor of screw fluid assembly
JP4089072B2 (ja) * 1998-10-23 2008-05-21 三菱電機株式会社 永久磁石埋込み形モータ
EP1059454B1 (fr) * 1999-06-09 2003-08-27 Sterling Fluid Systems (Germany) GmbH Compresseur à piston rotatif avec écoulement axial
DE19945871A1 (de) * 1999-09-24 2001-03-29 Leybold Vakuum Gmbh Schraubenpumpe, insbesondere Schraubenvakuumpumpe, mit zwei Pumpstufen
CA2492495A1 (fr) 2002-10-04 2004-04-15 Ebara Densan Ltd. Pompe a vis et procede de mise en oeuvre
ATE395515T1 (de) * 2004-10-01 2008-05-15 Lot Vacuum Co Ltd Mehrstufige trockenverdichtende vakuumpumpe mit einem roots-rotor und einem schraubenrotor
JP4642589B2 (ja) * 2005-08-09 2011-03-02 本田技研工業株式会社 永久磁石式回転子とその製造方法
BE1016762A3 (nl) * 2005-09-13 2007-06-05 Atlas Copco Airpower Nv Verbeterde schroef van een watergeinjecteerde schroefcompressor en een werkwijze voor het vervaardigen ervan.
EP1979619B1 (fr) * 2006-01-31 2016-12-14 Ebara Corporation Unité de pompe à vide

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EP2532895A1 (fr) 2012-12-12
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