EP2528100A1 - Circuit board, display device, and process for production of circuit board - Google Patents
Circuit board, display device, and process for production of circuit board Download PDFInfo
- Publication number
- EP2528100A1 EP2528100A1 EP10843931A EP10843931A EP2528100A1 EP 2528100 A1 EP2528100 A1 EP 2528100A1 EP 10843931 A EP10843931 A EP 10843931A EP 10843931 A EP10843931 A EP 10843931A EP 2528100 A1 EP2528100 A1 EP 2528100A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- circuit board
- layer
- wirings
- semiconductor layer
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 46
- 238000004519 manufacturing process Methods 0.000 title description 4
- 239000004065 semiconductor Substances 0.000 claims abstract description 83
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 68
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 68
- 229910052751 metal Inorganic materials 0.000 claims abstract description 26
- 239000002184 metal Substances 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims description 51
- 238000001312 dry etching Methods 0.000 claims description 17
- 238000001039 wet etching Methods 0.000 claims description 16
- 239000004020 conductor Substances 0.000 claims description 13
- 239000010936 titanium Substances 0.000 claims description 11
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 229910052715 tantalum Inorganic materials 0.000 claims description 6
- 229910052721 tungsten Inorganic materials 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 238000005530 etching Methods 0.000 description 26
- 239000004973 liquid crystal related substance Substances 0.000 description 18
- 239000000243 solution Substances 0.000 description 10
- 239000010408 film Substances 0.000 description 9
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 8
- 229910000838 Al alloy Inorganic materials 0.000 description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- 239000011787 zinc oxide Substances 0.000 description 4
- 229910007541 Zn O Inorganic materials 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 229910018125 Al-Si Inorganic materials 0.000 description 1
- 229910018185 Al—Co Inorganic materials 0.000 description 1
- 229910018507 Al—Ni Inorganic materials 0.000 description 1
- 229910018520 Al—Si Inorganic materials 0.000 description 1
- 229910001182 Mo alloy Inorganic materials 0.000 description 1
- -1 Mo/Al Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02551—Group 12/16 materials
- H01L21/02554—Oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02565—Oxide semiconducting materials not being Group 12/16 materials, e.g. ternary compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66969—Multistep manufacturing processes of devices having semiconductor bodies not comprising group 14 or group 13/15 materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/7869—Thin film transistors, i.e. transistors with a channel being at least partly a thin film having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
Definitions
- the present invention relates to a circuit board, a display device, and a process for producing a circuit board. More specifically, the present invention relates to a circuit board used as a component of an electronic device such as a display device; a display device; and a process for producing a circuit board.
- a circuit board has an electronic circuit as its component, and a circuit board including elements such as thin-film transistors (TFTs), for example, is widely used as a component of an electronic device such as a liquid crystal display device, an organic electroluminescent display device, and a solar battery.
- TFTs thin-film transistors
- a TFT array substrate has a pixel circuit that has a structure in which TFTs (switching elements) are disposed at intersections of m x n matrix wirings with m rows of scanning lines and n columns of signal lines.
- the drain wirings of the TFTs are connected to picture element electrodes.
- peripheral circuits such as a scanning driver IC and a data driver IC are respectively connected to the gate wirings and source wirings of the TFTs.
- low-resistance aluminum wirings are often used.
- a circuit is affected by the performance of TFTs formed on a TFT substrate. That is, the performance of TFTs formed on a TFT substrate varies according to the material of the TFTs, and thus the circuit formed on the TFT substrate affects whether the circuit can be driven by the TFTs formed on the circuit board, whether the circuit size is not large, whether the yield does not decrease, and the like.
- a-Si amorphous silicon
- a-Si has low electron mobility. For this reason, a material better in electronic properties has been desired.
- Patent Document 1 discloses a thin-film transistor that has an oxide semiconductor containing one element selected from In, Ga, and Zn as its channel layer.
- Patent Literature 1 JP 2008-277326 A
- a semiconductor layer is not resistant to wet etching whereas a-Si is resistant to wet etching, in the case of employing an oxide semiconductor as a semiconductor layer for an increase in the electron mobility.
- the oxide semiconductor is removed by the etching solution for aluminum which is used in a mask process (e.g., a five-sheet mask process with a channel etching process) in production of a circuit board including low-resistance aluminum wirings. Accordingly, such a circuit board can be further improved in terms of increasing reliability.
- the five-sheet mask process includes the steps of, for example, (1) performing etching using a first mask to form gate wirings; (2) performing etching using a second mask to form a semiconductor layer; (3) performing etching using a third mask to form a conductor layer, and then separating the layer into source electrodes and drain electrodes (this step is also referred to as a "channel etching process” or a “channel separation process” herein); (4) performing etching using a fourth mask to form an insulating film layer and an organic insulating film, and then forming contact holes; and (5) performing etching using a fifth mask to form picture element electrodes.
- the present invention has been made in view of the above state of the art, and aims to provide a reliable circuit board that includes TFTs a semiconductor layer of which is formed from an oxide semiconductor; and low-resistance aluminum wirings.
- the present inventors have made various studies on highly reliable circuit boards, and have focused on the phenomenon that, in a circuit board in which a semiconductor layer is formed from an oxide semiconductor, the oxide semiconductor in the TFT portions, terminal portions and so on of the circuit board is lost because of the etching solution for aluminum wirings.
- the loss of the oxide semiconductor has been found to lead to insufficient reliability of the circuit board.
- the present inventors have found that the loss of the oxide semiconductor because of the etching solution in production of a circuit board can be prevented and the reliability can be increased, in the case that the wirings are formed by stacking a layer formed from a metal other than aluminum and a layer containing aluminum in the TFT portions of the circuit board, and that each of the source wirings and the drain wirings includes a portion in contact with the semiconductor layer, portions of the source wirings in contact with the semiconductor layer and respective portions of the drain wirings in contact with the semiconductor layer spacedly facing each other.
- the findings have solved the above problem admirably, and thereby the present invention has been completed.
- the present invention is a circuit board including: an oxide semiconductor layer; source wirings; and drain wirings, wherein each of the source wirings and the drain wirings includes a portion in contact with the semiconductor layer, portions of the source wirings in contact with the semiconductor layer and respective portions of the drain wirings in contact with the semiconductor layer spacedly facing each other, and the source wirings and the drain wirings are formed by stacking a layer formed from a metal other than aluminum and a layer containing aluminum.
- the circuit board of the present invention having the above structure is produced through a channel etching process of etching the layer containing aluminum and then etching the layer formed from a metal other than aluminum.
- dry etching can be employed in place of the wet etching for aluminum.
- Use of dry etching enables to minimize the loss of the oxide semiconductor. Therefore, the reliability can be sufficiently increased regarding a circuit board that includes TFTs the semiconductor layer of which is formed from an oxide semiconductor; and low-resistance aluminum wirings.
- the layer containing aluminum is preferably formed from aluminum, an aluminum alloy, Mo/Al, or a Mo/Al alloy, for example.
- the Al alloy is an alloy the main component of which is Al-Ni, Al-Nd, Al-Co, or Al-Si, for example.
- the thickness of the layer is, for example, 50 nm to 400 nm.
- the layer formed from a metal other than aluminum is preferably one that is resistant to an etchant for the layer containing aluminum and can go through dry etching.
- metals such as Ti, Ta, and W are preferred.
- the thickness of the layer is preferably 10 nm to 100 nm so that the dry etching time is shortened to reduce damage to the base.
- oxide semiconductor layer examples include crystalline oxide semiconductor layers such as ZnO layers, and amorphous oxide semiconductor layers such as IGZO (indium gallium zinc oxide) layers. Among these, amorphous oxide semiconductor layers are preferred. These amorphous oxide semiconductor layers are lost by a mixed solution (used in general etching for Al) of phosphoric acid + nitric acid + acetic acid.
- crystalline oxide semiconductor layers such as ZnO layers
- amorphous oxide semiconductor layers such as IGZO (indium gallium zinc oxide) layers.
- IGZO indium gallium zinc oxide
- circuit board of the present invention essentially includes these components, the structure of the circuit board of the present invention is not particularly limited by other components. Preferred structures of the circuit board of the present invention are described in detail below.
- a preferred structure of the circuit board of the present invention is a structure in which the layer formed from a metal other than aluminum includes at least one selected from the group consisting of titanium, tantalum, and tungsten. This structure enables easy dry etching, which enables to achieve the effects of the present invention sufficiently.
- a more preferred structure is a structure in which the layer formed from a metal other than aluminum consists of at least one selected from the group consisting of titanium, tantalum, and tungsten.
- circuit board of the present invention is a structure in which the circuit board is a thin-film transistor array substrate.
- the thin-film transistor array substrate has thin-film transistors (TFTs) on the circuit board.
- Another aspect of the present invention is a display device including the circuit board of the present invention.
- the display device include liquid crystal display devices and EL display devices such as organic EL display devices and inorganic EL display devices.
- Yet another aspect of the present invention is a process for producing a circuit board that includes an oxide semiconductor layer, source wirings, and drain wirings, the process including: an oxide semiconductor formation step of forming an oxide semiconductor layer; a conductor layer formation step of forming a conductor layer by stacking a layer formed from a metal other than aluminum and a layer containing aluminum; and a treatment step of treating the layer containing aluminum by wet etching, and then treating the layer formed from a metal other than aluminum by dry etching, wherein the treatment step includes separating the conductor layer into source wirings and drain wirings such that portions of the source wirings in contact with the semiconductor layer and respective portions of the drain wirings in contact with the semiconductor layer spacedly face each other.
- the process for producing the circuit board of the present invention employs dry etching in place of wet etching in the later part of the etching in the channel etching process, and the use of dry etching minimizes the loss of the exposed oxide semiconductor. Therefore, the reliability can be sufficiently increased regarding a circuit board that includes TFTs the semiconductor layer of which is formed from an oxide semiconductor; and low-resistance aluminum wirings.
- the conductor layer formation step is enough if the step includes formation of a conductor layer as a pre-step of the treatment step of separating the conductor layer into source wirings and drain wirings through etching.
- a preferred structure of the process for producing the circuit board of the present invention is the same as the above preferred structure of the circuit board of the present invention.
- the present invention enables to sufficiently increase the reliability regarding a circuit board that includes TFTs the semiconductor layer of which is produced from an oxide semiconductor; and low-resistance aluminum wirings.
- portions of the source wirings in contact with the semiconductor layer and respective portions of the drain wirings in contact with the semiconductor layer spacedly facing each other is satisfied as long as a surface of each source wiring in a portion in contact with the semiconductor layer and a surface of a drain wiring in a portion in contact with the semiconductor layer are disposed in parallel with each other without direct contact as shown in Fig. 2 , for example.
- the circuit board is a substrate on which TFTs are formed in the embodiment, the circuit board is also referred to as a TFT-side substrate.
- a substrate facing the circuit board is a substrate on which color filters (CFs) are formed in the embodiment, the substrate facing the circuit board is also referred to as a CF-side substrate.
- FIG. 1 is a schematic plan view illustrating the circuit board of the first embodiment.
- a circuit board 100 is a TFT-side substrate provided with thin-film transistors (TFTs) 41, and has a picture element electrode area (display area) and an area outside the picture element electrode area (non-display area).
- TFTs thin-film transistors
- non-display area connecting portions 51 and terminal portions 61 are arranged.
- a source driver can be mounted on the circuit board 100 by, for example, a chip-on-glass (COG) method.
- COG chip-on-glass
- a flexible printed circuit board (FPC) can be mounted on the circuit board 100.
- signals for driving the source driver can be input from the FPC via the terminal portions 61 and the connecting portions 51.
- Fig. 2 is a schematic cross-sectional view illustrating a TFT portion in the circuit board of the first embodiment.
- the circuit board of the first embodiment has, in each TFT portion, a gate wiring 13, an oxide semiconductor layer 17 such as an IGZO (indium gallium zinc oxide) layer, and a source wiring 19s and a drain wiring 19d formed by stacking a layer formed from a metal other than aluminum and a layer containing aluminum.
- Each of the source wirings 19s and the drain wirings 19d has a portion in contact with the oxide semiconductor layer 17, and portions of the source wirings 19s in contact with the oxide semiconductor layer 17 and respective portions of the drain wirings 19d in contact with the oxide semiconductor layer 17 spacedly face each other.
- a channel etching process is performed in which etching of the layer containing aluminum is performed first and then etching of the layer formed from a metal other than aluminum is performed.
- dry etching can be employed in place of the wet etching, and dry etching enables to minimize the loss of the oxide semiconductor. Therefore, the reliability can be sufficiently increased regarding a circuit board that includes TFTs the semiconductor layer of which is formed from an oxide semiconductor; and low-resistance aluminum wirings.
- Any solution can be used for wet etching as long as it enables etching of aluminum.
- a solution enabling etching of aluminum usually results in a loss of the oxide semiconductor, and thus application of the present invention to a circuit board produced using such a solution is expected to achieve advantageous effects of the present invention.
- the solution include strong acid, weak acid, and strong alkali. Since the oxide semiconductor layer 17 is etched even with weak alkali in the case that the oxide semiconductor layer 17 is of ZnO or the like metal other than IGZO, the present invention can also be applied to a circuit board obtained using a weak alkali in this case.
- a mixed solution used in general etching of aluminum
- phosphoric acid + nitric acid + acetic acid is preferred.
- Suitable examples of the oxide semiconductor layer 17 other than an IGZO layer include ISZO (In-Si-Zn-O), IAZO (In-Al-Zn-O), INiZO (In-Ni-Zn-O), ICuZO (In-Cu-Zn-O), IHfZO (In-Hf-Zn-O), and IZO (In-Zn-O) layers.
- Fig. 3 is a schematic cross-sectional view illustrating a substrate on which gate wirings are formed in the process for producing the circuit board of the first embodiment. From the left side of the drawing, the respective portions indicate a TFT portion, a storage capacitance (Cs) portion, the connecting portion 51, and the terminal portion 61 in the circuit board. The same applies in Figs. 4 to 9 and Figs. 12 to 16 . In each of the TFT portion, the connecting portion, and the terminal portion, a gate wiring 13 is formed.
- Fig. 4 is a schematic cross-sectional view illustrating the substrate on which a semiconductor layer is further formed in the process for producing the circuit board of the first embodiment.
- An insulating layer 15 has been further formed on the substrate illustrated in Fig. 3 , and an oxide semiconductor layer 17 has been formed in each of the TFT portion and the terminal portion.
- Fig. 5 is a schematic cross-sectional view illustrating the substrate after wet etching of a layer containing aluminum in the process for producing the circuit board of the first embodiment. That is, a conductor layer is further formed on the substrate illustrated in Fig. 4 by stacking a layer 19a formed from a metal other than aluminum and a layer 19b containing aluminum. On the conductor layer, a resist 20 has been formed through a mask process, so that wet etching can be performed on the layer 19b containing aluminum.
- Fig. 6 is a schematic cross-sectional view illustrating the substrate after dry etching of the layer formed from a metal other than aluminum in the process for producing the circuit board of the first embodiment.
- the layer 19a formed from a metal other than aluminum has been further subjected to dry etching.
- the oxide semiconductor layer 17 has only received the minimum damage by dry etching, and is not lost substantially.
- the conductor layer (source wirings and drain wirings) illustrated in the present embodiment may include two layers or three or more layers, but preferably includes two layers or three layers.
- the layer preferably has a multi-layer structure of Al (aluminum)/Ti (titanium), Mo (molybdenum)/Al (aluminum)/Ti (titanium), Al alloy/Mo (molybdenum)/Ti, Al alloy/Ti, Al alloy/Ta (tantalum), or Al alloy/W (tungsten).
- the thickness of the layer containing aluminum can be 50 nm to 400 nm.
- the thickness of the layer formed from a metal other than aluminum can be 10 nm to 100 nm.
- the upper layer aluminum is processed through a wet etching process, and then Ti, Ta, W, or the like is processed through a dry process.
- Fig. 7 is a schematic cross-sectional view illustrating the substrate after removal of a resist in the process for producing the circuit board of the first embodiment. The resist has been removed from the substrate illustrated in Fig. 6 .
- Fig. 8 is a schematic cross-sectional view illustrating the substrate on which an organic insulating film is further formed in the process for producing the circuit board of the first embodiment.
- An insulating layer 21 has been further formed on the substrate illustrated in Fig. 7 , and then an organic insulating film 23 has been formed on the insulating layer 21. After that, contact holes have been formed by dry etching in the storage capacitance (Cs) portion, the connecting portion, and the terminal portion.
- Cs storage capacitance
- Fig. 9 is a schematic cross-sectional view illustrating the substrate on which picture element electrodes are further formed in the process for producing the circuit board of the first embodiment.
- Picture electrodes 31 have been further formed on the circuit board illustrated in Fig. 8 .
- wirings including a low-resistance aluminum (alloy) layer can be suitably produced through the five-sheet mask process.
- Fig. 10 is an exploded perspective view schematically illustrating the structure of a liquid crystal panel that includes the circuit board of the first embodiment. As illustrated in Fig.
- liquid crystals 73 are sandwiched by a CF-side substrate 72 and the circuit board 100 in a liquid crystal panel 200.
- the liquid crystal panel 200 also has a backlight 75 on the backside of the circuit board 100.
- the light of the backlight 75 passes through a polarizer 74, the circuit board 100, the liquid crystals 73, the CF-side substrate 72, and a polarizer 71 in the stated order, and transmission and non-transmission of light is controlled by alignment control of the liquid crystals.
- Fig. 11 is an exploded perspective view schematically illustrating the structure of a liquid crystal display device that includes the liquid crystal panel illustrated in Fig. 10 . As illustrated in Fig.
- the liquid crystal panel 200 fixed on a fixation panel 400 is sealed by a front cabinet 300 and a back cabinet 500.
- the back cabinet 500 and an upper stand 700 are fixed to each other via a metal fitting 600.
- the upper stand 700 and a lower stand 800 are fitted with each other.
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Thin Film Transistor (AREA)
- Liquid Crystal (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
- The present invention relates to a circuit board, a display device, and a process for producing a circuit board. More specifically, the present invention relates to a circuit board used as a component of an electronic device such as a display device; a display device; and a process for producing a circuit board.
- A circuit board has an electronic circuit as its component, and a circuit board including elements such as thin-film transistors (TFTs), for example, is widely used as a component of an electronic device such as a liquid crystal display device, an organic electroluminescent display device, and a solar battery.
- Hereinafter, a circuit board is illustrated based on an example of a circuit configuration of a TFT array substrate constituting a TFT-driven liquid crystal display panel. A TFT array substrate has a pixel circuit that has a structure in which TFTs (switching elements) are disposed at intersections of m x n matrix wirings with m rows of scanning lines and n columns of signal lines. The drain wirings of the TFTs are connected to picture element electrodes. Also, peripheral circuits such as a scanning driver IC and a data driver IC are respectively connected to the gate wirings and source wirings of the TFTs. For the wirings, low-resistance aluminum wirings are often used.
- A circuit is affected by the performance of TFTs formed on a TFT substrate. That is, the performance of TFTs formed on a TFT substrate varies according to the material of the TFTs, and thus the circuit formed on the TFT substrate affects whether the circuit can be driven by the TFTs formed on the circuit board, whether the circuit size is not large, whether the yield does not decrease, and the like. Although a-Si (amorphous silicon) is used in many cases for conventional circuit boards in that TFTs can be easily formed at low cost, a-Si has low electron mobility. For this reason, a material better in electronic properties has been desired.
- Regarding other semiconductor compounds usable for a channel layer of a TFT, Patent Document 1, for example, discloses a thin-film transistor that has an oxide semiconductor containing one element selected from In, Ga, and Zn as its channel layer.
- Patent Literature 1:
JP 2008-277326 A - However, a semiconductor layer is not resistant to wet etching whereas a-Si is resistant to wet etching, in the case of employing an oxide semiconductor as a semiconductor layer for an increase in the electron mobility. Hence, at least a part of the oxide semiconductor is removed by the etching solution for aluminum which is used in a mask process (e.g., a five-sheet mask process with a channel etching process) in production of a circuit board including low-resistance aluminum wirings. Accordingly, such a circuit board can be further improved in terms of increasing reliability. Here, the five-sheet mask process includes the steps of, for example, (1) performing etching using a first mask to form gate wirings; (2) performing etching using a second mask to form a semiconductor layer; (3) performing etching using a third mask to form a conductor layer, and then separating the layer into source electrodes and drain electrodes (this step is also referred to as a "channel etching process" or a "channel separation process" herein); (4) performing etching using a fourth mask to form an insulating film layer and an organic insulating film, and then forming contact holes; and (5) performing etching using a fifth mask to form picture element electrodes.
-
-
Fig. 12 is a schematic cross-sectional view illustrating a substrate on which gate wirings are formed in a process for producing a conventional circuit board. From the left side of the drawing, the respective portions indicate a TFT portion, a storage capacitance (Cs) portion, a connecting portion, and a terminal portion in the circuit board. In each portion, agate wiring 113 is formed. -
Fig. 13 is a schematic cross-sectional view illustrating the substrate on which a semiconductor layer is further formed in the process for producing a conventional circuit board. An insulatinglayer 115 has been further formed on the substrate illustrated inFig. 12 , and anoxide semiconductor layer 117 has been formed in each of the TFT portion and the terminal portion. -
Fig. 14 is a schematic cross-sectional view illustrating the substrate after wet etching of a layer containing aluminum in the process for producing a conventional circuit board. Alayer 119 containing aluminum has been further formed on the substrate illustrated inFig. 13 , and thelayer 119 containing aluminum has been then wet-etched by the mask process. In the portions from which thelayer 119 containing aluminum has been removed by wet etching, parts of theoxide semiconductor layer 117 have been lost and the layer has become thinner. -
-
Fig. 15 is a schematic cross-sectional view illustrating the substrate on which an organic insulating film is further formed in the process for producing a conventional circuit board. Aninsulating layer 121 has been further formed on the substrate illustrated inFig. 14 , and then an organicinsulating film 123 has been formed on theinsulating layer 121. After that, contact holes have been formed by dry etching in the storage capacitance (Cs) portion, the connecting portion, and the terminal portion. -
Fig. 16 is a schematic cross-sectional view illustrating a substrate on which picture element electrodes are further formed in the process for producing a conventional circuit board.Picture electrodes 131 have been further formed on the circuit board illustrated inFig. 15 . - The present invention has been made in view of the above state of the art, and aims to provide a reliable circuit board that includes TFTs a semiconductor layer of which is formed from an oxide semiconductor; and low-resistance aluminum wirings.
- The present inventors have made various studies on highly reliable circuit boards, and have focused on the phenomenon that, in a circuit board in which a semiconductor layer is formed from an oxide semiconductor, the oxide semiconductor in the TFT portions, terminal portions and so on of the circuit board is lost because of the etching solution for aluminum wirings. The loss of the oxide semiconductor has been found to lead to insufficient reliability of the circuit board. Also, the present inventors have found that the loss of the oxide semiconductor because of the etching solution in production of a circuit board can be prevented and the reliability can be increased, in the case that the wirings are formed by stacking a layer formed from a metal other than aluminum and a layer containing aluminum in the TFT portions of the circuit board, and that each of the source wirings and the drain wirings includes a portion in contact with the semiconductor layer, portions of the source wirings in contact with the semiconductor layer and respective portions of the drain wirings in contact with the semiconductor layer spacedly facing each other. The findings have solved the above problem admirably, and thereby the present invention has been completed.
- That is, the present invention is a circuit board including: an oxide semiconductor layer; source wirings; and drain wirings, wherein each of the source wirings and the drain wirings includes a portion in contact with the semiconductor layer, portions of the source wirings in contact with the semiconductor layer and respective portions of the drain wirings in contact with the semiconductor layer spacedly facing each other, and the source wirings and the drain wirings are formed by stacking a layer formed from a metal other than aluminum and a layer containing aluminum.
- The circuit board of the present invention having the above structure is produced through a channel etching process of etching the layer containing aluminum and then etching the layer formed from a metal other than aluminum. In the later part of the etching, dry etching can be employed in place of the wet etching for aluminum. Use of dry etching enables to minimize the loss of the oxide semiconductor. Therefore, the reliability can be sufficiently increased regarding a circuit board that includes TFTs the semiconductor layer of which is formed from an oxide semiconductor; and low-resistance aluminum wirings.
- The layer containing aluminum is preferably formed from aluminum, an aluminum alloy, Mo/Al, or a Mo/Al alloy, for example. The Al alloy is an alloy the main component of which is Al-Ni, Al-Nd, Al-Co, or Al-Si, for example. The thickness of the layer is, for example, 50 nm to 400 nm.
- The layer formed from a metal other than aluminum is preferably one that is resistant to an etchant for the layer containing aluminum and can go through dry etching. For example, metals such as Ti, Ta, and W are preferred. The thickness of the layer is preferably 10 nm to 100 nm so that the dry etching time is shortened to reduce damage to the base.
- Examples of the oxide semiconductor layer include crystalline oxide semiconductor layers such as ZnO layers, and amorphous oxide semiconductor layers such as IGZO (indium gallium zinc oxide) layers. Among these, amorphous oxide semiconductor layers are preferred. These amorphous oxide semiconductor layers are lost by a mixed solution (used in general etching for Al) of phosphoric acid + nitric acid + acetic acid.
- As long as the circuit board of the present invention essentially includes these components, the structure of the circuit board of the present invention is not particularly limited by other components.
Preferred structures of the circuit board of the present invention are described in detail below. - A preferred structure of the circuit board of the present invention is a structure in which the layer formed from a metal other than aluminum includes at least one selected from the group consisting of titanium, tantalum, and tungsten. This structure enables easy dry etching, which enables to achieve the effects of the present invention sufficiently. A more preferred structure is a structure in which the layer formed from a metal other than aluminum consists of at least one selected from the group consisting of titanium, tantalum, and tungsten.
- Another preferred structure of the circuit board of the present invention is a structure in which the circuit board is a thin-film transistor array substrate. The thin-film transistor array substrate has thin-film transistors (TFTs) on the circuit board.
- Another aspect of the present invention is a display device including the circuit board of the present invention. Examples of the display device include liquid crystal display devices and EL display devices such as organic EL display devices and inorganic EL display devices.
- Yet another aspect of the present invention is a process for producing a circuit board that includes an oxide semiconductor layer, source wirings, and drain wirings, the process including: an oxide semiconductor formation step of forming an oxide semiconductor layer; a conductor layer formation step of forming a conductor layer by stacking a layer formed from a metal other than aluminum and a layer containing aluminum; and a treatment step of treating the layer containing aluminum by wet etching, and then treating the layer formed from a metal other than aluminum by dry etching, wherein the treatment step includes separating the conductor layer into source wirings and drain wirings such that portions of the source wirings in contact with the semiconductor layer and respective portions of the drain wirings in contact with the semiconductor layer spacedly face each other.
- The process for producing the circuit board of the present invention employs dry etching in place of wet etching in the later part of the etching in the channel etching process, and the use of dry etching minimizes the loss of the exposed oxide semiconductor. Therefore, the reliability can be sufficiently increased regarding a circuit board that includes TFTs the semiconductor layer of which is formed from an oxide semiconductor; and low-resistance aluminum wirings.
- The conductor layer formation step is enough if the step includes formation of a conductor layer as a pre-step of the treatment step of separating the conductor layer into source wirings and drain wirings through etching.
- A preferred structure of the process for producing the circuit board of the present invention is the same as the above preferred structure of the circuit board of the present invention.
- The above structures may be appropriately combined as long as the combination does not go beyond the scope of the present invention.
- The present invention enables to sufficiently increase the reliability regarding a circuit board that includes TFTs the semiconductor layer of which is produced from an oxide semiconductor; and low-resistance aluminum wirings.
-
-
Fig. 1 is a schematic plan view illustrating a circuit board of a first embodiment. -
Fig. 2 is a schematic cross-sectional view illustrating a TFT portion in the circuit board of the first embodiment. -
Fig. 3 is a schematic cross-sectional view illustrating a substrate on which gate wirings have been formed in a process for producing the circuit board of the first embodiment. -
Fig. 4 is a schematic cross-sectional view illustrating the substrate on which a semiconductor layer is further formed in the process for producing the circuit board of the first embodiment. -
Fig. 5 is a schematic cross-sectional view illustrating the substrate after wet etching of a layer containing aluminum in the process for producing the circuit board of the first embodiment. -
Fig. 6 is a schematic cross-sectional view illustrating the substrate after dry etching of a layer formed from a metal other than aluminum in the process for producing the circuit board of the first embodiment. -
Fig. 7 is a schematic cross-sectional view illustrating the substrate after removal of a resist in the process for producing the circuit board of the first embodiment. -
Fig. 8 is a schematic cross-sectional view illustrating the substrate on which an organic insulating film is further formed in the process for producing the circuit board of the first embodiment. -
Fig. 9 is a schematic cross-sectional view illustrating the substrate on which picture elements are formed in the process for producing the circuit board of the first embodiment. -
Fig. 10 is an exploded perspective view schematically illustrating the structure of a liquid crystal panel that includes the circuit board of the first embodiment. -
Fig. 11 is an exploded perspective view schematically illustrating the structure of a liquid crystal display device that includes the liquid crystal panel illustrated inFig. 10 . -
Fig. 12 is a schematic cross-sectional view illustrating a substrate on which gate wirings are formed in a process for producing a conventional circuit board. -
Fig. 13 is a schematic cross-sectional view illustrating the substrate on which a semiconductor layer is further formed in the process for forming a conventional circuit board. -
Fig. 14 is a schematic cross-sectional view illustrating the substrate after wet etching of a layer containing aluminum in the process for forming a conventional circuit board. -
Fig. 15 is a schematic cross-sectional view illustrating the substrate on which an organic insulating film is further formed in the process for producing a conventional circuit board. -
Fig. 16 is a schematic cross-sectional view illustrating the substrate on which picture elements are further formed in the process for producing a conventional circuit board. - The condition of "portions of the source wirings in contact with the semiconductor layer and respective portions of the drain wirings in contact with the semiconductor layer spacedly facing each other" mentioned herein is satisfied as long as a surface of each source wiring in a portion in contact with the semiconductor layer and a surface of a drain wiring in a portion in contact with the semiconductor layer are disposed in parallel with each other without direct contact as shown in
Fig. 2 , for example.
Since the circuit board is a substrate on which TFTs are formed in the embodiment, the circuit board is also referred to as a TFT-side substrate. Since a substrate facing the circuit board is a substrate on which color filters (CFs) are formed in the embodiment, the substrate facing the circuit board is also referred to as a CF-side substrate. - The present invention will be described in more detail below with reference to the drawings based on an embodiment which, however, is not intended to limit the scope of the present invention.
-
Fig. 1 is a schematic plan view illustrating the circuit board of the first embodiment. Acircuit board 100 is a TFT-side substrate provided with thin-film transistors (TFTs) 41, and has a picture element electrode area (display area) and an area outside the picture element electrode area (non-display area).
In the non-display area, connectingportions 51 andterminal portions 61 are arranged. Via the connectingportions 51, a source driver can be mounted on thecircuit board 100 by, for example, a chip-on-glass (COG) method. Via theterminal portions 61, a flexible printed circuit board (FPC) can be mounted on thecircuit board 100. For example, signals for driving the source driver can be input from the FPC via theterminal portions 61 and the connectingportions 51.
In the display area of thecircuit board 100, gate wirings 13 andsource wirings 19s substantially perpendicular to each other are provided on a glass substrate (not illustrated inFig. 1 ), and apicture element electrode 31 and aTFT 41 are provided in each area surrounded by the gate wirings 13 and the source wirings 19s. Also, storage capacitance (Cs) wirings 25 are provided so as to overlap withpicture element electrode 31 in such a manner that they are substantially parallel with thegate wirings 13.
Fig. 2 is a schematic cross-sectional view illustrating a TFT portion in the circuit board of the first embodiment. The circuit board of the first embodiment has, in each TFT portion, agate wiring 13, anoxide semiconductor layer 17 such as an IGZO (indium gallium zinc oxide) layer, and asource wiring 19s and adrain wiring 19d formed by stacking a layer formed from a metal other than aluminum and a layer containing aluminum. Each of the source wirings 19s and thedrain wirings 19d has a portion in contact with theoxide semiconductor layer 17, and portions of the source wirings 19s in contact with theoxide semiconductor layer 17 and respective portions of thedrain wirings 19d in contact with theoxide semiconductor layer 17 spacedly face each other. In the circuit board of the present embodiment having the above structure, a channel etching process is performed in which etching of the layer containing aluminum is performed first and then etching of the layer formed from a metal other than aluminum is performed. In the later part of the etching, dry etching can be employed in place of the wet etching, and dry etching enables to minimize the loss of the oxide semiconductor. Therefore, the reliability can be sufficiently increased regarding a circuit board that includes TFTs the semiconductor layer of which is formed from an oxide semiconductor; and low-resistance aluminum wirings. - Any solution can be used for wet etching as long as it enables etching of aluminum. A solution enabling etching of aluminum usually results in a loss of the oxide semiconductor, and thus application of the present invention to a circuit board produced using such a solution is expected to achieve advantageous effects of the present invention. Examples of the solution include strong acid, weak acid, and strong alkali. Since the
oxide semiconductor layer 17 is etched even with weak alkali in the case that theoxide semiconductor layer 17 is of ZnO or the like metal other than IGZO, the present invention can also be applied to a circuit board obtained using a weak alkali in this case. Among these solutions, a mixed solution (used in general etching of aluminum) of phosphoric acid + nitric acid + acetic acid is preferred. - Suitable examples of the
oxide semiconductor layer 17 other than an IGZO layer include ISZO (In-Si-Zn-O), IAZO (In-Al-Zn-O), INiZO (In-Ni-Zn-O), ICuZO (In-Cu-Zn-O), IHfZO (In-Hf-Zn-O), and IZO (In-Zn-O) layers. - The steps of producing the circuit board of the first embodiment are described below with reference to
Figs. 3 to 9 .
Fig. 3 is a schematic cross-sectional view illustrating a substrate on which gate wirings are formed in the process for producing the circuit board of the first embodiment. From the left side of the drawing, the respective portions indicate a TFT portion, a storage capacitance (Cs) portion, the connectingportion 51, and theterminal portion 61 in the circuit board. The same applies inFigs. 4 to 9 andFigs. 12 to 16 . In each of the TFT portion, the connecting portion, and the terminal portion, agate wiring 13 is formed. -
Fig. 4 is a schematic cross-sectional view illustrating the substrate on which a semiconductor layer is further formed in the process for producing the circuit board of the first embodiment. An insulatinglayer 15 has been further formed on the substrate illustrated inFig. 3 , and anoxide semiconductor layer 17 has been formed in each of the TFT portion and the terminal portion. -
Fig. 5 is a schematic cross-sectional view illustrating the substrate after wet etching of a layer containing aluminum in the process for producing the circuit board of the first embodiment. That is, a conductor layer is further formed on the substrate illustrated inFig. 4 by stacking alayer 19a formed from a metal other than aluminum and alayer 19b containing aluminum. On the conductor layer, a resist 20 has been formed through a mask process, so that wet etching can be performed on thelayer 19b containing aluminum. -
Fig. 6 is a schematic cross-sectional view illustrating the substrate after dry etching of the layer formed from a metal other than aluminum in the process for producing the circuit board of the first embodiment. In a portion from which thelayer 19b containing aluminum has been removed (in other words, a portion with no resist 20 formed), thelayer 19a formed from a metal other than aluminum has been further subjected to dry etching. Theoxide semiconductor layer 17 has only received the minimum damage by dry etching, and is not lost substantially.
The conductor layer (source wirings and drain wirings) illustrated in the present embodiment may include two layers or three or more layers, but preferably includes two layers or three layers. For example, the layer preferably has a multi-layer structure of Al (aluminum)/Ti (titanium), Mo (molybdenum)/Al (aluminum)/Ti (titanium), Al alloy/Mo (molybdenum)/Ti, Al alloy/Ti, Al alloy/Ta (tantalum), or Al alloy/W (tungsten). The thickness of the layer containing aluminum can be 50 nm to 400 nm. Also, the thickness of the layer formed from a metal other than aluminum can be 10 nm to 100 nm. As mentioned above, the upper layer aluminum is processed through a wet etching process, and then Ti, Ta, W, or the like is processed through a dry process. -
Fig. 7 is a schematic cross-sectional view illustrating the substrate after removal of a resist in the process for producing the circuit board of the first embodiment. The resist has been removed from the substrate illustrated inFig. 6 . -
Fig. 8 is a schematic cross-sectional view illustrating the substrate on which an organic insulating film is further formed in the process for producing the circuit board of the first embodiment. An insulatinglayer 21 has been further formed on the substrate illustrated inFig. 7 , and then an organic insulatingfilm 23 has been formed on the insulatinglayer 21. After that, contact holes have been formed by dry etching in the storage capacitance (Cs) portion, the connecting portion, and the terminal portion. -
Fig. 9 is a schematic cross-sectional view illustrating the substrate on which picture element electrodes are further formed in the process for producing the circuit board of the first embodiment.Picture electrodes 31 have been further formed on the circuit board illustrated inFig. 8 .
Thereby, wirings including a low-resistance aluminum (alloy) layer can be suitably produced through the five-sheet mask process. That is, a loss of the oxide semiconductor in a TFT portion of a circuit board because of the etching solution in production of a circuit board can be prevented to increase the reliability, in the case that the wirings are formed by stacking a layer formed from a metal other than aluminum and a layer containing aluminum, and that each of the source wirings and the drain wirings includes a portion in contact with the semiconductor layer, and portions of the source wirings in contact with the semiconductor layer and respective portions of the drain wirings in contact with the semiconductor layer spacedly face each other.
Fig. 10 is an exploded perspective view schematically illustrating the structure of a liquid crystal panel that includes the circuit board of the first embodiment.
As illustrated inFig. 10 ,liquid crystals 73 are sandwiched by a CF-side substrate 72 and thecircuit board 100 in aliquid crystal panel 200. Theliquid crystal panel 200 also has abacklight 75 on the backside of thecircuit board 100. The light of thebacklight 75 passes through apolarizer 74, thecircuit board 100, theliquid crystals 73, the CF-side substrate 72, and apolarizer 71 in the stated order, and transmission and non-transmission of light is controlled by alignment control of the liquid crystals.
Fig. 11 is an exploded perspective view schematically illustrating the structure of a liquid crystal display device that includes the liquid crystal panel illustrated inFig. 10 . As illustrated inFig. 11 , theliquid crystal panel 200 fixed on afixation panel 400 is sealed by afront cabinet 300 and aback cabinet 500. Theback cabinet 500 and anupper stand 700 are fixed to each other via ametal fitting 600. Theupper stand 700 and alower stand 800 are fitted with each other. - The structures in the above embodiment may be appropriately combined as long as the combination does not go beyond the scope of the present invention.
- The present application claims priority to Patent Application No.
2010-011368 -
- 11: Glass Substrate
- 13, 113: Gate wiring
- 15, 21, 115, 121: Insulating layer
- 17, 117: Oxide semiconductor layer
- 19s: Source wiring
- 19d: Drain wiring
- 19a: Layer formed from metal other than aluminum
- 19b, 119: Layer containing aluminum
- 20: Resist
- 23, 123: Organic insulating film
- 25: Cs (storage capacitance) wiring
- 31,131: Picture element electrode
- 41: TFT
- 51: Connecting portion
- 61: Terminal portion
- 71, 74: Polarizer
- 72: CF-side substrate
- 73: Liquid crystal
- 75: Backlight
- 100: Circuit board
- 200: Liquid crystal panel
- 300: Front cabinet
- 400: Fixation panel
- 500: Back cabinet
- 600: Metal fitting
- 700: Upper stand
- 800: Lower stand
- 900: Liquid crystal display device
Claims (5)
- A circuit board comprising:an oxide semiconductor layer;source wirings; anddrain wirings,wherein each of the source wirings and the drain wirings includes a portion in contact with the semiconductor layer, portions of the source wirings in contact with the semiconductor layer and respective portions of the drain wirings in contact with the semiconductor layer spacedly facing each other, andthe source wirings and the drain wirings are formed by stacking a layer formed from a metal other than aluminum and a layer containing aluminum.
- The circuit board according to claim 1,
wherein the layer formed from a metal other than aluminum contains at least one selected from the group consisting of titanium, tantalum, and tungsten. - The circuit board according to claim 1 or 2,
wherein the circuit board is a thin-film transistor array substrate. - A display device comprising the circuit board according to any one of claims 1 to 3.
- A process for producing a circuit board that includes an oxide semiconductor layer, source wirings, and drain wirings,
the process comprising:an oxide semiconductor formation step of forming an oxide semiconductor layer;a conductor layer formation step of forming a conductor layer by stacking a layer formed from a metal other than aluminum and a layer containing aluminum; anda treatment step of treating the layer containing aluminum by wet etching, and then treating the layer formed from a metal other than aluminum by dry etching,wherein the treatment step includes separating the conductor layer into source wirings and drain wirings such that portions of the source wirings in contact with the semiconductor layer and respective portions of the drain wirings in contact with the semiconductor layer spacedly face each other.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010011368 | 2010-01-21 | ||
PCT/JP2010/068803 WO2011089767A1 (en) | 2010-01-21 | 2010-10-25 | Circuit board, display device, and process for production of circuit board |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2528100A1 true EP2528100A1 (en) | 2012-11-28 |
EP2528100A4 EP2528100A4 (en) | 2014-03-12 |
EP2528100B1 EP2528100B1 (en) | 2016-07-20 |
Family
ID=44306583
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10843931.6A Not-in-force EP2528100B1 (en) | 2010-01-21 | 2010-10-25 | Process for production of circuit board |
Country Status (5)
Country | Link |
---|---|
US (1) | US8778730B2 (en) |
EP (1) | EP2528100B1 (en) |
JP (1) | JP5559210B2 (en) |
CN (1) | CN102714221A (en) |
WO (1) | WO2011089767A1 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20120099475A (en) | 2009-12-04 | 2012-09-10 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | Semiconductor device and manufacturing method thereof |
US8664097B2 (en) * | 2010-09-13 | 2014-03-04 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of semiconductor device |
JP6076038B2 (en) * | 2011-11-11 | 2017-02-08 | 株式会社半導体エネルギー研究所 | Method for manufacturing display device |
KR20240105514A (en) | 2012-12-25 | 2024-07-05 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | Semiconductor device |
US9905585B2 (en) | 2012-12-25 | 2018-02-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device comprising capacitor |
KR102241249B1 (en) | 2012-12-25 | 2021-04-15 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | Resistor, display device, and electronic device |
US9915848B2 (en) | 2013-04-19 | 2018-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Display device and electronic device |
US9704894B2 (en) | 2013-05-10 | 2017-07-11 | Semiconductor Energy Laboratory Co., Ltd. | Display device including pixel electrode including oxide |
TWI649606B (en) | 2013-06-05 | 2019-02-01 | 日商半導體能源研究所股份有限公司 | Display device and electronic device |
CN105339999B (en) * | 2013-06-27 | 2017-12-01 | 夏普株式会社 | Liquid crystal display device |
US9293480B2 (en) | 2013-07-10 | 2016-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and display device including the semiconductor device |
WO2016063169A1 (en) | 2014-10-23 | 2016-04-28 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting element |
US10680017B2 (en) | 2014-11-07 | 2020-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting element including EL layer, electrode which has high reflectance and a high work function, display device, electronic device, and lighting device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070241327A1 (en) * | 2006-04-18 | 2007-10-18 | Samsung Electronics Co. Ltd. | Fabrication methods of a ZnO thin film structure and a ZnO thin film transistor, and a ZnO thin film structure and a ZnO thin film transistor |
US20090239335A1 (en) * | 2005-09-29 | 2009-09-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor Device and Manufacturing Method Thereof |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3365954B2 (en) * | 1997-04-14 | 2003-01-14 | 株式会社神戸製鋼所 | Al-Ni-Y alloy thin film for semiconductor electrode and sputtering target for forming Al-Ni-Y alloy thin film for semiconductor electrode |
JP5064747B2 (en) | 2005-09-29 | 2012-10-31 | 株式会社半導体エネルギー研究所 | Semiconductor device, electrophoretic display device, display module, electronic device, and method for manufacturing semiconductor device |
JP5305630B2 (en) * | 2006-12-05 | 2013-10-02 | キヤノン株式会社 | Manufacturing method of bottom gate type thin film transistor and manufacturing method of display device |
JP2008277326A (en) | 2007-04-25 | 2008-11-13 | Canon Inc | Amorphous oxide semiconductor, semiconductor device and thin-film transistor |
US8300167B2 (en) * | 2007-06-14 | 2012-10-30 | Sharp Kabushiki Kaisha | Display panel, display device, and method for manufacturing display panel |
WO2010061778A1 (en) * | 2008-11-28 | 2010-06-03 | シャープ株式会社 | Substrate for display device, and display device |
-
2010
- 2010-10-25 CN CN2010800618610A patent/CN102714221A/en active Pending
- 2010-10-25 WO PCT/JP2010/068803 patent/WO2011089767A1/en active Application Filing
- 2010-10-25 EP EP10843931.6A patent/EP2528100B1/en not_active Not-in-force
- 2010-10-25 JP JP2011550792A patent/JP5559210B2/en not_active Expired - Fee Related
- 2010-10-25 US US13/522,778 patent/US8778730B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090239335A1 (en) * | 2005-09-29 | 2009-09-24 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor Device and Manufacturing Method Thereof |
US20070241327A1 (en) * | 2006-04-18 | 2007-10-18 | Samsung Electronics Co. Ltd. | Fabrication methods of a ZnO thin film structure and a ZnO thin film transistor, and a ZnO thin film structure and a ZnO thin film transistor |
Non-Patent Citations (1)
Title |
---|
See also references of WO2011089767A1 * |
Also Published As
Publication number | Publication date |
---|---|
US8778730B2 (en) | 2014-07-15 |
US20120298988A1 (en) | 2012-11-29 |
EP2528100A4 (en) | 2014-03-12 |
WO2011089767A1 (en) | 2011-07-28 |
JP5559210B2 (en) | 2014-07-23 |
EP2528100B1 (en) | 2016-07-20 |
CN102714221A (en) | 2012-10-03 |
JPWO2011089767A1 (en) | 2013-05-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2528100B1 (en) | Process for production of circuit board | |
JP6817398B2 (en) | Display device | |
CN107636841B (en) | Active matrix substrate, method of manufacturing the same, and display device using the same | |
KR102089074B1 (en) | Array Substrate for Display Panel and Manufacturing Method for the same | |
JP5244439B2 (en) | Transparent conductive film, display device, and manufacturing method thereof | |
US9343487B2 (en) | Thin film transistor substrate and manufacturing method thereof | |
CN109661696B (en) | Active matrix substrate and method for manufacturing the same | |
US9159867B2 (en) | Array substrate, manufacturing method thereof, and display device | |
US9911765B2 (en) | Thin film transistor substrate including thin film transistor formed of oxide semiconductor and method for manufacturing the same | |
WO2014034617A1 (en) | Circuit board and display device | |
US20150179669A1 (en) | Method of manufacturing array substrate, array substrate and display device | |
TW201607005A (en) | Semiconductor device, manufacturing method thereof and liquid crystal display device | |
US10825843B2 (en) | Active matrix substrate and method for producing same | |
WO2014042058A1 (en) | Circuit substrate, manufacturing method thereof and display device | |
US9612498B2 (en) | Semiconductor device and display device | |
WO2011114595A1 (en) | Substrate for display panel, manufacturing method of same, display panel, and display device | |
JP6482256B2 (en) | Thin film transistor substrate and liquid crystal display device | |
KR102556961B1 (en) | Photo Mask and Display Panel using thereof and Method for Fabricating Display Panel using the thereof | |
WO2011104938A1 (en) | Method for producing circuit board, circuit board and display device | |
US20140252343A1 (en) | Thin-film transistor active device and method for manufacturing same | |
US8865517B2 (en) | Method for manufacturing thin-film transistor active device and thin-film transistor active device manufactured with same | |
US20140146259A1 (en) | Lcd device, array substrate, and method for manufacturing the array substrate | |
CN109491157B (en) | Method for manufacturing substrate for display panel | |
KR102142477B1 (en) | Array substrate and method of fabricating the same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20120802 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
DAX | Request for extension of the european patent (deleted) | ||
A4 | Supplementary search report drawn up and despatched |
Effective date: 20140212 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 27/12 20060101ALN20140206BHEP Ipc: G09F 9/30 20060101ALI20140206BHEP Ipc: H01L 23/52 20060101ALI20140206BHEP Ipc: H01L 21/3213 20060101ALI20140206BHEP Ipc: H01L 21/336 20060101ALI20140206BHEP Ipc: H01L 21/28 20060101ALI20140206BHEP Ipc: G02F 1/1368 20060101ALI20140206BHEP Ipc: H01L 21/3205 20060101ALI20140206BHEP Ipc: H01L 29/786 20060101AFI20140206BHEP |
|
17Q | First examination report despatched |
Effective date: 20150223 |
|
GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: G02F 1/1368 20060101ALI20160120BHEP Ipc: H01L 21/3213 20060101ALI20160120BHEP Ipc: H01L 21/28 20060101ALI20160120BHEP Ipc: H01L 29/45 20060101ALN20160120BHEP Ipc: H01L 29/786 20060101AFI20160120BHEP Ipc: H01L 23/52 20060101ALI20160120BHEP Ipc: H01L 21/336 20060101ALI20160120BHEP Ipc: G09F 9/30 20060101ALI20160120BHEP Ipc: H01L 27/12 20060101ALN20160120BHEP Ipc: H01L 21/02 20060101ALN20160120BHEP Ipc: H01L 21/3205 20060101ALI20160120BHEP Ipc: H01L 29/66 20060101ALN20160120BHEP |
|
INTG | Intention to grant announced |
Effective date: 20160209 |
|
GRAS | Grant fee paid |
Free format text: ORIGINAL CODE: EPIDOSNIGR3 |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR |
|
REG | Reference to a national code |
Ref country code: GB Ref legal event code: FG4D |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: EP |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: FG4D |
|
REG | Reference to a national code |
Ref country code: AT Ref legal event code: REF Ref document number: 814694 Country of ref document: AT Kind code of ref document: T Effective date: 20160815 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R096 Ref document number: 602010034952 Country of ref document: DE |
|
REG | Reference to a national code |
Ref country code: NL Ref legal event code: FP |
|
REG | Reference to a national code |
Ref country code: LT Ref legal event code: MG4D |
|
REG | Reference to a national code |
Ref country code: AT Ref legal event code: MK05 Ref document number: 814694 Country of ref document: AT Kind code of ref document: T Effective date: 20160720 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: LT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: HR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: FI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: NO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20161020 Ref country code: RS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: IS Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20161120 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: GR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20161021 Ref country code: PT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20161121 Ref country code: ES Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: SE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: PL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: AT Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: LV Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: BE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20160720 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R097 Ref document number: 602010034952 Country of ref document: DE |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: EE Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: RO Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 |
|
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: BG Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20161020 Ref country code: SK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: DK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: SM Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: CZ Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
26N | No opposition filed |
Effective date: 20170421 |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20161025 |
|
REG | Reference to a national code |
Ref country code: IE Ref legal event code: MM4A |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST Effective date: 20170630 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20161031 Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20161102 Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20161025 Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20161031 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: SI Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: LU Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20161025 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20161025 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: CY Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: HU Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO Effective date: 20101025 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: MK Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: MT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20161031 Ref country code: MC Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 Ref country code: TR Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: AL Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT Effective date: 20160720 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: NL Payment date: 20181019 Year of fee payment: 9 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20181019 Year of fee payment: 9 |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R119 Ref document number: 602010034952 Country of ref document: DE |
|
REG | Reference to a national code |
Ref country code: NL Ref legal event code: MM Effective date: 20191101 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20200501 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: NL Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20191101 |