EP2507402A4 - Linear deposition source - Google Patents

Linear deposition source

Info

Publication number
EP2507402A4
EP2507402A4 EP10833707.2A EP10833707A EP2507402A4 EP 2507402 A4 EP2507402 A4 EP 2507402A4 EP 10833707 A EP10833707 A EP 10833707A EP 2507402 A4 EP2507402 A4 EP 2507402A4
Authority
EP
European Patent Office
Prior art keywords
deposition source
linear deposition
linear
source
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP10833707.2A
Other languages
German (de)
French (fr)
Other versions
EP2507402A1 (en
Inventor
Chad Conroy
Scott Wayne Priddy
Jacob A Dahlstrom
Rich Bresnahan
David William Gotthold
John Patrin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Veeco Instruments Inc
Original Assignee
Veeco Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US12/628,189 external-priority patent/US20100159132A1/en
Application filed by Veeco Instruments Inc filed Critical Veeco Instruments Inc
Priority claimed from PCT/US2010/039085 external-priority patent/WO2011065998A1/en
Publication of EP2507402A1 publication Critical patent/EP2507402A1/en
Publication of EP2507402A4 publication Critical patent/EP2507402A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L59/00—Thermal insulation in general
    • F16L59/02—Shape or form of insulating materials, with or without coverings integral with the insulating materials
    • F16L59/029—Shape or form of insulating materials, with or without coverings integral with the insulating materials layered

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Physical Vapour Deposition (AREA)
EP10833707.2A 2009-11-30 2010-06-17 Linear deposition source Withdrawn EP2507402A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/628,189 US20100159132A1 (en) 2008-12-18 2009-11-30 Linear Deposition Source
PCT/US2010/039085 WO2011065998A1 (en) 2008-12-18 2010-06-17 Linear deposition source

Publications (2)

Publication Number Publication Date
EP2507402A1 EP2507402A1 (en) 2012-10-10
EP2507402A4 true EP2507402A4 (en) 2013-10-23

Family

ID=44935927

Family Applications (2)

Application Number Title Priority Date Filing Date
EP10833707.2A Withdrawn EP2507402A4 (en) 2009-11-30 2010-06-17 Linear deposition source
EP10833708.0A Withdrawn EP2507403A4 (en) 2009-11-30 2010-06-17 Linear deposition source

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP10833708.0A Withdrawn EP2507403A4 (en) 2009-11-30 2010-06-17 Linear deposition source

Country Status (4)

Country Link
EP (2) EP2507402A4 (en)
KR (2) KR20120104559A (en)
CN (2) CN102686765A (en)
TW (2) TW201118961A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102150436B1 (en) * 2013-12-20 2020-09-01 엘지디스플레이 주식회사 Evaporation source and vapor deposition apparatus having the same
DE102014007522A1 (en) * 2014-05-23 2015-11-26 Manz Ag Carrier arrangement for an evaporator source
KR102260617B1 (en) * 2014-07-07 2021-06-07 (주)선익시스템 Thin Film Deposition Apparatus with Evaporation Source Installed Multi-Crucible
WO2016006740A1 (en) * 2014-07-07 2016-01-14 주식회사 선익시스템 Thin film deposition apparatus having plurality of crucibles
KR102260572B1 (en) * 2014-07-07 2021-06-07 (주)선익시스템 Thin Film Deposition Apparatus with Multiple Evaporation Source
KR102260575B1 (en) * 2014-07-07 2021-06-07 (주)선익시스템 Thin Film Deposition Apparatus with Multiple Evaporation Source
WO2017008838A1 (en) * 2015-07-13 2017-01-19 Applied Materials, Inc. Evaporation source.
KR102369676B1 (en) 2017-04-10 2022-03-04 삼성디스플레이 주식회사 Apparatus and method for manufacturing a display apparatus
KR20230030645A (en) * 2020-06-29 2023-03-06 어플라이드 머티어리얼스, 인코포레이티드 Nozzle assembly, evaporation source, and method for depositing evaporated material onto a substrate

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4401052A (en) * 1979-05-29 1983-08-30 The University Of Delaware Apparatus for continuous deposition by vacuum evaporation
US20040076810A1 (en) * 2002-10-17 2004-04-22 Ucar Carbon Company Inc. Composite high temperature insulator
US7194197B1 (en) * 2000-03-16 2007-03-20 Global Solar Energy, Inc. Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5141564A (en) * 1988-05-03 1992-08-25 The Boeing Company Mixed ternary heterojunction solar cell
EP0502565B1 (en) * 1991-03-06 1996-12-18 Ohwada Carbon Industrial Co., Ltd. Carbon composite material reinforced with carbon fiber and inorganic fiber
DE19848177A1 (en) * 1998-10-20 2000-04-27 Leybold Systems Gmbh Vapor deposition of release agent for capacitor film has a closed hollow body evaporation vessel connected to the jet body with a shut off device
DE10025628A1 (en) * 2000-05-24 2001-11-29 Sgl Carbon Ag Unwindable components made of fiber composite materials, processes for their production and their use
US6562405B2 (en) * 2001-09-14 2003-05-13 University Of Delaware Multiple-nozzle thermal evaporation source
US20030168013A1 (en) * 2002-03-08 2003-09-11 Eastman Kodak Company Elongated thermal physical vapor deposition source with plural apertures for making an organic light-emitting device
WO2004105095A2 (en) * 2003-05-16 2004-12-02 Svt Associates Inc. Thin-film deposition evaporator
JP2006057173A (en) * 2004-08-24 2006-03-02 Tohoku Pioneer Corp Film deposition source, vacuum film deposition apparatus and method for producing organic el panel
KR20060060994A (en) * 2004-12-01 2006-06-07 삼성에스디아이 주식회사 Deposition source and deposition apparatus therewith
KR100671673B1 (en) * 2005-03-09 2007-01-19 삼성에스디아이 주식회사 Device and Method for vacuum plating by Multiple evaporation
JP4474324B2 (en) * 2005-04-28 2010-06-02 パナソニック株式会社 Deposition equipment
JP4894193B2 (en) * 2005-08-09 2012-03-14 ソニー株式会社 Vapor deposition apparatus and display device manufacturing system
JP2007066564A (en) * 2005-08-29 2007-03-15 Toshiba Matsushita Display Technology Co Ltd Manufacturing method and manufacturing device of organic el display device
JP4767000B2 (en) * 2005-11-28 2011-09-07 日立造船株式会社 Vacuum deposition equipment
KR100980729B1 (en) * 2006-07-03 2010-09-07 주식회사 야스 Multiple nozzle evaporator for vacuum thermal evaporation
WO2009134041A2 (en) * 2008-04-29 2009-11-05 Sunic System. Ltd. Evaporator and vacuum deposition apparatus having the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4401052A (en) * 1979-05-29 1983-08-30 The University Of Delaware Apparatus for continuous deposition by vacuum evaporation
US7194197B1 (en) * 2000-03-16 2007-03-20 Global Solar Energy, Inc. Nozzle-based, vapor-phase, plume delivery structure for use in production of thin-film deposition layer
US20040076810A1 (en) * 2002-10-17 2004-04-22 Ucar Carbon Company Inc. Composite high temperature insulator

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2011065998A1 *

Also Published As

Publication number Publication date
KR20120104559A (en) 2012-09-21
KR20120101425A (en) 2012-09-13
EP2507402A1 (en) 2012-10-10
EP2507403A4 (en) 2013-10-23
CN102712993A (en) 2012-10-03
TW201118961A (en) 2011-06-01
CN102686765A (en) 2012-09-19
EP2507403A1 (en) 2012-10-10
TW201142055A (en) 2011-12-01

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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A4 Supplementary search report drawn up and despatched

Effective date: 20130924

RIC1 Information provided on ipc code assigned before grant

Ipc: C23C 14/26 20060101ALI20130918BHEP

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Effective date: 20140423