EP2485887B1 - Articulated-head press - Google Patents

Articulated-head press Download PDF

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Publication number
EP2485887B1
EP2485887B1 EP10776771.7A EP10776771A EP2485887B1 EP 2485887 B1 EP2485887 B1 EP 2485887B1 EP 10776771 A EP10776771 A EP 10776771A EP 2485887 B1 EP2485887 B1 EP 2485887B1
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EP
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Prior art keywords
head
press
support
spherical joint
spherical
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EP10776771.7A
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German (de)
French (fr)
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EP2485887A1 (en
Inventor
Gilbert Cavazza
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S E T
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S E T
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B30—PRESSES
    • B30B—PRESSES IN GENERAL
    • B30B15/00—Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/06—Platens or press rams
    • B30B15/068—Drive connections, e.g. pivotal

Definitions

  • the present invention relates to a press for the treatment of parts. It is particularly well suited, although not exclusively, to industrial applications for which high loads are necessary, such as for example the manufacture of microelectronic circuits.
  • Such an annular spherical joint is formed of a female part which cooperates, with adjustment, with a male part.
  • the female part is in the form of a concave spherical inner bearing ring which is mounted on the slider.
  • the male part has the shape of a convex spherical outer span ring which is mounted on the press head.
  • the annular spherical joint supports small loads, it is, on the other hand, not able to withstand high loads, the ring of the spherical joint deforming under pressure. In the latter case, the centering of the press head relative to the slider is no longer ensured.
  • the present invention aims to overcome this disadvantage and, in particular, to provide a press capable of withstanding high loads without deformation.
  • the central articulation avoids deformation of the annular hinge, when applying a high load predefined on one or more parts to be treated.
  • the predefined load is distributed at the two annular and central spherical joints and not only at the single annular joint. The centering of the press head relative to the slider is thus ensured, whatever the load applied.
  • the increase in mass and volume is reduced in comparison with that which would have accompanied the implementation of a single spherical joint formed from, for example, a half-sphere full bulky and heavy.
  • said annular and central spherical joints are concentric.
  • first planar reference face associated with said orientable head.
  • first reference plane face may be a plane contact face of the orientable head opposite the support or even the face of a workpiece disposed on the contact face of the head.
  • the press further comprises means for obtaining, without contact, a parallelism between a first reference face, associated with said orientable head, and a second reference face, associated with said support.
  • Said means for obtaining a parallelism may comprise at least two controllable actuators, which are mounted on said slider and which are able to rotate said steerable head.
  • the figure 1 schematically represents a cross-sectional view of a press according to an embodiment of the present invention.
  • the figure 2 is a schematic cross section of a variant according to the invention of the press shown in FIG. figure 1 .
  • the figure 3 is a schematic sectional view along the line III-III of the slide of the press illustrated on the figure 2 .
  • FIG. 1 there is shown a press 1A for the treatment of parts according to an embodiment of the present invention.
  • the press can be either a low-load press or a medium or heavy load press.
  • the steerable head 6 may also include a workpiece (not shown) opposite that arranged on the support 2.
  • a workpiece (not shown) opposite that arranged on the support 2.
  • silicon discs As an illustrative but nonlimiting example, there may be mentioned, as parts to be treated, silicon discs.
  • the annular spherical joint 7 makes it possible to obtain a parallelism between a first reference plane face (for example the contact face 8 or the face of a workpiece disposed on the contact face 8) and a second planar face of reference (for example the support face 3 or the face of a workpiece carried by the support face 3), during the contact of these two reference faces, prior to the application of a predetermined load.
  • the parallelism of the two reference faces is thus obtained before a stiffening of the spherical joints 7 and 9.
  • the annular spherical joint 7 is formed of a female portion 7A which cooperates, with adjustment, with a male portion 7B.
  • the female part 7A is in the form of a concave spherical inner bearing ring which is mounted on the slider 5.
  • the male part 7B has the shape of a convex spherical outer bearing ring which is mounted on the press head 6.
  • the center O of the annular articulation 7 defines a pivot point around which the pivoting head 6 can pivot.
  • the slider 5 and the press head 6 comprise respective complementary means 9A and 9B which cooperate directly with one another to form a central spherical articulation 9 which associates with the annular spherical articulation 7 to ensure the pivoting of said press head 6.
  • the complementary means comprise a female part 9A and a male part 9B, which cooperate with each other with adjustment.
  • the male part 9B is formed of a spherical nipple, mounted on the press head 6, and the female part 9A is in the form of a recess with a spherical bottom formed in the end of the slide 5 facing the support 2.
  • the spherical nipple 9B engages in the recess 9A to form the central spherical joint 9.
  • the two spherical joints 7 and 9 are concentric, the center O of the central spherical articulation 9 coinciding with that of the annular spherical articulation 7.
  • the presence of the spherical nipple 9A increases the contact area between the slider 5 and the press head 6, which reduces the forces on the ring 7A. This prevents a deformation of the latter during the application of a heavy load.
  • the radius R1 of the central spherical joint 9 is at most equal to the radius R2 of the spherical joint 7.
  • the press 1B is similar to that described in connection with the figure 1 , except that it comprises means for obtaining a parallelism between a first reference face (the contact face 8, the face of a workpiece disposed on the contact face 8, etc.) and the second reference face (the support face 3, the face of a workpiece carried by the support face 3, etc.), prior to contacting the orientable head 6 and the support 2.
  • a first reference face the contact face 8, the face of a workpiece disposed on the contact face 8, etc.
  • the second reference face the support face 3, the face of a workpiece carried by the support face 3, etc.
  • these means are in the form of two controllable actuators 10 coupled to two pusher elements 11, respectively mounted at the periphery of the slider 5.
  • the pusher elements 11 are arranged vis-à-vis the actuators 10, diametrically opposite to the reference axis XX. They are also separated from each other by a 90 ° angle.
  • Each actuator 10 comprises a finger 10A mounted axially movable in a tubular guide 10B.
  • the movement of the finger 10A is controlled by control means (not shown in the figures).
  • One of the ends of the finger 10A is in contact with the press head 6.
  • the control means of the actuators 10 are independent and may optionally be associated with an optical alignment device by laser sensors (not shown in the figures).
  • the pushing elements 11 respectively comprise a bearing finger 11A mounted to be elastically mobile in a tubular guide 11B.
  • the ends of the support finger 11A are respectively in contact with the press head 6 and a compression spring 11C housed in the tubular guide 11B. This compression spring 11C exerts an action on the support finger 11A, so that it remains in contact with the press head 6.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Presses And Accessory Devices Thereof (AREA)
  • Control Of Presses (AREA)

Description

La présente invention concerne une presse destinée au traitement de pièces. Elle est particulièrement bien adaptée, quoique non exclusivement, aux applications industrielles pour lesquelles des fortes charges sont nécessaires, telles que par exemple la fabrication de circuits micro-électroniques.The present invention relates to a press for the treatment of parts. It is particularly well suited, although not exclusively, to industrial applications for which high loads are necessary, such as for example the manufacture of microelectronic circuits.

Le document US 2001/0027727 , conforme au préambule de la revendication 1, et le document US 2007/0105491 décrivent de telles presses.The document US 2001/0027727 , in accordance with the preamble of claim 1, and the document US 2007/0105491 describe such presses.

On connait déjà des presses à faible charge qui comportent :

  • un support de pièces à traiter ;
  • un coulisseau mobile transversalement audit support ; et
  • une tête de presse orientable articulée audit coulisseau par l'intermédiaire d'une articulation sphérique annulaire, ladite tête étant destinée à être appliquée sur ledit support de pièces par déplacement dudit coulisseau.
We already know low-load presses that include:
  • a support of parts to be treated;
  • a slide movable transversely to said support; and
  • an orientable press head articulated to said slide by means of an annular spherical joint, said head being intended to be applied to said support pieces by displacement of said slide.

Une telle articulation sphérique annulaire est formée d'une partie femelle qui coopère, avec ajustement, avec une partie mâle. La partie femelle se présente sous la forme d'une bague à portée interne sphérique concave qui est montée sur le coulisseau. La partie mâle a la forme d'un anneau à portée externe sphérique convexe qui est monté sur la tête de presse.Such an annular spherical joint is formed of a female part which cooperates, with adjustment, with a male part. The female part is in the form of a concave spherical inner bearing ring which is mounted on the slider. The male part has the shape of a convex spherical outer span ring which is mounted on the press head.

Bien que l'articulation sphérique annulaire supporte de faibles charges, elle se révèle, en revanche, incapable de résister à des charges élevées, la bague de l'articulation sphérique se déformant sous la pression. Dans ce dernier cas, le centrage de la tête de presse par rapport au coulisseau n'est plus assuré.Although the annular spherical joint supports small loads, it is, on the other hand, not able to withstand high loads, the ring of the spherical joint deforming under pressure. In the latter case, the centering of the press head relative to the slider is no longer ensured.

La présente invention a pour objet de remédier à cet inconvénient et, notamment, de fournir une presse apte à résister à des fortes charges sans déformation.The present invention aims to overcome this disadvantage and, in particular, to provide a press capable of withstanding high loads without deformation.

A cette fin, selon l'invention, la presse destinée au traitement de pièces du type comportant les caractéristiques de la revendication 1 est proposée.To this end, according to the invention, the press for the treatment of parts of the type comprising the features of claim 1 is proposed.

Ainsi, grâce à l'invention, l'articulation centrale permet d'éviter une déformation de l'articulation annulaire, lors de l'application d'une charge élevée prédéfinie sur une ou plusieurs pièces à traiter. En effet, la charge prédéfinie est répartie au niveau des deux articulations sphériques annulaire et centrale et non plus uniquement au niveau de la seule articulation annulaire. Le centrage de la tête de presse par rapport au coulisseau est ainsi assuré, quelle que soit la charge appliquée.Thus, thanks to the invention, the central articulation avoids deformation of the annular hinge, when applying a high load predefined on one or more parts to be treated. Indeed, the predefined load is distributed at the two annular and central spherical joints and not only at the single annular joint. The centering of the press head relative to the slider is thus ensured, whatever the load applied.

En outre, grâce à l'invention, l'augmentation de masse et de volume est réduite en comparaison avec celle qui aurait accompagnée la mise en oeuvre d'une unique articulation sphérique formée à partir, par exemple, d'une demi-sphère pleine volumineuse et lourde.In addition, thanks to the invention, the increase in mass and volume is reduced in comparison with that which would have accompanied the implementation of a single spherical joint formed from, for example, a half-sphere full bulky and heavy.

De préférence, lesdites articulations sphériques annulaire et centrale sont concentriques.Preferably, said annular and central spherical joints are concentric.

En outre, le centre desdites articulations sphériques annulaire et centrale est localisé sur une première face plane de référence associée à ladite tête orientable. Par exemple, la première face plane de référence peut être une face plane de contact de la tête orientable en regard du support ou bien encore la face d'une pièce à traiter disposée sur la face de contact de la tête.In addition, the center of said annular and central spherical joints is located on a first planar reference face associated with said orientable head. For example, the first reference plane face may be a plane contact face of the orientable head opposite the support or even the face of a workpiece disposed on the contact face of the head.

Dans un mode de réalisation particulier de la présente invention, la presse comporte en outre des moyens pour obtenir, sans contact, un parallélisme entre une première face de référence, associée à ladite tête orientable, et une seconde face de référence, associée audit support.In a particular embodiment of the present invention, the press further comprises means for obtaining, without contact, a parallelism between a first reference face, associated with said orientable head, and a second reference face, associated with said support.

Ainsi, on peut réaliser le parallélisme entre les première et seconde faces de référence préalablement à l'application d'une charge déterminée par la presse.Thus, one can achieve the parallelism between the first and second reference faces prior to the application of a load determined by the press.

Lesdits moyens pour obtenir un parallélisme peuvent comporter au moins deux actionneurs commandables, qui sont montés sur ledit coulisseau et qui sont aptes à faire pivoter ladite tête orientable.Said means for obtaining a parallelism may comprise at least two controllable actuators, which are mounted on said slider and which are able to rotate said steerable head.

Les figures du dessin annexé feront bien comprendre comment l'invention peut être réalisée. Sur ces figures, des références identiques désignent des éléments semblables.The figures of the appended drawing will make it clear how the invention can be realized. In these figures, identical references designate similar elements.

La figure 1 représente, de façon schématique, une vue en coupe transversale d'une presse conforme à un mode de réalisation de la présente invention.The figure 1 schematically represents a cross-sectional view of a press according to an embodiment of the present invention.

La figure 2 est une coupe transversale schématique d'une variante conforme à l'invention de la presse représentée en figure 1.The figure 2 is a schematic cross section of a variant according to the invention of the press shown in FIG. figure 1 .

La figure 3 est une vue schématique en coupe, selon la ligne III-III, du coulisseau de la presse illustrée sur la figure 2.The figure 3 is a schematic sectional view along the line III-III of the slide of the press illustrated on the figure 2 .

Sur la figure 1, on a représenté une presse 1A destinée au traitement de pièces conforme à un mode de réalisation de la présente invention.On the figure 1 , there is shown a press 1A for the treatment of parts according to an embodiment of the present invention.

Dans le cadre de la présente invention, la presse peut aussi bien être une presse à faible charge qu'une presse à moyenne ou forte charge.In the context of the present invention, the press can be either a low-load press or a medium or heavy load press.

De façon usuelle, la presse comporte :

  • un support 2 de pièces à traiter qui peut être fixe ou, au contraire, mobile. Ce support 2 présente une face plane de support 3 apte à recevoir une pièce à traiter 4 ;
  • un coulisseau 5 mobile transversalement au support 2. Le déplacement du coulisseau est symbolisé par la double flèche D ; et
  • une tête de presse orientable 6 articulée au coulisseau 5 par l'intermédiaire d'une articulation sphérique annulaire 7. Elle présente une face plane de contact 8. Cette tête orientable 6 est destinée à être appliquée sur le support de pièces 2 par déplacement du coulisseau 5.
In the usual way, the press comprises:
  • a support 2 of workpieces that can be fixed or, conversely, mobile. This support 2 has a flat support surface 3 adapted to receive a workpiece 4;
  • a slide 5 movable transversely to the support 2. The movement of the slide is symbolized by the double arrow D; and
  • an articulated press head 6 articulated to the slide 5 by means of an annular spherical articulation 7. It has a planar contact face 8. This orientable head 6 is intended to be applied to the support of parts 2 by moving the slide 5.

La tête orientable 6 peut également comporter une pièce à traiter (non représentée) en regard de celle disposée sur le support 2. A titre d'exemple illustratif mais non limitatif, on peut citer, comme pièces à traiter, des disques de silicium.The steerable head 6 may also include a workpiece (not shown) opposite that arranged on the support 2. As an illustrative but nonlimiting example, there may be mentioned, as parts to be treated, silicon discs.

L'articulation sphérique annulaire 7 permet d'obtenir un parallélisme entre une première face plane de référence (par exemple la face de contact 8 ou la face d'une pièce à traiter disposée sur la face de contact 8) et une seconde face plane de référence (par exemple la face de support 3 ou la face d'une pièce à traiter portée par la face de support 3), lors du contact de ces deux faces de référence, préalablement à l'application d'une charge prédéterminée. Le parallélisme des deux faces de référence est ainsi obtenu avant une rigidification des articulations sphériques 7 et 9.The annular spherical joint 7 makes it possible to obtain a parallelism between a first reference plane face (for example the contact face 8 or the face of a workpiece disposed on the contact face 8) and a second planar face of reference (for example the support face 3 or the face of a workpiece carried by the support face 3), during the contact of these two reference faces, prior to the application of a predetermined load. The parallelism of the two reference faces is thus obtained before a stiffening of the spherical joints 7 and 9.

Comme le montre la figure 1, l'articulation sphérique annulaire 7 est formée d'une partie femelle 7A qui coopère, avec ajustement, avec une partie mâle 7B. La partie femelle 7A se présente sous la forme d'une bague à portée interne sphérique concave qui est montée sur le coulisseau 5. La partie mâle 7B a la forme d'un anneau à portée externe sphérique convexe qui est monté sur la tête de presse 6.As shown in figure 1 , the annular spherical joint 7 is formed of a female portion 7A which cooperates, with adjustment, with a male portion 7B. The female part 7A is in the form of a concave spherical inner bearing ring which is mounted on the slider 5. The male part 7B has the shape of a convex spherical outer bearing ring which is mounted on the press head 6.

Le centre O de l'articulation annulaire 7 définit un point de pivotement autour duquel peut pivoter la tête orientable 6.The center O of the annular articulation 7 defines a pivot point around which the pivoting head 6 can pivot.

Selon l'invention, comme le montre la figure 1, le coulisseau 5 et la tête de presse 6 comportent des moyens complémentaires respectifs 9A et 9B qui coopèrent directement l'un avec l'autre pour former une articulation sphérique centrale 9 qui s'associe à l'articulation sphérique annulaire 7 pour assurer le pivotement de ladite tête de presse 6.According to the invention, as shown in figure 1 , the slider 5 and the press head 6 comprise respective complementary means 9A and 9B which cooperate directly with one another to form a central spherical articulation 9 which associates with the annular spherical articulation 7 to ensure the pivoting of said press head 6.

Les moyens complémentaires comportent une partie femelle 9A et une partie mâle 9B, qui coopèrent l'une avec l'autre avec ajustement. La partie mâle 9B est formée d'un téton sphérique, monté sur la tête de presse 6, et la partie femelle 9A se présente sous la forme d'un évidement à fond sphérique pratiqué dans le bout du coulisseau 5 orienté vers le support 2. Le téton sphérique 9B s'engage dans l'évidement 9A pour former l'articulation sphérique centrale 9.The complementary means comprise a female part 9A and a male part 9B, which cooperate with each other with adjustment. The male part 9B is formed of a spherical nipple, mounted on the press head 6, and the female part 9A is in the form of a recess with a spherical bottom formed in the end of the slide 5 facing the support 2. The spherical nipple 9B engages in the recess 9A to form the central spherical joint 9.

Dans le cadre de l'invention, les deux articulations sphériques 7 et 9 sont concentriques, le centre O de l'articulation sphérique centrale 9 coïncidant avec celui de l'articulation sphérique annulaire 7.In the context of the invention, the two spherical joints 7 and 9 are concentric, the center O of the central spherical articulation 9 coinciding with that of the annular spherical articulation 7.

La présence du téton sphérique 9A augmente la surface de contact entre le coulisseau 5 et la tête de presse 6, ce qui permet de réduire les efforts sur la bague 7A. On évite ainsi une déformation de cette dernière lors de l'application d'une forte charge.The presence of the spherical nipple 9A increases the contact area between the slider 5 and the press head 6, which reduces the forces on the ring 7A. This prevents a deformation of the latter during the application of a heavy load.

On notera que, dans ce mode de réalisation, le rayon R1 de l'articulation sphérique centrale 9 est au plus égal au rayon R2 de l'articulation sphérique 7.Note that, in this embodiment, the radius R1 of the central spherical joint 9 is at most equal to the radius R2 of the spherical joint 7.

Dans une variante du mode de réalisation conforme à l'invention, illustrée sur la figure 2, la presse 1B est semblable à celle décrite en relation avec la figure 1, excepté qu'elle comporte des moyens pour obtenir un parallélisme entre une première face de référence (la face de contact 8, la face d'une pièce à traiter disposée sur la face de contact 8, etc.) et la seconde face de référence (la face de support 3, la face d'une pièce à traiter portée par la face de support 3, etc.), préalablement à la mise en contact de la tête orientable 6 et du support 2.In a variant of the embodiment according to the invention, illustrated on the figure 2 , the press 1B is similar to that described in connection with the figure 1 , except that it comprises means for obtaining a parallelism between a first reference face (the contact face 8, the face of a workpiece disposed on the contact face 8, etc.) and the second reference face (the support face 3, the face of a workpiece carried by the support face 3, etc.), prior to contacting the orientable head 6 and the support 2.

Comme le montrent les figures 2 et 3, ces moyens se présentent sous la forme de deux actionneurs commandables 10 couplés à deux éléments poussoirs 11, respectivement montés en périphérie du coulisseau 5. Les actionneurs 10, disposés à égale distance d'un axe de référence X-X passant par le centre O, sont écartés l'un de l'autre d'un angle de 90°. Les éléments poussoirs 11 sont agencés en vis-à-vis des actionneurs 10, de façon diamétralement opposée par rapport à l'axe de référence X-X. Ils sont donc également écartés l'un de l'autre d'un angle de 90°.As shown by Figures 2 and 3 these means are in the form of two controllable actuators 10 coupled to two pusher elements 11, respectively mounted at the periphery of the slider 5. The actuators 10, arranged equidistant from a reference axis XX passing through the center O, are spaced from each other by an angle of 90 °. The pusher elements 11 are arranged vis-à-vis the actuators 10, diametrically opposite to the reference axis XX. They are also separated from each other by a 90 ° angle.

Chaque actionneur 10 comprend un doigt 10A monté axialement mobile dans un guide tubulaire 10B. Le déplacement du doigt 10A est contrôlé par des moyens de commande (non représentés sur les figures). Une des extrémités du doigt 10A est au contact de la tête de presse 6.Each actuator 10 comprises a finger 10A mounted axially movable in a tubular guide 10B. The movement of the finger 10A is controlled by control means (not shown in the figures). One of the ends of the finger 10A is in contact with the press head 6.

Les moyens de commande des actionneurs 10 sont indépendants et peuvent éventuellement être associés à un dispositif d'alignement optique par capteurs laser (non représenté sur les figures).The control means of the actuators 10 are independent and may optionally be associated with an optical alignment device by laser sensors (not shown in the figures).

Par ailleurs, les éléments poussoirs 11 comportent respectivement un doigt d'appui 11A monté élastiquement mobile dans un guide tubulaire 11B. Les extrémités du doigt d'appui 11A sont en contact respectivement avec la tête de presse 6 et un ressort de compression 11C logé dans le guide tubulaire 11B. Ce ressort de compression 11C exerce une action sur le doigt d'appui 11A, de sorte que celui-ci reste en contact avec la tête de presse 6.Furthermore, the pushing elements 11 respectively comprise a bearing finger 11A mounted to be elastically mobile in a tubular guide 11B. The ends of the support finger 11A are respectively in contact with the press head 6 and a compression spring 11C housed in the tubular guide 11B. This compression spring 11C exerts an action on the support finger 11A, so that it remains in contact with the press head 6.

En outre, l'action des doigts d'appui 11A sur la tête de presse 6 assure un contact permanent des doigts 10A avec ladite tête 6.In addition, the action of the bearing fingers 11A on the press head 6 ensures a permanent contact of the fingers 10A with said head 6.

Ainsi, en commandant le déplacement des doigts 10A des actionneurs 10 (et donc l'inclinaison de la première face de référence selon respectivement des axes d'inclinaison Y-Y et Z-Z, orthogonaux à l'axe de référence X-X), on peut ajuster, sans contact, le parallélisme entre la première face de référence et la seconde face de référence.Thus, by controlling the displacement of the fingers 10A of the actuators 10 (and therefore the inclination of the first reference face respectively according to the inclination axes YY and ZZ, orthogonal to the reference axis XX), it is possible to adjust, without contact, the parallelism between the first reference face and the second reference face.

Claims (5)

  1. A press for processing parts of the type comprising:
    - a support (2) for parts to be processed;
    - a sliding member which can be moved transversely to said support (2); and
    - a swivelling press head (6) which is jointed to said sliding member (5) by means of at least one annular spherical joint (7), said head (6) being intended to be applied to said part support (2) by movement (D) of said sliding member (5),
    wherein said sliding member (5) and said press head (6) comprise respective complementary means (9A, 9B) cooperating directly with each other, in order to form a central spherical joint (9) being associated with said annular spherical joint (7) in order to allow for the pivoting of said press head (6);
    characterised in that the annular spherical joint (7) is formed by a female portion (7A) which adjustably cooperates with a male portion (7B), the female portion (7A) being in the form of a ring with a concave spherical internal bearing which is mounted on the sliding member (5), the male portion (7B) is in the form of an annulus with a convex spherical external bearing which is mounted on the press head (6);
    wherein the complementary means comprise a female portion (9A) and a male portion (9B) adjustably cooperating with each other, the male portion (9B) being formed by a spherical stud, which is mounted on the press head (6), and the female portion (9A) being in the form of a recess with a spherical bottom arranged in the tip of the sliding member (5) turned to the support (2), the spherical stud (9B) engaging in the recess (9A) in order to form the central spherical joint (9).
  2. The press according to claim 1,
    characterised in that said annular spherical joint (7) and central spherical joint (9) are concentric.
  3. The press according to claim 2,
    characterised in that the centre (O) of said annular spherical joint (7) and central spherical joint (9) is located on a first planar reference face (8) associated with said swivelling head (6).
  4. The press according any one of the claims 1 to 3, characterised in that it further comprises means (10) for obtaining, without contact, a parallelism between a first reference face associated with said swivelling head (6), and a second reference face associated with said support (2).
  5. The press according to claim 4,
    characterised in that the means for obtaining a parallelism comprise at least two controllable actuators (10) which are mounted on said sliding member (5) and which are capable of causing said swivelling head (6) to pivot.
EP10776771.7A 2009-10-08 2010-09-30 Articulated-head press Active EP2485887B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0904804A FR2951106B1 (en) 2009-10-08 2009-10-08 ARTICULATED HEAD PRESS
PCT/FR2010/052065 WO2011042643A1 (en) 2009-10-08 2010-09-30 Articulated-head press

Publications (2)

Publication Number Publication Date
EP2485887A1 EP2485887A1 (en) 2012-08-15
EP2485887B1 true EP2485887B1 (en) 2019-08-14

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Application Number Title Priority Date Filing Date
EP10776771.7A Active EP2485887B1 (en) 2009-10-08 2010-09-30 Articulated-head press

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EP (1) EP2485887B1 (en)
JP (1) JP2013507254A (en)
DK (1) DK2485887T3 (en)
FR (1) FR2951106B1 (en)
WO (1) WO2011042643A1 (en)

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Publication number Priority date Publication date Assignee Title
CN105499967B (en) * 2015-12-29 2020-05-12 博众精工科技股份有限公司 Bush pressing mechanism

Family Cites Families (7)

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Publication number Priority date Publication date Assignee Title
JP2841334B2 (en) * 1990-07-30 1998-12-24 トーソク株式会社 Flip chip bonding equipment
JP3808924B2 (en) * 1996-01-16 2006-08-16 オリンパス株式会社 Optical element molding device with centering mechanism
JP3400299B2 (en) * 1997-06-26 2003-04-28 株式会社新川 Tool holding structure for bonding equipment
JP4547652B2 (en) * 2000-04-03 2010-09-22 Ｓｍｃ株式会社 Automatic alignment pressing device
US7156946B2 (en) * 2003-04-28 2007-01-02 Strasbaugh Wafer carrier pivot mechanism
JP4713102B2 (en) * 2004-07-29 2011-06-29 Ｓｃｉｖａｘ株式会社 Press device with tilt adjusting function, pattern forming device with tilt adjusting function, mold tilt adjusting method
JP4500183B2 (en) * 2005-02-25 2010-07-14 東芝機械株式会社 Transfer device

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Also Published As

Publication number Publication date
FR2951106B1 (en) 2012-01-06
WO2011042643A1 (en) 2011-04-14
FR2951106A1 (en) 2011-04-15
EP2485887A1 (en) 2012-08-15
DK2485887T3 (en) 2019-11-11
JP2013507254A (en) 2013-03-04

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