EP2458222B1 - Turbomolecular pump - Google Patents
Turbomolecular pump Download PDFInfo
- Publication number
- EP2458222B1 EP2458222B1 EP11008602.2A EP11008602A EP2458222B1 EP 2458222 B1 EP2458222 B1 EP 2458222B1 EP 11008602 A EP11008602 A EP 11008602A EP 2458222 B1 EP2458222 B1 EP 2458222B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- support ring
- turbomolecular pump
- accordance
- disk
- vanes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011324 bead Substances 0.000 claims description 23
- 230000007935 neutral effect Effects 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000011161 development Methods 0.000 description 7
- 230000018109 developmental process Effects 0.000 description 7
- 230000008901 benefit Effects 0.000 description 4
- 239000000835 fiber Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
Definitions
- the invention relates to a turbomolecular pump according to the preamble of claim 1.
- turbomolecular pumps have been used in vacuum technology to produce high vacuum and ultrahigh vacuum.
- the vacuum generation is based in them on a rotor with a plurality along the rotor axis staggered blade rings, between which stator side standing blade rings are arranged.
- stator blade rings are known in the art.
- so-called sheet metal stator disks are considered. These are typically made of thin sheet metal by first exposing the blades of the blade ring by punching or cutting and then turning them out of the disk plane in a subsequent forming step.
- These Blechstatorsayn are inexpensive and are particularly popular in the field of Vorvakuums in which the blades are exposed only by a few degrees from the disk plane.
- the EP 967 395 A2 shows such a BlechstatorMIC.
- each stator-side blade ring is arranged around the shaft of the rotor and usually between two rotor-side blade rings, the assemblability of forming the Blechstatorsay one stage of several, usually two, part discs to form.
- the small thickness of the sheet becomes a disadvantage: where the part discs abut each other, the thin sheets can slide over each other.
- the blades of the blade ring are then positioned incorrectly and deviate among others in the direction of the rotor axis from its desired position.
- the gap between the rotor-side and stator-side blade ring is used up. In special operating conditions, for example at high gas loads can lead to a contact between the rotor-side and stator-side components. In the worst case, the failure of the pump is the result.
- stator disc has two partial disks and that the contacting abutting edges of the partial disks are shaped in such a way that they collide in a crossed manner at least in sections. This can be effected by unscrewing at least a portion of the abutting edge of the disc plane. As a result, an overlapping of the part discs is prevented, the unscrewing can take place in the already necessary forming step in which the blades are rotated out of the disk plane. It is only a processing of the forming tool necessary.
- Fig. 1 It has a flange 4 which is releasably secured to the flange of a chamber to be evacuated. Through the suction port 6 gas is sucked into the pump and discharged through the outlet 8. In the housing 2 rotor 10 and stator 20 are angordnet, by the interaction of the conveying effect is achieved.
- the rotor comprises a shaft 12 on which a fore vacuum side rotor disk 14, a central rotor disk 16 and a high vacuum side rotor disk 18 are provided, each of the rotor disks having a blade ring consisting of a plurality of blades.
- the shaft is rotatably supported on the high vacuum side by a permanent magnet bearing 40 and on the fore vacuum side by a roller bearing 42.
- a drive 44 translates the rotor into rapid rotation of tens of thousands of revolutions per minute.
- the stator includes a forward vacuum-side stator disk 24, a middle stator disk 26, and a high-vacuum-side stator disk 28. These are axially spaced apart from each other by spacer rings 30, 32, and 34 with respect to the shaft and are alternately arranged with the rotor disks.
- the stator discs also have blade rings.
- the number of rotor and stator disks depends on the desired vacuum parameters, such as suction capacity and pressure ratio between intake opening and outlet.
- the rotor may be constructed instead of discs also known in the art bell design, also both bearings can be arranged on the vacuum side.
- the stator disc has an outer support ring 50 and an inner support ring 60.
- a first support ring portion 52 of the outer support ring is part of the first part disc 140, a second support ring portion 56 is part of the second part disc 142.
- the support ring 60 has a first inner support ring portion 62 which is part of the first part disc, and a second inner support ring portion 66 which Part of the second part of the disc is.
- Blades 48 are attached to inner and outer support ring and form a blade ring.
- the support ring sections 52 and 56 or 62 and 66 abut each other in the assembled state at abutting edges.
- the abutting edges 54 and 58 and 70 and 72 of the outer support ring portions and the abutting edges 64 and 68 and 74 and 76 of the inner support ring portions are in contact.
- the area of the support ring sections 52 and 56 is shown.
- the support ring sections define a disk plane 200.
- the blades 48 are tilted, the angle of attack 202 between the blade plane and the disk plane depending on the pressure range in which the disk is used.
- the angle of attack between the high-vacuum side and the fore-vacuum side decreases.
- the abutting edges 54 and 58 are also inclined towards the disk plane, wherein the tilting is preferably in opposite directions, so that the abutting edges intersect. This cruising turns into one Overlapping effectively prevented by very simple means, since the tilting of the abutting edges can be done in a single operation with the unscrewing of the blades from the disk plane.
- the 4 and 5 show the side view of a part disc from the direction of the shaft.
- abutting edges 54 and 70 of the outer support ring portion are inclined against the disk plane 200 while the abutting edges 64 and 74 of the inner support ring portion are in the disk plane. It is advantageous to incline both abutting edges 54 and 70 in the same direction against the disc plane. This makes it possible to make symmetrical both partial discs and at the same time to achieve protection against overlapping.
- the partial disk shown can be used both as a partial disk 140 and as a partial disk 142, so that the number of different parts in the turbo pump reduces and assembly errors are avoided.
- Fig. 5 are the abutting edges 72 and 58 of the outer support ring portion in the disk plane 200, while the abutting edges 76 and 68 of the inner support ring portion are inclined in the same direction against the disk plane.
- both the abutting edges of the inner and outer support ring portions may be inclined against the disk plane, thereby increasing the security against overlap.
- a recess 80 is incorporated, so that the abutting edges 54 and 56 of two part discs engage each other after assembly. It is advantageous to select the width 204 of the recess only slightly larger than the thickness 206 of the dividing disk, since this causes precise positioning of the dividing disks relative to each other.
- the recess has chamfers 82, so that the recess widens in the direction of the abutting edge.
- the chamfers cause a guide of the support ring sections during assembly, whereby a centering takes place.
- Another development provides to provide recesses on both part discs, which causes a particularly good locking of the support ring sections.
- the first training is in Fig. 7 in a front view and in Fig. 8 represented in a partial top block.
- the inner support ring portion 62 ' is designed to be used over its length.
- the abutting edges 64 'and 74' are inclined in the same direction against the disk plane 200.
- the vanes 48 of the dividing disc are connected by webs 84, which lie in the disc plane, with the inner support ring portion.
- the neutral fiber 88 of the utilization that is to say the region of the supporting ring section which lies in the plane of the pane over the entire length of the supporting ring section, lies substantially on the edge of the supporting ring section with which the webs are connected.
- the second training is in Fig. 9 in a front view and in Fig. 10 represented in a partial top block.
- the inner support ring portion 62 'over its length, ie designed between the inclined plane to the disk 200 abutting edges 64 "and 74".
- the blades 48 are in turn connected by webs 84 with the inner support ring portion.
- the webs are connected to the lying in the disk plane neutral fiber 88, which is not on the edge of the support ring portion but in the interior.
- Column 86 are formed between edge and neutral fiber, so that the webs come to rest in the disk plane.
- the use of the inner support ring portion is advantageous over a likewise conceivable use of the outer support ring portion, since complex, adapted to the use of configurations of the spacer ring omitted.
- FIG. 11a Another embodiment show the Fig. 11 to 13 ,
- the inner support ring sections 62 '"and 66'" of two part discs can be seen in the plan view.
- At least the partial disk 62 "' has a bead 100, which is guided as far as the abutting edges 62'" and 74 '.
- the bead runs according to FIG Fig. 11a not coaxial to the support ring. This is Fig. 11b illustrated by the radii.
- the radius of the deepest point of the bead has at the abutting edge 64 '''a large radius 104 which is greater than the small radius 102 at the abutting edge 74'''. This choice of radii prevents the edges from sliding over each other. Radially inside and outside the bead lie flat portions 106 and 102, on which the abutting edges of the part discs are superimposed.
- the bead can have different cross sections.
- the bead 100 has a substantially triangular cross-section.
- the bead 100 'in Fig. 12a has a rectangular, the bead 100 "in Fig. 12b a round cross section.
- the beading can also be seen in a continuing education, shown in Fig. 13a and 13b , Tabs 110 and 112, which bring the beads 100 of the support ring portions 62 '' and 66 '' in engagement with each other when assembled.
- Fig. 13 achieved in which the tabs are arranged on crossed sections of the bead, so that an effect analogous to Fig. 6a and b results.
- Fig. 13b is the support ring portion 66 '"shown in dashed lines, the support ring portion 62'" with a solid line. This illustration illustrates the crossed position of the bead sections to each other.
- Fig. 14 is an expression of this idea shown, in which the support ring portions 62 “" and 66 “” have beads 100 which are arranged at the abutting edges 64 "" and 68 “” radially offset from each other so that they do not overlap.
- tabs 114 and 116 are arranged, which protrude respectively into the space created by the bead of the opposite support ring portion.
- the bead may be provided in sections only in the region of the abutting edges. It is advantageous to let it run over the entire length of the support ring portion between the abutting edges, since as a further advantage, a stiffening of the support ring portion is achieved.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
Die Erfindung betrifft eine Turbomolekularpumpe nach dem Oberbegriff des Anspruchs 1.The invention relates to a turbomolecular pump according to the preamble of
Seit Jahrzehnten werden Turbomolekularpumpen in der Vakuumtechnik zur Erzeugung von Hochvakuum und Ultrahochvakuum eingesetzt. Die Vakuumerzeugung beruht in ihnen auf einem Rotor mit mehreren entlang der Rotorachse zueinander versetzten Schaufelkränzen, zwischen denen statorseitig stehende Schaufelkränze angeordnet sind.For decades, turbomolecular pumps have been used in vacuum technology to produce high vacuum and ultrahigh vacuum. The vacuum generation is based in them on a rotor with a plurality along the rotor axis staggered blade rings, between which stator side standing blade rings are arranged.
Verschiedene Gestaltungsformen der statorseitigen Schaufelkränze sind im Stand der Technik bekannt. Nachfolgend werden so genannte Blechstatorscheiben betrachtet. Diese werden typischerweise aus Feinblech hergestellt, indem zunächst durch Stanzen oder Schneiden die Schaufeln des Schaufelkranzes freigelegt und in einem nachfolgenden Umformschritt aus der Scheibenebene herausgedreht werden. Diese Blechstatorscheiben sind kostengünstig und sind insbesondere für den Bereich des Vorvakuums beliebt, in welchem die Schaufeln nur um wenige Grad aus der Scheibenebene herausgestellt sind. Die
Es ist daher Aufgabe der Erfindung eine Turbomolekularpumpe vorzustellen, in welcher das Überlappen der Teilscheiben verhindert ist.It is therefore an object of the invention to present a turbomolecular pump, in which the overlapping of the part discs is prevented.
Diese Aufgabe wird gelöst durch eine Turbomolekularpumpe mit den Merkmalen des ersten Anspruchs. Die abhängigen Ansprüche 2 bis 11 geben vorteilhafte Weiterbildungen an.This object is achieved by a turbomolecular pump having the features of the first claim. The
Es ist vorgesehen, dass die Statorscheibe zwei Teilscheiben aufweist und die sich berührenden Stoßkanten der Teilscheiben derart geformt sind, dass sie wenigstens abschnittsweise gekreuzt aufeinanderstoßen. Dies kann durch Herausdrehen wenigstens eines Teiles der Stoßkante aus der Scheibenebene bewirkt werden. Hierdurch wird ein Überlappen der Teilscheiben verhindert, wobei das Herausdrehen im ohnehin notwendigen Umformschritt erfolgen kann, in welchem die Schaufeln aus der Scheibenebene herausgedreht werden. Es ist lediglich eine Bearbeitung des Umformwerkzeuges notwendig.It is envisaged that the stator disc has two partial disks and that the contacting abutting edges of the partial disks are shaped in such a way that they collide in a crossed manner at least in sections. This can be effected by unscrewing at least a portion of the abutting edge of the disc plane. As a result, an overlapping of the part discs is prevented, the unscrewing can take place in the already necessary forming step in which the blades are rotated out of the disk plane. It is only a processing of the forming tool necessary.
Die Weiterbildungen bringen weitere Vorteile, beispielsweise eine besonders einfache Fertigung in der Ausgestaltung nach Anspruch 2. Die Gestaltungen nach den Ansprüchen 3 und 4 verhindern nicht nur ein Überlappen, sondern Verriegeln die Tragringabschnitte gegen eine Auslenkung aus der Scheibenebene heraus. Die Montage dieser Weiterbildung wird in der Ausprägung nach Anspruch 5 erleichtert. Eine Verwendelung des Tragringes, insbesondere des inneren Tragringes, nach einem der Ansprüche 6 bis 9 führt zu einer Versteifung des Tragringes, so dass die Widerstandsfähigkeit gegen hohe Axialkräfte, beispielsweise durch hohe Gaslasten, verbessert wird. Auch das Einprägen einer Sicke nach Anspruch 10 ist in Bezug auf die Steifigkeit gegen senkrecht auf die Scheibenebene wirkende Kräfte von Vorteil.The developments bring further advantages, for example, a particularly simple production in the embodiment according to
An Hand von Ausführungsbeispielen und deren Weiterbildungen soll die Erfindung näher erläutert und die Darstellung ihrer Vorteile vertieft werden.With reference to embodiments and their developments, the invention will be explained in more detail and the representation of its benefits to be deepened.
Es zeigen:
- Fig. 1:
- Schematischer Schnitt durch eine Turbomolekularvakuumpumpe;
- Fig. 2:
- Draufsicht auf zwei Teilscheiben einer Statorscheibe;
- Fig. 3:
- Seitenansicht in der Scheibenebene auf die in Berührung stehenden Abschnitte der Teilscheiben;
- Fig. 4:
- Blick auf eine Teilscheibe und deren Stoßkanten;
- Fig. 5:
- Alternative Bauform zur Variante der
Fig. 4 ; - Fig. 6:
- a) Blick auf einen Tragringabschnitt mit Nut, b) Blick auf eine Stoßkante mit Nut;
- Fig. 7:
- Teilscheibe mit einem gewendelten Tragringabschnitt in einer ersten Ausführung;
- Fig. 8:
- Blick auf den gewendelten Tragringabschnitt gemäß erster Ausführung;
- Fig. 9:
- Teilscheibe mit einem gewendelten Tragringabschnitt in einer zweiten Ausführung;
- Fig. 10:
- Blick auf den gewendelten Tragringabschnitt gemäß zweiter Ausführung;
- Fig. 11:
- a) Blick auf eine Statorscheibe mit Teilscheiben und einem Tragring, welcher eine Sicke aufweist, b) Blick auf die Stoßkante einer Teilscheibe;
- Fig. 12:
- a) und b) alternative Querschnittsformen der Sicke;
- Fig. 13:
- a) Draufblick auf Ausschnitt von Tragringabschnitten, welche Laschen aufweisen, b) Blick in der Scheibenebene.
- Fig. 14:
- Blick auf den Stoßbereich einer Weiterbildung der Teilscheiben mit Sicke.
- Fig. 1:
- Schematic section through a turbomolecular vacuum pump;
- Fig. 2:
- Top view of two partial disks of a stator disk;
- 3:
- Side view in the disc plane on the contacting portions of the part discs;
- 4:
- View of a dividing disk and its abutting edges;
- Fig. 5:
- Alternative design to the variant of
Fig. 4 ; - Fig. 6:
- a) view of a supporting ring section with a groove, b) view of an abutting edge with a groove;
- Fig. 7:
- Partial disk with a coiled support ring portion in a first embodiment;
- Fig. 8:
- View of the coiled support ring section according to the first embodiment;
- Fig. 9:
- Partial disk with a coiled support ring portion in a second embodiment;
- Fig. 10:
- View of the coiled support ring section according to the second embodiment;
- Fig. 11:
- a) view of a stator with part discs and a support ring, which has a bead, b) view of the abutting edge of a part disc;
- Fig. 12:
- a) and b) alternative cross-sectional shapes of the bead;
- Fig. 13:
- a) An overview of the section of supporting ring sections which have tabs, b) view in the plane of the pane.
- Fig. 14:
- View of the joint area of a further development of the dividing disks with a bead.
Es zeigt
Der Rotor umfasst eine Welle 12, auf der eine vorvakuumseitige Rotorscheibe 14, eine mittlere Rotorscheibe 16 und eine hochvakuumseitige Rotorscheibe 18 vorgesehen sind, wobei jede der Rotorscheiben einen aus einer Mehrzahl von Schaufeln bestehenden Schaufelkranz besitzt. Die Welle wird hochvakuumseitig durch ein Permanentmagnetlager 40 und vorvakuumseitig durch ein Wälzlager 42 drehbar unterstützt. Ein Antrieb 44 versetzt den Rotor in schnelle Drehung von einigen Zehntausend Umdrehungen in der Minute.The rotor comprises a
Der Stator umfasst eine vorvakuumseitige Statorscheibe 24, eine mittlere Statorscheibe 26 und eine hochvakuumseitige Statorscheibe 28. Diese sind durch Distanzringe 30, 32 und 34 in Bezug auf die Welle axial von einander beabstandet und mit den Rotorscheiben alternierend angeordnet. Die Statorscheiben besitzen ebenfalls Schaufelkränze.The stator includes a forward vacuum-
Die Anzahl von Rotor- und Statorscheiben hängt von den gewünschten vakuumtechnischen Parametern wie Saugvermögen und Druckverhältnis zwischen Ansaugöffnung und Auslass ab. Der Rotor kann anstelle von Scheiben auch in im Stand der Technik bekannter Glockenbauweise gebaut sein, zudem können beide Lager vorvakuumseitig angeordnet sein.The number of rotor and stator disks depends on the desired vacuum parameters, such as suction capacity and pressure ratio between intake opening and outlet. The rotor may be constructed instead of discs also known in the art bell design, also both bearings can be arranged on the vacuum side.
Die nachfolgend anhand der
In der Draufsicht nach
Die Statorscheibe weist einen äußeren Tragring 50 und einen inneren Tragring 60 auf. Ein erster Tragringabschnitt 52 des äußeren Tragringes ist Teil der ersten Teilscheibe 140, ein zweiter Tragringabschnitt 56 ist Teil der zweiten Teilscheibe 142. Der Tragring 60 besitzt einen ersten inneren Tragringabschnitt 62, der Bestandteil der ersten Teilscheibe ist, und einen zweiten inneren Tragringabschnitt 66, der Teil der zweiten Teilscheibe ist. Schaufeln 48 sind an innerem und äußerem Tragring befestigt und bilden einen Schaufelkranz.The stator disc has an
Die Tragringabschnitte 52 und 56 beziehungsweise 62 und 66 stoßen im montierten Zustand an Stoßkanten aneinander. Im Detail berühren sich die Stoßkanten 54 und 58 sowie 70 und 72 der äußeren Tragringabschnitte und die Stoßkanten 64 und 68 sowie 74 und 76 der inneren Tragringabschnitte.The
In der Seitenansicht in
Überlappen wirkungsvoll mit sehr einfachen Mitteln erhindert, da das Verkippen der Stoßkanten in einem Arbeitsgang mit dem Herausdrehen der Schaufeln aus der Scheibenebene erfolgen kann.In the side view in
Overlapping effectively prevented by very simple means, since the tilting of the abutting edges can be done in a single operation with the unscrewing of the blades from the disk plane.
Die
In
In
Alternativ können sowohl die Stoßkanten des inneren als auch des äußeren Tragringabschnittes gegen die Scheibenebene geneigt sein, wodurch die Sicherheit gegen Überlappen erhöht wird.Alternatively, both the abutting edges of the inner and outer support ring portions may be inclined against the disk plane, thereby increasing the security against overlap.
Eine Weiterbildung zeigen
Dies erhöht ebenfalls die Sicherheit gegen Überlappen der Teilscheiben. Dies lässt sich vorteilhaft weiterbilden, indem die Ausnehmung Abschrägungen 82 aufweist, so dass sich die Ausnehmung in Richtung Stoßkante aufweitet. Die Abschrägungen bewirken eine Führung der Tragringabschnitte während der Montage, wodurch eine Zentrierung erfolgt. Eine andere Weiterbildung sieht vor, an beiden Teilscheiben Ausnehmungen vorzusehen, was eine besonders gute Verriegelung der Tragringabschnitte bewirkt.This also increases the security against overlapping of the dividing discs. This can advantageously be further developed in that the recess has
Zwei Weiterbildungen, die sich auf den inneren Tragring beziehen, sind in den
Die erste Weiterbildung ist in
Die zweite Weiterbildung ist in
Die Verwendelung des inneren Tragringabschnitts ist gegenüber einer ebenfalls denkbaren Verwendelung des äußeren Tragringabschnitts vorteilhaft, da aufwändige, an die Verwendelung angepasste Gestaltungen des Distanzringes entfallen.The use of the inner support ring portion is advantageous over a likewise conceivable use of the outer support ring portion, since complex, adapted to the use of configurations of the spacer ring omitted.
Ein weiteres Ausführungsbeispiel zeigen die
Die Sicke kann unterschiedliche Querschnitte besitzen. In
Die Sicke kann zudem in einer Weiterbildung, gezeigt in
In
Die Sicke kann abschnittsweise nur im Bereich der Stoßkanten vorgesehen sein. Vorteilhaft ist, sie über die gesamte Länge des Tragringabschnitts zwischen den Stoßkanten verlaufen zu lassen, da so als weiterer Vorteil eine Versteifung des Tragringabschnitts erreicht wird.The bead may be provided in sections only in the region of the abutting edges. It is advantageous to let it run over the entire length of the support ring portion between the abutting edges, since as a further advantage, a stiffening of the support ring portion is achieved.
An den unterschiedlichen Enden der Tragringabschnitte können verschiedene der gezeigten Maßnahmen eingesetzt werden, so dass an einer Teilscheibe eines oder mehrere der vorgestellten Beispiele kombiniert werden. Auch ist die Kombination einzelner Merkmale der Beispiele möglich.At the different ends of the support ring sections, various of the measures shown can be used, so that one or more of the presented examples are combined on a part disc. Also, the combination of individual features of the examples is possible.
Claims (11)
- A turbomolecular pump (1) comprising a rotor (10) which has a ring of vanes; and a stator disk (14, 16, 18) which comprises a support ring (50, 60), a ring of vanes connected thereto and two part disks (140, 142), wherein each part disk has a support ring section (52, 56, 62, 66; 62'; 62"; 62"', 66"'; 62"", 66"") and an abutment edge (54, 58, 64, 68, 70, 72, 74, 76; 64', 74'; 64", 74"; 64"', 74"') arranged thereat and the abutment edges of the part disks contact one another, characterized in that the abutment edges of the part disks are formed such that they abut one another in an intersecting manner at least sectionally so that an overlapping of the part disks is prevented.
- A turbomolecular pump in accordance with claim 1, characterized in that the abutment edges of the part disks are formed in a straight line.
- A turbomolecular pump in accordance with claim 1 or claim 2, characterized in that at least the support ring section of one part disk has a recess (80) which is open toward the abutment edge and which is in engagement with the support ring section of a second part disk.
- A turbomolecular pump in accordance with claim 3, characterized in that the support ring sections of both part disks have recesses (80) which are arranged engaging into one another.
- A turbomolecular pump in accordance with claim 3 or claim 4, characterized in that the recess is formed in a self-centering manner, in particular widening toward the abutment edge.
- A turbomolecular pump in accordance with any one of the preceding claims, characterized in that at least one support ring section (62'; 62") is arranged radially inside the ring of vanes and is designed in the manner of a helix along its periphery.
- A turbomolecular pump in accordance with claim 6, characterized in that vanes (48) provided in the ring of vanes are connected to a neutral axis (88) of the support ring section (62'; 62").
- A turbomolecular pump in accordance with claim 6, characterized in that webs (84) are provided between the support ring section (62") and the vanes provided in the ring of vanes and are connected to a neutral axis (88) of the support ring section; and in that a gap (86) is provided between the web and the support ring section.
- A turbomolecular pump in accordance with any one of the claims 6 to 8, characterized in that the helical support ring section intersects the disk plane, as defined by the ring of vanes, a multiple of times.
- A turbomolecular pump in accordance with any one of the claims 1 to 5, characterized in that each support ring section (62"', 66"'; 62"", 66"") comprises a bead (100; 100'; 100") extending in the peripheral direction.
- A turbomolecular pump in accordance with claim 10, characterized in that the beads (100) of two part disks each have a bead end at one of the abutment edges; and in that these bead ends are arranged radially offset from one another.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102010052660A DE102010052660A1 (en) | 2010-11-26 | 2010-11-26 | Turbo molecular pump |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2458222A2 EP2458222A2 (en) | 2012-05-30 |
EP2458222A3 EP2458222A3 (en) | 2016-03-09 |
EP2458222B1 true EP2458222B1 (en) | 2017-09-27 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP11008602.2A Active EP2458222B1 (en) | 2010-11-26 | 2011-10-27 | Turbomolecular pump |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP2458222B1 (en) |
DE (1) | DE102010052660A1 (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6236806B2 (en) * | 2013-03-07 | 2017-11-29 | 株式会社島津製作所 | Vacuum pump |
JP6241223B2 (en) * | 2013-03-13 | 2017-12-06 | 株式会社島津製作所 | Vacuum pump |
DE102013110251A1 (en) | 2013-09-17 | 2015-03-19 | Pfeiffer Vacuum Gmbh | Arrangement with a vacuum pump and method for compensating a magnetic field of at least one arranged in a vacuum pump, generating a magnetic interference field component |
DE102013112185B4 (en) | 2013-11-06 | 2022-04-14 | Pfeiffer Vacuum Gmbh | Vacuum pump and vacuum pump with at least one turbomolecular pump stage |
DE102013022539B3 (en) | 2013-11-06 | 2022-04-14 | Pfeiffer Vacuum Gmbh | vacuum pump |
DE102013114576A1 (en) * | 2013-12-19 | 2015-06-25 | Pfeiffer Vacuum Gmbh | stator |
DE102014100207B4 (en) * | 2014-01-09 | 2020-07-09 | Pfeiffer Vacuum Gmbh | STATOR DISC |
EP3051140B1 (en) * | 2015-01-29 | 2018-01-10 | Pfeiffer Vacuum Gmbh | Stator disc for a vacuum pump |
EP3916235B1 (en) * | 2020-05-27 | 2023-04-26 | Pfeiffer Vacuum Technology AG | Method for producing a vacuum pump |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3013083B2 (en) * | 1998-06-23 | 2000-02-28 | セイコー精機株式会社 | Turbo molecular pump |
JP4527966B2 (en) * | 2003-05-01 | 2010-08-18 | 株式会社大阪真空機器製作所 | Molecular pump |
-
2010
- 2010-11-26 DE DE102010052660A patent/DE102010052660A1/en not_active Withdrawn
-
2011
- 2011-10-27 EP EP11008602.2A patent/EP2458222B1/en active Active
Non-Patent Citations (1)
Title |
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None * |
Also Published As
Publication number | Publication date |
---|---|
EP2458222A3 (en) | 2016-03-09 |
EP2458222A2 (en) | 2012-05-30 |
DE102010052660A1 (en) | 2012-05-31 |
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