EP2335302A1 - Methode de formation d'une electrode metallique sur une couche d'oxyde metallique - Google Patents
Methode de formation d'une electrode metallique sur une couche d'oxyde metalliqueInfo
- Publication number
- EP2335302A1 EP2335302A1 EP09748268A EP09748268A EP2335302A1 EP 2335302 A1 EP2335302 A1 EP 2335302A1 EP 09748268 A EP09748268 A EP 09748268A EP 09748268 A EP09748268 A EP 09748268A EP 2335302 A1 EP2335302 A1 EP 2335302A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- layer
- metal oxide
- oxide layer
- metallic electrode
- functional layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims abstract description 42
- 229910044991 metal oxide Inorganic materials 0.000 title claims abstract description 39
- 150000004706 metal oxides Chemical class 0.000 title claims abstract description 39
- 229910052751 metal Inorganic materials 0.000 title abstract description 18
- 239000002184 metal Substances 0.000 title abstract description 18
- 238000004519 manufacturing process Methods 0.000 title description 9
- 239000010410 layer Substances 0.000 claims abstract description 64
- 239000002346 layers by function Substances 0.000 claims abstract description 26
- 239000006185 dispersion Substances 0.000 claims abstract description 15
- 229920000642 polymer Polymers 0.000 claims abstract description 13
- 239000007791 liquid phase Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 2
- 239000012044 organic layer Substances 0.000 claims description 2
- 150000002739 metals Chemical class 0.000 abstract description 6
- 239000012530 fluid Substances 0.000 abstract 2
- 239000002082 metal nanoparticle Substances 0.000 abstract 1
- 239000000243 solution Substances 0.000 description 15
- 239000002105 nanoparticle Substances 0.000 description 8
- 239000010408 film Substances 0.000 description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229920000144 PEDOT:PSS Polymers 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012702 metal oxide precursor Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920000123 polythiophene Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000007928 solubilization Effects 0.000 description 1
- 238000005063 solubilization Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 235000010215 titanium dioxide Nutrition 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
- H10K30/81—Electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- the present invention relates to a method of disposing a metallic electrode over a functional layer from which electrons are extractable or into which electrons are injectable.
- the functional layer may be, for example, a photoactive polymer layer for the production of electronic components, in particular of polymer solar cells.
- the production of solar cells from a solution requires the application of a charge carrier collecting back contact.
- State of the art here are thermal sublimation or Sputterdeposition in a vacuum.
- the use of vacuum processes requires high installation costs of the production plant, high production costs and low throughput of semi-finished products compared with, for example, printing presses.
- the present invention describes the application of an inorganic back contact by means of pure printing processes or coating processes of liquids.
- electrodes are made of low work function metals and are thus relatively unstable. Also, the process is difficult alsskalierbar on a roll-to-roll process. Another disadvantage of organic electrodes lies in the degradation under UV light, as well as the water sensitivity due to hygroscopic influences.
- WO 2007/029750 A1 shows a process for producing an organic thin-film photoelectric converter under atmospheric conditions.
- a layer of titanium (IV) oxide is formed in a wet process.
- WO 2007/040601 A1 and WO 2007/079500 A2 show the realization of a titanium oxide layer by means of sol-gel methods.
- US 2007/0166872 A1 shows a method of depositing an electrode from a semiconductor oxide.
- EP 1 622 212 A2 shows the coating of a nano-structured electrode.
- EP 1 670 298 A1 shows the application of printed conductors to a promoter.
- the object of the present invention starting from the prior art is to provide a method for arranging a metallic electrode over a functional layer, in particular over a photoactive polymer layer of a solar cell, with which the use of vacuum technology can be avoided, so that an optimization of the manufacturing and Installation process can be realized.
- the method according to the invention serves for arranging a metallic electrode above or below a functional layer from which electrons can be extracted or into which
- Electrons are injectable.
- the functional layer is, for example, the photoactive layer, a solar cell or an organic layer of an organic - A -
- the functional layer is preferably made of a polymer, such as. As polythiophene, wherein in the polymer also other molecules may be included. Alternatively, the functional layer can also consist of another substance, for example an inorganic substance.
- the electrode in particular a cathode serves to collect the electrons extracted from the functional layer or to inject electrons into the functional layer. With the method according to the invention, the electrode is brought into effective contact with the functional layer, so that the metallic electrode is located above the functional layer with respect to the functional layer.
- One step of the method according to the invention provides for applying a metal oxide layer from a liquid phase or from a nanoparticulate dispersion. In the liquid
- Phase is a precursor phase, for example, as part of a sol-gel process.
- the metal oxide is preferably titanium oxide, zinc oxide or indium oxide.
- a further step of the method according to the invention provides for applying the metallic electrode from a liquid phase, in particular a solution of metals bound in organic molecules, or from a nanoparticulate dispersion, i. H. a dispersion of metallic nanoparticles, before.
- the metal of the electrode is preferably gold, silver or
- the two mentioned steps of the method according to the invention can be carried out according to the embodiment in a different sequence or simultaneously.
- the metal oxide layer is preferably applied to the functional layer, in order subsequently to apply the metallic electrode to the metal oxide layer.
- the metallic electrode may be applied to a substrate to thereafter place the metal oxide layer on the metal substrate Apply electrode.
- the functional layer is then applied to the metal oxide layer.
- the metal oxide layer is arranged above the functional layer, while the metallic electrode is arranged above the metal oxide layer.
- a thermal, chemical or photochemical conversion of the metallic electrode to an amorphous, semicrystalline or fully crystalline layer takes place.
- the thermal conversion can for example also be done by sintering, in which heat is generated or supplied. Furthermore, thermal, chemical or photochemical conversion of the metal oxide layer to an amorphous, semicrystalline or fully crystalline layer also takes place. This conversion is preferably carried out together with the thermal, chemical or photochemical conversion of the metallic electrode.
- the metal oxide is applied together with the metallic electrode from a common nanoparticulate dispersion or from a common liquid phase.
- the metal oxide may be applied together with the metallic electrode of a mixture of the nanoparticulate dispersion and the liquid phase. In these embodiments of the method according to the invention, the application of the metal oxide and the application of the metallic electrode take place in a common step.
- the thermal, chemical or photochemical Conversion of the metal oxide layer and / or the thermal, chemical or photochemical conversion of the metallic electrode preferably at a temperature that is harmless to the film substrate.
- a temperature of up to 150 0 C for a film substrate of thermally stabilized PET is harmless.
- a further metal oxide layer or another semitransparent oxide layer of a liquid phase can first be applied to the substrate in order subsequently or simultaneously to coat the metallic electrode with the further metal oxide layer or metal oxide layer on the semitransparent oxide layer. Then the functional layer has to be applied.
- the inventive method is preferably used for applying a metallic electrode to any, in particular photoactive electron-transporting layer.
- a metal oxide layer of a liquid phase is applied to the layer to be covered and, in a subsequent sintering process, chemically transformed into an amorphous, semicrystalline or fully crystalline layer, thermally or photochemically converted.
- the metal oxide is preferably applied together with the metal from a common nanoparticulate dispersion or organic precursor solution.
- the metal oxide layer is preferably used together with the dispersion of metallic nanoparticles or the solution of metals bound in organic molecules sintered or thermally, chemically or photochemically converted.
- the metal for the electrode it is preferable to use a metal having a high work function of more than 4.0 eV, more preferably more than 4.5 eV.
- Solution-processed metallic electrodes in particular cathodes for electronic components, in particular (polymer) solar cells, are realized with the present invention.
- Direct application of a solution of metallic nanoparticles to a photoactive layer could cause solubilization of the latter. Therefore, it is proposed according to the invention to first apply a metal oxide precursor (solution) to the photovoltaically active layer from the solution. Subsequently, this is converted either alone or together with the subsequent metallic layer thermally, chemically or photochemically into an amorphous or semicrystalline or crystalline opaque thin layer. Afterwards, this layer has the property of being very chemically inert, ie in particular of not reacting with the photovoltaically active material. Furthermore, a special coverage is achieved with this layer, which prevents a diffusing through of the subsequent metal layer.
- the second layer consists of metallic nanoparticles or organometallic precursors, which is also applied from the solution to the metal oxide layer.
- This metallic nanoparticle layer is then thermally, chemically or photochemically transformed either independently of or together with the underlying metal oxide layer.
- the metallic nanoparticle layer makes exploits the property that metallic nanoparticles melt at much lower temperatures and thus form a closed film than particles in the micrometer range. Thus, this method allows the use of plastic film substrates, which are only limited temperature stability.
- a double layer electrode produced by the method of the present invention d. H.
- the metallic electrode with the metal oxide layer is, on the one hand, adapted to the electronic energy bands and, on the other hand, has a sufficiently high conductivity. In addition, the stability of the metallic electrode with the metal oxide intermediate layer is also increased.
- the present invention allows the complete abandonment of vacuum technologies z. As in the production of all successive layers of a polymer solar cell.
- the method according to the invention can be used, for example, in the production of electronic components such as polymer solar cells, polymer light-emitting diodes or polymer transistors.
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Photovoltaic Devices (AREA)
- Hybrid Cells (AREA)
Abstract
Die vorliegende Erfindung betrifft ein Verfahren zum Anordnen einer metallischen Elektrode über einer Funktionsschicht, aus welcher Elektronen extrahierbar oder in welche Elektronen injizierbar sind. Bei der Funktionsschicht kann es sich beispielsweise um eine photoaktive Polymerschicht für die Herstellung von elektronischen Bauelementen, insbesondere von Polymer-Solarzellen handeln. Ein Schritt des erfindungsgemäßen Verfahrens sieht ein Aufbringen einer Metalloxidschicht aus einer flüssigen Phase oder aus einer nanopartikulären Dispersion vor. Ein weiterer Schritt des erfindungsgemäßen Verfahrens sieht ein Aufbringen der metallischen Elektrode aus einer flüssigen Phase, insbesondere einer Lösung aus in organischen Molekülen eingebundenen Metallen, oder aus einer aus einer nanopartikulären Dispersion, d. h. einer Dispersion aus metallischen Nanopartikeln, vor. Jedenfalls ist im Ergebnis die Metalloxidschicht über der Funktionsschicht angeordnet, während die metallische Elektrode über der Metalloxidschicht angeordnet ist. In einem weiteren Schritt des erfindungsgemäßen Verfahrens erfolgt ein thermisches, chemisches oder photochemisches Umwandeln der metallischen Elektrode zu einer amorphen, semikristallinen oder vollkristallinen Schicht. Weiterhin erfolgt auch ein thermisches, chemisches oder photochemisches Umwandeln der Metalloxidschicht zu einer amorphen, semikristallinen oder vollkristallinen Schicht.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008051656A DE102008051656A1 (de) | 2008-10-08 | 2008-10-08 | Verfahren zum Aufbringen einer metallischen Elektrode auf eine Polymerschicht |
PCT/EP2009/063130 WO2010040815A1 (fr) | 2008-10-08 | 2009-10-08 | Verfahren zum herstellen einer metallischen elektrode über einer metalloxidschicht |
Publications (1)
Publication Number | Publication Date |
---|---|
EP2335302A1 true EP2335302A1 (fr) | 2011-06-22 |
Family
ID=41432784
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP09748268A Withdrawn EP2335302A1 (fr) | 2008-10-08 | 2009-10-08 | Methode de formation d'une electrode metallique sur une couche d'oxyde metallique |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2335302A1 (fr) |
DE (1) | DE102008051656A1 (fr) |
WO (1) | WO2010040815A1 (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011077961A1 (de) | 2011-06-22 | 2012-12-27 | Siemens Aktiengesellschaft | Schwachlichtdetektion mit organischem fotosensitivem Bauteil |
DE102014017063A1 (de) | 2014-11-14 | 2016-05-19 | Technische Universität Ilmenau | Verfahren zur Erzeugung von flüssigprozessierten Misch-Metalloxidschichten und ihre Verwendung in elektrischen, elektronischen und opto-elektronischen Bauelementen |
WO2018071445A1 (fr) | 2016-10-11 | 2018-04-19 | Microdose Therapeutx, Inc. | Inhalateur et ses méthodes d'utilisation |
CN112635102A (zh) * | 2020-12-04 | 2021-04-09 | 华南理工大学 | 复合导电薄膜及其制备方法以及薄膜晶体管 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19507413A1 (de) | 1994-05-06 | 1995-11-09 | Bayer Ag | Leitfähige Beschichtungen |
DE10255964A1 (de) | 2002-11-29 | 2004-07-01 | Siemens Ag | Photovoltaisches Bauelement und Herstellungsverfahren dazu |
US6949403B2 (en) * | 2003-07-22 | 2005-09-27 | Organic Vision Inc. | Non-vacuum methods for the fabrication of organic semiconductor devices |
FR2869454B1 (fr) * | 2004-04-22 | 2006-11-03 | Commissariat Energie Atomique | Procede de fabrication de couches minces semi-conductrices photosensibilisees. |
ATE465521T1 (de) * | 2004-07-29 | 2010-05-15 | Konarka Technologies Inc | Verfahren zur beschichtung von nanostrukturierte elektroden |
EP1670298A1 (fr) * | 2004-12-07 | 2006-06-14 | Samsung SDI Germany GmbH | Substrat pour afficheur et son procédé de fabrication |
JP2008533745A (ja) | 2005-03-17 | 2008-08-21 | ザ リージェンツ オブ ザ ユニバーシティ オブ カリフォルニア | 光学スペーサを用いた高効率ポリマー光起電力セルのためのアーキテクチャ |
US20060211272A1 (en) * | 2005-03-17 | 2006-09-21 | The Regents Of The University Of California | Architecture for high efficiency polymer photovoltaic cells using an optical spacer |
EP1902297A4 (fr) | 2005-07-14 | 2009-07-15 | Konarka Technologies Inc | Dispositifs organiques stables |
EP1974391A4 (fr) | 2006-01-04 | 2010-11-17 | Univ California | Couche de passivation pour des cellules photovoltaiques |
-
2008
- 2008-10-08 DE DE102008051656A patent/DE102008051656A1/de not_active Withdrawn
-
2009
- 2009-10-08 EP EP09748268A patent/EP2335302A1/fr not_active Withdrawn
- 2009-10-08 WO PCT/EP2009/063130 patent/WO2010040815A1/fr active Application Filing
Non-Patent Citations (1)
Title |
---|
See references of WO2010040815A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO2010040815A1 (fr) | 2010-04-15 |
DE102008051656A1 (de) | 2010-04-15 |
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