EP2279422A1 - Mikromechanischer beschleunigungssensor - Google Patents
Mikromechanischer beschleunigungssensorInfo
- Publication number
- EP2279422A1 EP2279422A1 EP09745830A EP09745830A EP2279422A1 EP 2279422 A1 EP2279422 A1 EP 2279422A1 EP 09745830 A EP09745830 A EP 09745830A EP 09745830 A EP09745830 A EP 09745830A EP 2279422 A1 EP2279422 A1 EP 2279422A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- acceleration sensor
- seismic mass
- mass
- deflection
- seismic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 230000001133 acceleration Effects 0.000 title claims abstract description 84
- 239000000725 suspension Substances 0.000 claims description 34
- 238000000034 method Methods 0.000 claims description 7
- 230000005484 gravity Effects 0.000 description 11
- 239000000758 substrate Substances 0.000 description 8
- 239000003990 capacitor Substances 0.000 description 7
- 238000005538 encapsulation Methods 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000012549 training Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
Definitions
- the invention relates to a micromechanical acceleration sensor, a method for measuring an acceleration and the use of the acceleration sensor in motor vehicles.
- the object of the invention has been found to propose a micromechanical acceleration sensor and a method for measuring accelerations, with which accelerations can be detected relatively precisely.
- micromechanical acceleration sensor according to claim 1 and the method according to claim 8.
- a resetting device is preferably understood to be a capacitive device, in particular acting according to the electrostatic principle, by means of which the deflection of the seismic mass can be influenced and the deflection of the seismic mass is particularly preferably always or constantly regulated back to a defined deflection value, wherein this defined deflection value very particularly preferably corresponds to a rest position of the seismic mass.
- the at least one restoring device comprises at least one, in particular substantially flat, electrode and is substantially configured and arranged relative to the first seismic mass that between deflection of the first seismic mass and / or the force acting thereon due to an electrical voltage applied to the reset means and this electrical voltage is a substantially quadratic relationship.
- the at least one restoring device comprises one or more plate capacitors and very particularly preferably no meander-shaped capacitor structure which has a substantially linear relationship between the deflection of the first seismic mass due to an electrical voltage applied to the restoring device and this electrical voltage.
- the acceleration sensor is in particular preferably designed such that the restoring tension-acceleration characteristic essentially has the shape or the shape of a root function, at least with regard to the first seismic mass and its at least one restoring device assigned to it.
- the electrode of the at least one restoring device is preferably arranged in an encapsulation module of the acceleration sensor, this encapsulation module is designed in particular as a lid.
- the electrode of the at least one restoring device expediently has an angle of less than 20 ° with a base surface or substrate plane of the acceleration sensor and is arranged in particular substantially parallel to the base surface.
- the acceleration sensor comprise at least two or a multiple of two read-out means symmetrically arranged and / or formed to a geometric or mass center and / or a geometric or mass center axis of the first seismic mass or acceleration sensor.
- the acceleration sensor preferably has at least two or a multiple of two restoring devices, which are symmetrically arranged and / or formed to a geometric or mass-related center and / or a geometric or mass-related central axis of the first seismic mass or of the acceleration sensor.
- the at least one restoring device and the at least one read-out device preferably have one or more capacities with the seismic mass assigned to them.
- This capacitance is designed in particular as at least one plate capacitor, particularly preferably as comb structures with a plurality of plate capacitors. - A -
- the two or more restoring devices and / or read-out devices of the acceleration sensor are designed such that upon deflection of at least the first seismic mass in a first direction, the at least two restoring devices and / or read-out devices undergo opposite changes in capacitance, ie mutually inverse plate spacing changes.
- the comb structures of opposite restoring and / or read-out devices engage each other in a staggered manner.
- These opposing capacity training particularly preferably also have the otherwise symmetrical reset and / or readout devices described above.
- the first seismic mass is preferably suspended eccentrically with respect to its center of gravity, in particular on at least one torsion spring.
- the center of gravity of at least the first seismic mass is particularly preferably in a direction with respect to their suspension or. Torsionsachse outsourced pronounced, while the center of gravity is very particularly preferred below or above the suspension or torsion, outsourced or pronounced on a perpendicular to this axis.
- the center of gravity of at least the first seismic mass is particularly preferably outsourced in two directions with respect to its suspension or torsion axis, with the center of mass being very particular preferably below or above and laterally offset from the suspension or torsion axis outsourced or pronounced.
- the acceleration sensor is designed as a triaxial sensor and has four seismic masses, which are each attached to at least one torsion spring, wherein the center of gravity of the seismic mass is respectively outsourced to the suspension axis and two seismic masses are suspended so that the Suspension axes are formed at substantially 90 ° relative to the suspension axes of the two other seismic masses.
- the acceleration sensor comprises an electronic evaluation circuit or is connected to such an evaluation circuit which can detect the accelerations in three directions from the deflections and / or restoring voltages of the four seismic masses.
- the suspension axes are particularly preferably arranged substantially parallel to an xy-substrate plane, wherein the suspension axes of the four seismic masses are aligned in pairs in the x-direction and y-direction, most preferably the suspension axes or torsion springs are relative to the one mass in front or on the left side and relative to the other mass behind or on the right side in each case the center of mass of the respective seismic mass arranged or formed.
- the seismic masses are each associated with two readout electrodes, these readout electrodes are assigned or arranged on both sides of the suspension axis or the corresponding torsion spring.
- At least the first seismic mass are assigned at least two readout devices, which are associated with a suspension axis of the first seismic mass on both sides of this suspension axis and / or on both sides relative to this suspension axis and / or which are arranged in a central region of the associated with the first seismic mass and are arranged correspondingly, and wherein the at least one restoring device of the first seismic mass relative to the suspension axis and / or the central region is assigned to the outside as the readout devices and is arranged accordingly.
- a resetting device is arranged further outwards than the readout device, particularly preferably on both sides of the readout device.
- the arrangement of the at least one restoring device in the outer region of the seismic mass causes the required restoring tension due to the relatively large lever, relative to the suspension axis, can remain relatively low, so only relatively low electrical reset voltages are required.
- the acceleration sensor preferably comprises a control circuit which can adjust the deflection of the seismic mass to a defined deflection value, in particular the deflection value corresponding to a rest position of the seismic mass, by means of at least the restoring device.
- the least one reading device detects the deflection of the seismic mass preferably according to the capacitive principle.
- the acceleration sensor has at least two readout devices, which are assigned to the seismic mass in common, whereby a differential detection of the deflection of the seismic mass can be performed and thus in particular an offset capacity need not be considered.
- the at least one read-out device above and / or below or the seismic mass, based on the substrate plane, since no additional chip area is required for readout or reset structures, and thus the sensor can be made smaller.
- the acceleration sensor preferably has in each case, in particular in pairs, in front of and behind or above and below at least the first seismic mass at least one restoring device or at least one return electrode, thereby increasing the total capacity of the restoring devices, is doubled in particular, and so lower restoring stresses, so applied to the respective restoring device electrical voltage required.
- acceleration sensor with reset device is its small design compared to sensors with several seismic masses which are suspended on springs for different measuring ranges or with respect to several sensors. Another advantage is that existing sensor designs can be used, which only need to be extended by the at least one reset device.
- the measuring range of a low-g sensor can preferably be extended (typically 1-5 g) to an additional, higher measuring range (50-10 0 g).
- a hitherto partially customary or hitherto necessary, separate high-g acceleration sensor can be dispensed with.
- At least one restoring device comprising at least one parallel plate capacitor permits the nonlinear provision of the seismic mass or of the acceleration signal. This makes it much easier to realize the conflicting requirements for the highest possible resolution in the low-g range and the largest possible measuring range with the lowest possible reset voltages in the high-g range.
- the reduction in resolution usually associated with an increase in the measuring range only occurs at high levels in the case of this solution Accelerations on.
- the non-linear course of the transfer characteristic ensures that a relatively high resolution can be achieved for measurements in the low-g measuring range (1-5 g).
- the method is preferably developed by the regulation is constantly performed.
- the acceleration detected by the acceleration sensor is calculated at least from the value of an electrical voltage which is applied to the restoring device for regulating the deflection of the seismic mass to the defined deflection value in the context of the control.
- the invention also relates to the use of the micromechanical acceleration sensor in motor vehicles, in particular for the combined detection of relatively low accelerations, for example for ESP applications, and relatively large accelerations, for example for occupant protection and airbag applications.
- FIG. 1 shows an exemplary control system of an acceleration sensor in the form of a block diagram, wherein the acceleration sensor comprises a provisioning control and has a relatively wide measuring range.
- FIG. 3 shows an exemplary embodiment with a first seismic mass, which has a center of gravity that is outsourced with respect to its suspension axis,
- FIG. 5 shows the cross section of an exemplary acceleration sensor with two seismic masses 2b, 2c, which are deflected in phase in the z direction by an acceleration
- Fig. 6 shows the cross section of an exemplary acceleration sensor with top and bottom electrodes and reset means.
- Reset signal and a linearized signal as a function of acceleration shows the exemplary representation of the resolution of a reset acceleration sensor as a function of the reset voltage at the reset electrodes.
- Circuit block 3 comprises an A / D converter which converts the analog signal into a digital signal.
- a / D converter allows direct conversion into a digital bit signal with a given conversion width.
- Further alternative embodiments are embodied, for example, as sigma-delta converters in which the analog signal is first converted into a pulse-width-modulated signal and then into a parallel digital signal via at least one subsequent decimation stage.
- Circuit block 4 consists of a regulator structure which controls the output nal to adjust the input signal to 0. This regulator causes the voltage signal fed back to the reset electrodes C3, C4 via the D / A converter 7 and the high-voltage converter 8 to be adjusted such that the force of the acceleration signal acting on the seismic mass is compensated by the electrostatic force acting in C3 and C4 becomes.
- a sigma-delta converter can also be used here.
- a combination of the A / D converter with the D / A converter to a so-called "closed-loop signal" delta converter is possible.
- the correlation for the parallel plate capacitor results in the nonlinear dependence of the restoring voltage on the applied acceleration shown in FIG.
- the signal is squared by a multiplication and thus restored a linear relationship to the acceleration.
- the adjustment of the offset and the sensitivity which is advantageous for sensors in this class of accuracy, also takes place.
- An additional test input makes it possible to deflect the seismic mass via the electrostatic excitation for test purposes. This can be used to detect any loose particles or etching residues.
- FIG. 2 shows an exemplary embodiment of a micromechanical acceleration sensor which has a seismic mass suspended by springs Ia and Ib on a frame.
- the acceleration sensor has restoring devices 5aa-5bb with counterelectrodes 5a / bL and 5a / b-R, respectively, designed as capacitive comb structures, with which forces can be provided or generated which counteract the movement of the seismic mass 2.
- an acting force in particular a caused by a detected acceleration force can be compensated.
- the four restoring devices 5aa to 5bb are arranged symmetrically to the center of seismic mass 2.
- the signal readout takes place, for example, twice differentially by means of the two readout devices 3a and 3b, which are symmetrical to the central axis of seismic mass 2 in the x direction and arranged, however, the comb structures offset or counter-interlocking, whereby upon deflection of seismic mass 2 in negative x Direction, exemplified by the arrow, the comb structures of the readout means 3a, 4a undergo a positive capacitance change and the comb structures of the readout means 3b, 4b a negative.
- FIG. 2b shows an exemplary embodiment with four readout devices 3a-3d, 4a-4d, which are arranged symmetrically in the center of seismic mass 2, but in each case in pairs have opposing or offset intermeshing comb structures, whereby an additional differential measurement is made possible ,
- the capacity Changes in the dimensions c- and c + of these comb structures upon deflection of the seismic mass 2 in the direction indicated by the arrow are also illustrated.
- four schematically indicated restoring devices 5aa to 5bb are arranged.
- FIG. 3 shows the cross-section of an exemplary micromechanical acceleration sensor, comprising a seismic mass 2 with a center of gravity pending to the springs 1, a frame 6, read-out devices 4a, 4b and additional reset devices 5-L, 5-R formed as electrodes.
- the acceleration sensor is closed by means of a cover or encapsulation module 7, which has electrical feedthroughs 8 with which the electrodes can be connected.
- an exemplary three-axis acceleration sensor with four seismic masses 2a-d, with respect to the center of gravity of the masses 9a-d outsourced spring suspensions or torsion springs la-d is illustrated.
- the acceleration sensor comprises an electronic evaluation circuit (not shown) or is connected to such an evaluation circuit which can detect the accelerations in three directions from the deflections and / or restoring voltages of the four seismic masses 2a to 2d.
- the suspension axes are particularly preferably substantially parallel to an xy Arranged substrate plane, wherein the suspension axes of the four seismic masses in pairs in the x-direction Ia, Id and y-direction Ib, Ic are aligned and with respect to the one mass before Id or left side Ib and based on the other mass behind Ia or on the right-hand side Ic in each case of the center of gravity 9a-9d of the respective seismic mass are arranged or formed.
- the seismic masses each have two readout electrodes, not shown, associated with these readout electrodes are associated on both sides of the suspension axis or the corresponding torsion spring.
- Fig. 5 an embodiment is shown in which the seismic masses 2b and 2c, each eccentrically suspended with respect to their center of gravity 9 by means of torsion springs are assigned two readout devices 4a and 4b, the both sides of the suspension axis above the seismic mass 2b, 2c in a central region of these masses are arranged. Further out is each Resetting device 5 associated with the seismic masses and arranged.
- the arrangement of the restoring devices 5 in the outer region of the seismic masses 2b, 2c causes the required restoring tension due to the relatively large lever, relative to the suspension axis, can remain relatively low, so only relatively low electrical reset voltages are required.
- FIG. 6 shows an exemplary cross-section of an acceleration sensor with a seismic mass 2 which is eccentric with respect to its center of mass of the torsion spring
- Seismic mass 2 are each on both sides of the suspension axis or torsion spring 1 readout above 4aa, 4ab and below 4ba, 4bb assigned, relative to the z-direction, perpendicular to the x-y substrate plane. With regard to the readout devices, seismic masses are also above and below both sides
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008023664 | 2008-05-15 | ||
PCT/EP2009/055942 WO2009138498A1 (de) | 2008-05-15 | 2009-05-15 | Mikromechanischer beschleunigungssensor |
Publications (1)
Publication Number | Publication Date |
---|---|
EP2279422A1 true EP2279422A1 (de) | 2011-02-02 |
Family
ID=40921995
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP09745830A Ceased EP2279422A1 (de) | 2008-05-15 | 2009-05-15 | Mikromechanischer beschleunigungssensor |
Country Status (4)
Country | Link |
---|---|
US (1) | US20110113880A1 (de) |
EP (1) | EP2279422A1 (de) |
DE (1) | DE102009021567A1 (de) |
WO (1) | WO2009138498A1 (de) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4738521B2 (ja) * | 2009-09-24 | 2011-08-03 | 株式会社東芝 | 電子機器及びデータ送受信システム |
DE102010039236B4 (de) * | 2010-08-12 | 2023-06-29 | Robert Bosch Gmbh | Sensoranordnung und Verfahren zum Abgleich einer Sensoranordnung |
US9229026B2 (en) * | 2011-04-13 | 2016-01-05 | Northrop Grumman Guaidance and Electronics Company, Inc. | Accelerometer systems and methods |
DE102013217478A1 (de) | 2013-09-03 | 2015-03-05 | Bert Grundmann | Beschleunigungssensor, Anordnung und Verfahren zum Detektieren eines Haftungsverlusts eines Fahrzeugrades |
DE102015000158A1 (de) * | 2015-01-05 | 2016-07-07 | Northrop Grumman Litef Gmbh | Beschleunigungssensor mit reduziertem Bias und Herstellungsverfahren eines Beschleunigungssensors |
WO2016189690A1 (ja) * | 2015-05-27 | 2016-12-01 | 株式会社日立製作所 | 加速度センサシステム |
GB2555804B (en) | 2016-11-09 | 2022-02-02 | Atlantic Inertial Systems Ltd | Accelerometer control |
DE102019200839A1 (de) * | 2019-01-24 | 2020-07-30 | Robert Bosch Gmbh | Mikromechanischer Inertialsensor |
JP6870761B2 (ja) * | 2019-05-15 | 2021-05-12 | 株式会社村田製作所 | ロバストなz軸加速度センサ |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003104823A1 (de) * | 2002-06-11 | 2003-12-18 | Conti Temic Microelectronic Gmbh | Mehrachsiger monolithischer beschleunigungssensor |
US20060156818A1 (en) * | 2001-03-08 | 2006-07-20 | Konrad Kapser | Micromechanical capacitive acceleration sensor |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69113632T2 (de) * | 1990-08-17 | 1996-03-21 | Analog Devices Inc | Monolithischer beschleunigungsmesser. |
JP2938989B2 (ja) * | 1991-01-29 | 1999-08-25 | キヤノン株式会社 | 角加速度センサ |
US5565625A (en) * | 1994-12-01 | 1996-10-15 | Analog Devices, Inc. | Sensor with separate actuator and sense fingers |
US5587518A (en) * | 1994-12-23 | 1996-12-24 | Ford Motor Company | Accelerometer with a combined self-test and ground electrode |
DE19541388A1 (de) * | 1995-11-07 | 1997-05-15 | Telefunken Microelectron | Mikromechanischer Beschleunigungssensor |
US5767584A (en) * | 1995-11-14 | 1998-06-16 | Grow International Corp. | Method for generating electrical power from fuel cell powered cars parked in a conventional parking lot |
US6107691A (en) * | 1995-11-14 | 2000-08-22 | Grow International Corp. | Methods for utilizing the electrical and non electrical outputs of fuel cell powered vehicles |
US5880369A (en) * | 1996-03-15 | 1999-03-09 | Analog Devices, Inc. | Micromachined device with enhanced dimensional control |
DE19639946B4 (de) * | 1996-09-27 | 2006-09-21 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
US6196067B1 (en) * | 1998-05-05 | 2001-03-06 | California Institute Of Technology | Silicon micromachined accelerometer/seismometer and method of making the same |
US6543286B2 (en) * | 2001-01-26 | 2003-04-08 | Movaz Networks, Inc. | High frequency pulse width modulation driver, particularly useful for electrostatically actuated MEMS array |
US6829937B2 (en) * | 2002-06-17 | 2004-12-14 | Vti Holding Oy | Monolithic silicon acceleration sensor |
WO2004027435A1 (en) * | 2002-09-18 | 2004-04-01 | Carnegie Mellon University | Built-in self test of mems |
US6871992B2 (en) * | 2002-09-23 | 2005-03-29 | Seong Woong Kim | Brake light system |
FI119528B (fi) * | 2003-02-11 | 2008-12-15 | Vti Technologies Oy | Kapasitiivinen kiihtyvyysanturirakenne |
US6841992B2 (en) * | 2003-02-18 | 2005-01-11 | Honeywell International, Inc. | MEMS enhanced capacitive pick-off and electrostatic rebalance electrode placement |
US7047808B2 (en) * | 2003-02-28 | 2006-05-23 | Bae Systems Plc | Accelerometer |
US6935175B2 (en) * | 2003-11-20 | 2005-08-30 | Honeywell International, Inc. | Capacitive pick-off and electrostatic rebalance accelerometer having equalized gas damping |
KR20080003905A (ko) * | 2005-05-05 | 2008-01-08 | 에이에프에스 트리니티 파워 코포레이션 | 고속 에너지 저장 장치를 포함하는 플러그인 하이브리드차량 |
US7337671B2 (en) * | 2005-06-03 | 2008-03-04 | Georgia Tech Research Corp. | Capacitive microaccelerometers and fabrication methods |
FI119299B (fi) * | 2005-06-17 | 2008-09-30 | Vti Technologies Oy | Menetelmä kapasitiivisen kiihtyvyysanturin valmistamiseksi ja kapasitiivinen kiihtyvyysanturi |
WO2007037972A2 (en) * | 2005-09-23 | 2007-04-05 | Afs Trinity Power Corporation | Method and apparatus for power electronics and control of plug-in hybrid propulsion with fast energy storage |
JP5117716B2 (ja) * | 2006-02-14 | 2013-01-16 | セイコーインスツル株式会社 | 力学量センサ |
FR2898683B1 (fr) * | 2006-03-14 | 2008-05-23 | Commissariat Energie Atomique | Accelerometre triaxial a membrane |
US7578189B1 (en) * | 2006-05-10 | 2009-08-25 | Qualtre, Inc. | Three-axis accelerometers |
US20070282495A1 (en) * | 2006-05-11 | 2007-12-06 | University Of Delaware | System and method for assessing vehicle to grid (v2g) integration |
US7552637B2 (en) * | 2006-09-19 | 2009-06-30 | Honeywell International Inc. | Torque driving circuit |
US7610809B2 (en) * | 2007-01-18 | 2009-11-03 | Freescale Semiconductor, Inc. | Differential capacitive sensor and method of making same |
US7578190B2 (en) * | 2007-08-03 | 2009-08-25 | Freescale Semiconductor, Inc. | Symmetrical differential capacitive sensor and method of making same |
US8116915B2 (en) * | 2008-03-03 | 2012-02-14 | University Of Delaware | Methods and apparatus using hierarchical priority and control algorithms for grid-integrated vehicles |
DE102008017156A1 (de) * | 2008-04-03 | 2009-10-08 | Continental Teves Ag & Co. Ohg | Mikromechanischer Beschleunigungssensor |
DE102008040855B4 (de) * | 2008-07-30 | 2022-05-25 | Robert Bosch Gmbh | Dreiachsiger Beschleunigungssensor |
-
2009
- 2009-05-15 DE DE102009021567A patent/DE102009021567A1/de active Pending
- 2009-05-15 US US12/992,401 patent/US20110113880A1/en not_active Abandoned
- 2009-05-15 WO PCT/EP2009/055942 patent/WO2009138498A1/de active Application Filing
- 2009-05-15 EP EP09745830A patent/EP2279422A1/de not_active Ceased
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060156818A1 (en) * | 2001-03-08 | 2006-07-20 | Konrad Kapser | Micromechanical capacitive acceleration sensor |
WO2003104823A1 (de) * | 2002-06-11 | 2003-12-18 | Conti Temic Microelectronic Gmbh | Mehrachsiger monolithischer beschleunigungssensor |
Also Published As
Publication number | Publication date |
---|---|
WO2009138498A9 (de) | 2010-01-21 |
WO2009138498A1 (de) | 2009-11-19 |
DE102009021567A1 (de) | 2009-12-31 |
US20110113880A1 (en) | 2011-05-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2263093B1 (de) | Mikromechanischer beschleunigungssensor | |
EP2279422A1 (de) | Mikromechanischer beschleunigungssensor | |
DE112015004530B4 (de) | MEMS-Beschleunigungsmesser mit Z-Achsen-Ankerverfolgung | |
DE102008040855B4 (de) | Dreiachsiger Beschleunigungssensor | |
DE69113632T2 (de) | Monolithischer beschleunigungsmesser. | |
DE102008041327B4 (de) | Dreiachsiger Beschleunigungssensor | |
EP2394177B1 (de) | Beschleunigungssensor und verfahren zum betreiben eines beschleunigungssensors | |
DE69405651T2 (de) | Beschleunigungsmessaufnehmer | |
EP1512020B1 (de) | Mehrachsiger monolithischer beschleunigungssensor | |
DE102006057929A1 (de) | Mikromechanischer Inertialsensor mit verringerter Empfindlichkeit gegenüber dem Einfluss driftender Oberflächenladungen und zu seinem Betrieb geeignetes Verfahren | |
EP2274627A1 (de) | Mikromechanisches bauelement und verfahren zum betrieb eines mikromechanischen bauelements | |
DE102009046807A1 (de) | Verfahren zur der Empfindlichkeitsbestimmung eines Beschleunigungs- oder Magnetfeldsensors | |
DE102011076008B4 (de) | Kraftaufnehmer, insbesondere Wägezelle | |
DE102009047018A1 (de) | Verfahren zum Abgleich eines Beschleunigungssensors und Beschleunigungssensor | |
DE10329665B4 (de) | Drucksensor, Chip mit einem Drucksensor und Verfahren zum Erfassen eines Nutzdrucks | |
DE102006024671A1 (de) | Mikromechanisches Bauelement | |
EP3110746B1 (de) | Mikromechanisches bauteil mit geteilter, galvanisch isolierter aktiver struktur und verfahren zum betreiben eines solchen bauteils | |
DE102019200839A1 (de) | Mikromechanischer Inertialsensor | |
WO2002029421A1 (de) | Verfahren und vorrichtung zum elektrischen nullpunktabgleich für ein mikromechanisches bauelement | |
DE102008040567B4 (de) | Verfahren zum Betrieb eines Sensormoduls und Sensormodul | |
DE19813941A1 (de) | Mikromechanischer Beschleunigungssensor | |
DE102019216984A1 (de) | Mikromechanische Sensoranordnung | |
DE102019218326A1 (de) | Mikromechanischer Sensor mit Elektroden zur Stressmessung und stresskompensierte Sensorvorrichtung | |
DE102007046306B4 (de) | Beschleunigungssensor | |
DE102020119371B3 (de) | Mikroelektromechanischer Beschleunigungssensor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20101215 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL BA RS |
|
DAX | Request for extension of the european patent (deleted) | ||
17Q | First examination report despatched |
Effective date: 20170724 |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: CONTINENTAL TEVES AG & CO. OHG |
|
REG | Reference to a national code |
Ref country code: DE Ref legal event code: R003 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN REFUSED |
|
18R | Application refused |
Effective date: 20191222 |