EP2228540A3 - Anordnung mit Vakuumpumpe - Google Patents

Anordnung mit Vakuumpumpe Download PDF

Info

Publication number
EP2228540A3
EP2228540A3 EP10002262.3A EP10002262A EP2228540A3 EP 2228540 A3 EP2228540 A3 EP 2228540A3 EP 10002262 A EP10002262 A EP 10002262A EP 2228540 A3 EP2228540 A3 EP 2228540A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
chamber
flange
assembly
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10002262.3A
Other languages
English (en)
French (fr)
Other versions
EP2228540A2 (de
EP2228540B1 (de
Inventor
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2228540A2 publication Critical patent/EP2228540A2/de
Publication of EP2228540A3 publication Critical patent/EP2228540A3/de
Application granted granted Critical
Publication of EP2228540B1 publication Critical patent/EP2228540B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

Die Erfindung betrifft eine Anordnung mit einer Vakuumpumpe (1; 100)), welche einen Pumpenflansch (10; 110; 70) aufweist, einer Kammer (2), welche einen Kammerflansch (20; 120) aufweist, mit einer Flanschverbindung zur vakuumdichten Verbindung von Kammer und Vakuumpumpe. Um die Montierbarkeit zu erhöhen und gleichzeitig eine einfache Konstruktion vorzustellen, wird vorgeschlagen, dass die Anordnung eine Kraftübertragungsstruktur (65; 165) umfasst, welche eine Kraft von einer Einleitungsstelle (56; 156) an wenigstens einen in der Flanschverbindung liegenden Wirkpunkt (59; 159) überträgt.
EP10002262.3A 2009-03-14 2010-03-05 Anordnung mit Vakuumpumpe Active EP2228540B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200910013244 DE102009013244A1 (de) 2009-03-14 2009-03-14 Anordnung mit Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2228540A2 EP2228540A2 (de) 2010-09-15
EP2228540A3 true EP2228540A3 (de) 2014-07-16
EP2228540B1 EP2228540B1 (de) 2016-08-03

Family

ID=42154832

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10002262.3A Active EP2228540B1 (de) 2009-03-14 2010-03-05 Anordnung mit Vakuumpumpe

Country Status (2)

Country Link
EP (1) EP2228540B1 (de)
DE (1) DE102009013244A1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2516969B (en) * 2013-08-09 2017-04-19 Edwards Ltd Vacuum system securing devices
DE102013109637A1 (de) 2013-09-04 2015-03-05 Pfeiffer Vacuum Gmbh Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe
DE102013222167B4 (de) 2013-10-31 2024-07-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3026303B1 (de) * 2014-11-28 2021-01-06 Pfeiffer Vacuum Gmbh Vakuumpumpe, vakuumzubehör und dichtung zu dessen abdichtung
EP3702622A1 (de) * 2019-02-26 2020-09-02 Pfeiffer Vacuum Gmbh Vakuumsystem
EP3763944B1 (de) * 2020-03-31 2022-09-07 Pfeiffer Vacuum Technology AG Befestigungsschiene mit exzentereinrichtung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1090231A1 (de) * 1998-05-26 2001-04-11 Leybold Vakuum GmbH Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art
DE102005020904A1 (de) * 2005-05-07 2006-11-09 Leybold Vacuum Gmbh Vakuum-Pumpenanordnung
US20080309071A1 (en) * 2007-06-15 2008-12-18 Varian, Inc. Split joint for vacuum pumps and method for obtaining thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1090231A1 (de) * 1998-05-26 2001-04-11 Leybold Vakuum GmbH Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art
DE102005020904A1 (de) * 2005-05-07 2006-11-09 Leybold Vacuum Gmbh Vakuum-Pumpenanordnung
US20080309071A1 (en) * 2007-06-15 2008-12-18 Varian, Inc. Split joint for vacuum pumps and method for obtaining thereof

Also Published As

Publication number Publication date
EP2228540A2 (de) 2010-09-15
DE102009013244A1 (de) 2010-09-16
EP2228540B1 (de) 2016-08-03

Similar Documents

Publication Publication Date Title
EP2228540A3 (de) Anordnung mit Vakuumpumpe
WO2017058598A3 (en) Compressible adjunct and method for making the same
EP4245284A3 (de) Verbindungs- und behältersystem mit schräger sollbruchlinie
EP2922145A3 (de) Verbindungsanordnung und entsprechendes Verfahren
EP1975541A3 (de) Schaft eines Repetiergewehrs und Systemkasten eines Repetiergewehrs für einen derartigen Schaft
WO2011046623A3 (en) Hiv-1 antibodies
WO2007080308A3 (fr) Emulsion huile dans eau thermoreversible
EP1927728A3 (de) Verfahren zur Spannungsreduktion bei Verbundwerkstoffen
EP4324737A3 (de) Tragflügel
EP3130501A3 (de) Achsenanordnung mit kupplungskragenaktuatormechanismus
EP3081266A3 (de) Flammenrückschlagsicherung
EP2787223A3 (de) Dichtungsanordnung und Verfahren zur Formung einer Dichtungsanordnung
WO2016075150A3 (de) Optoelektronische vorrichtung, verwendung eines dualen emitters als wellenlängenkonversionsstoff
MX2017013450A (es) Metodo para producir producto moldeado por prensa, producto moldeado por prensa y dispositivo de prensado.
EP3594535A3 (de) Ablenkplatte für schmierflüssigkeit
WO2019147717A8 (en) Manufacture of novolacs and resoles using lignin
EP3109498A3 (de) Baueinheit für eine synchronisierungseinheit eines zahnräderwechselgetriebes
EP2656975A3 (de) Vorrichtung zur Blattverarbeitung
EP2292935A3 (de) Radiallüftergehäuse
EP2891834A3 (de) Spannungswellengetriebe
EP2913550A3 (de) Keilschlosswellenverriegelungssystem
EP2213424A3 (de) Gelenkanordnung
EP2133581A3 (de) Verbindungselement
EP3213811A3 (de) Schaufel für ein laufrad eines rührers, laufrad und rührer
EP2453231A3 (de) Hohlfaseranschluss

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

AX Request for extension of the european patent

Extension state: AL BA ME RS

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

AX Request for extension of the european patent

Extension state: AL BA ME RS

RIC1 Information provided on ipc code assigned before grant

Ipc: F04D 29/60 20060101ALI20140606BHEP

Ipc: F04D 19/04 20060101AFI20140606BHEP

17P Request for examination filed

Effective date: 20150115

RBV Designated contracting states (corrected)

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

17Q First examination report despatched

Effective date: 20150316

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

INTG Intention to grant announced

Effective date: 20160120

INTG Intention to grant announced

Effective date: 20160125

INTG Intention to grant announced

Effective date: 20160211

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

Ref country code: AT

Ref legal event code: REF

Ref document number: 817525

Country of ref document: AT

Kind code of ref document: T

Effective date: 20160815

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502010012106

Country of ref document: DE

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20160803

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161103

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161203

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161205

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161104

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502010012106

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20161103

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20170504

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20171130

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170305

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170331

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170331

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170331

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170305

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20170331

REG Reference to a national code

Ref country code: AT

Ref legal event code: MM01

Ref document number: 817525

Country of ref document: AT

Kind code of ref document: T

Effective date: 20170305

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170331

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: AT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20170305

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20100305

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20160803

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20160803

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CZ

Payment date: 20240227

Year of fee payment: 15

Ref country code: GB

Payment date: 20240320

Year of fee payment: 15

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20240329

Year of fee payment: 15

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20240528

Year of fee payment: 15