EP2228540A3 - Anordnung mit Vakuumpumpe - Google Patents
Anordnung mit Vakuumpumpe Download PDFInfo
- Publication number
- EP2228540A3 EP2228540A3 EP10002262.3A EP10002262A EP2228540A3 EP 2228540 A3 EP2228540 A3 EP 2228540A3 EP 10002262 A EP10002262 A EP 10002262A EP 2228540 A3 EP2228540 A3 EP 2228540A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- vacuum pump
- chamber
- flange
- assembly
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 abstract 1
- 238000010276 construction Methods 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200910013244 DE102009013244A1 (de) | 2009-03-14 | 2009-03-14 | Anordnung mit Vakuumpumpe |
Publications (3)
Publication Number | Publication Date |
---|---|
EP2228540A2 EP2228540A2 (de) | 2010-09-15 |
EP2228540A3 true EP2228540A3 (de) | 2014-07-16 |
EP2228540B1 EP2228540B1 (de) | 2016-08-03 |
Family
ID=42154832
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10002262.3A Active EP2228540B1 (de) | 2009-03-14 | 2010-03-05 | Anordnung mit Vakuumpumpe |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP2228540B1 (de) |
DE (1) | DE102009013244A1 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2516969B (en) * | 2013-08-09 | 2017-04-19 | Edwards Ltd | Vacuum system securing devices |
DE102013109637A1 (de) | 2013-09-04 | 2015-03-05 | Pfeiffer Vacuum Gmbh | Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe |
DE102013222167B4 (de) | 2013-10-31 | 2024-07-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
EP3026303B1 (de) * | 2014-11-28 | 2021-01-06 | Pfeiffer Vacuum Gmbh | Vakuumpumpe, vakuumzubehör und dichtung zu dessen abdichtung |
EP3702622A1 (de) * | 2019-02-26 | 2020-09-02 | Pfeiffer Vacuum Gmbh | Vakuumsystem |
EP3763944B1 (de) * | 2020-03-31 | 2022-09-07 | Pfeiffer Vacuum Technology AG | Befestigungsschiene mit exzentereinrichtung |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1090231A1 (de) * | 1998-05-26 | 2001-04-11 | Leybold Vakuum GmbH | Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art |
DE102005020904A1 (de) * | 2005-05-07 | 2006-11-09 | Leybold Vacuum Gmbh | Vakuum-Pumpenanordnung |
US20080309071A1 (en) * | 2007-06-15 | 2008-12-18 | Varian, Inc. | Split joint for vacuum pumps and method for obtaining thereof |
-
2009
- 2009-03-14 DE DE200910013244 patent/DE102009013244A1/de active Pending
-
2010
- 2010-03-05 EP EP10002262.3A patent/EP2228540B1/de active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1090231A1 (de) * | 1998-05-26 | 2001-04-11 | Leybold Vakuum GmbH | Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art |
DE102005020904A1 (de) * | 2005-05-07 | 2006-11-09 | Leybold Vacuum Gmbh | Vakuum-Pumpenanordnung |
US20080309071A1 (en) * | 2007-06-15 | 2008-12-18 | Varian, Inc. | Split joint for vacuum pumps and method for obtaining thereof |
Also Published As
Publication number | Publication date |
---|---|
EP2228540A2 (de) | 2010-09-15 |
DE102009013244A1 (de) | 2010-09-16 |
EP2228540B1 (de) | 2016-08-03 |
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