EP2197107A3 - Surface acoustic wave filter and communication apparatus - Google Patents

Surface acoustic wave filter and communication apparatus Download PDF

Info

Publication number
EP2197107A3
EP2197107A3 EP10158450A EP10158450A EP2197107A3 EP 2197107 A3 EP2197107 A3 EP 2197107A3 EP 10158450 A EP10158450 A EP 10158450A EP 10158450 A EP10158450 A EP 10158450A EP 2197107 A3 EP2197107 A3 EP 2197107A3
Authority
EP
European Patent Office
Prior art keywords
conductor pattern
piezoelectric substrate
disposed
wiring
acoustic wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10158450A
Other languages
German (de)
French (fr)
Other versions
EP2197107A2 (en
EP2197107B1 (en
Inventor
Teruhisa Shibahara
Norihiko Nakahashi
Hiroki Watanabe
Yuichi Takamine
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=32775225&utm_source=***_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP2197107(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of EP2197107A2 publication Critical patent/EP2197107A2/en
Publication of EP2197107A3 publication Critical patent/EP2197107A3/en
Application granted granted Critical
Publication of EP2197107B1 publication Critical patent/EP2197107B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/0023Balance-unbalance or balance-balance networks
    • H03H9/0028Balance-unbalance or balance-balance networks using surface acoustic wave devices
    • H03H9/0047Balance-unbalance or balance-balance networks using surface acoustic wave devices having two acoustic tracks
    • H03H9/0066Balance-unbalance or balance-balance networks using surface acoustic wave devices having two acoustic tracks being electrically parallel
    • H03H9/0071Balance-unbalance or balance-balance networks using surface acoustic wave devices having two acoustic tracks being electrically parallel the balanced terminals being on the same side of the tracks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00Auxiliary devices
    • H01P1/20Frequency-selective devices, e.g. filters
    • H01P1/201Filters for transverse electromagnetic waves
    • H01P1/203Strip line filters
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/0023Balance-unbalance or balance-balance networks
    • H03H9/0028Balance-unbalance or balance-balance networks using surface acoustic wave devices
    • H03H9/0033Balance-unbalance or balance-balance networks using surface acoustic wave devices having one acoustic track only
    • H03H9/0038Balance-unbalance or balance-balance networks using surface acoustic wave devices having one acoustic track only the balanced terminals being on the same side of the track
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/0023Balance-unbalance or balance-balance networks
    • H03H9/0028Balance-unbalance or balance-balance networks using surface acoustic wave devices
    • H03H9/0085Balance-unbalance or balance-balance networks using surface acoustic wave devices having four acoustic tracks
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/0023Balance-unbalance or balance-balance networks
    • H03H9/0028Balance-unbalance or balance-balance networks using surface acoustic wave devices
    • H03H9/0085Balance-unbalance or balance-balance networks using surface acoustic wave devices having four acoustic tracks
    • H03H9/009Lattice filters
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544Transducers of particular shape or position
    • H03H9/14576Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger
    • H03H9/14582Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger the last fingers having a different pitch
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544Transducers of particular shape or position
    • H03H9/14588Horizontally-split transducers
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • H03H9/6423Means for obtaining a particular transfer characteristic
    • H03H9/6433Coupled resonator filters
    • H03H9/6483Ladder SAW filters

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Electromagnetism (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

A surface acoustic wave filter (700) comprises a piezoelectric substrate (100). A first conductor pattern is disposed on the piezoelectric substrate (100): a portion of the first conductor pattern defines IDTs (701a,b;702a-c) and pads (710-715), and at least another portion of the first conductor pattern defines a first wiring trace (726). An insulating pattern (2) is disposed on the piezoelectric substrate (100) and on the first wiring trace, and has a permittivity less than that of the piezoelectric substrate. A second conductor pattern is disposed on the piezoelectric substrate (100) and on the insulating pattern (2) and is in conduction with the first conductor pattern. At least a portion of the second conductor pattern defines a second wiring trace (725). At a portion where wiring traces having different potentials face each other in a plan view in the first and second wiring traces, at least a portion (723,727) of at least one of the wiring traces is disposed on the insulating pattern (2). The first wiring trace (726) crosses the second wiring trace (725) at at least one point, with the insulating pattern (2) disposed therebetween.
EP10158450.6A 2003-02-24 2004-02-24 Surface acoustic wave filter and communication apparatus Expired - Lifetime EP2197107B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003046269 2003-02-24
JP2003406255A JP4222197B2 (en) 2003-02-24 2003-12-04 Surface acoustic wave filter, communication device
EP04290489A EP1453198B1 (en) 2003-02-24 2004-02-24 Surface acoustic wave filter and communication apparatus

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP04290489.6 Division 2004-02-24

Publications (3)

Publication Number Publication Date
EP2197107A2 EP2197107A2 (en) 2010-06-16
EP2197107A3 true EP2197107A3 (en) 2010-06-23
EP2197107B1 EP2197107B1 (en) 2013-06-26

Family

ID=32775225

Family Applications (2)

Application Number Title Priority Date Filing Date
EP04290489A Expired - Lifetime EP1453198B1 (en) 2003-02-24 2004-02-24 Surface acoustic wave filter and communication apparatus
EP10158450.6A Expired - Lifetime EP2197107B1 (en) 2003-02-24 2004-02-24 Surface acoustic wave filter and communication apparatus

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP04290489A Expired - Lifetime EP1453198B1 (en) 2003-02-24 2004-02-24 Surface acoustic wave filter and communication apparatus

Country Status (5)

Country Link
US (1) US7295089B2 (en)
EP (2) EP1453198B1 (en)
JP (1) JP4222197B2 (en)
KR (1) KR100538484B1 (en)
CN (1) CN100372230C (en)

Families Citing this family (64)

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JP4403819B2 (en) * 2004-02-09 2010-01-27 株式会社村田製作所 Manufacturing method of electronic parts
JP3993579B2 (en) * 2004-04-28 2007-10-17 富士通メディアデバイス株式会社 Balanced output type filter
WO2006003787A1 (en) * 2004-06-30 2006-01-12 Murata Manufacturing Co., Ltd. Balance type elastic wave filter and elastic wave filter device
CN1842961B (en) * 2004-07-23 2010-10-20 株式会社村田制作所 Acoustic surface wave device
US7479853B2 (en) * 2004-09-02 2009-01-20 Murata Manufacturing Co., Ltd. Balanced type surface acoustic wave filter
JP4412123B2 (en) * 2004-09-09 2010-02-10 エプソントヨコム株式会社 Surface acoustic wave device
US7274270B2 (en) * 2005-04-13 2007-09-25 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Resonator matching network
DE112006002957B4 (en) 2005-11-14 2010-12-16 Murata Manufacturing Co. Ltd., Nagaokakyo-shi A method of manufacturing a surface acoustic wave device and surface acoustic wave device
JP4694951B2 (en) * 2005-11-16 2011-06-08 京セラ株式会社 Surface acoustic wave device
CN1976222B (en) * 2005-11-30 2011-09-21 京瓷株式会社 Acoustic surface wave element, acoustic surface wave device, and communication device with same
JP2007259430A (en) * 2006-02-24 2007-10-04 Matsushita Electric Ind Co Ltd Surface acoustic wave filter, antenna duplexer, high frequency module using the same, and communication device
JP2011217420A (en) * 2006-02-24 2011-10-27 Panasonic Corp Surface acoustic wave filter, antenna duplexer, high-frequency module using them, and communication apparatus
US7579928B2 (en) * 2006-04-03 2009-08-25 Kyocera Corporation Surface acoustic wave device and communication device
WO2007116760A1 (en) * 2006-04-06 2007-10-18 Murata Manufacturing Co., Ltd. Duplexer
US8143681B2 (en) * 2006-04-20 2012-03-27 The George Washington University Saw devices, processes for making them, and methods of use
US20100007444A1 (en) * 2006-04-20 2010-01-14 Anis Nurashikin Nordin GHz Surface Acoustic Resonators in RF-CMOS
JP5121178B2 (en) * 2006-07-24 2013-01-16 京セラ株式会社 Surface acoustic wave device and communication device
JP5025181B2 (en) * 2006-07-24 2012-09-12 京セラ株式会社 Surface acoustic wave device and communication device
WO2008018452A1 (en) * 2006-08-07 2008-02-14 Kyocera Corporation Method for manufacturing surface acoustic wave device
JP4244057B2 (en) * 2006-08-30 2009-03-25 富士通メディアデバイス株式会社 Balance filter and duplexer
DE102006042546A1 (en) * 2006-09-11 2008-03-27 Epcos Ag With surface waves working electrical component
JP4702454B2 (en) * 2007-02-02 2011-06-15 株式会社村田製作所 Elastic wave filter device
US20090124513A1 (en) * 2007-04-20 2009-05-14 Patricia Berg Multiplex Biosensor
KR101027593B1 (en) 2007-05-29 2011-04-06 가부시키가이샤 무라타 세이사쿠쇼 Acoustic wave branching filter
WO2008146524A1 (en) * 2007-05-30 2008-12-04 Murata Manufacturing Co., Ltd. Surface acoustic wave filter device
JP2009010559A (en) * 2007-06-27 2009-01-15 Nippon Dempa Kogyo Co Ltd Piezoelectric component and method of manufacturing the same
US20090016036A1 (en) * 2007-07-13 2009-01-15 Wong Shaw Fong Conductor reinforcement for circuit boards
JP5110611B2 (en) * 2007-07-26 2012-12-26 京セラ株式会社 Surface acoustic wave device and communication device
US8031034B1 (en) 2007-08-27 2011-10-04 Triquint Semiconductor, Inc. Surface acoustic wave filter and method for improved rejection
US8138858B1 (en) * 2007-10-29 2012-03-20 Rf Micro Devices, Inc. Architectures using multiple dual-mode surface acoustic wave devices
JP2009147914A (en) * 2007-11-22 2009-07-02 Panasonic Corp Surface acoustic wave filter and surface acoustic wave duplexer
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CN101965683B (en) * 2008-03-19 2014-01-29 株式会社村田制作所 Surface acoustic wave device
EP2197108B1 (en) 2008-03-27 2013-01-30 Murata Manufacturing Co. Ltd. Elastic wave filter device
EP2290817A4 (en) * 2008-06-16 2011-08-24 Murata Manufacturing Co Elastic boundary wave device
KR101232242B1 (en) * 2008-11-04 2013-02-12 가부시키가이샤 무라타 세이사쿠쇼 Elastic wave filter device and module comprising the elastic wave filter device
CN102150364B (en) 2008-11-04 2013-12-11 株式会社村田制作所 Elastic wave filter device
JP4809448B2 (en) * 2009-02-02 2011-11-09 日本電波工業株式会社 Duplexer
CN102804600B (en) * 2009-06-26 2015-09-02 京瓷株式会社 Surface acoustic wave filter and use its channel-splitting filter
JP5325729B2 (en) * 2009-09-28 2013-10-23 太陽誘電株式会社 Elastic wave filter
US8169279B2 (en) * 2009-10-23 2012-05-01 Lojack Operating Company, Lp Notched saw image frequency rejection filter system
US9099981B2 (en) 2010-01-20 2015-08-04 Skyworks Panasonic Filter Solutions Japan Co., Ltd. Acoustic wave device having an inorganic insulator and an organic insulator
DE102010021164B4 (en) * 2010-05-21 2019-02-21 Snaptrack, Inc. Balanced / Unbalanced working SAW filter
JP5142302B2 (en) * 2010-07-13 2013-02-13 太陽誘電株式会社 Balance filter
US8960004B2 (en) 2010-09-29 2015-02-24 The George Washington University Synchronous one-pole surface acoustic wave resonator
US9153764B2 (en) * 2011-03-08 2015-10-06 Nokia Technologies Oy Apparatus for transducing a surface acoustic wave
JP5648745B2 (en) * 2011-07-11 2015-01-07 株式会社村田製作所 Elastic wave filter device
JP6116120B2 (en) 2012-01-24 2017-04-19 太陽誘電株式会社 Acoustic wave device and method of manufacturing acoustic wave device
CN104040887B (en) * 2012-02-06 2016-08-17 株式会社村田制作所 Filter apparatus
CN103929147B (en) * 2013-01-11 2017-02-01 中国科学院声学研究所 Single-ended pair SAW resonator with high quality factors
WO2014167752A1 (en) * 2013-04-10 2014-10-16 株式会社村田製作所 Duplexer
JP6176324B2 (en) 2013-06-13 2017-08-09 株式会社村田製作所 Filter device and duplexer
JP5880529B2 (en) 2013-11-29 2016-03-09 株式会社村田製作所 Surface acoustic wave filter
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CN107078720B (en) * 2014-10-06 2021-12-24 株式会社村田制作所 Ladder filter and duplexer
CN107852143B (en) * 2015-07-28 2021-02-26 株式会社村田制作所 Elastic wave device
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CN110679085B (en) * 2017-06-05 2023-11-21 株式会社村田制作所 Elastic wave filter device
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Also Published As

Publication number Publication date
KR20040076222A (en) 2004-08-31
JP2004282707A (en) 2004-10-07
EP1453198A3 (en) 2006-03-01
EP2197107A2 (en) 2010-06-16
JP4222197B2 (en) 2009-02-12
CN100372230C (en) 2008-02-27
CN1525640A (en) 2004-09-01
US7295089B2 (en) 2007-11-13
US20040196119A1 (en) 2004-10-07
EP1453198A2 (en) 2004-09-01
EP1453198B1 (en) 2013-01-30
KR100538484B1 (en) 2005-12-23
EP2197107B1 (en) 2013-06-26

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