EP2150360A4 - Methods and apparatus for efficient operation of an abatement system - Google Patents

Methods and apparatus for efficient operation of an abatement system

Info

Publication number
EP2150360A4
EP2150360A4 EP08754676A EP08754676A EP2150360A4 EP 2150360 A4 EP2150360 A4 EP 2150360A4 EP 08754676 A EP08754676 A EP 08754676A EP 08754676 A EP08754676 A EP 08754676A EP 2150360 A4 EP2150360 A4 EP 2150360A4
Authority
EP
European Patent Office
Prior art keywords
methods
efficient operation
abatement system
abatement
efficient
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP08754676A
Other languages
German (de)
French (fr)
Other versions
EP2150360A1 (en
Inventor
Daniel O Clark
Robbert M Vermeulen
Youssef A Loldj
Belynda Flippo
Mehran Moalem
Shaun W Crawford
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of EP2150360A1 publication Critical patent/EP2150360A1/en
Publication of EP2150360A4 publication Critical patent/EP2150360A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/4184—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by fault tolerance, reliability of production system
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B9/00—Safety arrangements
    • G05B9/02—Safety arrangements electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45026—Circuit board, pcb
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P80/00—Climate change mitigation technologies for sector-wide applications
    • Y02P80/10—Efficient use of energy, e.g. using compressed air or pressurized fluid as energy carrier
    • Y02P80/15—On-site combined power, heat or cool generation or distribution, e.g. combined heat and power [CHP] supply

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Thermal Sciences (AREA)
  • Quality & Reliability (AREA)
  • Analytical Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)
  • General Factory Administration (AREA)
  • Chemical Vapour Deposition (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
EP08754676A 2007-05-25 2008-05-24 Methods and apparatus for efficient operation of an abatement system Withdrawn EP2150360A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US93173107P 2007-05-25 2007-05-25
PCT/US2008/006587 WO2008147524A1 (en) 2007-05-25 2008-05-24 Methods and apparatus for efficient operation of an abatement system

Publications (2)

Publication Number Publication Date
EP2150360A1 EP2150360A1 (en) 2010-02-10
EP2150360A4 true EP2150360A4 (en) 2013-01-23

Family

ID=40071430

Family Applications (1)

Application Number Title Priority Date Filing Date
EP08754676A Withdrawn EP2150360A4 (en) 2007-05-25 2008-05-24 Methods and apparatus for efficient operation of an abatement system

Country Status (7)

Country Link
US (2) US20080290041A1 (en)
EP (1) EP2150360A4 (en)
JP (2) JP5660888B2 (en)
KR (2) KR20150069034A (en)
CN (1) CN101678407A (en)
TW (2) TWI492270B (en)
WO (2) WO2008147523A1 (en)

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KR20080104372A (en) 2006-03-16 2008-12-02 어플라이드 머티어리얼스, 인코포레이티드 Methods and apparatus for pressure control in electronic device manufacturing systems
US20090175771A1 (en) * 2006-03-16 2009-07-09 Applied Materials, Inc. Abatement of effluent gas
KR101560705B1 (en) 2007-05-25 2015-10-16 어플라이드 머티어리얼스, 인코포레이티드 Methods and apparatus for assembling and operating electronic device manufacturing systems
JP5660888B2 (en) * 2007-05-25 2015-01-28 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Method and apparatus for efficient operation of an abatement system
WO2008156687A1 (en) * 2007-06-15 2008-12-24 Applied Materials, Inc. Methods and systems for designing and validating operation of abatement systems
WO2009055750A1 (en) 2007-10-26 2009-04-30 Applied Materials, Inc. Methods and apparatus for smart abatement using an improved fuel circuit
US8539257B2 (en) * 2008-10-08 2013-09-17 Applied Materials, Inc. Method and apparatus for detecting an idle mode of processing equipment
US20110220342A1 (en) * 2010-03-12 2011-09-15 Applied Materials, Inc. Methods and apparatus for selectively reducing flow of coolant in a processing system
US9740182B2 (en) 2012-06-08 2017-08-22 Applied Materials, Inc. Integrated controller solution for monitoring and controlling manufacturing equipment
KR20160106730A (en) * 2014-01-14 2016-09-12 어플라이드 머티어리얼스, 인코포레이티드 Nitrogen oxide abatement in semiconductor fabrication
US11332824B2 (en) * 2016-09-13 2022-05-17 Lam Research Corporation Systems and methods for reducing effluent build-up in a pumping exhaust system
GB2579788B (en) * 2018-12-13 2021-06-30 Edwards Ltd Abatement apparatus
KR102282582B1 (en) * 2019-10-14 2021-07-29 영진아이엔디(주) Energy saving type scrubber system for treating waste gas and method for the same

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WO2006095132A1 (en) * 2005-03-07 2006-09-14 Edwards Limited Apparatus for inhibiting the propagation of a flame front
US20070079849A1 (en) * 2005-10-12 2007-04-12 Richard Hogle Integrated chamber cleaning system

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US20010008123A1 (en) * 1998-04-15 2001-07-19 Michael W. Hayes Integrated ion implant scrubber system
US20050089455A1 (en) * 2003-10-24 2005-04-28 Marganski Paul J. Gas-using facility including portable dry scrubber system and/or over-pressure control arrangement
WO2005121912A1 (en) * 2004-06-07 2005-12-22 The Boc Group Plc Method of controlling operation of a processing system
WO2006095132A1 (en) * 2005-03-07 2006-09-14 Edwards Limited Apparatus for inhibiting the propagation of a flame front
US20070079849A1 (en) * 2005-10-12 2007-04-12 Richard Hogle Integrated chamber cleaning system

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* Cited by examiner, † Cited by third party
Title
See also references of WO2008147524A1 *

Also Published As

Publication number Publication date
WO2008147524A1 (en) 2008-12-04
KR20100033977A (en) 2010-03-31
KR101551170B1 (en) 2015-09-09
JP2010528476A (en) 2010-08-19
WO2008147523A1 (en) 2008-12-04
JP2015043430A (en) 2015-03-05
CN101678407A (en) 2010-03-24
JP5660888B2 (en) 2015-01-28
EP2150360A1 (en) 2010-02-10
TWI492270B (en) 2015-07-11
JP6023134B2 (en) 2016-11-09
TW200915124A (en) 2009-04-01
KR20150069034A (en) 2015-06-22
US20080310975A1 (en) 2008-12-18
TW200901271A (en) 2009-01-01
US20080290041A1 (en) 2008-11-27

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