EP2112256B1 - Method for producing a hollow fibre spinning nozzle - Google Patents

Method for producing a hollow fibre spinning nozzle Download PDF

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Publication number
EP2112256B1
EP2112256B1 EP09008291A EP09008291A EP2112256B1 EP 2112256 B1 EP2112256 B1 EP 2112256B1 EP 09008291 A EP09008291 A EP 09008291A EP 09008291 A EP09008291 A EP 09008291A EP 2112256 B1 EP2112256 B1 EP 2112256B1
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EP
European Patent Office
Prior art keywords
plate
hollow fibre
spinning nozzle
fibre spinning
shaped body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP09008291A
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German (de)
French (fr)
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EP2112256A1 (en
Inventor
Thorsten Keller
Jens-Holger Stahl
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Fresenius Medical Care Deutschland GmbH
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Fresenius Medical Care Deutschland GmbH
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Publication of EP2112256A1 publication Critical patent/EP2112256A1/en
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Classifications

    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01D—MECHANICAL METHODS OR APPARATUS IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS
    • D01D5/00—Formation of filaments, threads, or the like
    • D01D5/24—Formation of filaments, threads, or the like with a hollow structure; Spinnerette packs therefor
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01D—MECHANICAL METHODS OR APPARATUS IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS
    • D01D4/00—Spinnerette packs; Cleaning thereof
    • D01D4/02—Spinnerettes
    • D01D4/022—Processes or materials for the preparation of spinnerettes
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01D—MECHANICAL METHODS OR APPARATUS IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS
    • D01D5/00—Formation of filaments, threads, or the like
    • D01D5/28—Formation of filaments, threads, or the like while mixing different spinning solutions or melts during the spinning operation; Spinnerette packs therefor
    • D01D5/30—Conjugate filaments; Spinnerette packs therefor
    • D01D5/34—Core-skin structure; Spinnerette packs therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S425/00—Plastic article or earthenware shaping or treating: apparatus
    • Y10S425/217—Spinnerette forming conjugate, composite or hollow filaments
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49428—Gas and water specific plumbing component making
    • Y10T29/49432—Nozzle making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/4998—Combined manufacture including applying or shaping of fluent material

Definitions

  • the invention relates to a method for producing a hollow fiber spinneret.
  • Hollow-fiber spinnerets are already known which serve for the production of polymeric hollow-fiber membranes (cf. JP 2001254221 or JP-A-55090608 ).
  • such hollow fiber spinnerets 10 consist of a base body 12 made of metal, in which a plurality of bores 14, 16, 18, 22 are introduced.
  • a tube 20 is fitted, in which a Kayllstoff- or support means channel 22 is formed for introducing the precipitant or support means.
  • the holes 16 and 18 form Massezu Siliconkanäle for a polymer, which exits via an annular channel 22, which also consists of a corresponding hole, yes.
  • the known hollow-fiber spinnerets 10 In the production of the known hollow-fiber spinnerets 10, methods of conventional metal working are used. Here, therefore, the nozzle structure by the assembly of both nozzle parts, with an inaccuracy, for example, the geometry of the annulus 22 accumulated from the manufacturing errors in the manufacture of the base body 12 and the tube 20. There are also possible mounting errors added, which also contribute to an inaccuracy of Geometry can lead. Finally, the known in the art hollow fiber spinnerets are not arbitrarily reduced in size.
  • the object of the invention is to provide a method for producing a hollow-fiber spinneret with which even fine capillary membranes can be produced, wherein the manufacturing tolerances are minimized and the manufacturing process for these hollow fiber spinnerets is significantly cheaper.
  • the manufacturing process provides a completely novel design for hollow fiber spinnerets since the invention avoids conventional metalworking and uses microstructure techniques.
  • at least two plate-shaped bodies structured by microstructure technology are joined together to form the hollow-fiber spinneret.
  • a second unstructured plate is preferably added to a first plate formed by microstructure technology, wherein the second plate is patterned only after application to the first plate.
  • the plates are connected flat to each other.
  • a hollow fiber spinneret is made of two plates, the first plate excluding the mass feed channels, a mass flow equalization zone, a precipitant / proppant feed bore and a stub, while in the second plate a nozzle structure having a mass annulus and a needle with a precipitant / proppant bore excluded.
  • the second plate additionally contains the MassezuGermankanäle and the mass flow homogenization zone. There omitted on the first plate these elements and the needle stump.
  • a special feature of this construction is that the needle of the spinneret is connected to the first plate only at one end face.
  • the hollow-fiber spinneret produced by the preferred method with which a simple capillary hollow-fiber membrane can be produced, advantageously has the following dimensions: Thickness of the first plate: 0.250 - 1.500 mm Thickness of the second plate: 0.050 - 1.500 mm Outer diameter of the needle: 0.020 - 1.500 mm Length of the needle incl.
  • Needle stump 0.100 - 2.000 mm Diameter of the precipitation agent bore: 0.010 - 1.000 mm Length of precipitation agent hole: 0.150 - 2.500 mm Outer diameter of the annular gap: 0.040 - 3.000 mm Length of the annular gap: 0.050 - 1.500 mm Height of the spinneret: 0.300 - 3.000 mm Edge length of the spinneret: 1,000 - 25,00 mm.
  • a further preferred embodiment of the invention consists of a method in which the base body comprises three plates, the first plate containing feed channels, a homogenization zone and a needle stub with a central feed bore, a second plate adjoining the first plate, feed channels , a homogenizing zone and another needle stub having a concentric annular channel and a needle extension having a central bore, and wherein a third plate, which in turn adjoins the second plate, a nozzle structure comprising a central bore and two concentric annular gaps.
  • Capillary membranes with coextruded bilayers can be produced by means of this hollow-fiber spinneret produced by the process according to the invention.
  • the hollow fiber spinnerets are made of three individual plates, wherein the first plate has a central feed bore, a parallel to the first plate second feed channels and arranged to these equalization zones and a needle stub with concentric annular channel and a central bore and wherein the third plate adjoining the second plate has a nozzle structure consisting of a central bore and two concentric annular gaps.
  • the outer diameter of the multi-channel hollow fiber spinneret is less than 1 mm.
  • the outer diameter of the multi-channel hollow fiber spinneret is less than or equal to 0.45 mm.
  • FIG. 2 is a hollow fiber spinneret 10 made by a method according to a first embodiment of the invention.
  • the entire body 26 is composed of two individual plates 30 and 32.
  • ground supply channels 34, a mass flow equalization zone 36, a precipitating agent supply bore 38 and a needle stub 40 are formed by a corresponding etching operation, which will be described later in detail.
  • the three-dimensional design of here in FIG. 2 shown hollow fiber spinneret results from FIG. 4 , There it can be seen that the Massezu Foodkanäle, ie the channels for supplying the considered to the considered here.
  • the mass flow equalization zone 36 results as an annular space around the needle stub 40 around.
  • the Kayllstoffitznessersbohrung 38 is widened in its pointing to the top area, as in particular the FIG. 2 can be seen.
  • the monocrystalline silicon illustrated embodiment has a thickness of the first plate of 0.4 mm, a thickness of the second plate of 0.1 mm, an outside diameter of the needle of 0.05 mm, a length of the needle including a needle stump of 0.15 mm , a diameter of the precipitating agent bore 38 in the extended range of 0.1 mm, an outer diameter of the annular gap 42 of 0.1 mm and a length of the annular gap 42 of 0.1 mm.
  • the height of the main body 26, ie the height of the entire spinneret 10, is accordingly 0.5 mm, while an edge length of the main body 26 of the spinneret 10 is 2 mm.
  • hollow fiber spinnerets In the production of hollow fiber spinnerets by means of microstructure technology is assumed by 2 round wafer discs with 100 to 300 mm diameter. From these wafers, many spinneret structures are simultaneously produced. The individual hollow fiber spinnerets 10 are then obtained by dicing the finished wafers.
  • the separated split spinnerets can each contain a single nozzle structure, as shown here, but also several nozzle structures in a nozzle structure composite. This is achieved by not separating all the nozzle structures that have been formed on the wafer from each other, but that a plurality of nozzle structures together form a multiple nozzle unit, which are cut along the outer contour of the wafer.
  • the production of the spinnerets 10 begins with the structuring on both sides of a first wafer, which receives the elements 34, 36, 38, 40 of the plate 30 of the spinneret 10.
  • the structures are fabricated by a series of standard lithography techniques, ie photoresist masks, SiO, Si-N or the like, and standard etching techniques.
  • RIE reactive ion etching
  • D-RIE reactive ion deep etching
  • cryo-etching should be mentioned in particular.
  • Particularly suitable are special deep etching methods such as the D-RIE and the cryo-etching.
  • the lithographic masks for the front and back must be aligned visually.
  • the second wafer from which the second plate is to be produced, is bonded to the correspondingly structured first wafer.
  • all bonding methods can be used, anodic bonding, direct bonding or the like.
  • direct bonding is particularly suitable since the highest strengths are achieved and thus a good hold of the needle on the first plate is ensured.
  • the nozzle structure 48 with annular gap 42 and precipitation agent bore 46 is produced in a two-stage etching process. In the first step, only the deeper precipitation agent hole is advanced. In the second step, both structures are then finished etched.
  • the individual spinnerets are cut out of the wafer by suitable separation methods, such as wafer sawing or laser processing.
  • a hollow fiber spinneret 10 for producing a hollow fiber coextruded from two layers is shown.
  • a hollow-fiber spinneret 10 with a main body 100 consisting of three individual plates 102, 104 and 106 is shown.
  • the individual plates in turn consist of monocrystalline silicon.
  • a feed channel 108 is excluded for the precipitant.
  • feed channels 110, 112 for a first polymer are provided, which open into an associated homogenization zone 114.
  • the equalization zone 114 surrounds a corresponding needle stump 116.
  • a precipitant hole 118 is also excluded, which is surrounded by a further needle stub 120 and an annular space 122. Furthermore, further feed channels 124 with subsequent homogenization zone 126 are excluded in the second plate 104. Finally, the third plate points 106 two annular gaps 128 and 130 for the respective polymeric materials to be coextruded, and a needle 132 with precipitant well bore 134.
  • the supply channels 124 are each configured differently. While in the embodiment according to the FIG. 3a the feed channel 124 for the second polymer is provided only in the second plate 104, which runs in the variant according to the FIG. 3b both through the second plate 104 as well as through the third plate 106.
  • the second polymer feed passage 124 extends through the second plate 104 and the first plate 102 as shown in FIG Figure 3c shown.
  • the representation according to FIG. 5 corresponds to the section according to FIG. 3a , wherein it is clear here that 8 feed channels 112 are arranged in a star shape, while only 4 feed channels 124 are arranged in a cross shape.
  • the three plates 102, 104 and 106 are in turn connected to the main body 100 by a suitable bonding method, advantageously direct bonding. Otherwise corresponds to the manufacturing method for the hollow fiber spinneret 10 according to the Figures 3 and 5 , analogous to that, as already stated by the FIG. 2 and 4 was explained in detail.

Abstract

A hollow fiber spinning nozzle comprises a base element with precipitating agent/support agent as well as inlet channels together with a nozzle structure with an outflow opening and a needle with a borehole for a precipitating agent. The base element comprises at least two microstructured flat bodies brought together.

Description

Die Erfindung betrifft ein Verfahren zur Herstellung einer Hohlfaser-Spinndüse.The invention relates to a method for producing a hollow fiber spinneret.

Es sind bereits Hohlfaser-Spinndüsen bekannt, die zur Herstellung von polymeren Hohlfasermembranen dienen (vgl. JP 2001254221 oder JP-A-55090 608 ). Wie in der Figur 1 gemäß der beigefügten Zeichnung dargestellt, bestehen derartige Hohlfaser-Spinndüsen 10 aus einem Grundkörper 12 aus Metall, in welchen mehrere Bohrungen 14, 16, 18, 22 eingebracht sind. In die Bohrung 14 ist ein Röhrchen 20 eingepasst, in welchem ein Fällmittel- bzw. Stützmittelkanal 22 zum Einbringen des Fällmittels bzw. Stützmittels ausgebildet ist. Die Bohrungen 16 und 18 bilden Massezuführkanäle für ein Polymer, das über einen Ringkanal 22, der ja ebenfalls aus einer entsprechenden Bohrung besteht, austritt. Bei der Herstellung der bekannten Hohlfaser-Spinndüsen 10 werden Verfahren der üblichen Metallbearbeitung angewandt. Hier entsteht also die Düsenstruktur durch den Zusammenbau beider Düsenteile, wobei sich eine Ungenauigkeit, beispielsweise der Geometrie des Ringraums 22 aufsummiert aus den Fertigungsfehlern beim Fertigen des Grundkörpers 12 und des Röhrchens 20. Es treten darüber hinaus mögliche Montagefehler hinzu, die ebenfalls zu einer Ungenauigkeit der Geometrie führen können. Schließlich sind die gemäß dem Stand der Technik bekannten Hohlfaser-Spinndüsen nicht beliebig verkleinerbar.Hollow-fiber spinnerets are already known which serve for the production of polymeric hollow-fiber membranes (cf. JP 2001254221 or JP-A-55090608 ). Like in the FIG. 1 shown in the accompanying drawing, such hollow fiber spinnerets 10 consist of a base body 12 made of metal, in which a plurality of bores 14, 16, 18, 22 are introduced. In the bore 14, a tube 20 is fitted, in which a Fällmittel- or support means channel 22 is formed for introducing the precipitant or support means. The holes 16 and 18 form Massezuführkanäle for a polymer, which exits via an annular channel 22, which also consists of a corresponding hole, yes. In the production of the known hollow-fiber spinnerets 10, methods of conventional metal working are used. Here, therefore, the nozzle structure by the assembly of both nozzle parts, with an inaccuracy, for example, the geometry of the annulus 22 accumulated from the manufacturing errors in the manufacture of the base body 12 and the tube 20. There are also possible mounting errors added, which also contribute to an inaccuracy of Geometry can lead. Finally, the known in the art hollow fiber spinnerets are not arbitrarily reduced in size.

Aufgabe der Erfindung ist es, ein Verfahren zur Herstellung einer Hohlfaser-Spinndüse an die Hand zu geben, mit denen auch feine Kapillarmembranen herstellbar sind, wobei die Fertigungstoleranzen minimiert werden und das Herstellverfahren für diese Hohlfaser-Spinndüsen deutlich verbilligt wird.The object of the invention is to provide a method for producing a hollow-fiber spinneret with which even fine capillary membranes can be produced, wherein the manufacturing tolerances are minimized and the manufacturing process for these hollow fiber spinnerets is significantly cheaper.

Erfindungsgemäß wird diese Aufgabe durch die Kombination der Merkmale des Anspruchs 1 gelöst. Durch das Herstellverfahren wird eine vollständig neuartige Konstruktionsweise für Hohlfaser-Spinndüsen geschaffen, da sich die Erfindung von der konventionellen Metallbearbeitung abwendet und Verfahren der Mikrostrukturtechnik anwendet. Erfindungsgemäß werden nämlich mindestens zwei mittels Mikrostrukturtechnik strukturierte plattenförmige Körper zu der Hohlfaser-Spinndüse zusammengefügt. Dabei wird bevorzugt auf eine erste mittels Mikrostrukturtechnik gebildete Platte eine zweite unstrukturierte Platte gefügt, wobei die zweite Platte erst nach dem Aufbringen auf die erste Platte strukturiert wird. Die Platten werden flächig miteinander verbunden. Mit der neuen Fertigungsmethode eröffnet sich eine Vielzahl von Vorteilen. Zunächst läßt sich eine wesentlich kleinere Abmessung der Düsenstruktur mittels der Mikrostrukturtechnik realisieren. Darüber hinaus ist eine wesentlich höhere Präzision hinsichtlich der Düsenstruktur realisierbar. Diese Präzision kommt dadurch zustande, dass die Düsenstruktur in einem Schritt entsteht. Sie ist nur durch die Genauigkeit der zu Grunde liegenden Lithographiemaske, die bei der Mikrostrukturtechnik verwendet wird, beschränkt. Derartige Lithographie-masken lassen sich jedoch mit Toleranzen von 100 nm extrem genau fertigen. Ein weiterer Vorteil des erfindungsgemäßen Verfahrens liegt in den wesentlich geringeren Produktionskosten der Spinndüsen.According to the invention this object is achieved by the combination of the features of claim 1. The manufacturing process provides a completely novel design for hollow fiber spinnerets since the invention avoids conventional metalworking and uses microstructure techniques. In accordance with the invention, at least two plate-shaped bodies structured by microstructure technology are joined together to form the hollow-fiber spinneret. In this case, a second unstructured plate is preferably added to a first plate formed by microstructure technology, wherein the second plate is patterned only after application to the first plate. The plates are connected flat to each other. The new manufacturing method opens up a multitude of advantages. First, a much smaller dimension of the nozzle structure can be realized by means of microstructure technology. In addition, a much higher precision with respect to the nozzle structure can be realized. This precision is achieved by creating the nozzle structure in one step. It is limited only by the accuracy of the underlying lithographic mask used in microstructure technology. However, such lithography masks can be manufactured extremely precisely with tolerances of 100 nm. Another advantage of the method according to the invention lies in the significantly lower production costs of the spinnerets.

Besondere Ausgestaltungen der Erfindung ergeben sich aus den sich an den Hauptanspruch anschließenden Unteransprüchen.Particular embodiments of the invention will become apparent from the subsequent claims to the main claim.

Grundsätzlich lassen sich natürlich für die Realisierung der Hohlfaser-Spinndüsen nach der Erfindung alle Materialien der Mikrostrukturtechnik einsetzen, sofern diese anisotrop geätzt und gebondet werden können. Besonders vorteilhaft sind aber einkristallines Silizium, Galliumarsenid (GaAs) oder Germanium einsetzbar.In principle, of course, all materials of microstructure technology can be used for the realization of the hollow-fiber spinnerets according to the invention, provided that they can be anisotropically etched and bonded. However, it is particularly advantageous to use monocrystalline silicon, gallium arsenide (GaAs) or germanium.

Gemäß einer besonderen Ausführungsform der Erfindung wird eine Hohlfaser-Spinndüse aus zwei Platten gefertigt, wobei in der ersten Platte die Massezuführkanäle, eine Massestrom-Vergleichmäßigungszone, eine Fällmittel/Stützmittelzuführbohrung und ein Nadelstumpf ausgenommen sind, während in der zweiten Platte eine Düsenstruktur mit Masse-Ringspalt und eine Nadel mit einer Fällmittel/Stützmittelbohrung ausgenommen werden.According to a particular embodiment of the invention, a hollow fiber spinneret is made of two plates, the first plate excluding the mass feed channels, a mass flow equalization zone, a precipitant / proppant feed bore and a stub, while in the second plate a nozzle structure having a mass annulus and a needle with a precipitant / proppant bore excluded.

Alternativ ist auch ein Herstellverfahren denkbar, bei dem die zweite Platte zusätzlich die Massezuführkanäle und die Massestrom-Vergleichmäßigungszone enthält. Dort entfallen auf der ersten Platte diese Elemente und der Nadelstumpf. Ein besonderes Merkmal dieser Konstruktion ist es, dass die Nadel der Spinndüse nur an einer Stirnfläche mit der erste Platte verbunden ist.Alternatively, a manufacturing method is conceivable in which the second plate additionally contains the Massezuführkanäle and the mass flow homogenization zone. There omitted on the first plate these elements and the needle stump. A special feature of this construction is that the needle of the spinneret is connected to the first plate only at one end face.

Die mit dem bevorzugten Verfahren hergestellte Hohlfaser-Spinndüse, mit der eine einfache Kapillar-Hohlfasermembran herstellbar ist, weisen vorteilhaft folgende Abmessungen auf: Dicke der ersten Platte: 0,250 - 1,500 mm Dicke der zweiten Platte: 0,050 - 1,500 mm Außendurchmesser der Nadel: 0,020 - 1,500 mm Länge der Nadel incl. Nadelstumpf: 0,100 - 2,000 mm Durchmesser der Fällmittelbohrung: 0,010 - 1,000 mm Länge der Fällmittelbohrung: 0,150 - 2,500 mm Außendurchmesser des Ringspalts: 0,040 - 3,000 mm Länge des Ringspalts: 0,050 - 1,500 mm Höhe der Spinndüse: 0,300 - 3,000 mm Kantenlänge der Spinndüse: 1,000 - 25,00 mm. The hollow-fiber spinneret produced by the preferred method, with which a simple capillary hollow-fiber membrane can be produced, advantageously has the following dimensions: Thickness of the first plate: 0.250 - 1.500 mm Thickness of the second plate: 0.050 - 1.500 mm Outer diameter of the needle: 0.020 - 1.500 mm Length of the needle incl. Needle stump: 0.100 - 2.000 mm Diameter of the precipitation agent bore: 0.010 - 1.000 mm Length of precipitation agent hole: 0.150 - 2.500 mm Outer diameter of the annular gap: 0.040 - 3.000 mm Length of the annular gap: 0.050 - 1.500 mm Height of the spinneret: 0.300 - 3.000 mm Edge length of the spinneret: 1,000 - 25,00 mm.

Eine weitere bevorzugte Ausgestaltung der Erfindung besteht aus einem Verfahren, in dem der der Grundkörper drei Platten aufweist, wobei die erste Platte Zuführkanäle, eine Vergleichmäßigungszone und einen Nadelstumpf mit einer zentralen Zuführbohrung enthält, eine zweite Platte, die sich an die erste Platte anschließt, Zuführkanäle, eine Vergleichmäßigungszone und einen weiteren Nadelstumpf mit einem konzentrischen Ringkanal sowie eine Nadelverlängerung mit einer zentralen Bohrung aufweist, und wobei eine dritte Platte, die sich wiederum an die zweite Platte anschließt, eine Düsenstruktur bestehend aus einer zentralen Bohrung und zwei konzentrischen Ringspalten aufweist. Mittels dieser mit dem erfindungsgemäßen Verfahren hergestellte Hohlfaser-Spinndüse lassen sich Kapillarmembranen mit koextrudierten Doppelschichten herstellen.A further preferred embodiment of the invention consists of a method in which the base body comprises three plates, the first plate containing feed channels, a homogenization zone and a needle stub with a central feed bore, a second plate adjoining the first plate, feed channels , a homogenizing zone and another needle stub having a concentric annular channel and a needle extension having a central bore, and wherein a third plate, which in turn adjoins the second plate, a nozzle structure comprising a central bore and two concentric annular gaps. Capillary membranes with coextruded bilayers can be produced by means of this hollow-fiber spinneret produced by the process according to the invention.

Eine alternative Ausführungsvariante ergibt sich dadurch, dass die Hohlfaser-Spinndüsen aus drei einzelnen Platten hergestellt sind, wobei die erste Platte eine zentrale Zuführungsbohrung aufweist, eine sich an die erste Platte anschließende zweite Platte parallele Zuführkanäle und zu diesen angeordnete Vergleichmäßigungszonen sowie ein Nadelstumpf mit konzentrischem Ringkanal und eine zentrale Bohrung aufweist und wobei die an die zweite Platte anschließende dritte Platte eine Düsenstruktur bestehend aus einer zentralen Bohrung und zwei konzentrischen Ringspalten aufweist.An alternative embodiment results from the fact that the hollow fiber spinnerets are made of three individual plates, wherein the first plate has a central feed bore, a parallel to the first plate second feed channels and arranged to these equalization zones and a needle stub with concentric annular channel and a central bore and wherein the third plate adjoining the second plate has a nozzle structure consisting of a central bore and two concentric annular gaps.

Vorteilhaft ist der äußere Durchmesser der Mehrkanal-Hohlfaser-Spinndüse kleiner als 1 mm. Besonders vorteilhaft ist der äußere Durchmesser der Mehrkanal-Hohlfaser-Spinndüse kleiner oder gleich 0,45 mm. Mit dieser ist eine Dialysemembran mit einem Innendurchmesser von 200-300 µm herstellbar.Advantageously, the outer diameter of the multi-channel hollow fiber spinneret is less than 1 mm. Particularly advantageously, the outer diameter of the multi-channel hollow fiber spinneret is less than or equal to 0.45 mm. With this a dialysis membrane with an inner diameter of 200-300 microns can be produced.

Weitere Einzelheiten und Vorteile der Erfindung ergeben sich aus den in der Zeichnung dargestellten Ausführungsbeispielen. Es zeigen:

Figur 1:
einen schematischen Schnitt durch eine Hohlfaser-Spinndüse gemäß einer Ausführungsform nach dem Stand der Technik,
Figur 2:
einen schematischen Schnitt durch eine Hohlfaser-Spinndüse nach einer ersten Ausgestaltung der Erfindung,
Figur 3:
eine schematische Schnittdarstellung einer Hohlfaser-Spinndüse nach einer zweiten Ausführungsvariante der Erfindung, wobei drei Varianten der Anordnung der Massezuführkanäle gezeigt sind,
Figur 4:
eine teilweise geschnittene dreidimensionale Darstellung einer Hohlfa- ser-Spinndüse gemäß Figur 2 und
Figur 5:
eine teilweise geschnittene dreidimensionale Darstellung einer Hohlfa- ser-Spinndüse gemäß der Ausführungsvariante nach Figur 3.
Further details and advantages of the invention will become apparent from the embodiments illustrated in the drawings. Show it:
FIG. 1:
a schematic section through a hollow fiber spinneret according to an embodiment of the prior art,
FIG. 2:
a schematic section through a hollow fiber spinneret according to a first embodiment of the invention,
FIG. 3:
1 is a schematic sectional view of a hollow fiber spinneret according to a second embodiment of the invention, wherein three variants of the arrangement of the ground feed channels are shown,
FIG. 4:
a partially sectioned three-dimensional representation of a hollow fiber spinneret according to FIG. 2 and
FIG. 5:
a partially cut three-dimensional view of a hollow fiber spinneret according to the embodiment according to FIG. 3 ,

In Figur 2 ist eine Hohlfaser-Spinndüse 10, die mittels eines Verfahrens nach einer ersten Ausgestaltung der Erfindung hergestellt wurde, gezeigt. Hier ist der gesamte Grundkörper 26 aus zwei einzelnen Platten 30 und 32 zusammengesetzt. In der ersten Platte 30 sind Massezuführkanäle 34, eine Massenstrom-Vergleichmäßigungszone 36, eine Fällmittelzuführungsbohrung 38 und ein Nadelstumpf 40 durch einen entsprechenden Ätzvorgang, der später noch im einzelnen beschrieben wird, gebildet. Die dreidimensionale Ausgestaltung der hier in Figur 2 dargestellten Hohlfaser-Spinndüse ergibt sich aus Figur 4. Dort ist zu sehen, dass die Massezuführkanäle, d.h. die Kanäle zur Zuführung der auszufällenden polymeren Masse im hier dargestellten Ausführungsbeispiel kreuzförmig angeordnet sind. Die Massestrom-Vergleichmäßigungszone 36 ergibt sich als Ringraum um den Nadelstumpf 40 herum. Die Fällmittelzuführungsbohrung 38 ist in ihrem zur Oberseite hinweisenden Bereich verbreitert, wie das insbesondere der Figur 2 zu entnehmen ist.In FIG. 2 is a hollow fiber spinneret 10 made by a method according to a first embodiment of the invention. Here, the entire body 26 is composed of two individual plates 30 and 32. In the first plate 30, ground supply channels 34, a mass flow equalization zone 36, a precipitating agent supply bore 38 and a needle stub 40 are formed by a corresponding etching operation, which will be described later in detail. The three-dimensional design of here in FIG. 2 shown hollow fiber spinneret results from FIG. 4 , There it can be seen that the Massezuführkanäle, ie the channels for supplying the auszufällenden polymeric mass are arranged crosswise in the embodiment shown here. The mass flow equalization zone 36 results as an annular space around the needle stub 40 around. The Fällmittelzuführungsbohrung 38 is widened in its pointing to the top area, as in particular the FIG. 2 can be seen.

Aus den Figuren 2 und 4 ist auch der Aufbau der zweiten Platte 32 zu entnehmen, die eine Masse-Austrittsöffnung 42 aufweist, der unmittelbar an die Massestrom-Vergleichmäßigungszone 36 anschließt. Diese Masse-Austrittsöffnung bzw. der Masse-Ringspalt 42 ergibt mit der Nadel 44 mit Fällmittelbohrung 46 die hochpräzise Düsenstruktur 48. Das in den Figuren 2 und 4 dargestellte Ausführungsbeispiel aus einkristallinem Silizium hat beispielsweise eine Dicke der ersten Platte von 0,4 mm, eine Dicke der zweiten Platte von 0,1 mm, einen Außendurchmesser der Nadel von 0,05 mm, eine Länge der Nadel inklusive Nadelstumpf von 0,15 mm, ein Durchmesser der Fällmittelbohrung 38 im erweiterten Bereich von 0,1 mm, einen Außendurchmesser des Ringspalts 42 von 0,1 mm und eine Länge des Ringspalts 42 von 0,1 mm. Die Höhe des Grundkörpers 26, d.h. die Höhe der gesamten Spinndüse 10, beträgt demnach 0,5 mm, während eine Kantenlänge des Grundkörpers 26 der Spinndüse 10 2 mm beträgt.From the Figures 2 and 4 is also the construction of the second plate 32 can be seen, which has a mass outlet opening 42 which connects directly to the mass flow equalization zone 36. This mass outlet opening or the mass-annular gap 42 results with the needle 44 with Fällmittelbohrung 46, the high-precision nozzle structure 48. The in the Figures 2 and 4 For example, the monocrystalline silicon illustrated embodiment has a thickness of the first plate of 0.4 mm, a thickness of the second plate of 0.1 mm, an outside diameter of the needle of 0.05 mm, a length of the needle including a needle stump of 0.15 mm , a diameter of the precipitating agent bore 38 in the extended range of 0.1 mm, an outer diameter of the annular gap 42 of 0.1 mm and a length of the annular gap 42 of 0.1 mm. The height of the main body 26, ie the height of the entire spinneret 10, is accordingly 0.5 mm, while an edge length of the main body 26 of the spinneret 10 is 2 mm.

Bei der Herstellung von Hohlfaser-Spinndüsen mittels Mikrostrukturtechnik wird von 2 runden Waferscheiben mit 100 bis 300 mm Durchmesser ausgegangen. Aus diesen Wafern werden gleichzeitig viele Spinndüsenstrukturen hergestellt. Die einzelnen Hohlfaser-Spinndüsen 10 erhält man dann durch Zerteilen der fertig bearbeiteten Wafer. Die vereinzelten geteilten Spinndüsen können jeweils eine einzige Düsenstruktur, wie hier dargestellt, aber auch mehrere Düsenstrukturen in einem Düsenstrukturverbund enthalten. Dies erreicht man dadurch, dass nicht alle Düsenstrukturen, die auf dem Wafer gebildet wurden, voneinander getrennt werden, sondern dass mehrere Düsenstrukturen zusammen eine Mehrfach-Düseneinheit bilden, die entlang ihrer Außenkontur vom Wafer ausgeschnitten werden.In the production of hollow fiber spinnerets by means of microstructure technology is assumed by 2 round wafer discs with 100 to 300 mm diameter. From these wafers, many spinneret structures are simultaneously produced. The individual hollow fiber spinnerets 10 are then obtained by dicing the finished wafers. The separated split spinnerets can each contain a single nozzle structure, as shown here, but also several nozzle structures in a nozzle structure composite. This is achieved by not separating all the nozzle structures that have been formed on the wafer from each other, but that a plurality of nozzle structures together form a multiple nozzle unit, which are cut along the outer contour of the wafer.

Die Herstellung der Spinndüsen 10 beginnt mit der beidseitigen Strukturierung eines ersten Wafers, der die Elemente 34, 36, 38, 40 der Platte 30 der Spinndüse 10 aufnimmt. Die Strukturen werden mit einer Folge von Standard-Lithographieverfahren, d.h. Masken aus Photoresist, SiO, Si-N oder ähnlichem, und Standard-Ätzverfahren gefertigt. Bei den Standard-Ätzverfahren sind insbesondere das reaktive Ionen-Ätzen (RIE), das reaktive Ionen-Tiefenätzen (D-RIE) und das Kryo-Ätzen zu nennen. Besonders geeignet sind spezielle Tiefenätzverfahren wie das D-RIE und das Kryo-Ätzen. Die Lithographie-Masken für die Vorder- und Rückseite müssen optisch zueinander ausgerichtet werden. Anschließend wird der zweite Wafer, aus dem die zweite Platte hergestellt werden soll, auf den entsprechend strukturierten ersten Wafer gebondet. Dabei können sämtliche Bondverfahren eingesetzt werden, das Anodische Bonden, das Direktbonden oder ähnliches. Besonders geeignet ist aber das Direktbonden, da die höchsten Festigkeiten erreicht werden und damit ein guter Halt der Nadel auf der ersten Platte gewährleistet wird. Im nächsten Schritt wird die Düsenstrukur 48 mit Ringspalt 42 und Fällmittelbohrung 46 in einem zweistufigen Ätzverfahren hergestellt. Im ersten Schritt wird nur die tiefere Fällmittelbohrung vorangetrieben. Im zweiten Schritt werden dann beide Strukturen fertig geätzt. Zur Anwendung kommen dabei wieder die genannten Lithographie- und Ätzverfahren, wobei hier die Verwendung der Tiefenätzverfahren noch eher angeraten ist als bei der Bearbeitung des ersten Wafers. Im letzten Schritt werden die einzelnen Spinndüsen, wie bereits zuvor beschrieben, durch geeignete Trennverfahren, wie Wafer-Sägen oder Laserbearbeitung aus dem Wafer herausgeschnitten.The production of the spinnerets 10 begins with the structuring on both sides of a first wafer, which receives the elements 34, 36, 38, 40 of the plate 30 of the spinneret 10. The structures are fabricated by a series of standard lithography techniques, ie photoresist masks, SiO, Si-N or the like, and standard etching techniques. In the standard etching processes, reactive ion etching (RIE), reactive ion deep etching (D-RIE) and cryo-etching should be mentioned in particular. Particularly suitable are special deep etching methods such as the D-RIE and the cryo-etching. The lithographic masks for the front and back must be aligned visually. Subsequently, the second wafer, from which the second plate is to be produced, is bonded to the correspondingly structured first wafer. In this case, all bonding methods can be used, anodic bonding, direct bonding or the like. However, direct bonding is particularly suitable since the highest strengths are achieved and thus a good hold of the needle on the first plate is ensured. In the next step, the nozzle structure 48 with annular gap 42 and precipitation agent bore 46 is produced in a two-stage etching process. In the first step, only the deeper precipitation agent hole is advanced. In the second step, both structures are then finished etched. The above-mentioned lithography and etching processes are again used, although the use of the deep etching process is even more advisable here than during the processing of the first wafer. In the last step, as described above, the individual spinnerets are cut out of the wafer by suitable separation methods, such as wafer sawing or laser processing.

Anhand der Figuren 3 und 5 werden weitere alternative Ausgestaltungen der mittels des erfindungsgemäßen Verfahrens hergestellten Hohlfaser-Spinndüsen erläutert. Hier ist eine Hohlfaser-Spinndüse 10 zur Herstellung einer aus zwei Schichten koextrudierten Hohlfaser gezeigt. Hier ist eine Hohlfaser-Spinndüse 10 mit einem Grundkörpers 100 bestehend aus drei einzelnen Platten 102, 104 und 106 gezeigt. Die einzelnen Platten bestehen wiederum aus einkristallinem Silizium. In der ersten Platte 102 ist ein Zuführkanal 108 für das Fällmittel ausgenommen. Zusätzlich sind Zuführkanäle 110, 112 für ein erstes Polymer vorgesehen, die in eine zugehörige Vergleichmäßigungszone 114 einmünden. Die Vergleichmäßigungszone 114 umgibt einen entsprechenden Nadelstumpf 116.Based on Figures 3 and 5 Further alternative embodiments of the hollow-fiber spinnerets produced by means of the method according to the invention will be explained. Here, a hollow fiber spinneret 10 for producing a hollow fiber coextruded from two layers is shown. Here, a hollow-fiber spinneret 10 with a main body 100 consisting of three individual plates 102, 104 and 106 is shown. The individual plates in turn consist of monocrystalline silicon. In the first plate 102, a feed channel 108 is excluded for the precipitant. In addition, feed channels 110, 112 for a first polymer are provided, which open into an associated homogenization zone 114. The equalization zone 114 surrounds a corresponding needle stump 116.

In der zweiten Platte 104 ist ebenfalls eine Fällmittelbohrung 118 ausgenommen, die von einem weiterem Nadelstumpf 120 und einem Ringraum 122 umgeben ist. Weiterhin sind weitere Zuführkanäle 124 mit anschließender Vergleichmäßigungszone 126 in der zweiten Platte 104 ausgenommen. Schließlich weist die dritte Platte 106 zwei Ringspalten 128 und 130 für die jeweiligen polymeren Materialien, die koextrudiert werden sollen, auf, sowie eine Nadel 132 mit Fällmittelbohrung 134. Bei den Varianten der Figur 3a, Figur 3b und Figur 3c sind die Zuführkanäle 124 jeweils anders ausgestaltet. Während in der Ausführungsvariante gemäß der Figur 3a der Zuführungskanal 124 für das zweite Polymer lediglich in der zweiten Platte 104 vorgesehen ist, verläuft der in der Variante gemäß der Figur 3b sowohl durch die zweite Platte 104 wie auch durch die dritte Platte 106. In der Ausführungsvariante gemäß der Figur 3c verläuft der Zuführkanal 124 für das zweite Polymer durch die zweite Platte 104 und die erste Platte 102, wie hier in der Figur 3c dargestellt. Die Darstellung gemäß Figur 5 entspricht dem Schnitt gemäß Figur 3a, wobei hier deutlich wird, dass 8 Zuführkanäle 112 sternförmig angeordnet sind, während lediglich 4 Zuführkanäle 124 kreuzförmig angeordnet sind.In the second plate 104, a precipitant hole 118 is also excluded, which is surrounded by a further needle stub 120 and an annular space 122. Furthermore, further feed channels 124 with subsequent homogenization zone 126 are excluded in the second plate 104. Finally, the third plate points 106 two annular gaps 128 and 130 for the respective polymeric materials to be coextruded, and a needle 132 with precipitant well bore 134. In the variants of 3a, 3b and 3c the supply channels 124 are each configured differently. While in the embodiment according to the FIG. 3a the feed channel 124 for the second polymer is provided only in the second plate 104, which runs in the variant according to the FIG. 3b both through the second plate 104 as well as through the third plate 106. In the embodiment according to the Figure 3c For example, the second polymer feed passage 124 extends through the second plate 104 and the first plate 102 as shown in FIG Figure 3c shown. The representation according to FIG. 5 corresponds to the section according to FIG. 3a , wherein it is clear here that 8 feed channels 112 are arranged in a star shape, while only 4 feed channels 124 are arranged in a cross shape.

Die drei Platten 102, 104 und 106 werden wiederum durch ein geeignetes Bondverfahren, vorteilhaft ein Direktbonden, miteinander zum Grundkörper 100 verbunden. Ansonsten entspricht das Herstellverfahren für die Hohlfaser-Spinndüse 10 gemäß der Figuren 3 und 5, analog demjenigen, wie es bereits anhand der Figur 2 und 4 im einzelnen erläutert wurde.The three plates 102, 104 and 106 are in turn connected to the main body 100 by a suitable bonding method, advantageously direct bonding. Otherwise corresponds to the manufacturing method for the hollow fiber spinneret 10 according to the Figures 3 and 5 , analogous to that, as already stated by the FIG. 2 and 4 was explained in detail.

Claims (16)

  1. A process for producing a hollow fibre spinning nozzle having a main body comprising the process steps:
    - structuring at least two plate-shaped bodies by means of microstructure technology,
    - assembling at least two plate-shaped bodies to form a main body in which there are provided one or more precipitation agent/support agent and material feed passages and at least one nozzle structure connected to said passages and having at least one material outlet opening and at least one needle with a precipitation agent/support agent bore.
  2. A process for producing a hollow fibre spinning nozzle according to claim 1 wherein the hollow fibre spinning nozzle is made from two plate-shaped bodies comprising the process steps:
    - structuring a first plate-shaped body by means of microstructure technology,
    - applying a second unstructured plate-shaped body to the first structured plate-shaped body to form the main body of the hollow fibre spinning nozzle, and
    - structuring the second plate-shaped body by means of microstructure technology.
  3. A process for producing a hollow fibre spinning nozzle according to claim 1 wherein the hollow fibre spinning nozzle is made from two plate-shaped bodies comprising the process steps:
    - structuring a first plate-shaped body by means of microstructure technology,
    - applying a second unstructured plate-shaped body to the first structured plate-shaped body,
    - structuring the second plate-shaped body by means of microstructure technology,
    - applying a third unstructured plate-shaped body to the second structured plate-shaped body to form the main body of the hollow fibre spinning nozzle, and
    - structuring of the third plate-shaped body by means of microstructure technology.
  4. A process for producing a hollow fibre spinning nozzle according to claim 1 or claim 2 wherein the main body comprises two plate-shaped bodies and the material feed passages, a material flow homogenisation zone, the precipitation agent/support agent feed bore and a needle stump are provided in the first plate-shaped body by means of the structuring, and the nozzle structure with a material annular gap as a material outlet opening and the needle with the precipitation agent/support agent bore are provided by means of the structuring of the second plate-shaped body.
  5. A process for producing a hollow fibre spinning nozzle according to claim 1 or claim 2 wherein the main body comprises two plate-shaped bodies and the precipitation agent/support agent feed bore is produced by means of the structuring of the first plate-shaped body and the material feed passages, a material flow homogenisation zone, the nozzle structure with material annular gap as the material outlet opening and the needle with the precipitation agent/support agent bore are provided by means of the structuring of the second plate-shaped body.
  6. A process for producing a hollow fibre spinning nozzle according to claim 3 wherein the main body comprises three plate-shaped bodies and the material feed passages, a material flow homogenisation zone, the precipitation agent/support agent feed bore and a needle stump are provided by means of the structuring of the first plate-shaped body and the material feed passages, a material flow homogenisation zone, an annular space and a further needle stump are provided by means of the structuring of the second plate-shaped body and the nozzle structure having two material annular gaps as the material outlet opening and the needle with the precipitation agent/support agent bore are provided by means of the structuring of the third plate-shaped body.
  7. A process for producing a hollow fibre spinning nozzle according to one of claims 1 to 6 wherein the first plate-shaped body is structured on both sides.
  8. A process for producing a hollow fibre spinning nozzle according to one of the preceding claims wherein the structuring of at least one plate-shaped body of the at least two plate-shaped bodies includes the steps:
    - producing a lithography mask with a standard lithography process, and
    - etching the structuring by means of reactive ion etching or reactive ion depth etching or cryogenic etching.
  9. A process for producing a hollow fibre spinning nozzle according to claim 8 characterised in that the etching process is in the form of a two-stage process and in particular in a first step the deeper precipitation agent bore is at least partially formed and in a subsequent second step the precipitation agent bore and the nozzle structure with annular gap are finished.
  10. A process for producing a hollow fibre spinning nozzle according to claim 7 and claim 8 wherein the lithography masks for the front and rear sides of the first plate-shaped body are optically oriented relative to each other.
  11. A process for producing a hollow fibre spinning nozzle according to one of the preceding claims wherein at least one plate-shaped body of the hollow fibre spinning nozzle comprises monocrystalline silicon, gallium arsenide or germanium.
  12. A process for producing a hollow fibre spinning nozzle according to one of the preceding claims wherein the plate-shaped bodies are joined by means of bonding processes, in particular anodic bonding or direct bonding.
  13. A process for producing a hollow fibre spinning nozzle according to one of the preceding claims characterised in that to produce a hollow fibre spinning nozzle comprising at least two plate-shaped bodies by means of microstructure technology at least two round wafers are provided as the plate-shaped bodies, on which a plurality of spinning nozzle structures are simultaneously produced.
  14. A process for producing a hollow fibre spinning nozzle according to claim 13 characterised in that the plurality of nozzle structures on the wafer are divided up into individual hollow fibre spinning nozzles.
  15. A process for producing a hollow fibre spinning nozzle according to claim 13 characterised in that an individual hollow fibre spinning nozzle has a single nozzle structure or a plurality of nozzle structures in a nozzle structure array.
  16. A process according to one of claims 14 and 15 characterised in that the process of dividing up the wafer is effected by means of wafer sawing or laser processing.
EP09008291A 2002-03-13 2003-02-13 Method for producing a hollow fibre spinning nozzle Expired - Lifetime EP2112256B1 (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104775171A (en) * 2015-03-30 2015-07-15 临邑大正特纤新材料有限公司 Lotus-root-shaped fiber spinning pack
WO2023036919A1 (en) 2021-09-10 2023-03-16 Oceansafe Ag Fiber

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7762801B2 (en) 2004-04-08 2010-07-27 Research Triangle Institute Electrospray/electrospinning apparatus and method
US7765949B2 (en) * 2005-11-17 2010-08-03 Palo Alto Research Center Incorporated Extrusion/dispensing systems and methods
US7922471B2 (en) 2006-11-01 2011-04-12 Palo Alto Research Center Incorporated Extruded structure with equilibrium shape
US8704086B2 (en) 2008-11-07 2014-04-22 Solarworld Innovations Gmbh Solar cell with structured gridline endpoints vertices
US8080729B2 (en) 2008-11-24 2011-12-20 Palo Alto Research Center Incorporated Melt planarization of solar cell bus bars
US8586129B2 (en) 2010-09-01 2013-11-19 Solarworld Innovations Gmbh Solar cell with structured gridline endpoints and vertices
WO2012084134A1 (en) 2010-12-22 2012-06-28 Fresenius Medical Care Deutschland Gmbh Delamination free membrane
DE102011010921A1 (en) 2011-02-10 2012-08-16 Fresenius Medical Care Deutschland Gmbh Membrane used for e.g. reverse osmosis, comprises at least two layers which are at least partly covalently and delamination free bonded to each other, where each layer comprises layer-forming material(s) comprising polymer(s)
DE102010055731A1 (en) 2010-12-22 2012-06-28 Fresenius Medical Care Deutschland Gmbh Membrane used for e.g. reverse osmosis, comprises at least two layers which are at least partly covalently and delamination free bonded to each other, where each layer comprises layer-forming material(s) comprising polymer(s)
US10371468B2 (en) 2011-11-30 2019-08-06 Palo Alto Research Center Incorporated Co-extruded microchannel heat pipes
US9120190B2 (en) 2011-11-30 2015-09-01 Palo Alto Research Center Incorporated Co-extruded microchannel heat pipes
US8875653B2 (en) 2012-02-10 2014-11-04 Palo Alto Research Center Incorporated Micro-extrusion printhead with offset orifices for generating gridlines on non-square substrates
CN103668484A (en) * 2013-12-19 2014-03-26 吴江明敏制衣有限公司松陵分公司 Scattering fiber spinneret plate
CN103911678B (en) * 2014-04-17 2016-04-13 华中科技大学 A kind of coaxial nozzle for electrofluid spray printing
CN103981581B (en) * 2014-05-29 2016-05-04 苏州东茂纺织实业有限公司 A kind of imitated natural fabric fuse equipment
CN104762672A (en) * 2015-04-23 2015-07-08 宁波斯宾拿建嵘精密机械有限公司 Spinneret
CN106236323B (en) * 2016-08-05 2017-11-17 浙江大学 A kind of nerve trachea with contact guiding function and preparation method thereof and device
WO2018056584A1 (en) 2016-09-21 2018-03-29 삼성전자 주식회사 Method for measuring skin condition and electronic device therefor
DE102017208011A1 (en) 2017-05-11 2018-11-15 Fresenius Medical Care Deutschland Gmbh Spinneret, spinneret apparatus, method of making a hollow fiber or hollow fiber membrane with a spinneret and filter
US20190233972A1 (en) * 2018-01-31 2019-08-01 Saudi Arabian Oil Company Producing Fibers Using Spinnerets
DE102019203837A1 (en) 2019-03-20 2020-09-24 Fresenius Medical Care Deutschland Gmbh Plant and process for the production of hollow fiber membranes

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2815532A (en) * 1953-05-25 1957-12-10 American Viscose Corp Spinneret mixing element
BE571497A (en) * 1957-11-16
GB1050191A (en) * 1962-08-06
US3453689A (en) * 1967-03-20 1969-07-08 Du Pont Insert type spinneret
US3659983A (en) * 1969-02-19 1972-05-02 Dow Chemical Co Spinnerette for the production of hollow fibers
US3686377A (en) * 1971-03-01 1972-08-22 Du Pont Method and apparatus for melt-spinning hollow fibers
JPS5590608A (en) 1978-12-27 1980-07-09 Tanaka Kikinzoku Kogyo Kk Manufacture of spinneret for hollow fiber
US4229154A (en) * 1979-04-04 1980-10-21 E. I. Du Pont De Nemours And Company Spinneret for the production of hollow filaments
US4411852A (en) * 1982-02-18 1983-10-25 Fiber Industries, Inc. Spinning process with a desensitized spinneret design
JPS63227808A (en) * 1986-10-13 1988-09-22 Tanaka Kikinzoku Kogyo Kk Spinneret for extruding hollow fibers
US5162074A (en) * 1987-10-02 1992-11-10 Basf Corporation Method of making plural component fibers
JPH01254221A (en) * 1988-04-01 1989-10-11 Matsushita Electric Works Ltd Circulation bath apparatus
JP2569830B2 (en) * 1989-10-05 1997-01-08 東レ株式会社 Polygonal hollow section yarn and method for producing the same
JP2728549B2 (en) * 1990-07-04 1998-03-18 帝人株式会社 Method for producing composite hollow fiber
US5320512A (en) 1992-09-24 1994-06-14 E. I. Du Pont De Nemours And Company Apparatus for spinning multicomponent hollow fibers
AU7163596A (en) * 1995-10-30 1997-05-22 Kimberly-Clark Corporation Fiber spin pack
BR9710223A (en) * 1996-07-08 2000-01-18 Spraychip Systems Atomization device aided by gas.
US5781607A (en) * 1996-10-16 1998-07-14 Ibm Corporation Membrane mask structure, fabrication and use
US5877580A (en) * 1996-12-23 1999-03-02 Regents Of The University Of California Micromachined chemical jet dispenser
NL1010458C2 (en) * 1998-11-03 2000-05-04 Search B V S Longitudinally reinforced self-supporting capillary membranes and their use.
DE19910012C1 (en) * 1999-03-08 2001-01-18 Ostthueringische Materialpruef Process for the production of molded articles
DE19926769A1 (en) * 1999-06-13 2000-12-14 Max Planck Gesellschaft Production of structures in conducting materials comprises producing a pattern of longitudinal macropores in a base body, leaving areas of the base body with the structure of the required structure pore-free, and etching
KR100343211B1 (en) * 1999-11-04 2002-07-10 윤종용 Fablication method of Micro Electromechanical System structure which can be packaged in the state of wafer level
JP2001254221A (en) * 2000-03-10 2001-09-21 Toray Ind Inc Method of fabricating spinneret for hollow fiber and spinneret for hollow fiber
DE10027411C1 (en) * 2000-05-25 2001-08-23 Siemens Ag Fluid circuit board, assembly with fluid circuit board and method of manufacturing the same
US6696220B2 (en) * 2000-10-12 2004-02-24 Board Of Regents, The University Of Texas System Template for room temperature, low pressure micro-and nano-imprint lithography
US6799960B2 (en) * 2000-12-08 2004-10-05 L'air Liquide - Societe Anonyme A Directoire Et Consiel De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude Spinnerette assembly for forming hollow fibers
US6746226B2 (en) * 2000-12-08 2004-06-08 L'Air Liquide - Societe Anonyme à Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation des Procedes Georges Claude Spinnerette assembly for forming multicomponent hollow fibers
US7291003B1 (en) * 2004-09-23 2007-11-06 Sandia Corporation Micromachined spinneret

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104775171A (en) * 2015-03-30 2015-07-15 临邑大正特纤新材料有限公司 Lotus-root-shaped fiber spinning pack
WO2023036919A1 (en) 2021-09-10 2023-03-16 Oceansafe Ag Fiber

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ES2357373T3 (en) 2011-04-25
US7393195B2 (en) 2008-07-01
DE50311868D1 (en) 2009-10-15
DE50313356D1 (en) 2011-02-03
JP2005520061A (en) 2005-07-07
KR20040094722A (en) 2004-11-10
HRP20040714A2 (en) 2005-08-31
CA2474274A1 (en) 2003-09-18
US20080268082A1 (en) 2008-10-30
BR0307233A (en) 2004-12-07
EP2112256A1 (en) 2009-10-28
HRP20040714B1 (en) 2012-07-31
ATE441742T1 (en) 2009-09-15
AU2003208849A1 (en) 2003-09-22
JP4340161B2 (en) 2009-10-07
EP1483435B1 (en) 2009-09-02
CA2474274C (en) 2011-11-29
US20050087637A1 (en) 2005-04-28
ATE492666T1 (en) 2011-01-15
US8490283B2 (en) 2013-07-23
KR100974985B1 (en) 2010-08-09
EP1483435A1 (en) 2004-12-08
ES2329564T3 (en) 2009-11-27
WO2003076701A1 (en) 2003-09-18

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