EP1948928B1 - Compressor - Google Patents

Compressor Download PDF

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Publication number
EP1948928B1
EP1948928B1 EP06807564A EP06807564A EP1948928B1 EP 1948928 B1 EP1948928 B1 EP 1948928B1 EP 06807564 A EP06807564 A EP 06807564A EP 06807564 A EP06807564 A EP 06807564A EP 1948928 B1 EP1948928 B1 EP 1948928B1
Authority
EP
European Patent Office
Prior art keywords
gas
bearing
pressure
compressor
reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP06807564A
Other languages
German (de)
French (fr)
Other versions
EP1948928A1 (en
Inventor
Mario Bechtold
Bernd Gromoll
Stefan Nunninger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BSH Hausgeraete GmbH
Original Assignee
BSH Bosch und Siemens Hausgeraete GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BSH Bosch und Siemens Hausgeraete GmbH filed Critical BSH Bosch und Siemens Hausgeraete GmbH
Publication of EP1948928A1 publication Critical patent/EP1948928A1/en
Application granted granted Critical
Publication of EP1948928B1 publication Critical patent/EP1948928B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
    • F04B39/122—Cylinder block
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F04B35/045—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric using solenoids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
    • F04B39/125—Cylinder heads

Definitions

  • the invention relates to a compressor according to the preamble of claim 1.
  • the piston of a compressor should be stored by a gas bearing.
  • part of the gas compressed by the compressor is branched off from the useful gas stream and passed through nozzles into the gas bearing.
  • the problem with this arrangement is the loss of useful gas in particular because the gas loss depends on the thermodynamic operating point of the compressor. That at high end pressure of the gas more gas is lost than at low final pressure. As a result, the gas loss and the bearing capacity of the gas bearing are dependent on the compressor operating point.
  • the structure of a known from the prior art gas bearing is schematically below in FIG. 1 and will be described in detail.
  • the bearing nozzles must be continuously supplied with a gas stream. This is achieved by feeding the supply directly from the high-pressure chamber of the compressor.
  • the invention relates to a compressor with self-supplying gas storage, in which the supply pressure is independent of the delivery pressure. This optimizes the gas storage according to structure and function.
  • FIG. 1 a linear compressor is shown, in which a linearly guided compressor piston 2 acts on a gas volume 1.
  • a gas bearing is formed between the piston 2 and the inner wall of the hollow cylinder 10.
  • the gas space 1 is a low-pressure chamber 15 and a high-pressure chamber 20 assigned.
  • the low-pressure space 15 has a gas inlet 16 and an inlet valve 17.
  • the high-pressure space 20 has a gas outlet 21 and an outlet valve 22.
  • FIG. 2 shows an improved design of the gas bearing.
  • a second gas outlet 33 with channel 30 is mounted in the compression chamber 1.
  • the pressure in the gas reservoir 25 is determined by the position A of the gas outlet 33 in the compression chamber and the pressure drop in the connecting line and is below the compression end pressure.
  • the channel 30 is designed such that the pressure drop becomes minimal.
  • the gas bearing can be fed directly from the high pressure, wherein the gas flow is limited by a pressure reducer to the minimum necessary bearing pressure.
  • connection between compression chamber 1 and gas storage reservoir 25 is connected via a closable by valve 31 channel 30 FIG. 3 or a channel 40 without valve, but with anisotropic flow resistance 41 according to FIG. 4 produced. In both cases it is ensured that gas from the compression chamber 1 enters the gas reservoir 25. Conversely, however, no gas or only slightly gas can pass from the reservoir 25 back into the compression space 1 through the valve 31 or through the anisotropic flow resistance 41.
  • the volume of the gas reservoir 25 is selected so that the gas bearing is fed reliably from the reservoir 25 during repetitive operation, in particular if the reservoir is not fed from the high-pressure chamber 20 during the part of the compression cycle or intake cycle.
  • the gas reservoir 25 can be provided with an outlet valve 26.
  • the pressure in the reservoir 25 can be maintained permanently or at least longer, whereby the time period in which the compressor can remain switched off without the gas bearing loses the load capacity, can be extended.
  • the outlet valve 26 of the gas reservoir is again opened to first restore the carrying capacity of the gas bearing and then only to begin the movement of the piston 2.
  • start-up is, with the gas reservoir 25 empty, first to move the piston 2 with a reduced stroke in order to pressurize the gas reservoir 25. Once this is the bearing capacity of the gas bearing, the stroke can be increased to normal and normal compressor operation begins.
  • Another alternative would be an exhaust valve of the compression chamber, which opens independent of the pressure behind the exhaust valve only from a certain pressure. It can thereby be achieved that during start-up of the compressor first the gas reservoir 25 is filled and only then uses the Nutzgasstrom.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

Known compressors are equipped with gas bearings, in which the bearing nozzles are continuously supplied with a stream of gas. According to the invention, the gas bearing is a self-sufficient bearing, in which the supply pressure is independent of the delivery pressure. To achieve this, the compressor is equipped with a gas reservoir with a bearing supply pressure.

Description

Die Erfindung bezieht sich auf einen Kompressor gemäß dem Oberbegriff des Patentanspruches 1.The invention relates to a compressor according to the preamble of claim 1.

Der Kolben eines Kompressors soll durch ein Gaslager gelagert werden. Dazu wird ein Teil des durch den Kompressor verdichteten Gases vom Nutzgasstrom abgezweigt und über Düsen in das Gaslager geleitet. Problematisch bei dieser Anordnung ist der Verlust von Nutzgas insbesondere deshalb, weil der Gasverlust vom thermodynamischen Arbeitspunkt des Kompressors abhängt. D.h. bei hohem Endruck des Gases geht mehr Gas verloren als bei niederem Enddruck. Dadurch sind der Gasverlust und die Tragfähigkeit des Gaslagers vom Kompressorarbeitspunkt abhängig.The piston of a compressor should be stored by a gas bearing. For this purpose, part of the gas compressed by the compressor is branched off from the useful gas stream and passed through nozzles into the gas bearing. The problem with this arrangement is the loss of useful gas in particular because the gas loss depends on the thermodynamic operating point of the compressor. That at high end pressure of the gas more gas is lost than at low final pressure. As a result, the gas loss and the bearing capacity of the gas bearing are dependent on the compressor operating point.

Um die Tragfähigkeit des Lagers auch bei niedrigem Verdichterenddruck sicherzustellen, sind entsprechend viele Lagerdüsen mit passendem Querschnitt vorzusehen. Bei hohem Verdichtungsenddruck führt dies zu starken Gasverlusten und deshalb zu schlechtem Verdichterwirkungsgrad.In order to ensure the bearing capacity of the bearing, even at low compressor discharge pressure, a corresponding number of bearing nozzles with a suitable cross section must be provided. At high compression end pressure, this leads to strong gas losses and therefore to poor compressor efficiency.

Der Aufbau eines vom Stand der Technik bekannten Gaslagers ist schematisch weiter unten in Figur 1 dargestellt und wird im Einzelnen beschrieben. Damit das Gaslager funktioniert, müssen die Lagerdüsen kontinuierlich mit einem Gasstrom versorgt werden. Das wird dadurch erreicht, dass die Versorgung direkt aus dem Hochdruckraum des Kompressors gespeist wird.The structure of a known from the prior art gas bearing is schematically below in FIG. 1 and will be described in detail. For the gas bearing to work, the bearing nozzles must be continuously supplied with a gas stream. This is achieved by feeding the supply directly from the high-pressure chamber of the compressor.

Aus Dokument GB-A-923,732 , das als nächstliegender Stand der Technik angesehen wird, ist ein Kolbenkompressor mit Gaslager bekannt, dessen Gaslager ein selbstversorgendes Gaslager ist, bei dem der Versorgungsdruck unabhängig vom Förderdruck ist.From document GB-A-923.732 Known as the closest prior art, a gas bearing reciprocating compressor is known whose gas bearing is a self-powered gas bearing in which the supply pressure is independent of the delivery pressure.

Demgegenüber ist es Aufgabe der Erfindung, einen verbesserten Kompressor zu schaffen.In contrast, it is an object of the invention to provide an improved compressor.

Die Aufgabe ist erfindungsgemäß durch die Merkmale des Patentanspruches 1 gelöst. Weiterbildungen sind in den Unteransprüchen angegeben.The object is achieved by the features of claim 1. Further developments are specified in the subclaims.

Gegenstand der Erfindung ist ein Kompressor mit selbst versorgendem Gaslager, bei dem der Versorgungsdruck unabhängig vom Förderdruck ist. Damit ist das Gaslager nach Aufbau und Funktion optimiert.The invention relates to a compressor with self-supplying gas storage, in which the supply pressure is independent of the delivery pressure. This optimizes the gas storage according to structure and function.

Weitere Einzelheiten und Vorteile ergeben sich aus der nachfolgenden Figurenbeschreibung von Ausführungsbeispielen anhand der Zeichnung in Verbindung mit den Patentansprüchen.Further details and advantages will become apparent from the following description of exemplary embodiments with reference to the drawing in conjunction with the claims.

Es zeigen

Figur 1
eine Anordnung eines Linearkompressors gemäß dem Stand der Technik,
Figur 2
einen Kompressor gemäß Figur 1 mit optimiertem Gaslager,
Figur 3
eine erste Verbindung vom Gasreservoir und Kompressionsraum und
Figur 4
eine zweite Verbindung von Gasreservoir und Kompressionsraum.
Show it
FIG. 1
an arrangement of a linear compressor according to the prior art,
FIG. 2
a compressor according to FIG. 1 with optimized gas bearing,
FIG. 3
a first connection from the gas reservoir and compression space and
FIG. 4
a second connection of gas reservoir and compression space.

In Figur 1 ist ein Linearkompressor dargestellt, bei dem ein linear geführter Kompressorkolben 2 auf ein Gasvolumen 1 einwirkt. Durch ein anschließendes hohlzylindrisches Element 10 wird zwischen Kolben 2 und Innenwand des Hohlzylinders 10 ein Gaslager gebildet.In FIG. 1 a linear compressor is shown, in which a linearly guided compressor piston 2 acts on a gas volume 1. By a subsequent hollow cylindrical element 10, a gas bearing is formed between the piston 2 and the inner wall of the hollow cylinder 10.

Es sind beispielhaft vier Gaseinlassdüsen 11 bis 11''' mit Längskanal 12 angedeutet, über die eine Gasströmung zum Gaslager gelangt. Dafür sind geeignete Leitungen vorhanden.By way of example, four gas inlet nozzles 11 to 11 '' 'with a longitudinal channel 12 are indicated, via which a gas flow arrives at the gas bearing. For this purpose, suitable cables are available.

Dem Gasraum 1 ist ein Niederdruckraum 15 und ein Hochdruckraum 20 zugeordnet. Der Niederdruckraum 15 hat einen Gaseinlass 16 und ein Einlassventil 17. Der Hochdruckraum 20 hat einen Gasauslass 21 und ein Auslassventil 22.The gas space 1 is a low-pressure chamber 15 and a high-pressure chamber 20 assigned. The low-pressure space 15 has a gas inlet 16 and an inlet valve 17. The high-pressure space 20 has a gas outlet 21 and an outlet valve 22.

Figur 2 zeigt eine verbesserte Ausbildung des Gaslagers. Die Lagerdüsen 11 bis 11''' werden aus einem separaten Gasreservoir 25 gespeist, in dem sich eine ausreichende Menge Gas passenden Drucks befindet. Der Gasstrom durch das Lager und damit die Düsenzahl, Düsendurchmesser und Gasdruck kann dabei so gewählt werden, dass das Lager zuverlässig trägt. FIG. 2 shows an improved design of the gas bearing. The bearing nozzles 11 to 11 '''are fed from a separate gas reservoir 25, in which there is a sufficient amount of gas suitable pressure. The gas flow through the bearing and thus the number of nozzles, nozzle diameter and gas pressure can be chosen so that the bearing carries reliable.

Um den Druck im Gaslagerreservoir 25 unabhängig vom Arbeitspunkt des Hauptgaskreislaufes einzustellen, wird ein zweiter Gasauslass 33 mit Kanal 30 im Kompressionsraum 1 angebracht. Der Druck im Gasreservoir 25 wird über die Lage A des Gasauslasses 33 im Kompressionsraum und den Druckabfall in der Verbindungsleitung bestimmt und liegt unterhalb des Verdichtungsenddrucks. Idealerweise wird der Kanal 30 derart gestaltet, dass der Druckabfall minimal wird.In order to adjust the pressure in the gas storage reservoir 25 independently of the operating point of the main gas circuit, a second gas outlet 33 with channel 30 is mounted in the compression chamber 1. The pressure in the gas reservoir 25 is determined by the position A of the gas outlet 33 in the compression chamber and the pressure drop in the connecting line and is below the compression end pressure. Ideally, the channel 30 is designed such that the pressure drop becomes minimal.

Alternativ kann das Gaslager direkt aus dem Hochdruck gespeist werden, wobei der Gasstrom durch ein Druckminderer auf den minimal notwendigen Lagerdruck begrenzt wird.Alternatively, the gas bearing can be fed directly from the high pressure, wherein the gas flow is limited by a pressure reducer to the minimum necessary bearing pressure.

Die Kombination aus Druckminderungselement und zweitem Gasauslass ermöglicht minimale Verluste des Gaslagers, da der Gasmassenstrom minimal wird und die notwendige Verdichtungsarbeit für die Lagerversorgung minimal wird.The combination of pressure reducing element and second gas outlet allows minimal losses of the gas bearing, since the gas mass flow is minimal and the necessary compaction work for the storage supply is minimal.

Die Verbindung zwischen Kompressionsraum 1 und Gaslagerreservoir 25 wird über einen per Ventil 31 verschließbaren Kanal 30 gemäß Figur 3 oder einen Kanal 40 ohne Ventil, aber mit anisotropem Strömungswiderstand 41 gemäß Figur 4 hergestellt. In beiden Fällen wird sichergestellt, dass Gas aus dem Kompressionsraum 1 in das Gasreservoir 25 gelangt. Umgekehrt kann aber durch das Ventil 31 oder durch den anisotropen Strömungswiderstand 41 kein Gas oder nur geringfügig Gas aus dem Reservoir 25 zurück in den Kompressionsraum 1 gelangen.The connection between compression chamber 1 and gas storage reservoir 25 is connected via a closable by valve 31 channel 30 FIG. 3 or a channel 40 without valve, but with anisotropic flow resistance 41 according to FIG. 4 produced. In both cases it is ensured that gas from the compression chamber 1 enters the gas reservoir 25. Conversely, however, no gas or only slightly gas can pass from the reservoir 25 back into the compression space 1 through the valve 31 or through the anisotropic flow resistance 41.

Das Volumen des Gasreservoirs 25 wird so gewählt, dass das Gaslager bei repetierendem Betrieb zuverlässig aus dem Reservoir 25 gespeist wird, insbesondere wenn während des Teils des Verdichtungszyklus bzw. Ansaugzyklus das Reservoir nicht aus dem Hochdruckraum 20 gespeist wird.The volume of the gas reservoir 25 is selected so that the gas bearing is fed reliably from the reservoir 25 during repetitive operation, in particular if the reservoir is not fed from the high-pressure chamber 20 during the part of the compression cycle or intake cycle.

Speziell für den Anlauf des Verdichters kann das Gasreservoir 25 mit einem Auslassventil 26 versehen werden. Dadurch kann der Druck im Reservoir 25 dauerhaft oder zumindest länger gehalten werden, wodurch die Zeitdauer, in der der Kompressor ausgeschaltet bleiben kann, ohne dass das Gaslager die Tragfähigkeit verliert, verlängert werden kann. Vor dem Anlauf des Kolbens 2 wird das Auslassventil 26 des Gasreservoirs wieder geöffnet, um zunächst die Tragfähigkeit des Gaslagers wieder herzustellen und dann erst die Bewegung des Kolbens 2 zu beginnen.Especially for the start-up of the compressor, the gas reservoir 25 can be provided with an outlet valve 26. Thereby, the pressure in the reservoir 25 can be maintained permanently or at least longer, whereby the time period in which the compressor can remain switched off without the gas bearing loses the load capacity, can be extended. Before the start of the piston 2, the outlet valve 26 of the gas reservoir is again opened to first restore the carrying capacity of the gas bearing and then only to begin the movement of the piston 2.

Eine Alternative des Anlaufs besteht darin, bei entleertem Gasreservoir 25 den Kolben 2 zunächst mit reduziertem Hub zu bewegen, um das Gasreservoir 25 unter Druck zu setzten. Sobald dadurch die Tragfähigkeit des Gaslagers gegeben ist, kann der Hub auf Normalhub erhöht werden und der normale Verdichterbetrieb beginnt.An alternative of start-up is, with the gas reservoir 25 empty, first to move the piston 2 with a reduced stroke in order to pressurize the gas reservoir 25. Once this is the bearing capacity of the gas bearing, the stroke can be increased to normal and normal compressor operation begins.

Eine weitere Alternative wäre ein Auslassventil des Kompressionsraums, das unabhängig vom Druck hinter dem Auslassventil erst ab einem bestimmten Druck öffnet. Dadurch kann erreicht werden, dass beim Anlauf des Verdichters zunächst das Gasreservoir 25 gefüllt wird und erst dann der Nutzgasstrom einsetzt.Another alternative would be an exhaust valve of the compression chamber, which opens independent of the pressure behind the exhaust valve only from a certain pressure. It can thereby be achieved that during start-up of the compressor first the gas reservoir 25 is filled and only then uses the Nutzgasstrom.

Claims (7)

  1. Compressor with gas bearing and with a compression chamber (1), wherein the gas bearing is a self-supplying gas bearing in which the supply pressure is independent of the conveying pressure, wherein a gas reservoir (25) with bearing supply pressure is present, characterised in that a channel (40) with an anisotropic flow resistance (41) is present between compression chamber (1) and gas reservoir.
  2. Compressor according to claim 1, characterised in that the supply of the bearing is undertaken at a lower pressure than the compression end pressure.
  3. Compressor according to claim 1, characterised in that the supply of the bearing is fed from the high pressure by way of a pressure reducer.
  4. Compressor according to claim 3, characterised in that the pressure reducer is fed from a separate tap in the compression chamber.
  5. Compressor according to claim 1, characterised in that means for ensuring the gas bearing support capability in the case of repeating operation of the gas bearing are present.
  6. Compressor according to claim 1, characterised in that the gas reservoir (25) is constantly under pressure.
  7. Compressor according to any one of the preceding claims, characterised in that at least one channel (30) with valve (31) is present between compression chamber (1) and gas reservoir (25).
EP06807564A 2005-11-09 2006-10-26 Compressor Not-in-force EP1948928B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005053836A DE102005053836A1 (en) 2005-11-09 2005-11-09 compressor
PCT/EP2006/067795 WO2007054437A1 (en) 2005-11-09 2006-10-26 Compressor

Publications (2)

Publication Number Publication Date
EP1948928A1 EP1948928A1 (en) 2008-07-30
EP1948928B1 true EP1948928B1 (en) 2011-03-23

Family

ID=37547079

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06807564A Not-in-force EP1948928B1 (en) 2005-11-09 2006-10-26 Compressor

Country Status (8)

Country Link
US (1) US20090301293A1 (en)
EP (1) EP1948928B1 (en)
CN (1) CN101305186B (en)
AT (1) ATE503111T1 (en)
DE (2) DE102005053836A1 (en)
ES (1) ES2360729T3 (en)
RU (1) RU2411394C2 (en)
WO (1) WO2007054437A1 (en)

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Publication number Priority date Publication date Assignee Title
KR101397083B1 (en) 2011-09-06 2014-06-30 엘지전자 주식회사 Reciprocating motor and reciprocating compressor having the same
BR102013003056A2 (en) * 2013-02-07 2014-09-16 Whirlpool Sa FLOW RESTRICTOR AND GAS COMPRESSOR
EP2971765B1 (en) * 2013-03-13 2017-09-06 Howden Thomassen Compressors B.V. Horizontal piston compressor
US10352313B2 (en) * 2014-06-24 2019-07-16 Lg Electronics Inc. Linear compressor
US9932975B2 (en) * 2015-01-16 2018-04-03 Haier Us Appliance Solutions, Inc. Compressor
CN106401908A (en) * 2015-07-17 2017-02-15 姚宏志 High-efficiency refrigerant compressor
CN107101409B (en) * 2017-05-17 2018-01-23 宁利平 Double acting α type sterlin refrigerators
KR102495256B1 (en) 2018-05-16 2023-02-02 엘지전자 주식회사 Linear compressor
CN111365909B (en) * 2018-12-25 2024-04-05 珠海格力电器股份有限公司 Refrigerant circulation system, air conditioning equipment and control method of refrigerant circulation system
KR102430411B1 (en) * 2020-12-07 2022-08-09 엘지전자 주식회사 Linear compressor

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Publication number Priority date Publication date Assignee Title
US2907304A (en) * 1957-04-04 1959-10-06 Macks Elmer Fred Fluid actuated mechanism
GB923732A (en) * 1960-05-27 1963-04-18 Atomic Energy Authority Uk Improvements in or relating to free piston compressors with gas bearings
DE1945924A1 (en) * 1969-09-11 1971-03-18 Lenger Karl Werner Free piston machine
JPS5970830A (en) * 1982-10-15 1984-04-21 Hitachi Ltd Turbosupercharger
JP3089270B2 (en) * 1990-02-26 2000-09-18 日本精工株式会社 Hydrostatic gas bearing
JPH08312582A (en) * 1995-05-23 1996-11-26 Daikin Ind Ltd Reversal preventing device for compressor
DE10257951A1 (en) * 2002-12-12 2004-07-01 Leybold Vakuum Gmbh piston compressor
JP4427248B2 (en) * 2002-12-17 2010-03-03 株式会社東芝 Gas bearing device

Also Published As

Publication number Publication date
EP1948928A1 (en) 2008-07-30
RU2411394C2 (en) 2011-02-10
DE102005053836A1 (en) 2007-05-10
WO2007054437A1 (en) 2007-05-18
ES2360729T3 (en) 2011-06-08
DE502006009174D1 (en) 2011-05-05
US20090301293A1 (en) 2009-12-10
CN101305186A (en) 2008-11-12
RU2008119085A (en) 2009-12-20
CN101305186B (en) 2010-08-18
ATE503111T1 (en) 2011-04-15

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