EP1892667A3 - Prüfvorrichtung - Google Patents

Prüfvorrichtung Download PDF

Info

Publication number: EP1892667A3
Authority: EP; European Patent Office
Prior art keywords: image; examination apparatus; acquisition unit; specimen; unit configured
Prior art date: 2006-08-25
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP07016468A

Other languages

English (en)

French (fr)

Other versions

EP1892667A2 (de

Inventor

Yoshihisa Tanikawa

Tomoaki Sato

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Olympus Corp

Original Assignee

Olympus Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2006-08-25

Filing date

2007-08-22

Publication date

2008-03-05

2007-08-22 Application filed by Olympus Corp filed Critical Olympus Corp

2008-02-27 Publication of EP1892667A2 publication Critical patent/EP1892667A2/de

2008-03-05 Publication of EP1892667A3 publication Critical patent/EP1892667A3/de

Status Withdrawn legal-status Critical Current

Links

Classifications

- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/365—Control or image processing arrangements for digital or video microscopes
- G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/26—Stages; Adjusting means therefor

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
Multimedia (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Computer Vision & Pattern Recognition (AREA)
Microscoopes, Condenser (AREA)
Endoscopes (AREA)
Studio Devices (AREA)

EP07016468A 2006-08-25 2007-08-22 Prüfvorrichtung Withdrawn EP1892667A3 (de)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP2006229721A JP2008052139A (ja)	2006-08-25	2006-08-25	観察装置

Publications (2)

Publication Number	Publication Date
EP1892667A2 EP1892667A2 (de)	2008-02-27
EP1892667A3 true EP1892667A3 (de)	2008-03-05

Family

ID=38828683

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP07016468A Withdrawn EP1892667A3 (de)	2006-08-25	2007-08-22	Prüfvorrichtung

Country Status (3)

Country	Link
US (1)	US20080174765A1 (de)
EP (1)	EP1892667A3 (de)
JP (1)	JP2008052139A (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CN103033129B (zh)	2011-10-07	2015-10-21	财团法人工业技术研究院	光学设备及光学定址方法
US20180348500A1 (en) *	2015-11-11	2018-12-06	Scopio Labs Ltd.	Scanning microscope with real time response

Citations (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0256516A (ja) *	1988-08-23	1990-02-26	Hitachi Ltd	顕微鏡画像の視野内自動位置決め装置
JPH05334572A (ja) *	1992-06-01	1993-12-17	Fuji Electric Co Ltd	室内監視装置
JPH07253548A (ja) *	1994-03-15	1995-10-03	Nikon Corp	標本像の自動追尾装置及び追尾方法
JPH07261097A (ja) *	1994-03-17	1995-10-13	Fujitsu Ltd	顕微鏡及び画像取得方法
JP2000088764A (ja) *	1998-09-17	2000-03-31	Nippon Steel Corp	自動顕微鏡検査装置
US6081370A (en) *	1996-06-03	2000-06-27	Leica Mikroskopie Systeme Ag	Determining the position of a moving object

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5448399A (en) *	1992-03-13	1995-09-05	Park Scientific Instruments	Optical system for scanning microscope
US5491548A (en) *	1994-03-18	1996-02-13	Tektronix, Inc.	Optical signal measurement instrument and wide dynamic range optical receiver for use therein
US6407373B1 (en) *	1999-06-15	2002-06-18	Applied Materials, Inc.	Apparatus and method for reviewing defects on an object
JP2002185974A (ja) *	2000-12-12	2002-06-28	Canon Inc	画像処理装置およびその方法

2006
- 2006-08-25 JP JP2006229721A patent/JP2008052139A/ja not_active Withdrawn
2007
- 2007-08-21 US US11/842,496 patent/US20080174765A1/en not_active Abandoned
- 2007-08-22 EP EP07016468A patent/EP1892667A3/de not_active Withdrawn

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0256516A (ja) *	1988-08-23	1990-02-26	Hitachi Ltd	顕微鏡画像の視野内自動位置決め装置
JPH05334572A (ja) *	1992-06-01	1993-12-17	Fuji Electric Co Ltd	室内監視装置
JPH07253548A (ja) *	1994-03-15	1995-10-03	Nikon Corp	標本像の自動追尾装置及び追尾方法
JPH07261097A (ja) *	1994-03-17	1995-10-13	Fujitsu Ltd	顕微鏡及び画像取得方法
US6081370A (en) *	1996-06-03	2000-06-27	Leica Mikroskopie Systeme Ag	Determining the position of a moving object
JP2000088764A (ja) *	1998-09-17	2000-03-31	Nippon Steel Corp	自動顕微鏡検査装置

Also Published As

Publication number	Publication date
JP2008052139A (ja)	2008-03-06
US20080174765A1 (en)	2008-07-24
EP1892667A2 (de)	2008-02-27

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Legal Events

Date	Code	Title	Description
2008-01-25	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2008-02-01	PUAL	Search report despatched	Free format text: ORIGINAL CODE: 0009013
2008-02-27	AK	Designated contracting states	Kind code of ref document: A2 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
2008-02-27	AX	Request for extension of the european patent	Extension state: AL BA HR MK YU
2008-03-05	AK	Designated contracting states	Kind code of ref document: A3 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR
2008-03-05	AX	Request for extension of the european patent	Extension state: AL BA HR MK YU
2008-03-05	RIC1	Information provided on ipc code assigned before grant	Ipc: G02B 21/26 20060101AFI20080131BHEP
2008-11-12	AKX	Designation fees paid
2009-01-30	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN
2009-03-04	18D	Application deemed to be withdrawn	Effective date: 20080906
2009-04-16	REG	Reference to a national code	Ref country code: DE Ref legal event code: 8566