EP1841053A1

EP1841053A1 - Energy scavenger

Info

Publication number: EP1841053A1
Application number: EP06111849A
Authority: EP
Inventors: Terje Kvisteroy; Terje Skog
Original assignee: Infineon Technologies Sensonor AS
Current assignee: Infineon Technologies Sensonor AS
Priority date: 2006-03-28
Filing date: 2006-03-28
Publication date: 2007-10-03
Anticipated expiration: 2026-03-28
Also published as: US20070228889A1; US7535156B2; DE602006009761D1; JP2007267591A; EP1841053B1

Abstract

A micro-electromechanical package (1) comprises a casing (2,3,6) and a microelectronic circuit (7). At least one portion of the casing comprises piezoelectric material arranged such that, in use, dynamically changing mechanical strain in the at least one portion produces an electrical charge.

Description

The present invention relates to the area of energy scavenging and particularly to a piezoelectric energy scavenger.
Energy scavengers, also sometimes known as energy harvesters are increasingly used in electronic systems to reduce the strain on main power sources or, in some cases, to act as main sources of power.
An energy scavenger is a device which converts ambient energy, which would otherwise be wasted, into energy which can be used for a specific purpose. Energy scavengers may be used in a wide variety of applications raging from indirectly powering emergency telecommunication equipment to powering microelectronic sensors.
A system for indirectly powering telecommunication devices could, for example, comprise a solar panel which would help charge a battery connected to an stationary emergency wireless telephone box located on the side of a remote motorway. Unfortunately, solar power is not always ideal for powering microelectronic circuits in that, often, these circuits are found in relatively dark places.
However, many micro electronic devices, such as acceleration sensors or passive sensors are constantly being exposed to kinetic forces. Consequently, kinetic energy scavengers have been developed to harness a part of the residual ambient energy caused by the acceleration, vibration or dynamic compression of a device.
Kinetic energy scavengers may harness vibratory energy using piezoelectric devices, thereby converting strain in a material into electrical impulses. These devices can be used in a wide variety of applications.
Most energy scavengers comprise multiple interconnected parts which are assembled in a package in order to protect the highly sensitive parts from environmental conditions. This has numerous drawbacks. The first of which is that the multiple interconnected parts must be assembled and placed in the package itself. Thus, known energy scavengers are expensive and difficult to manufacture. What is needed is an energy scavenger which comprises few parts and is thereby cheaper and easier to manufacture.
One fundamental challenge with energy scavengers for kinetic energy is the need for large seismic masses or large diaphragms to reach certain levels of efficiency. A second fundamental challenge for piezoelectric energy scavengers is that the efficiency is directly related to the amount of piezoelectric material that is exposed to resulting high strains. Thus, the efficiency of the scavenger is directly related to the volume and/or area of the device.
As has been appreciated by the applicant, there is a need to for an energy scavenger which maximises the piezoelectric material exposed to high strain while minimising the complexity of the microeletronic system itself.
In order to overcome the problems associated with the prior art, the present invention provides a micro-electrortiechanical package which comprises:

a casing; and
a microelectronic circuit;
wherein at least one portion of the casing comprises piezoelectric material arranged such that, in use, dynamically changing mechanical strain in the at least one portion produces an electrical charge.

Preferably, the at least one portion of the casing comprises at least one outer wall of the casing.
The at least one outer wall of the casing may comprise an inertial mass formed as part of the casing.
The at least one portion of the casing may comprise a cantilever arm.
The cantilever arm may comprise an inertial mass.
Preferably, electrode layers (5) are embedded in the piezoelectric material such that, in use, they collect the electrical charges produced by the piezoelectric material.
The casing may be made of Aluminum Nitride.
The microelectronic circuit may further comprise at least one of:

a power management circuit;
a power storage circuit; and
a micro-electromechanical sensor circuit.

The present invention further provides a method of manufacturing the micro-electromechanical package of any of the previous claims, the method comprises the steps of:

forming the MEMS package using a ceramic multi-layering technique or a polymer moulding technique.

An example of the present invention will now be described with reference to the accompanying drawings in which:

Figure 1 is a cross-sectional view of a micro-electromechanical package according to a first example of the present invention;
Figure 2 is a cross-sectional view of a micro-electromechanical package according to a second example of the present invention;
Figure 3 is a cross-sectional view of a micro-electromechanical package according to a third example of the present invention;
Figure 4 is a cross-sectional view of a micro-electromechanical package according to a fourth example of the present invention;
Figure 5 is a cross-sectional view of a micro-electromechanical package according to a fifth example of the present invention; and
Figure 6 is a cross-sectional view of a micro-electromechanical package according to a sixth example of the present invention.

With reference to Figure 1, the micro-electromechanical package 1 of the present invention comprises a casing made of piezoelectric material 2 and a diaphragm 3 including electrodes 5 interleaved with layers of the piezoelectric material 2. The electrodes 5 collect the electrical charge produced in the piezoelectric material 2 layers of the diaphragm 3.
The micro-electromechanical package 1 may also comprise a variety of electronic circuits 7. These may include power management and power storage circuits as well as micro-electromechanical sensors. The micro-electromechanical package 1 of the present invention may also comprise solder terminals 8 for connecting the package to a substrate (not shown) and a lid 6 for shielding the electronic circuits 7.
With reference to the example shown in Figure 1, an external force F acting upon the diaphragm will create mechanical strain in the interleaved layers of piezoelectric material 2 included in the diaphragm 3. Consequently, the piezoelectric layers generate charges which are collected by the electrodes 5 and sent to the electronic circuits 7 or, alternatively, to the substrate (not shown) via the solder terminals 8.
Thus, the device found in the example of Figure 1 collects the energy related to the external force F applied directly to the micro-electromechanical package 1 itself. A possible application for which this particular example of the present invention would be well suited is that of a sensor integrated into the rubber of a tire. Each time the appropriate surface of the tire hits and leaves contact with the road surface the diaphragm will either compressed or decompressed and the piezoelectric material will be strained.
With reference to the example shown in Figure 2, a first external force F is applied to a first diaphragm 3 and a second external force F' is applied to a second diaphragm 3'. Both diaphragms 3; 3' function in the same way as the diaphragm of the example shown in Figure 1. The metal bond 9 is used to join the two parts of the package hermetically. One reliable method of making such a bond would be using a metal-to-metal bonding technique.
With reference now to the example shown in Figure 3, the micro-electromechanical package 1 of the present invention comprises a casing made of piezoelectric material 2 and a diaphragm 3 comprised of electrodes 5 interleaved with layers of the piezoelectric material 2. Again, the electrodes 5 collect the electrical charge produced in the piezoelectric material layers of the diaphragm 3.
This particular embodiment further comprises an inertial mass 4 located inside the package and formed at the centre of the diaphragm 3. Thus, when the micro-electromechanical package 1 is moved or vibrated, the inertial mass 4 is used to amplify the strain in the piezoelectric material 2 in the diaphragm 3. In this case the diaphragm acts as the elastic spring element of a mass-spring system. A possible application for which this particular example of the invention would be well suited is that of sensors integrated onto the wheel of a car. When the car is driving the wheel will vibrate and the casing mounted to the wheel will feel the same vibrations. The mass-spring system will vibrate and the piezoelectric material will be strained.
With reference now to the example shown in Figure 4, the micro-electromechanical package 1 of the present invention can comprise an inertial mass 4 located outside of the package and formed at the centre of the diaphragm 3. This particular example of the invention may provide advantages related to manufacturing costs and application integration.
With reference now to the example shown in Figure 5, the micro-electromechanical package 1 of the present invention may comprise a cantilever arm 11 integrally formed with one wall of the micro-electromechanical package 1. The cantilever arm 11 also includes an inertial mass 4 formed at the free end of the cantilever arm 11. This particular example of the invention will provide a significant advantage when no displacement or movement of any outer wall of the casing is possible (e.g. when the component is potted or encased in hard epoxy).
With reference now to the example shown in Figure 6, the micro-electromechanical package 1 of the present invention further comprises a weight 10 embedded in the inertial mass 4. The embedded weight 10 may be made of a metal. Each of the previous examples which comprise an inertial mass 4 may also comprise a weight 10 embedded in the inertial mass 4. As mentioned above, the efficiency of a vibratory energy scavenger depends much on the seismic mass. In light of the fact that most casing materials (ceramics and plastics) are light weight materials, the efficiency of an energy scavenger will be significantly improved by inserting a high density metal during the casing manufacturing process.

Claims

A micro-electromechanical package (1) comprising:
a casing; and

a microelectronic circuit (7);

wherein at least one portion of the casing comprises piezoelectric material arranged such that, in use, dynamically changing mechanical strain in the at least one portion produces an electrical charge.
The micro-electromechanical package (1) of claim 1, wherein the at least one portion of the casing comprises at least one outer wall (3) of the casing.
The micro-electromechanical package (1) of claim 2, wherein the at least one outer wall (3) of the casing comprises an inertial mass (4) formed as part of the casing.
The micro-electromechanical package (1) of claim 1, wherein the at least one portion of the casing comprises a cantilever arm (11).
The micro-electromechanical package of claim 4, wherein the cantilever arm (11) comprises an inertial mass (4).
The micro-electromechanical package (1) of any of the preceding claims, wherein electrode layers (5) are embedded in the piezoelectric material such that, in use, they collect the electrical charges produced by the piezoelectric material.
The micro-electromechanical package (1) of any of the preceding claims, wherein the casing is made of Aluminum Nitride.
The micro-electromechanical package (1) of any of the preceding claims, wherein the microelectronic circuit further comprises at least one of:
a power management circuit;

a power storage circuit; and

a micro-electromechanical sensor circuit.
A method of manufacturing the micro-electromechanical package (1) of any of the previous claims, the method comprising the steps of:
forming the MEMS package using a ceramic multi-layering technique or a polymer moulding technique.