EP1790419A3 - Capacitive ultrasonic transducer and method of fabricating the same - Google Patents

Capacitive ultrasonic transducer and method of fabricating the same Download PDF

Info

Publication number
EP1790419A3
EP1790419A3 EP06013590A EP06013590A EP1790419A3 EP 1790419 A3 EP1790419 A3 EP 1790419A3 EP 06013590 A EP06013590 A EP 06013590A EP 06013590 A EP06013590 A EP 06013590A EP 1790419 A3 EP1790419 A3 EP 1790419A3
Authority
EP
European Patent Office
Prior art keywords
electrode
ultrasonic transducer
capacitive ultrasonic
same
fabricating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06013590A
Other languages
German (de)
French (fr)
Other versions
EP1790419A2 (en
Inventor
Ming-Wei Chang
Tse-Min Deng
Tsung-Ju Gwo
Zhen-Yuan Chung
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Industrial Technology Research Institute ITRI
Original Assignee
Industrial Technology Research Institute ITRI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Industrial Technology Research Institute ITRI filed Critical Industrial Technology Research Institute ITRI
Publication of EP1790419A2 publication Critical patent/EP1790419A2/en
Publication of EP1790419A3 publication Critical patent/EP1790419A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

A capacitive ultrasonic transducer (30) that includes a first electrode (31), an insulating layer (32) formed on the first electrode, at least one support frame (38) formed on the insulating layer, and a second electrode (35) formed spaced apart from the first electrode, wherein the first electrode and the second electrode define an effective area of oscillation of the capacitive ultrasonic transducer, and the respective length of the first electrode and the second electrode defining the effective area of oscillation is substantially the same.
EP06013590A 2005-11-24 2006-06-30 Capacitive ultrasonic transducer and method of fabricating the same Withdrawn EP1790419A3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN200510123960 2005-11-24

Publications (2)

Publication Number Publication Date
EP1790419A2 EP1790419A2 (en) 2007-05-30
EP1790419A3 true EP1790419A3 (en) 2010-05-12

Family

ID=37846053

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06013590A Withdrawn EP1790419A3 (en) 2005-11-24 2006-06-30 Capacitive ultrasonic transducer and method of fabricating the same

Country Status (2)

Country Link
EP (1) EP1790419A3 (en)
CN (1) CN102225389B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110510573B (en) * 2019-08-30 2023-01-10 中国科学院深圳先进技术研究院 Capacitive micro-mechanical ultrasonic transducer and preparation method and application thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1975801A (en) * 1930-12-15 1934-10-09 Sound Lab Corp Ltd Microphone
US4432007A (en) * 1978-11-08 1984-02-14 General Electric Company Ultrasonic transducer fabricated as an integral part of a monolithic integrated circuit
EP1085784A2 (en) * 1999-09-16 2001-03-21 Sanyo Electric Co., Ltd. Semiconductor device, semiconductor electret condenser microphone, and method of producing semiconductor electret condenser microphone
JP2005027186A (en) * 2003-07-04 2005-01-27 Seiko Epson Corp Ultrasonic conversion apparatus
WO2005077012A2 (en) * 2004-02-06 2005-08-25 Georgia Tech Research Corporation Cmut devices and fabrication methods

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5423220A (en) * 1993-01-29 1995-06-13 Parallel Design Ultrasonic transducer array and manufacturing method thereof
KR100935934B1 (en) * 2003-03-15 2010-01-11 삼성전자주식회사 Emitter for electron-beam projection lithography system and method of manufacturing thereof
JP4044090B2 (en) * 2003-12-26 2008-02-06 シャープ株式会社 Color filter substrate, liquid crystal display device including the same, and method for manufacturing color filter substrate
JP4123192B2 (en) * 2004-06-03 2008-07-23 セイコーエプソン株式会社 Ultrasonic transducer and method of manufacturing ultrasonic transducer

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1975801A (en) * 1930-12-15 1934-10-09 Sound Lab Corp Ltd Microphone
US4432007A (en) * 1978-11-08 1984-02-14 General Electric Company Ultrasonic transducer fabricated as an integral part of a monolithic integrated circuit
EP1085784A2 (en) * 1999-09-16 2001-03-21 Sanyo Electric Co., Ltd. Semiconductor device, semiconductor electret condenser microphone, and method of producing semiconductor electret condenser microphone
JP2005027186A (en) * 2003-07-04 2005-01-27 Seiko Epson Corp Ultrasonic conversion apparatus
WO2005077012A2 (en) * 2004-02-06 2005-08-25 Georgia Tech Research Corporation Cmut devices and fabrication methods

Also Published As

Publication number Publication date
CN102225389A (en) 2011-10-26
CN102225389B (en) 2013-09-18
EP1790419A2 (en) 2007-05-30

Similar Documents

Publication Publication Date Title
EP1585218A3 (en) Bulk acoustic wave resonator and methods of making the same
EP1471637A3 (en) Method for fabricating cantilevered type film bulk acoustic resonator and film bulk acoustic resonator fabricated by the same
WO2007023409A3 (en) Acoustic light-emitting device
EP1061645A3 (en) Surface acoustic wave element, method for producing the same and surface acoustic wave device using the same
EP1955783A3 (en) Flexible capacitive ultrasonic transducer and method of fabricating the same
TW200801458A (en) Capacitive ultrasonic transducer and method of fabricating the same
EP1667244A3 (en) Phase change memory device having phase change material layer containing phase change nano particles and method of fabricating the same
EP2383888A3 (en) Boundary acoustic wave device manufacturing method and boundary acoustic wave device
WO2005084284A3 (en) Multiple element electrode cmut devices and fabrication methods
EP1406386A3 (en) Piezoelectric resonator, piezoelectric filter, and communication apparatus
EP2202783A3 (en) Capacitor and method for fabricating the same
EP1761104A4 (en) Electrostatic capacity type ultrasonic vibrator, manufacturing method thereof, and electrostatic capacity type ultrasonic probe
EP1700539A3 (en) Cable management device and method of manufacturing same
EP1100289A8 (en) Electroacoustic transducer, process of producing the same and electroacoustic transducing device using the same
ITTO20010253A0 (en) STRUCTURAL ELEMENT FOR THE SUSPENSION OF A MOTOR VEHICLE AND PROCEDURE FOR ITS CREATION.
EP1689079A3 (en) Piezoelectric vibration element, piezoelectric vibrator, piezoelectric oscillator, frequency stabilization method, and method of manufacturing the piezoelectric vibrator
EP1830417A3 (en) Semiconductor device and its manufacturing method
JP2005519316A5 (en)
EP1609173A4 (en) Electronic device including a self-assembled monolayer, and a method of fabricating the same
EP1746722A3 (en) Film bulk acoustic wave resonator and manufacturing method thereof
EP1737011A3 (en) Electron emitter
EP1783902A3 (en) Wafer level package for surface acoustic wave device and fabrication method thereof
EP1689080A3 (en) Film bulk acoustic resonator and a method for manufacturing the same
BR0001410B1 (en) method for the continuous production of geogrades, large surface area geogrades, vibration welding apparatus for producing geogrades and use of large surface area geogrades.
ITRM20010243A0 (en) SURFACE MICROMECHANICAL PROCEDURE FOR THE CREATION OF ELECTRO-ACOUSTIC TRANSDUCERS, IN PARTICULAR ULTRASONIC TRANSDUCERS, REL

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA HR MK YU

RIC1 Information provided on ipc code assigned before grant

Ipc: G01H 11/06 20060101ALI20100125BHEP

Ipc: B06B 1/02 20060101AFI20070320BHEP

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA HR MK RS

17P Request for examination filed

Effective date: 20101012

AKX Designation fees paid

Designated state(s): DE GB

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20130103