EP1615000A4 - Thermal type mass flow rate sensor made of corrosion resistant metal, and fluid supply equipment using the same - Google Patents

Thermal type mass flow rate sensor made of corrosion resistant metal, and fluid supply equipment using the same

Info

Publication number
EP1615000A4
EP1615000A4 EP04710538A EP04710538A EP1615000A4 EP 1615000 A4 EP1615000 A4 EP 1615000A4 EP 04710538 A EP04710538 A EP 04710538A EP 04710538 A EP04710538 A EP 04710538A EP 1615000 A4 EP1615000 A4 EP 1615000A4
Authority
EP
European Patent Office
Prior art keywords
flow rate
mass flow
fluid supply
same
rate sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04710538A
Other languages
German (de)
French (fr)
Other versions
EP1615000A1 (en
Inventor
Nobukazu Ikeda
Kaoru Hirata
Kouji Nishino
Ryousuke Dohi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of EP1615000A1 publication Critical patent/EP1615000A1/en
Publication of EP1615000A4 publication Critical patent/EP1615000A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
EP04710538A 2003-04-16 2004-02-12 Thermal type mass flow rate sensor made of corrosion resistant metal, and fluid supply equipment using the same Withdrawn EP1615000A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003112090A JP3754678B2 (en) 2003-04-16 2003-04-16 Corrosion-resistant metal thermal mass flow sensor and fluid supply equipment using the same
PCT/JP2004/001519 WO2004092688A1 (en) 2003-04-16 2004-02-12 Thermal type mass flow rate sensor made of corrosion resistant metal, and fluid supply equipment using the same

Publications (2)

Publication Number Publication Date
EP1615000A1 EP1615000A1 (en) 2006-01-11
EP1615000A4 true EP1615000A4 (en) 2006-06-14

Family

ID=33296021

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04710538A Withdrawn EP1615000A4 (en) 2003-04-16 2004-02-12 Thermal type mass flow rate sensor made of corrosion resistant metal, and fluid supply equipment using the same

Country Status (7)

Country Link
US (1) US7363810B2 (en)
EP (1) EP1615000A4 (en)
JP (1) JP3754678B2 (en)
KR (1) KR100714779B1 (en)
CN (1) CN100406854C (en)
TW (1) TWI257475B (en)
WO (1) WO2004092688A1 (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3754678B2 (en) * 2003-04-16 2006-03-15 株式会社フジキン Corrosion-resistant metal thermal mass flow sensor and fluid supply equipment using the same
JP2005241279A (en) 2004-02-24 2005-09-08 Fujikin Inc Sensor made of anti-corrosion metal for fluid and fluid supply apparatus
JP4185477B2 (en) * 2004-07-23 2008-11-26 長野計器株式会社 Pressure sensor
TWI275416B (en) * 2006-04-11 2007-03-11 Touch Micro System Tech Micro sample heating apparatus and method of making the same
US7755466B2 (en) 2006-04-26 2010-07-13 Honeywell International Inc. Flip-chip flow sensor
US9013890B2 (en) * 2010-03-26 2015-04-21 Infineon Technologies Ag Semiconductor packages and methods for producing the same
TWI427275B (en) * 2011-09-21 2014-02-21 Taiwan Bally Technology Co Ltd Fluid measuring apparatus
JP5481454B2 (en) 2011-09-22 2014-04-23 株式会社東芝 Flow sensor, mass flow controller, and method of manufacturing flow sensor
DE102013101403B4 (en) 2012-12-21 2024-05-08 Innovative Sensor Technology Ist Ag Sensor for determining a process variable of a medium and method for manufacturing the sensor
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
DE102013014532B3 (en) * 2013-09-03 2014-11-06 W. O. M. World of Medicine GmbH Apparatus and method for determining mixing ratios of flowing media
KR101611972B1 (en) * 2015-01-08 2016-04-12 주식회사 현대케피코 air flow sensor for improving durability
US10107662B2 (en) 2015-01-30 2018-10-23 Honeywell International Inc. Sensor assembly
US10655994B2 (en) * 2015-04-30 2020-05-19 Hewlett-Packard Development Company, L.P. Microfluidic flow sensor
US9776852B2 (en) * 2016-02-01 2017-10-03 Taiwan Semiconductor Manufacturing Company Ltd. Method for controlling surface roughness in MEMS structure
US10983537B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
WO2018180387A1 (en) * 2017-03-30 2018-10-04 株式会社フジキン Mass flow sensor, mass flow meter provided with mass flow sensor, and mass flow controller provided with mass flow sensor
CN107449477A (en) * 2017-07-28 2017-12-08 佛山市川东磁电股份有限公司 A kind of wide-range high-precision flow sensor and preparation method
CN109579928B (en) * 2018-11-23 2020-10-23 北京控制工程研究所 Thermal type micro-flow measuring sensor flow channel and sealing structure
US20220146292A1 (en) * 2020-11-06 2022-05-12 Honeywell International Inc. Flow sensing device
CN113190050A (en) * 2021-04-01 2021-07-30 青岛芯笙微纳电子科技有限公司 MEMS mass flow controller based on piezoelectric control valve and control method
CN113513605B (en) * 2021-04-01 2023-03-24 青岛芯笙微纳电子科技有限公司 MEMS mass flow controller based on electromagnetic control valve and control method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4539059A (en) * 1982-08-24 1985-09-03 Robert Bosch Gmbh Method of manufacturing corrosion-resistant measuring probes
EP0452134A2 (en) * 1990-04-13 1991-10-16 Yamatake-Honeywell Co. Ltd. Diaphragm-type sensor
EP1333255A1 (en) * 2000-10-17 2003-08-06 Yamatake Corporation Flow sensor
EP1365216A1 (en) * 2002-05-10 2003-11-26 Yamatake Corporation Flow sensor and method of manufacturing the same

Family Cites Families (22)

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Publication number Priority date Publication date Assignee Title
US4548078A (en) * 1982-09-30 1985-10-22 Honeywell Inc. Integral flow sensor and channel assembly
ATE70911T1 (en) * 1983-05-18 1992-01-15 Bronkhorst High Tech Bv FLOWMETER.
US5291781A (en) * 1991-04-12 1994-03-08 Yamatake-Honeywell Co., Ltd. Diaphragm-type sensor
JP3175887B2 (en) * 1992-10-27 2001-06-11 株式会社半導体エネルギー研究所 measuring device
US5393351A (en) * 1993-01-13 1995-02-28 The United States Of America As Represented By The Secretary Of Commerce Multilayer film multijunction thermal converters
JPH08201131A (en) * 1995-01-27 1996-08-09 Hitachi Ltd Thermal type flow rate sensor
JP3291161B2 (en) 1995-06-12 2002-06-10 株式会社フジキン Pressure type flow controller
JPH09178523A (en) * 1995-12-22 1997-07-11 Aisan Ind Co Ltd Sensor for intake air flow rate measuring apparatus
US6125695A (en) * 1997-10-13 2000-10-03 Teledyne Brown Engineering, Inc. Method and apparatus for measuring a fluid
US6062077A (en) * 1997-10-17 2000-05-16 Azima; Faramarz Techniques for making and using a sensing assembly for a mass flow controller
JPH11230803A (en) * 1998-02-17 1999-08-27 Yamatake Corp Flowmeter
JP3522535B2 (en) 1998-05-29 2004-04-26 忠弘 大見 Gas supply equipment equipped with pressure type flow controller
US5965813A (en) * 1998-07-23 1999-10-12 Industry Technology Research Institute Integrated flow sensor
DE19951595A1 (en) 1999-10-27 2001-05-17 Bosch Gmbh Robert Mass flow sensor comprises a frame formed partially by silicon, metal layer, heating element, temperature measuring element and a membrane having a dielectric and/or non-conducting accommodating layer
DE19952055A1 (en) 1999-10-28 2001-05-17 Bosch Gmbh Robert Mass flow sensor comprises a frame, a membrane held by the frame, a metal layer, a heating element, a temperature measuring element and a moisture barrier arranged above the metal layer
JP4576597B2 (en) * 2001-06-01 2010-11-10 株式会社フジキン Corrosion-resistant integrated mass flow controller
US6527835B1 (en) * 2001-12-21 2003-03-04 Sandia Corporation Chemical preconcentrator with integral thermal flow sensor
US6818911B2 (en) * 2002-04-10 2004-11-16 Canon Kabushiki Kaisha Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method
JP3683868B2 (en) 2002-05-10 2005-08-17 株式会社山武 Thermal flow sensor
JP3686398B2 (en) 2002-08-23 2005-08-24 株式会社山武 Manufacturing method of flow sensor
JP3754678B2 (en) * 2003-04-16 2006-03-15 株式会社フジキン Corrosion-resistant metal thermal mass flow sensor and fluid supply equipment using the same
JP2005241279A (en) * 2004-02-24 2005-09-08 Fujikin Inc Sensor made of anti-corrosion metal for fluid and fluid supply apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4539059A (en) * 1982-08-24 1985-09-03 Robert Bosch Gmbh Method of manufacturing corrosion-resistant measuring probes
EP0452134A2 (en) * 1990-04-13 1991-10-16 Yamatake-Honeywell Co. Ltd. Diaphragm-type sensor
EP1333255A1 (en) * 2000-10-17 2003-08-06 Yamatake Corporation Flow sensor
EP1365216A1 (en) * 2002-05-10 2003-11-26 Yamatake Corporation Flow sensor and method of manufacturing the same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2004092688A1 *

Also Published As

Publication number Publication date
WO2004092688A1 (en) 2004-10-28
US20060053878A1 (en) 2006-03-16
EP1615000A1 (en) 2006-01-11
TW200427970A (en) 2004-12-16
TWI257475B (en) 2006-07-01
JP2004317315A (en) 2004-11-11
CN100406854C (en) 2008-07-30
KR20050118727A (en) 2005-12-19
KR100714779B1 (en) 2007-05-04
CN1774618A (en) 2006-05-17
US7363810B2 (en) 2008-04-29
JP3754678B2 (en) 2006-03-15

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