EP1495304A4 - Surface cleaning and particle counting - Google Patents

Surface cleaning and particle counting

Info

Publication number: EP1495304A4
Authority: EP; European Patent Office
Prior art keywords: surface cleaning; particle counting; counting; particle; cleaning
Prior art date: 2002-04-01
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

EP02731253A

Other languages

German (de)

French (fr)

Other versions

EP1495304A1 (en

Inventor

John Samuel Batchelder

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Convey Technology Inc

Original Assignee

Convey Technology Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-04-01

Filing date

2002-04-01

Publication date

2009-11-18

2002-04-01 Application filed by Convey Technology Inc filed Critical Convey Technology Inc

2002-04-01 Priority claimed from PCT/US2002/010564 external-priority patent/WO2003085383A1/en

2005-01-12 Publication of EP1495304A1 publication Critical patent/EP1495304A1/en

2009-11-18 Publication of EP1495304A4 publication Critical patent/EP1495304A4/en

Status Withdrawn legal-status Critical Current

Links

238000004140 cleaning Methods 0.000 title 1
239000002245 particle Substances 0.000 title 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0028—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by adhesive surfaces
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/14—Optical investigation techniques, e.g. flow cytometry
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N2001/028—Sampling from a surface, swabbing, vaporising
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like

Landscapes

Chemical & Material Sciences (AREA)
Biochemistry (AREA)
Physics & Mathematics (AREA)
Health & Medical Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Analytical Chemistry (AREA)
General Health & Medical Sciences (AREA)
General Physics & Mathematics (AREA)
Immunology (AREA)
Pathology (AREA)
Dispersion Chemistry (AREA)
Sampling And Sample Adjustment (AREA)
Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

EP02731253A 2002-04-01 2002-04-01 Surface cleaning and particle counting Withdrawn EP1495304A4 (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
PCT/US2002/010564 WO2003085383A1 (en)	1999-05-12	2002-04-01	Surface cleaning and particle counting

Publications (2)

Publication Number	Publication Date
EP1495304A1 EP1495304A1 (en)	2005-01-12
EP1495304A4 true EP1495304A4 (en)	2009-11-18

Family

ID=33449002

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
EP02731253A Withdrawn EP1495304A4 (en)	2002-04-01	2002-04-01	Surface cleaning and particle counting

Country Status (4)

Country	Link
EP (1)	EP1495304A4 (en)
JP (1)	JP4099454B2 (en)
KR (1)	KR100730013B1 (en)
AU (1)	AU2002303238A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP2834709B1 (en) *	2012-04-02	2020-05-27	ASML Netherlands B.V.	Particulate contamination measurement method and apparatus
KR102350274B1 (en)	2020-05-15	2022-01-11	강원대학교산학협력단	Sampling system and sampling method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6225244A (en) *	1985-07-26	1987-02-03	Hitachi Ltd	Method and instrument for measuring sticking dust
US4727616A (en) *	1986-09-15	1988-03-01	Ronald Kucera	Pick up roller
US4766324A (en) *	1987-08-07	1988-08-23	Tencor Instruments	Particle detection method including comparison between sequential scans
US5699584A (en) *	1995-07-24	1997-12-23	Xerox Corporation	Web system
US6175984B1 (en) *	1997-09-02	2001-01-23	International Business Machines Corporation	Apparatus for cleaning precision components

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4009047A (en)	1973-12-03	1977-02-22	Minnesota Mining And Manufacturing Company	Method and device for cleaning sheets
US5343290A (en)	1992-06-11	1994-08-30	International Business Machines Corporation	Surface particle detection using heterodyne interferometer
US6023597A (en)	1995-05-30	2000-02-08	Canon Kabushiki Kaisha	Cellular conductive roller with conductive powder filling open cells in the surface
US6207406B1 (en)	1999-10-15	2001-03-27	Judd R. Wilkins	Microbial sampling apparatus and process

2002
- 2002-04-01 JP JP2003582524A patent/JP4099454B2/en not_active Expired - Fee Related
- 2002-04-01 KR KR1020047015649A patent/KR100730013B1/en not_active IP Right Cessation
- 2002-04-01 EP EP02731253A patent/EP1495304A4/en not_active Withdrawn
- 2002-04-01 AU AU2002303238A patent/AU2002303238A1/en not_active Abandoned

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6225244A (en) *	1985-07-26	1987-02-03	Hitachi Ltd	Method and instrument for measuring sticking dust
US4727616A (en) *	1986-09-15	1988-03-01	Ronald Kucera	Pick up roller
US4766324A (en) *	1987-08-07	1988-08-23	Tencor Instruments	Particle detection method including comparison between sequential scans
US5699584A (en) *	1995-07-24	1997-12-23	Xerox Corporation	Web system
US6175984B1 (en) *	1997-09-02	2001-01-23	International Business Machines Corporation	Apparatus for cleaning precision components

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO03085383A1 *

Also Published As

Publication number	Publication date
KR20050009289A (en)	2005-01-24
EP1495304A1 (en)	2005-01-12
JP2005521886A (en)	2005-07-21
KR100730013B1 (en)	2007-06-20
AU2002303238A1 (en)	2003-10-20
JP4099454B2 (en)	2008-06-11

Legal Events

Date	Code	Title	Description
2004-11-26	PUAI	Public reference made under article 153(3) epc to a published international application that has entered the european phase	Free format text: ORIGINAL CODE: 0009012
2005-01-12	17P	Request for examination filed	Effective date: 20041021
2005-01-12	AK	Designated contracting states	Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE TR
2005-01-12	AX	Request for extension of the european patent	Extension state: AL LT LV MK RO SI
2009-11-18	A4	Supplementary search report drawn up and despatched	Effective date: 20091021
2010-03-26	STAA	Information on the status of an ep patent application or granted ep patent	Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN
2010-04-28	18D	Application deemed to be withdrawn	Effective date: 20091031

Publication	Publication Date	Title
AU2003293294A8 (en)	2004-04-19	Uv-stabilised particles
GB2409180B (en)	2006-01-25	High conductivity particle filter
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AU2003272187A8 (en)	2004-01-06	Novel nanoparticles and use thereof
GB0216197D0 (en)	2002-08-21	Serrs active particles
AU2002352891A8 (en)	2003-07-24	Superabsorbent containing particles and composites
AU2003290871A1 (en)	2004-06-03	Advanced mask cleaning and handling
EP1578394A4 (en)	2011-02-23	Antibody-containing particles and compositions
AU2003299478A8 (en)	2004-05-25	Bioactivation of particles
GB0316695D0 (en)	2003-08-20	Particle formation
EP1699435A4 (en)	2009-05-20	Particles
AU2003211294A8 (en)	2003-10-20	Vacuum ultrasonic cleaning and dezymotizing device
IL164154A0 (en)	2005-12-18	Fine particle size pioglitazone
EP1512669A4 (en)	2010-01-06	Magnetite particles
AU2003286887A8 (en)	2004-06-07	Cleaning pads
AU2003293538A1 (en)	2004-07-29	Cleaning and surface preparation device
EP1495304A4 (en)	2009-11-18	Surface cleaning and particle counting
EP1495306A4 (en)	2007-10-03	Surface cleaning and particle counting
GB0221999D0 (en)	2002-10-30	Coated metallurgical particles
HK1085517A1 (en)	2006-08-25	Comprehensive cleaning device for jewelry and the like
EP1567030A4 (en)	2011-01-19	Abrasive soap and handling mechanism
GB2411347B (en)	2007-01-31	Hand and fingernail cleaning apparatus
GB2417218B (en)	2006-07-12	High conductivity particle filter
GB0224662D0 (en)	2002-12-04	Effervescent particles