EP1433518A1 - Process for removing harmful organometallic compounds from a gas - Google Patents

Process for removing harmful organometallic compounds from a gas

Info

Publication number
EP1433518A1
EP1433518A1 EP03027222.3A EP03027222A EP1433518A1 EP 1433518 A1 EP1433518 A1 EP 1433518A1 EP 03027222 A EP03027222 A EP 03027222A EP 1433518 A1 EP1433518 A1 EP 1433518A1
Authority
EP
European Patent Office
Prior art keywords
gas
organometallic compounds
removing harmful
harmful
organometallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03027222.3A
Other languages
German (de)
French (fr)
Other versions
EP1452220A1 (en
Inventor
Kenji Otsuka
Takashi Kasaya
Toshio Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Pionics Ltd
Original Assignee
Japan Pionics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002376411A external-priority patent/JP4048108B2/en
Application filed by Japan Pionics Ltd filed Critical Japan Pionics Ltd
Publication of EP1433518A1 publication Critical patent/EP1433518A1/en
Publication of EP1452220A1 publication Critical patent/EP1452220A1/en
Withdrawn legal-status Critical Current

Links

EP03027222A 2002-12-26 2003-11-28 Process for removing harmful organometallic compounds from a gas Withdrawn EP1452220A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002376411A JP4048108B2 (en) 2002-12-26 2002-12-26 How to clean harmful gases
JP2002376411 2002-12-26

Publications (2)

Publication Number Publication Date
EP1433518A1 true EP1433518A1 (en) 2004-06-30
EP1452220A1 EP1452220A1 (en) 2004-09-01

Family

ID=32463567

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03027222A Withdrawn EP1452220A1 (en) 2002-12-26 2003-11-28 Process for removing harmful organometallic compounds from a gas

Country Status (5)

Country Link
US (1) US20040129138A1 (en)
EP (1) EP1452220A1 (en)
JP (1) JP4048108B2 (en)
CN (1) CN1511616A (en)
TW (1) TW200413084A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5696348B2 (en) * 2008-08-09 2015-04-08 東京エレクトロン株式会社 Metal recovery method, metal recovery apparatus, exhaust system, and film forming apparatus using the same
US20140322124A1 (en) * 2013-04-26 2014-10-30 Japan Pionics Co., Ltd. Method of processing discharge gas discharged from production process of gallium nitride compound semiconductor
JP2014214060A (en) * 2013-04-26 2014-11-17 日本パイオニクス株式会社 Hydrogen recovery method, and hydrogen reuse method using the same
JP2015000842A (en) * 2013-06-18 2015-01-05 日本パイオニクス株式会社 Recovery method of ammonia and reuse method of ammonia using the same
CN106345289A (en) * 2016-08-28 2017-01-25 桂林市晶准测控技术有限公司 Harmful gas purifier and preparation method thereof
US11173451B1 (en) * 2020-10-29 2021-11-16 Air Products And Chemicals, Inc. Removal of hydrogen impurity from gas streams

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5949822A (en) * 1982-09-14 1984-03-22 Nippon Sanso Kk Treatment of gas comtaining volatile inorganic hydride or the like
DE3869480D1 (en) * 1987-06-01 1992-04-30 Japan Pionics METHOD FOR PURIFYING EXHAUST GAS.
US5853678A (en) * 1993-03-17 1998-12-29 Nipon Sanso Corporation Method for removing hydrides, alkoxides and alkylates out of a gas using cupric hydroxide
WO1994021355A1 (en) * 1993-03-17 1994-09-29 Nippon Sanso Corporation Methods of removing and detecting harmful component
JP3340510B2 (en) * 1993-05-19 2002-11-05 日本パイオニクス株式会社 Hazardous gas purification method
JP3347478B2 (en) * 1994-06-13 2002-11-20 日本パイオニクス株式会社 Exhaust gas purification method
JP2998002B2 (en) * 1996-01-11 2000-01-11 日本酸素株式会社 Organometallic compound abatement agent and harmful gas abatement method
GB9614848D0 (en) * 1996-07-15 1996-09-04 Boc Group Plc Processes for the scrubbing of noxious substances
SG111909A1 (en) * 1999-01-21 2005-06-29 Mitsui Chemicals Inc Agent for and process of treating exhaust gas
US6447576B1 (en) * 1999-10-29 2002-09-10 Japan Pionics Co., Ltd. Cleaning agent and cleaning process of harmful gas
JP2001219033A (en) * 1999-11-30 2001-08-14 Japan Pionics Co Ltd Method and device for cleaning harmful gas
TW510820B (en) * 1999-11-30 2002-11-21 Japan Pionics Method of cleaning of harmful gas and cleaning apparatus
US6805728B2 (en) * 2002-12-09 2004-10-19 Advanced Technology Materials, Inc. Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream

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