EP1424585A4 - Optical switch - Google Patents

Optical switch

Info

Publication number
EP1424585A4
EP1424585A4 EP02758818A EP02758818A EP1424585A4 EP 1424585 A4 EP1424585 A4 EP 1424585A4 EP 02758818 A EP02758818 A EP 02758818A EP 02758818 A EP02758818 A EP 02758818A EP 1424585 A4 EP1424585 A4 EP 1424585A4
Authority
EP
European Patent Office
Prior art keywords
shaped grooves
fabricated
electrode
parallel
mirrors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02758818A
Other languages
German (de)
French (fr)
Other versions
EP1424585A1 (en
Inventor
Toshihide Norimatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Aviation Electronics Industry Ltd
Original Assignee
Japan Aviation Electronics Industry Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Aviation Electronics Industry Ltd filed Critical Japan Aviation Electronics Industry Ltd
Publication of EP1424585A1 publication Critical patent/EP1424585A1/en
Publication of EP1424585A4 publication Critical patent/EP1424585A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12104—Mirror; Reflectors or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/352—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element having a shaped reflective surface, e.g. a reflective element comprising several reflective surfaces or facets that function together
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

There is provided an optical switch that can be easily manufactured and has hardly any optical loss. A movable board-like electrode disposed in parallel with a fixed board-like electrode with a predetermined space therebetween by a flexible beam-like element, at least two mirrors fabricated on the surface of the movable board-like electrode, and at least three V-shaped grooves for fixing optical fibers are concurrently fabricated by applying an anisotropic etching to a single crystal silicon having its surface of (100) crystal face. In this case, two opposed mirrors are fabricated such that their mirror surfaces form a right angle, and two parallel V-shaped grooves are formed at positions opposed to the mirror surfaces at an angle of 45 DEG thereto. An output side and an input side optical fibers are received and fixed in one of the two V-shaped grooves and the other groove, respectively. <IMAGE>
EP02758818A 2001-08-10 2002-08-09 Optical switch Withdrawn EP1424585A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001243582 2001-08-10
JP2001243582 2001-08-10
PCT/JP2002/008177 WO2003014799A1 (en) 2001-08-10 2002-08-09 Optical switch

Publications (2)

Publication Number Publication Date
EP1424585A1 EP1424585A1 (en) 2004-06-02
EP1424585A4 true EP1424585A4 (en) 2005-07-13

Family

ID=19073657

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02758818A Withdrawn EP1424585A4 (en) 2001-08-10 2002-08-09 Optical switch

Country Status (6)

Country Link
US (1) US7103243B2 (en)
EP (1) EP1424585A4 (en)
JP (1) JP3840225B2 (en)
KR (1) KR100630617B1 (en)
CN (1) CN1308721C (en)
WO (1) WO2003014799A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3639978B2 (en) 2002-05-10 2005-04-20 日本航空電子工業株式会社 Light switch
JP2005107180A (en) * 2003-09-30 2005-04-21 Japan Aviation Electronics Industry Ltd Microoptical device and method of manufacturing same
CN100399080C (en) * 2005-05-19 2008-07-02 上海交通大学 Method for preparing metal base micro machinery optical fiber position clip
KR100736247B1 (en) 2005-11-28 2007-07-06 광주과학기술원 Mems type optical add-drop module with v-type micromirrors moving slantly
CA2660055A1 (en) * 2006-08-03 2008-02-07 Nabtesco Corporation Optical path switching device
DE202010006536U1 (en) * 2010-05-07 2010-08-19 Bürkert Werke GmbH Opto-mechanical switch
CN102486554B (en) * 2010-12-03 2015-04-15 鸿富锦精密工业（深圳）有限公司 Optical communication system
CN104424863B (en) * 2013-08-21 2017-09-01 联想(北京)有限公司 A kind of display

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60159720A (en) * 1984-01-31 1985-08-21 Toshiba Corp Optical switch
WO2001053874A1 (en) * 2000-01-20 2001-07-26 Japan Science And Technology Corporation Mechanical optical switch and method for manufacturing the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5436986A (en) * 1993-03-09 1995-07-25 Tsai; Jian-Hung Apparatus for switching optical signals among optical fibers and method
JPH10227986A (en) * 1997-02-17 1998-08-25 Hitachi Ltd Optical switch and its manufacture, and optical communication equipment using optical switch
JPH11119123A (en) * 1997-10-20 1999-04-30 Tdk Corp Optical switch and manufacture thereof
JP3500497B2 (en) 1999-07-27 2004-02-23 日本航空電子工業株式会社 Light switch
US6363182B2 (en) * 2000-07-31 2002-03-26 James D. Mills Optical switch for reciprocal traffic
JP2002082292A (en) * 2000-09-06 2002-03-22 Japan Aviation Electronics Industry Ltd Optical switch
JP3557525B2 (en) * 2001-03-29 2004-08-25 日本航空電子工業株式会社 Micro movable device
US6842555B2 (en) * 2002-07-18 2005-01-11 Analog Devices, Inc. Method and apparatus for optical switching with same side input and outputs

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60159720A (en) * 1984-01-31 1985-08-21 Toshiba Corp Optical switch
WO2001053874A1 (en) * 2000-01-20 2001-07-26 Japan Science And Technology Corporation Mechanical optical switch and method for manufacturing the same
EP1182487A1 (en) * 2000-01-20 2002-02-27 Japan Science and Technology Corporation Mechanical optical switch and method for manufacturing the same

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
OSAMU IMAKI ET AL: "Study of (2x2)xN optical switch by micromachine technology", INSTITUTE OF ELECTRONICS, INFORMATION AND COMMUNICATION ENGINEERS TSUSHIN SOCIETY TAIKAI KOEN RONBUNSHUU, 2000, pages 208, XP002956680 *
PATENT ABSTRACTS OF JAPAN vol. 010, no. 003 (P - 418) 8 January 1986 (1986-01-08) *
See also references of WO03014799A1 *

Also Published As

Publication number Publication date
KR20040020972A (en) 2004-03-09
JP3840225B2 (en) 2006-11-01
WO2003014799A1 (en) 2003-02-20
KR100630617B1 (en) 2006-10-02
EP1424585A1 (en) 2004-06-02
JPWO2003014799A1 (en) 2004-11-25
US7103243B2 (en) 2006-09-05
CN1308721C (en) 2007-04-04
CN1559019A (en) 2004-12-29
US20040234191A1 (en) 2004-11-25

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 20040129

AK Designated contracting states

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Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR

A4 Supplementary search report drawn up and despatched

Effective date: 20050601

RIC1 Information provided on ipc code assigned before grant

Ipc: 7G 02B 26/08 A

Ipc: 7G 02B 6/35 B

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Effective date: 20060224

STAA Information on the status of an ep patent application or granted ep patent

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18D Application deemed to be withdrawn

Effective date: 20070801