EP1377752A2 - Turbomolecular pump - Google Patents

Turbomolecular pump

Info

Publication number
EP1377752A2
EP1377752A2 EP02727419A EP02727419A EP1377752A2 EP 1377752 A2 EP1377752 A2 EP 1377752A2 EP 02727419 A EP02727419 A EP 02727419A EP 02727419 A EP02727419 A EP 02727419A EP 1377752 A2 EP1377752 A2 EP 1377752A2
Authority
EP
European Patent Office
Prior art keywords
temperature
stator
pump
power
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP02727419A
Other languages
German (de)
French (fr)
Other versions
EP1377752B1 (en
Inventor
Roland Blumenthal
Heinz-Dieter Odendahl
Dieter Bohry
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1377752A2 publication Critical patent/EP1377752A2/en
Application granted granted Critical
Publication of EP1377752B1 publication Critical patent/EP1377752B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2270/00—Control
    • F05D2270/30—Control parameters, e.g. input parameters
    • F05D2270/335—Output power or torque

Definitions

  • the invention relates to a turbomolecular pump with a pump stator, a rapidly rotating pump rotor and a motor for driving the pump rotor.
  • a gas or gas particles are compressed to produce a high vacuum by rotating blades of the pump rotor and the fixed blades of the pump stator to a multiple of the inlet pressure.
  • the gas heating caused by the gas compression and gas friction is mainly dissipated again via the pump rotor and the pump stator.
  • the cooling of the pump stator can be effected by a cooling fluid leading cooling channels, the active pump rotor cooling is problematic, since the rotating pumps 'rotor' no cooling fluid can be supplied. The pump rotor can therefore overheat under unfavorable operating conditions.
  • the turbomolecular pump therefore has a control device which limits the engine power to a predetermined constant maximum engine power, so that the pump power and the gas and rotor heating correlating therewith are also limited to a constant maximum value.
  • the permissible maximum motor power is calculated and / or experimentally determined by assuming the most unfavorable process conditions for pump operation, for example a thermally unfavorable gas, poor pump stator cooling, high ambient temperatures etc.
  • the permissible maximum motor power is selected so that the pump rotor cannot exceed the maximum permissible rotor temperature even under the most unfavorable process conditions.
  • the engine power is limited to the predetermined maximum power even if the process conditions are more favorable than assumed for the calculation of the maximum engine power.
  • the motor power is therefore limited to the specified maximum motor power even if the actual rotor temperature has not yet reached the maximum permissible rotor temperature.
  • the output power of the turbomolecular pump is generally limited to a value far below an actually thermally permissible value.
  • the object of the invention is therefore to create a device and a method with which the output power of a turbomolecular pump is increased.
  • a temperature sensor for measuring the stator temperature is arranged on the pump stator. Furthermore, the control device has a maximum power determination device which determines the maximum permissible motor power as a function of the measured stator temperature. The permissible maximum motor power is therefore not a constant, unchangeable value, but is determined depending on the respective stator temperature.
  • the rotor temperature correlates strongly with the temperature of the stator-side parts of the pump, for example with the temperature of the base flange, the pump housing, the motor housing, the bearing housing, the pump stator, the motor and with the actual motor or pump power.
  • the stator temperature therefore provides information about the rotor temperature, so that the rotor temperature can also be reliably limited to a maximum value by measuring the stator temperature and limiting the permissible maximum motor power for the respective stator temperature.
  • the permissible maximum motor power is adapted to the respective thermal situation, and is therefore usually above a constant permissible maximum motor power determined for the most unfavorable thermal circumstances.
  • the actual motor power and thus the output power of the pump can be significantly increased in this way under normal process conditions.
  • the pump rotor is more reliably protected against overheating, ie exceeding the maximum permissible rotor temperature, since the rotor temperature is monitored indirectly.
  • the maximum power determination device has a rotor temperature determination device which determines the rotor temperature from the stator temperature measured by the temperature sensor. The maximum power determination device then determines the permissible maximum engine power as a function of the determined rotor temperature.
  • the rotor temperature determining device determines the motor rotor temperature from one or more different stator temperatures which are inserted into a polynomial whose constant coefficients were previously determined experimentally. In this way, the permissible maximum engine power can be determined quickly and with little storage space.
  • the limitation of the maximum motor power may only intervene when a threshold temperature of the rotor is reached and limit the permissible maximum motor power, while the maximum motor power is not limited as long as the calculated rotor temperature is below the threshold temperature.
  • the permissible maximum motor power can also be determined directly from a polynomial which is resolved according to the permissible maximum motor power and which already contains the rotor threshold temperature and / or a maximum rotor temperature in the form of coefficients.
  • the maximum engine power calculated on the basis of the coefficients can, if necessary, be additionally limited by other parameters.
  • multiple temperature sensors are provided at various points of the stator, wherein the maximum power follow-ER- ⁇ averaging means the permissible maximum motor output power in dependence on the determined ge messengeren- temperatures of all temperature sensors.
  • the temperature sensors can be attached to the housing of the turbomolecular pump, to a pump stator element part of the motor on the stator side, for example on the motor housing or on the motor winding, or in a cooling duct of the pump stator.
  • the temperature transmitters can also be arranged at other points on the stator side of the turbomolecular pump, the temperature and temperature behavior of which allow reliable conclusions to be drawn about the temperature of the rotor.
  • the maximum power determination device has a Kehnfeld memory, in which the permissible maximum motor power for each stator temperature is stored in a map.
  • a complex non-linear characteristic curve can also be stored in the characteristic diagram, so that a complex determination of the permissible maximum motor power through arithmetic operations can be omitted.
  • a secondary method for limiting the maximum permissible motor output of a motor in a turbomolecular pump that drives a pump rotor mounted in a pump stator the following method steps are provided: measuring the pump stator temperature, determining a permissible maximum motor output from the measured pump stator temperature and limiting the motor output to that permissible maximum engine power determined.
  • FIG. 1 shows a turbomolecular pump in longitudinal section with a plurality of temperature sensors
  • FIG. 2 shows a block diagram of the regulation of the turbomolecular pump of FIG. 1.
  • FIG. 1 shows a turbomolecular pump 10 which has a pump housing 12, one longitudinal end of which forms the suction side 14 and the other end of which forms the pressure side and has a gas outlet 16.
  • a pump stator 18, which comprises a pump rotor 20, is arranged in the pump housing 12.
  • the pump rotor 20 has a rotor shaft 22 which is rotatably mounted in the pump housing 12 with two radial magnetic bearings 24, 26 and an axial bearing (not shown).
  • the rotor shaft 22 and the pump rotor 20 connected to it are driven by an electric motor 28.
  • the electric motor 28 and the two radial magnetic bearings 24, 26 are accommodated in a common bearing motor housing 30.
  • the turbomolecular pump 10 • serves to generate a high vacuum and rotates at speeds of up to 100,000 rpm.
  • the turbomolecular pump 10 has a plurality of temperature sensors 32-38 on the stator side, ie on the side of the fixed parts.
  • a first temperature sensor 32 is in the area of the base flange of the pump housing. 12 arranged.
  • a second temperature sensor 34 is arranged on or in the pump stator 18.
  • a third temperature sensor 36 is arranged on the motor 28 and measures the temperature in the area of the motor coils or the motor magnetic guide plates.
  • a fourth temperature sensor 38 is arranged on the bearing motor housing 30. Another temperature sensor can be arranged in the course of the cooling channel 13.
  • the heat transferred by the gas heating of the compressed gas to the pump rotor 20 and induced by the active magnetic bearings 26 and the electric motor 28 in the pump rotor 20 is essentially dissipated by heat radiation from the pump rotor 20 to the parts on the stator side.
  • the parts on the stator side that is to say the pump housing 12, the pump stator 18, the bearing motor housing 30 as well as the magnetic bearings 24, 26 and the electric motor 28 are thus heated in addition to their own heating by the heat radiated onto them by the pump rotor 20.
  • the measurement of the temperature and the temperature profile of the parts on the stator side therefore allows conclusions to be drawn about the rotor temperature.
  • the relationship between the actual temperature of the pump rotor 20 and the temperatures of the parts on the stator side measured by the temperature sensors 32-38 can be determined with a simple experimental setup.
  • a rotor temperature sensor 40 is suitably arranged as close as possible to the pump rotor 20 on the suction side. In this way, the rotor temperature can be measured directly in the experiment, so that the relationship between the rotor temperature and the temperatures measured by the stator-side temperature sensors 32-38 can be recorded under different process conditions.
  • P is the instantaneous motor power
  • Ti to T n are the respectively measured temperatures of the stator-side temperature sensors 32-38 and the rotor temperature sensor 40.
  • the coefficients ⁇ 0 to ⁇ n and ⁇ i to ⁇ n are constants which are obtained by evaluating the experimentally measured pump rotor and pump location temperatures were determined. If you enter the maximum permissible rotor temperature in this polynomial instead of the measured • rotor temperature, the permissible maximum motor power P max is determined with this polynomial.
  • FIG. 2 the control of the pump rotor otor 28 is shown schematically.
  • a control device 42 controls a motor driver 44, which in turn controls the coils of the electric motor 28.
  • An engine power setpoint is output to the control device 42 via an actuating element 46.
  • the control device 42 has a maximum output power detecting device 50 and a power limiter • 52nd In the maximum power determination device 50, the permissible maximum engine power P max is determined from the temperature values supplied by the four temperature transmitters 32-38 according to the above formula.
  • the engine power setpoint value supplied by the control element 46 is limited to the determined • permissible maximum engine power if the power value specified by the control element 46 is greater than the determined allowable maximum engine power.
  • the rotor temperature is limited to a maximum temperature, so that the rotor is protected from being destroyed by overheating.
  • the actual engine power, the ambient temperature and other measured variables can be used as further parameters for determining the permissible maximum engine power.
  • the present rotor temperature can be inferred from a plurality of stator-side temperature sensors.
  • a permissible maximum motor power is determined from the determined rotor temperature, to which the motor power is limited.
  • the permissible maximum motor power is therefore variable, so that the performance of the motor and the pump can be fully utilized and is only limited if there is a risk of overheating.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Air Blowers (AREA)

Abstract

A turbomolecular pump (10) comprises a stator, a pump rotor, a motor (28) for driving the pump rotor and a control device (42). The control device (42) controls the motor output as to prevent the motor output from exceeding a permissible motor maximum output. Stator-side temperature sensors (32-38), which are provided for measuring the stator temperature, are arranged on the turbomolecular pump (10). The control device (42) comprises a maximum output determining device (50), that establishes the permissible motor maximum output according to the measured stator temperature. The permissible motor maximum output is thus not set to a constant value, but is always determined according to the stator temperature. This results in the power of the motor being fully exploited as long as the measured stator temperature is less than a maximum value.

Description

Turbomolekularpumpe Turbo molecular pump
Die Erfindung bezieht sich auf eine Turbomolekularpumpe mit einem Pumpenstator, einem schnell drehenden Pumpenrotor und einem Motor zum Antrieb des Pumpenrotors .The invention relates to a turbomolecular pump with a pump stator, a rapidly rotating pump rotor and a motor for driving the pump rotor.
In einer Turbomolekularpumpe werden zur Erzeugung eines Hochvakuums ein Gas bzw. Gasteilchen durch rotierende Schaufeln des Pumpenrotors und die feststehenden Schaufeln des Pumpenstators auf ein Vielfaches des Eingangsdruckes verdichtet. Die durch die Gasverdichtung und Gasreibung verursachte Gaserwärmung wird überwiegend über den Pumpenrotor und den Pumpenstator wieder abgeführt. Während die Kühlung des Pumpenstators durch ein Kühlfluid führende Kühlkanäle erfolgen kann, ist die aktive Pumpenrotorkühlung problematisch, da dem rotierenden Pumpen- 'rotor 'kein Kühlfluid zugeführt werden kann. Unter ungünstigen Betriebsbedingungen kann der Pumpenrotor daher überhitzen. Bei Überhitzung des Pumpenrotors über eine maximal zulässige Rotortemperatur besteht die Gefahr der Zerstörung des Pumpenrotors und, als Folge davon, des- Pumpenstators. Die Turbomolekular- pumpe muss daher stets unterhalb der maximal zulässigen Rotortemperatur betrieben werden.In a turbomolecular pump, a gas or gas particles are compressed to produce a high vacuum by rotating blades of the pump rotor and the fixed blades of the pump stator to a multiple of the inlet pressure. The gas heating caused by the gas compression and gas friction is mainly dissipated again via the pump rotor and the pump stator. During the cooling of the pump stator can be effected by a cooling fluid leading cooling channels, the active pump rotor cooling is problematic, since the rotating pumps 'rotor' no cooling fluid can be supplied. The pump rotor can therefore overheat under unfavorable operating conditions. If the pump rotor overheats to a maximum permissible rotor temperature, there is a risk of the pump rotor being destroyed and, as a result, of the pump stator. The turbomolecular The pump must therefore always be operated below the maximum permissible rotor temperature.
Eine direkte Messung der Rotortemperatur ist wegen der schwierigen Signalübertragung von dem schnelldrehenden Pumpenrotor zu dem Stator nur mit großem Aufwand möglich. Die Turbomolekularpumpe weist daher eine Steuervorrichtung auf, die die Motorleistung auf eine vorgegebene konstante Motor-Maximalleistung begrenzt, so dass auch die Pumpleistung und die damit korrelierende Gas- und Rotorerwärmung auf einen konstanten Maximalwert begrenzt sind.A direct measurement of the rotor temperature is only possible with great effort because of the difficult signal transmission from the fast rotating pump rotor to the stator. The turbomolecular pump therefore has a control device which limits the engine power to a predetermined constant maximum engine power, so that the pump power and the gas and rotor heating correlating therewith are also limited to a constant maximum value.
Die zulässige Motor-Maximalleistung wird rechnerisch und/oder experimentell ermittelt, indem für den Pumpenbetrieb die ungünstigsten Prozessbedingungen angenommen werden, beispielsweise ein thermisch sich ungünstig verhaltendes Gas, eine schlechte Pumpenstator-Kühlung, hohe Umgebungstemperaturen etc. Die zulässige Motor-Maximalleistung wird so gewählt, dass der Pumpenrotor auch unter den ungünstigsten Prozessbedingungen die maximal zulässige Rotortemperatur nicht überschreiten kann. Durch die Festlegung einer konstanten Motor-Maximalleistung wird die Motorleistung auf die vorgegebene Maximalleistung auch dann beschränkt, wenn die Prozessbedingungen günstiger sind, als für die Berechnung der Motor-Maximalleistung angenommen. Die Motorleistung wird also auch dann auf die vorgegebene Motor-Maximalleistung begrenzt, wenn die tatsächliche Rotortemperatur die maximal zulässige Rotortemperatur noch nicht erreicht hat. Da die der Ermittlung der maximal zulässigen Motor- Maximalleistung zugrundegelegten extremen Prozessbedingungen in der Praxis nur einen seltenen Ausnahmefall darstellen, wird die Ausgangsleistung der Turbomolekularpumpe in der Regel auf einen Wert weit unterhalb eines tatsächlich thermisch zulässigen Wertes beschränkt. Aufgabe der Erfindung ist es daher, eine Vorrichtung und ein Verfahren zu schaffen, mit dem die Ausgangsleistung einer Turbomolekularpumpe erhöht wird.The permissible maximum motor power is calculated and / or experimentally determined by assuming the most unfavorable process conditions for pump operation, for example a thermally unfavorable gas, poor pump stator cooling, high ambient temperatures etc. The permissible maximum motor power is selected so that the pump rotor cannot exceed the maximum permissible rotor temperature even under the most unfavorable process conditions. By defining a constant maximum engine power, the engine power is limited to the predetermined maximum power even if the process conditions are more favorable than assumed for the calculation of the maximum engine power. The motor power is therefore limited to the specified maximum motor power even if the actual rotor temperature has not yet reached the maximum permissible rotor temperature. Since the extreme process conditions on which the determination of the maximum permissible maximum engine power is based are only a rare exception in practice, the output power of the turbomolecular pump is generally limited to a value far below an actually thermally permissible value. The object of the invention is therefore to create a device and a method with which the output power of a turbomolecular pump is increased.
Diese Aufgabe wird erfindungsgemäß gelöst mit den Merkmalen der Ansprüche 1 bzw. 11.This object is achieved with the features of claims 1 and 11 respectively.
Gemäß der Erfindung ist an dem Pumpenstator ein Temperaturgeber zur Messung der Statortemperatur angeordnet. Ferner weist die Steuervorrichtung eine Maximalleistungs-Ermittlungsvorrichtung auf, die die zulässige Motor-Maximalleistung in Abhängigkeit von der gemessenen Statortemperatur bestimmt. Die zulässige Motor-Maximalleistung ist also kein konstanter unveränderbarer Wert, sondern wird in Abhängigkeit von der jeweiligen Statortemperatur bestimmt. Die Rotortemperatur korreliert stark mit der Temperatur der statorseitigen Teile der Pumpe, beispielsweise mit der Temperatur des Basisflansches, des Pumpengehäuses, des Motorgehäuses, des Lagergehäuses, des Pumpenstators, des Motors sowie mit der tatsächlichen Motor- bzw. Pumpleistung. Die Statortemperatur gibt daher Auskunft über die Rotortemperatur, so -dass durch Messung der Statortemperatur und Begrenzung der zulässigen Motor-Maximalleistung für die jeweilige Statortemperatur auch die Rotortemperatur zuverlässig auf einen Maximalwert begrenzt werden kann. Durch die Messung der Statortemperatur und die dadurch vornehmbaren Rückschlüsse auf die Rotortemperatur, ist die zulässige Motor-Maximalleistung an die jeweilige thermische Situation angepasst, und liegt damit in der Regel oberhalb einer für ungünstigste thermische Umstände bestimmten konstanten zulässigen Motor-Maximalleistung. Die tatsächliche Motorleistung und -damit die Ausgangsleistung der Pumpe kann auf diese Weise unter normalen Prozessbedingungen deutlich erhöht werden. Gleichzeitig ist der Pumpenrotor zuverlässiger gegen Überhitzung, d.h. Überschreiten der maximal zulässigen Rotortemperatur geschützt, da eine indirekte Überwachung der Rotortemperatur stattfindet. Gemäß einer bevorzugten Ausgestaltung weist die Maximal- leistungs-Ermittlungsvorrichtung eine Rotortemperatur-Ermittlungsvorrichtung auf, die aus der von dem Temperaturgeber gemessenen Statortemperatur die Rotortemperatur ermittelt. Anschließend bestimmt die Maximalleistungs-Ermittlungsvorrichtung in Abhängigkeit von der ermittelten Rotortemperatur die zulässige Motor-Maximalleistung.According to the invention, a temperature sensor for measuring the stator temperature is arranged on the pump stator. Furthermore, the control device has a maximum power determination device which determines the maximum permissible motor power as a function of the measured stator temperature. The permissible maximum motor power is therefore not a constant, unchangeable value, but is determined depending on the respective stator temperature. The rotor temperature correlates strongly with the temperature of the stator-side parts of the pump, for example with the temperature of the base flange, the pump housing, the motor housing, the bearing housing, the pump stator, the motor and with the actual motor or pump power. The stator temperature therefore provides information about the rotor temperature, so that the rotor temperature can also be reliably limited to a maximum value by measuring the stator temperature and limiting the permissible maximum motor power for the respective stator temperature. By measuring the stator temperature and the conclusions that can be drawn about the rotor temperature, the permissible maximum motor power is adapted to the respective thermal situation, and is therefore usually above a constant permissible maximum motor power determined for the most unfavorable thermal circumstances. The actual motor power and thus the output power of the pump can be significantly increased in this way under normal process conditions. At the same time, the pump rotor is more reliably protected against overheating, ie exceeding the maximum permissible rotor temperature, since the rotor temperature is monitored indirectly. According to a preferred embodiment, the maximum power determination device has a rotor temperature determination device which determines the rotor temperature from the stator temperature measured by the temperature sensor. The maximum power determination device then determines the permissible maximum engine power as a function of the determined rotor temperature.
Die Rotortemperatur-Ermittlungsvorrichtung ermittelt die Motor- Rotortemperatur aus einer oder aus mehreren verschiedenen Statortemperaturen, die in ein Polynom eingesetzt werden, dessen konstante Koeffizienten zuvor experimentell ermittelt wurden. Auf diese Weise lässt sich schließlich die zulässige Motor-Maximalleistung schnell und auch mit wenig Speicherplatz ermitteln. Die Begrenzung der Motor-Maximalleistung kann ggf.. erst bei Erreichen einer Schwellentemperatur des Rotors eingreifen und die zulässige Motor-Maximalleistung begrenzen, während die Motor-Maximalleistung nicht begrenzt ist, solange die errechnete Rotortemperatur unterhalb der Schwellentemperatur liegt. Die zulässige Motor-Maximalleistung kann auch direkt aus einem Polynom ermittelt werden, das nach- der zulässigen Motor-Maximalleistung aufgelöst ist und in dem die Rotor- Schwellentemperatur, und/oder eine Rotor-Maximaltemperatur in Form von Koeffizienten bereits enthalten ist.The rotor temperature determining device determines the motor rotor temperature from one or more different stator temperatures which are inserted into a polynomial whose constant coefficients were previously determined experimentally. In this way, the permissible maximum engine power can be determined quickly and with little storage space. The limitation of the maximum motor power may only intervene when a threshold temperature of the rotor is reached and limit the permissible maximum motor power, while the maximum motor power is not limited as long as the calculated rotor temperature is below the threshold temperature. The permissible maximum motor power can also be determined directly from a polynomial which is resolved according to the permissible maximum motor power and which already contains the rotor threshold temperature and / or a maximum rotor temperature in the form of coefficients.
Die anhand der -Koeffizienten, berechnete Motor-Maximalleistung kann ggf. noch zusätzlich durch andere Parameter begrenzt werden.The maximum engine power calculated on the basis of the coefficients can, if necessary, be additionally limited by other parameters.
Vorzugsweise sind mehrere Temperaturgeber an verschiedenen Stellen des Stators vorgesehen, wobei die ■ Maximalleistungs-Er- mittlungsvorrichtung die zulässige Motor-Maximalleistung in Abhängigkeit von den gemessenen- Temperaturen aller Temperaturgeber bestimmt. Die Temperaturgeber können an dem Gehäuse der Turbomolekularpumpe, an einem Pumpenstatorelement, an .einen statorseitigen Teil des Motors, beispielsweise an dem Motorgehäuse oder an der Motorwicklung, oder in einem Kühlkanal des Pumpenstators angeordnet sein. Die Temperaturgeber können auch an anderen statorseitigen Stellen der Turbomolekularpumpe angeordnet sein, deren Temperatur und Temperaturverhalten zuverlässige Rückschlüsse auf die Temperatur des Rotors zulassen. Auf diese Weise wird aus einer Vielzahl von gemessenen Temperaturen ein genauer Rückschluss auf die Rotortemperatur und damit auf die zulässige Motor-Maximalleistung ermöglicht. Die Begrenzung der Motorleistung erfolgt daher nah an der objektiv zulässigen Motor-Maximalleistung. Die Ermittlung der Rotortemperatur und der zulässigen Motor-Maximalleistung durch mehrere stator- seitige Temperaturgeber ist so zuverlässig und genau, dass nur geringe Sicherheitsspannen vorgesehen werden müssen, um ein Überhitzen des Rotors zu vermeiden. Auf diese Weise kann der Motor mit einem Maximum an thermisch zulässiger Leistung angesteuert werden, d.h. das Leistungspotential des Motors und der Pumpe können stets annähernd vollständig ausgeschöpft werden.Preferably, multiple temperature sensors are provided at various points of the stator, wherein the maximum power follow-ER- ■ averaging means the permissible maximum motor output power in dependence on the determined gemessenen- temperatures of all temperature sensors. The temperature sensors can be attached to the housing of the turbomolecular pump, to a pump stator element part of the motor on the stator side, for example on the motor housing or on the motor winding, or in a cooling duct of the pump stator. The temperature transmitters can also be arranged at other points on the stator side of the turbomolecular pump, the temperature and temperature behavior of which allow reliable conclusions to be drawn about the temperature of the rotor. In this way, a precise conclusion on the rotor temperature and thus on the permissible maximum motor power is made possible from a large number of measured temperatures. The limitation of the engine power is therefore close to the objectively permissible maximum engine power. The determination of the rotor temperature and the permissible maximum motor power by several stator-side temperature sensors is so reliable and precise that only small safety margins have to be provided in order to avoid overheating of the rotor. In this way, the motor can be controlled with a maximum of thermally permissible power, ie the power potential of the motor and the pump can always be almost fully exhausted.
Gemäß einer bevorzugten- Ausgestaltung weist die Maximal- leistungs-Ermittlungsvorrichtung einen Kehnfeldspeicher auf, in dem in einem Kennfeld die zulässige Motor-Maximalleistung für jede Statortemperatur gespeichert ist. In dem Kennfeld lässt sich auch eine komplexe nicht-lineare Kennlinie speichern, so dass eine aufwendige Ermittlung der zulässigen Motor-Maximalleistung durch Rechenoperationen entfallen kann.According to a preferred embodiment, the maximum power determination device has a Kehnfeld memory, in which the permissible maximum motor power for each stator temperature is stored in a map. A complex non-linear characteristic curve can also be stored in the characteristic diagram, so that a complex determination of the permissible maximum motor power through arithmetic operations can be omitted.
Gemäß einem nebengeordneten Verfahren zur Begrenzung der maximal zulässigen Motorleistung eines Motors in einer Turbomolekularpumpe, der einen in einem Pumpenstator gelagerten Pumpenrotor antreibt, sind folgende Verfahrensschritte vorgesehen: Messen der Pumpenstatortemperatur, Ermitteln einer zulässigen Motor-Maximalleistung aus der gemessenen Pumpenstatortemperatur und Begrenzung der Motorleistung auf die ermittelte zulässige Motor-Maximalleistung. Im folgenden wird unter Bezugnahme auf die Figuren ein Ausführungsbeispiel der Erfindung näher erläutert.According to a secondary method for limiting the maximum permissible motor output of a motor in a turbomolecular pump that drives a pump rotor mounted in a pump stator, the following method steps are provided: measuring the pump stator temperature, determining a permissible maximum motor output from the measured pump stator temperature and limiting the motor output to that permissible maximum engine power determined. An exemplary embodiment of the invention is explained in more detail below with reference to the figures.
Es zeigen:Show it:
Fig. 1 eine Turbomolekularpumpe im Längsschnitt mit mehreren Temperatugebern,1 shows a turbomolecular pump in longitudinal section with a plurality of temperature sensors,
Fig. 2 ein Blockschaltbild der Regelung der Turbomolekularpumpe der Fig. 1.FIG. 2 shows a block diagram of the regulation of the turbomolecular pump of FIG. 1.
.In Fig. 1 ist eine Turbomolekularpumpe 10 dargestellt, die ein Pumpengehäuse 12 aufweist, dessen einen Längsende die Saugseite 14 bildet und dessen anderes Ende die Druckseite bildet und einem Gasauslass 16 aufweist. In dem Pumpengehäuse 12 ist ein Pumpenstator 18 angeordnet, der einen Pumpenrotor 20 umfasst. Der Pumpenrotor 20 weist eine Rotorwelle 22 auf, die mit zwei Radialmagnetlagern 24,26 und einem nicht dargestellten Axiallager drehbar in dem Pumpengehäuse 12 gelagert ist. Die Rotorwelle 22 und der damit verbundene Pumpenrotor 20 werden durch einen Elektromotor 28 angetrieben.- Der Elektromotor 28 und die beiden Radial-Magnetlager 24,26 sind in einem gemeinsamen Lager-Motor-Gehäuse 30 untergebracht. Das Pumpengehäuse1 shows a turbomolecular pump 10 which has a pump housing 12, one longitudinal end of which forms the suction side 14 and the other end of which forms the pressure side and has a gas outlet 16. A pump stator 18, which comprises a pump rotor 20, is arranged in the pump housing 12. The pump rotor 20 has a rotor shaft 22 which is rotatably mounted in the pump housing 12 with two radial magnetic bearings 24, 26 and an axial bearing (not shown). The rotor shaft 22 and the pump rotor 20 connected to it are driven by an electric motor 28. The electric motor 28 and the two radial magnetic bearings 24, 26 are accommodated in a common bearing motor housing 30. The pump housing
12 wird durch ein Kühlmittel gekühlt, das durch einen Kühlkanal12 is cooled by a coolant flowing through a cooling channel
13 in dem Pumpengehäuse 12 fließt. Die Turbomolekularpumpe 10 •dient der Erzeugung eines Hochvakuums und dreht mit Drehzahlen bis zu 100 000 U/min.13 flows in the pump housing 12. The turbomolecular pump 10 • serves to generate a high vacuum and rotates at speeds of up to 100,000 rpm.
Die Turbomolekularpumpe 10 weist statorseitig, d.h. auf der Seite der feststehenden Teile, mehrere Temperaturgeber 32-38 auf. Ein erster Temperaturgeber 32 ist im Bereich des Basisflansches des Pumpengehäuses. 12 angeordnet. Ein zweiter Temperaturgeber 34 ist an bzw. in dem Pumpenstator 18 angeordnet. Ein dritter Temperaturgeber 36 ist an dem Motor 28 angeordnet und misst die im Bereich der Motorspulen bzw. der Motor-Magnetleitbleche herrschende Temperatur. Ein vierter Temperaturgeber 38 ist an dem Lager-Motorgehäuse 30 angeordnet. Ein weiterer Temperaturgeber kann im Verlauf des Kühlkanales 13 angeordnet sein.The turbomolecular pump 10 has a plurality of temperature sensors 32-38 on the stator side, ie on the side of the fixed parts. A first temperature sensor 32 is in the area of the base flange of the pump housing. 12 arranged. A second temperature sensor 34 is arranged on or in the pump stator 18. A third temperature sensor 36 is arranged on the motor 28 and measures the temperature in the area of the motor coils or the motor magnetic guide plates. A fourth temperature sensor 38 is arranged on the bearing motor housing 30. Another temperature sensor can be arranged in the course of the cooling channel 13.
Die durch die Gaserwärmung des komprimierten Gases auf den Pumpenrotor 20 übertragene und durch die aktiven Magnetlager 26 und den Elektromotor 28 in dem Pumpenrotor 20 induzierte Wärme wird im Wesentlichen durch Wärmestrahlung von dem Pumpenrotor 20 auf die statorseitigen Teile abgeführt. Die statorseitigen Teile, also das Pumpengehäuse 12, der Pumpenstator 18, das Lager-Motor-Gehäuse 30 sowie die Magnetlager 24,26 und der Elektromotor 28 werden also neben ihrer Eigenerwärmung auch durch die von dem Pumpenrotor 20 auf sie abgestrahlte Wärme erwärmt. Die Messung der Temperatur und des Temperaturverlaufes der genannten statorseitigen Teile erlaubt daher Rückschlüsse auf die Rotortemperatur.The heat transferred by the gas heating of the compressed gas to the pump rotor 20 and induced by the active magnetic bearings 26 and the electric motor 28 in the pump rotor 20 is essentially dissipated by heat radiation from the pump rotor 20 to the parts on the stator side. The parts on the stator side, that is to say the pump housing 12, the pump stator 18, the bearing motor housing 30 as well as the magnetic bearings 24, 26 and the electric motor 28 are thus heated in addition to their own heating by the heat radiated onto them by the pump rotor 20. The measurement of the temperature and the temperature profile of the parts on the stator side therefore allows conclusions to be drawn about the rotor temperature.
Die Beziehung zwischen der tatsächlichen Temperatur des Pumpenrotors 20 und den von den Temperaturgebern 32-38 gemessenen Temperaturen der statorseitigen Teile lässt sich mit einem einfachen Versuchsaufbau ermitteln. Hierzu wird saugseitig ein Rotor-Temperaturgeber 40 in geeigneter Weise möglichst nah an dem Pumpenrotor 20 angeordnet. Auf diese Weise kann die Rotortemperatur im Experiment direkt gemessen werden, so dass der Zusammenhang zwischen der Rotortemperatur und den von den statorseitigen Temperaturgebern 32-38 gemessenen Temperaturen unter verschiedenen Prozessbedingungen aufgezeichnet werden kann. Aus den von allen Temperaturgebern 32-40 aufgezeichneten Temperaturen und Temperaturverläufen lässt sich ein Polynom für die Motorleistung P in Abhängigkeit von der Rotortemperatur und den statorseitigen Temperaturen ermitteln: P = α0 + The relationship between the actual temperature of the pump rotor 20 and the temperatures of the parts on the stator side measured by the temperature sensors 32-38 can be determined with a simple experimental setup. For this purpose, a rotor temperature sensor 40 is suitably arranged as close as possible to the pump rotor 20 on the suction side. In this way, the rotor temperature can be measured directly in the experiment, so that the relationship between the rotor temperature and the temperatures measured by the stator-side temperature sensors 32-38 can be recorded under different process conditions. A polynomial for the motor power P as a function of the rotor temperature and the stator-side temperatures can be determined from the temperatures and temperature profiles recorded by all temperature sensors 32-40: P = α 0 +
P ist die momentane Motorleistung, Ti bis Tn sind die jeweils gemessenen Temperaturen der statorseitigen Temperaturgeber 32- 38 und des Rotortemperaturgebers 40. Die Koeffizienten α0 bis αn sowie ßi bis ßn sind Konstanten, die durch die Auswertung der experimentell gemessenen Pumpenrotor- und Pumpenstatortempe- raturen ermittelt wurden. Gibt man anstelle der gemessenen •Rotortempeartur die maximal zulässige Rotortemperatur in dieses Polynom ein, so wird mit diesem Polynom die zulässige Motor- Maximalleistung Pmax ermittelt.P is the instantaneous motor power, Ti to T n are the respectively measured temperatures of the stator-side temperature sensors 32-38 and the rotor temperature sensor 40. The coefficients α 0 to α n and βi to β n are constants which are obtained by evaluating the experimentally measured pump rotor and pump location temperatures were determined. If you enter the maximum permissible rotor temperature in this polynomial instead of the measured • rotor temperature, the permissible maximum motor power P max is determined with this polynomial.
Damit liegt ein Polynom vor, mit dem für einen Satz gleichzeitig gemessener Statortemperaturen Ti bis Tn jeweils die zulässige Motor-Maximalleistung Pmax errechnet werden kann.There is therefore a polynomial with which the permissible maximum motor power P max can be calculated for a set of stator temperatures Ti to T n measured simultaneously.
In Fig. 2 ist schematisch die Steuerung des Pumpenrotor otors 28 dargestellt. Eine Steuervorrichtung 42 steuert einen Motortreiber 44, der wiederum die Spulen des Elektromotors 28 ansteuert. Über ein Stellelement 46 wird ein Motor-Leistungssollwert an die Steuervorrichtung 42 ausgegeben. Die Steuervorrichtung 42 weist eine Maximalleistungs-Ermittlungsvorrichtung 50 •und einen Leistungsbegrenzer 52 auf. In der Maximalleistungs- Ermittlungsvorrichtung 50 wird aus den von den vier Temperaturgebern 32-38 gelieferten Temperaturwerten nach der o.a. Formel die zulässige Motor-Maximalleistung Pmax ermittelt. In dem Leistungsbegrenzer 52 wird der von dem Stellelement 46 gelieferte Motorleistungssollwert auf die ermittelte • zulässige Motor-Maximalleistung begrenzt, falls der von dem Stellelement 46 angegebene Leistungswert größer als die- ermittelte zulässige Motor-Maximalleistung ist. Auf diese Weise wird die Rorortem- peratur auf eine Maximaltemperatur begrenzt, so dass der Rotor vor Zerstörung durch Überhitzung geschützt ist. Als weitere Parameter für die Ermittlung der zulässigen Motor- Maximalleistung können neben der Kühlfluidtemperatur auch die tatsächliche Motorleistung, die Umgebungstemperatur und andere Messgrößen genutzt werden.In Fig. 2, the control of the pump rotor otor 28 is shown schematically. A control device 42 controls a motor driver 44, which in turn controls the coils of the electric motor 28. An engine power setpoint is output to the control device 42 via an actuating element 46. The control device 42 has a maximum output power detecting device 50 and a power limiter • 52nd In the maximum power determination device 50, the permissible maximum engine power P max is determined from the temperature values supplied by the four temperature transmitters 32-38 according to the above formula. In the power limiter 52, the engine power setpoint value supplied by the control element 46 is limited to the determined • permissible maximum engine power if the power value specified by the control element 46 is greater than the determined allowable maximum engine power. In this way, the rotor temperature is limited to a maximum temperature, so that the rotor is protected from being destroyed by overheating. In addition to the cooling fluid temperature, the actual engine power, the ambient temperature and other measured variables can be used as further parameters for determining the permissible maximum engine power.
Mit der beschriebenen Vorrichtung lässt sich über mehrere statorseitige Temperaturgeber auf die vorliegende Rotortemperatur schließen. Um eine Überhitzung des Pumpenrotors auf eine Temperatur oberhalb einer maximalen Rotortemperatur zu vermeiden, wird aus der ermittelten Rotortemperatur eine zulässige Motor-Maximalleistung ermittelt, auf die die Motorleistung begrenzt ist. Die zulässige Motor-Maximalleistung ist also variabel, so dass das Leistungsvermögen des Motors und der Pumpe voll ausgeschöpft werden kann, und nur bei Überhitzungs- gefahr begrenzt wird. With the device described, the present rotor temperature can be inferred from a plurality of stator-side temperature sensors. In order to avoid overheating of the pump rotor to a temperature above a maximum rotor temperature, a permissible maximum motor power is determined from the determined rotor temperature, to which the motor power is limited. The permissible maximum motor power is therefore variable, so that the performance of the motor and the pump can be fully utilized and is only limited if there is a risk of overheating.

Claims

PATENTANSPRÜCHE
Turbomolekularpumpe mit einem Stator (12,18), einem Pumpenrotor (20), einem Motor (28) zum Antrieb des Pumpenrotors (20) und einer Steuervorrichtung (42) zur Steuerung des Motors (28),Turbomolecular pump with a stator (12, 18), a pump rotor (20), a motor (28) for driving the pump rotor (20) and a control device (42) for controlling the motor (28),
wobei die Steuervorrichtung (42) die Motorleistung derart regelt, dass die Motorleistung eine zulässige Motor-Maximalleistung nicht übersteigt,the control device (42) regulating the engine power in such a way that the engine power does not exceed a permissible maximum engine power,
d a d u r c h g e k e n n z e i c h n e t ,characterized ,
dass statorseitig ein Temperaturgeber (32-38) zur Messung der Statortemperatur angeordnet ist, undthat a temperature sensor (32-38) is arranged on the stator side for measuring the stator temperature, and
dass die Steuervorrichtung (42) eine Maximalleistungs-Er- mittlungsvorrichtung (50) aufweist, die die zulässige Motor-Maximalleistung in Abhängigkeit von der gemessenen Statortemperatur bestimmt.that the control device (42) has a maximum power determination device (50) which determines the permissible maximum motor power as a function of the measured stator temperature.
Turbomolekularpumpe nach Anspruch 1, dadurch gekennzeichnet, dass mehrere Temperaturgeber (32-38) an verschiedenen Stellen des Stators (12,18) vorgesehen sind und die Maxi- malleistungs-Ermittlungsvorrichtung (50) die zulässige Motor-Maximalleistung in Abhängigkeit von den gemessenen Temperaturen aller Temperaturgeber (32-38) bestimmt.Turbomolecular pump according to claim 1, characterized in that a plurality of temperature sensors (32-38) are provided at different locations on the stator (12, 18) and the maximum power determination device (50) determines the permissible maximum engine power as a function of the measured temperatures of all Temperature sensor (32-38) determined.
Turbomolekularpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass der Maximalleistungs-Ermittlungsvorrichtung (50) eine Rotortemperatur-Ermittlungsvorrichtung zugeordnet ist, die aus der von dem Temperaturgeber (32-38) gemessenen Statortemperatur die Rotortemperatur ermittelt und dass die Maximalleistungs-Ermittlungsvorrichtung (50) die zulässige Motor-Maximalleistung in Abhängigkeit von der ermittelten Rotortemperatur bestimmt.Turbomolecular pump according to claim 1 or 2, characterized in that the maximum power determining device (50) is assigned a rotor temperature determining device which determines the rotor temperature from the stator temperature measured by the temperature sensor (32-38) and that the maximum power determination device (50) determines the permissible maximum motor power as a function of the determined rotor temperature.
4. Turbomolekularpumpe nach einem der Ansprüche 1-3, dadurch gekennzeichnet, dass die Maximalleistungs-Ermittlungsvor- richtung (50) die zulässige Motor-Maximalleistung mit Hilfe eines Polynom ermittelt.4. Turbomolecular pump according to one of claims 1-3, characterized in that the maximum power determination device (50) determines the permissible maximum engine power using a polynomial.
5. Turbomolekularpumpe nach einem der Ansprüche 1-4, dadurch gekennzeichnet, dass die Maxi alleistungs-Ermittlungsvor- richtung (50) einen Kennfeldspeicher aufweist, in dem in einem Kennfeld die zulässige Motor-Maximalleistung für jede Statortemperatur gespeichert ist.5. Turbomolecular pump according to one of claims 1-4, characterized in that the maxi-power determination device (50) has a map memory in which the permissible maximum engine power for each stator temperature is stored in a map.
6. Turbomolekularpumpe nach einem der Ansprüche 1-5, dadurch gekennzeichnet, dass der Temperaturgeber (32) an einem Pumpengehäuse (12) vorgesehen ist.6. turbomolecular pump according to one of claims 1-5, characterized in that the temperature transmitter (32) is provided on a pump housing (12).
7. Turbomolekularpumpe nach einem der Ansprüche 1-5, dadurch gekennzeichnet, dass der Temperaturgeber (34) an einem Pumpenstator (18) vorgesehen ist.7. turbomolecular pump according to one of claims 1-5, characterized in that the temperature transmitter (34) is provided on a pump stator (18).
8. Turbomolekularpumpe nach einem der Ansprüche 1-5, dadurch gekennzeichnet, dass der Temperaturgeber (36) an einem statorseitigen Teil des Motors (28) vorgesehen ist.8. Turbomolecular pump according to one of claims 1-5, characterized in that the temperature sensor (36) is provided on a stator-side part of the motor (28).
9. Turbomolekularpumpe nach einem der Ansprüche 1-5, dadurch gekennzeichnet, dass der Motor (28) ein Gehäuse (30) aufweist und der Temperaturgeber (38) an dem Motorgehäuse vorgesehen ist. 9. turbomolecular pump according to one of claims 1-5, characterized in that the motor (28) has a housing (30) and the temperature sensor (38) is provided on the motor housing.
10. Turbomolekularpumpe nach einem der Ansprüche 1-9, dadurch gekennzeichnet, dass das Pumpengehäuse (12) oder das Pu - penstatorelement (18) einen Kühlkanal (13) aufweist und dass der Temperaturgeber im Verlauf des Kühlkanales (13) angeordnet ist.10. Turbomolecular pump according to one of claims 1-9, characterized in that the pump housing (12) or the pump stator element (18) has a cooling channel (13) and that the temperature sensor is arranged in the course of the cooling channel (13).
11. Verfahren zur Begrenzung der Motorleistung eines Motors11. Procedure for limiting the engine power of an engine
(28) in einer Turbomolekularpumpe (10), der einen in einem Stator (12,18) gelagerten Pumpenrotor (20) antreibt, mit den Verfahrensschritten(28) in a turbomolecular pump (10) which drives a pump rotor (20) mounted in a stator (12, 18) with the method steps
Messen der Pumpenstatortemperatur,Measuring the pump stator temperature,
Ermitteln einer zulässigen Motor-Maximalleistung in Abhängigkeit von der gemessenen Pumpenstatortemperatur,Determining a permissible maximum motor power as a function of the measured pump stator temperature,
Begrenzung der Motorleistung auf die ermittelte zulässige Motor-Maximalleistung.Limitation of the engine power to the determined permissible maximum engine power.
12. Verfahren nach Anspruch 11, dadurch gekennzeichnet, dass das Ermitteln der zulässigen Motor-Maximalleistung aus den Schritten12. The method according to claim 11, characterized in that the determination of the permissible maximum engine power from the steps
Errechnen der Pumpenrotortemperatur aus der gemessenen Pumpenstatortemperatur,Calculating the pump rotor temperature from the measured pump stator temperature,
Ermitteln der zulässigen Motor-Maximalleistung aus der errechneten Pumpenrotortemperatur besteht. Determining the permissible maximum motor power from the calculated pump rotor temperature consists.
EP02727419A 2001-03-27 2002-03-15 Turbomolecular pump Expired - Lifetime EP1377752B1 (en)

Applications Claiming Priority (3)

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DE10114969A DE10114969A1 (en) 2001-03-27 2001-03-27 Turbo molecular pump
DE10114969 2001-03-27
PCT/EP2002/002884 WO2002077462A2 (en) 2001-03-27 2002-03-15 Turbomolecular pump

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EP1377752A2 true EP1377752A2 (en) 2004-01-07
EP1377752B1 EP1377752B1 (en) 2011-05-11

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013223020A1 (en) 2013-11-12 2015-05-13 Oerlikon Leybold Vacuum Gmbh Method for operating a vacuum pump

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI117350B (en) * 2002-10-16 2006-09-15 Waertsilae Finland Oy Hardware and Method for Fuel Supply System
GB0229353D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
FR2861142B1 (en) * 2003-10-16 2006-02-03 Mecanique Magnetique Sa MOLECULAR TURBO VACUUM PUMP
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system
GB0508872D0 (en) * 2005-04-29 2005-06-08 Boc Group Plc Method of operating a pumping system
DE102005041500A1 (en) * 2005-09-01 2007-03-08 Leybold Vacuum Gmbh vacuum pump
DE102005041501A1 (en) * 2005-09-01 2007-03-08 Leybold Vacuum Gmbh Vacuum turbomolecular pump
JP4821308B2 (en) * 2005-12-21 2011-11-24 株式会社島津製作所 Vacuum pump
DE102007001065B4 (en) * 2007-01-03 2021-07-22 Leybold Gmbh Gas pump
JP4935509B2 (en) * 2007-06-05 2012-05-23 株式会社島津製作所 Turbo molecular pump
JP5782378B2 (en) 2009-08-21 2015-09-24 エドワーズ株式会社 Vacuum pump
FR2974175B1 (en) * 2011-04-14 2013-10-11 Mecanique Magnetique Sa DEVICE FOR DETECTING THE AXIAL POSITION OF A ROTATING SHAFT AND APPLICATION TO A TURBO-MOLECULAR PUMP
US9404811B2 (en) * 2011-10-04 2016-08-02 Hamilton Sundstrand Corporation Motor housing thermal sensing
EP2846043B1 (en) 2013-09-09 2020-01-22 Leybold GmbH Calculation of the rotor temperature of a vacuum pump using the motor current or power
JP6705228B2 (en) * 2016-03-14 2020-06-03 株式会社島津製作所 Temperature controller and turbo molecular pump
US10590955B2 (en) * 2017-02-23 2020-03-17 Shimadzu Corporation Turbo-molecular pump
JP6445227B1 (en) * 2017-10-31 2018-12-26 株式会社アルバック Vacuum pump and control method thereof
CN111213316B (en) * 2017-10-31 2021-07-13 株式会社爱发科 Vacuum pump and control method thereof

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2757599A1 (en) 1977-12-23 1979-06-28 Kernforschungsz Karlsruhe Rotary molecular pump with bladed rotor and stator - reduces rotor and=or stator temp. to improve compression ratio and=or suction
IT1288738B1 (en) * 1996-10-08 1998-09-24 Varian Spa ELECTRONIC CONTROL UNIT FOR VACUUM PUMP.
JP3057486B2 (en) * 1997-01-22 2000-06-26 セイコー精機株式会社 Turbo molecular pump
US6123522A (en) * 1997-07-22 2000-09-26 Koyo Seiko Co., Ltd. Turbo molecular pump
US6075337A (en) * 1998-06-30 2000-06-13 Fuji Electric Co., Ltd. Speed control apparatus for induction motor
US6329732B1 (en) * 1999-07-20 2001-12-11 General Electric Company Electric motors and methods for assembling temperature sensors therein
JP3480439B2 (en) * 1999-09-27 2003-12-22 日産自動車株式会社 Control device for rotating electric machine

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO02077462A2 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013223020A1 (en) 2013-11-12 2015-05-13 Oerlikon Leybold Vacuum Gmbh Method for operating a vacuum pump

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AU2002257665A1 (en) 2002-10-08
JP4511117B2 (en) 2010-07-28
CA2441957A1 (en) 2002-10-03
CA2441957C (en) 2010-08-03
JP2004522040A (en) 2004-07-22
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DE10114969A1 (en) 2002-10-10
WO2002077462A2 (en) 2002-10-03
WO2002077462A3 (en) 2002-12-12
US20040081560A1 (en) 2004-04-29

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