EP1330606A1 - Mechanical kinetic vacuum pump - Google Patents
Mechanical kinetic vacuum pumpInfo
- Publication number
- EP1330606A1 EP1330606A1 EP01974146A EP01974146A EP1330606A1 EP 1330606 A1 EP1330606 A1 EP 1330606A1 EP 01974146 A EP01974146 A EP 01974146A EP 01974146 A EP01974146 A EP 01974146A EP 1330606 A1 EP1330606 A1 EP 1330606A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- alloy
- vacuum pump
- mechanical kinetic
- rotor
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/20—Manufacture essentially without removing material
- F05D2230/22—Manufacture essentially without removing material by sintering
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/12—Light metals
- F05D2300/125—Magnesium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/17—Alloys
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/17—Alloys
- F05D2300/173—Aluminium alloys, e.g. AlCuMgPb
Definitions
- the invention relates to a mechanical kinetic vacuum pump with a rotor made of an aluminum alloy.
- Mechanical kinetic vacuum pumps by definition include gas ring pumps, turbo vacuum pumps (axial, radial) and molecular / turbomolecular pumps. They are able to mechanically transport the gas particles to be conveyed in the molecular flow range (pressures below IGT 3 mbar). Molecular pumps are also able to pump gases in the Knudsen flow range (IGT 3 to 1 mbar). Mechanical kinetic vacuum pumps which are preferably used often have a turbomolecular pump stage and an adjoining molecular pump stage (compound or hybrid pump), since such a pump is able to compress gases down to the region of the viscous flow.
- Turbomolecular vacuum pumps and compound pumps are used in manufacturing processes in the semiconductor industry.
- the methods used - etching, coating or the like. - can only be carried out in a vacuum.
- the vacuum pumps mentioned have the task of evacuating the vacuum chambers before starting the processes. and maintain the desired low pressures while the processes are running.
- Turbomolecular vacuum pumps are operated at high speeds (up to 100,000 revolutions / min).
- the rotors are made of a light metal, usually of a melt-metallurgically produced aluminum alloy.
- the alloy is adjusted so that the rotors have the highest possible heat resistance and creep rupture strength.
- the creep rupture strength decreases with increasing rotor temperature.
- the aluminum alloys used up to now have an acceptable creep rupture strength if the rotor temperatures do not exceed 120 ° C.
- the semiconductor components located in the vacuum chamber assume elevated temperatures. This is associated with an increase in the temperature of the gases to be conveyed by the vacuum pumps. These gases in particular cause an increase in the temperature of the rotors of the connected vacuum pumps. This increase in temperature affects the mentioned creep rupture strength.
- Cooling the rotors of a molecular or turbomolecular vacuum pump is difficult.
- the rotors are in a vacuum, so that there is no heat dissipation via the extracted, already hot gases. If the rotors are magnetically supported, their bearing parts do not touch. A heat dissipation via the magnetic bearings is therefore also not possible. If mechanical bearings are provided, rotor heat can be dissipated via the bearings. However, there are strict limits to this way of heat dissipation.
- the surface areas of the rotor and stator touching one another via the rolling elements are limited to the almost point-shaped contact surfaces of the rolling bodies in their bearing rings.
- the bearings must not reach high temperatures due to the presence of a lubricant.
- the operation of mechanical bearings is also associated with heat generation.
- the drive motor of the pump is usually part of the stator and is arranged near the bearings. In the phases in which it is operated under load, it forms a heat source itself. In this case, the heat can be partially transported between the rotor and stator via the gas due to the increased density. The removal of significant amounts of heat via the mechanical bearings would only be possible with intensive cooling of the stator-side bearing parts.
- a mechanical kinetic vacuum pump intended for use in semiconductor processes is known from international patent application WO 99/57441. It is designed as a turbomolecular vacuum pump.
- the pumping speed of the Improve pump In order to achieve the goal of reducing the duration of semiconductor processes, the task is set, the pumping speed of the Improve pump.
- the size of the pump should not change.
- the use of a firmer material suitable for higher temperatures is preferably proposed for the rotor, namely a material consisting of a metal as the base material and non-metallic additives serving to reinforce the base material, such as ceramic. This material should make it possible to increase the speed of the rotors in order to achieve the increase in pumping speed associated with an increase in thermal load without changing the size of the pump.
- machining of the proposed materials is associated with problems due to their increased proportion of hard material particles.
- Rotors for turbomolecular vacuum pumps including the large number of their blades, are usually turned / milled from the full.
- the degree of machining associated with the manufacture of a rotor is up to 80%.
- the manufacture of the rotors from the proposed material is therefore complex and expensive.
- the present invention has for its object to improve the heat and creep rupture strength of a friction vacuum pump of the type mentioned.
- Aluminum alloys produced by powder metallurgy are known per se. They are manufactured in such a way that the melt consisting of the alloy components is sprayed onto a cold surface. Compared to the melting metallurgical production of aluminum materials, the melt solidifies very quickly, which gives the alloy a new structure with changed properties. Aluminum alloys produced by spray compacting, the main alloy component of which is copper, have above all a much higher strength than an aluminum alloy produced by melt metallurgy.
- DISPAL Materials of the type according to the invention are offered on the market under the name DISPAL (eg DISPAL S 690 and S 691). They also contain aluminum
- copper and further alloy components such as magnesium, manganese, zirconium, silver and / or titanium with proportions between 0.1 and 1% by weight.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10053664 | 2000-10-28 | ||
DE10053664A DE10053664A1 (en) | 2000-10-28 | 2000-10-28 | Mechanical kinetic vacuum pump |
PCT/EP2001/009193 WO2002035100A1 (en) | 2000-10-28 | 2001-08-09 | Mechanical kinetic vacuum pump |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1330606A1 true EP1330606A1 (en) | 2003-07-30 |
EP1330606B1 EP1330606B1 (en) | 2011-07-13 |
Family
ID=7661493
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01974146A Expired - Lifetime EP1330606B1 (en) | 2000-10-28 | 2001-08-09 | Mechanical kinetic vacuum pump |
Country Status (5)
Country | Link |
---|---|
US (1) | US7097431B2 (en) |
EP (1) | EP1330606B1 (en) |
JP (1) | JP2004512463A (en) |
DE (1) | DE10053664A1 (en) |
WO (1) | WO2002035100A1 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003254285A (en) * | 2002-02-28 | 2003-09-10 | Boc Edwards Technologies Ltd | Pump device |
DE102004049543A1 (en) * | 2004-10-12 | 2006-04-13 | Man B & W Diesel Ag | Rotor for radial compressor has outer region consisting of basic and additional materials forming gradient material |
RU2435076C2 (en) * | 2006-04-29 | 2011-11-27 | Ёрликон Лайбольд Вакуум Гмбх | Manufacturing method of rotors and stators of turbomolecular pump |
EP2433012B1 (en) | 2009-05-20 | 2015-11-04 | Edwards Limited | Side-channel pump with axial gas bearing |
US9335296B2 (en) | 2012-10-10 | 2016-05-10 | Westinghouse Electric Company Llc | Systems and methods for steam generator tube analysis for detection of tube degradation |
DE102013219050B3 (en) * | 2013-09-23 | 2015-01-22 | Oerlikon Leybold Vacuum Gmbh | High-performance rotors of a turbomolecular pump |
DE102013219043A1 (en) | 2013-09-23 | 2015-03-26 | Oerlikon Leybold Vacuum Gmbh | Alloys of rotors of a turbomolecular pump |
EP3085964B1 (en) * | 2015-04-21 | 2019-12-11 | Pfeiffer Vacuum Gmbh | Production of a vacuum pump part by metallic additive manufacturing |
US11935662B2 (en) | 2019-07-02 | 2024-03-19 | Westinghouse Electric Company Llc | Elongate SiC fuel elements |
KR102523509B1 (en) | 2019-09-19 | 2023-04-18 | 웨스팅하우스 일렉트릭 컴퍼니 엘엘씨 | Apparatus and Method of Use for Performing In Situ Adhesion Testing of Cold Spray Deposits |
GB2592043A (en) * | 2020-02-13 | 2021-08-18 | Edwards Ltd | Axial flow vacuum pump |
FR3111143B1 (en) | 2020-06-04 | 2022-11-18 | Constellium Issoire | High temperature performance aluminum copper magnesium alloy products |
EP4151860A3 (en) * | 2022-12-22 | 2023-04-05 | Pfeiffer Vacuum Technology AG | Vacuum pump |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2654055B2 (en) * | 1976-11-29 | 1979-11-08 | Kernforschungsanlage Juelich Gmbh, 5170 Juelich | Rotor and stator disks for turbo molecular pumps |
DE2923632A1 (en) * | 1979-06-11 | 1980-12-18 | Leybold Heraeus Gmbh & Co Kg | METHOD FOR PRODUCING A VAN RING FOR THE ROTOR OF A TUBOMOLECULAR PUMP AND A ROTOR EQUIPPED WITH VAN RINGS OF THIS TYPE |
DE3530910A1 (en) * | 1984-08-31 | 1986-03-13 | Hitachi, Ltd., Tokio/Tokyo | METHOD FOR PRODUCING CASTING MOLDS |
US5455003A (en) * | 1988-08-18 | 1995-10-03 | Martin Marietta Corporation | Al-Cu-Li alloys with improved cryogenic fracture toughness |
US5512241A (en) * | 1988-08-18 | 1996-04-30 | Martin Marietta Corporation | Al-Cu-Li weld filler alloy, process for the preparation thereof and process for welding therewith |
FR2636974B1 (en) * | 1988-09-26 | 1992-07-24 | Pechiney Rhenalu | ALUMINUM ALLOY PARTS RETAINING GOOD FATIGUE RESISTANCE AFTER EXTENDED HOT HOLDING AND METHOD FOR MANUFACTURING SUCH PARTS |
JPH0334699U (en) * | 1989-08-07 | 1991-04-04 | ||
FR2651244B1 (en) * | 1989-08-24 | 1993-03-26 | Pechiney Recherche | PROCESS FOR OBTAINING MAGNESIUM ALLOYS BY SPUTTERING. |
GB2267912A (en) * | 1992-06-15 | 1993-12-22 | Secr Defence | Metal matrix for composite materials |
DE69307848T2 (en) * | 1992-12-03 | 1997-08-21 | Toyo Aluminium Kk | Highly heat-resistant and wear-resistant aluminum alloy |
US5372499A (en) * | 1993-08-24 | 1994-12-13 | Daido Tokushuko Kabushiki Kaisha | High-temperature gas blower impeller with vanes made of dispersion-strengthened alloy, gas blower using such impeller, and gas circulating furnace equipped with such gas blower |
US5524699A (en) * | 1994-02-03 | 1996-06-11 | Pcc Composites, Inc. | Continuous metal matrix composite casting |
US5976214A (en) * | 1994-04-14 | 1999-11-02 | Sumitomo Electric Industries, Ltd. | Slide member of sintered aluminum alloy and method of manufacturing the same |
JP3331749B2 (en) * | 1994-06-27 | 2002-10-07 | 松下電器産業株式会社 | Vacuum pump |
EP0772698A1 (en) * | 1994-08-01 | 1997-05-14 | Hehmann, Franz, Dr | Selected processing for non-equilibrium light alloys and products |
US5925315A (en) * | 1995-02-14 | 1999-07-20 | Caterpillar Inc. | Aluminum alloy with improved tribological characteristics |
JP3160504B2 (en) * | 1995-09-05 | 2001-04-25 | 三菱重工業株式会社 | Turbo molecular pump |
US6077363A (en) * | 1996-06-17 | 2000-06-20 | Pechiney Rhenalu | Al-Cu-Mg sheet metals with low levels of residual stress |
JP3301919B2 (en) * | 1996-06-26 | 2002-07-15 | 株式会社神戸製鋼所 | Aluminum alloy extruded material with excellent chip breaking performance |
US5728638A (en) * | 1996-08-21 | 1998-03-17 | Bfd, Inc. | Metal/ceramic composites containing inert metals |
US6089843A (en) * | 1997-10-03 | 2000-07-18 | Sumitomo Electric Industries, Ltd. | Sliding member and oil pump |
JPH11117035A (en) * | 1997-10-09 | 1999-04-27 | Sumitomo Electric Ind Ltd | Sliding member |
US6095754A (en) * | 1998-05-06 | 2000-08-01 | Applied Materials, Inc. | Turbo-Molecular pump with metal matrix composite rotor and stator |
DE19915307A1 (en) * | 1999-04-03 | 2000-10-05 | Leybold Vakuum Gmbh | Turbomolecular friction vacuum pump, with annular groove in region of at least one endface of rotor |
DE19918229C2 (en) * | 1999-04-22 | 2002-07-18 | Daimler Chrysler Ag | Method of manufacturing blanks for cylinder liners |
DE19929952C1 (en) * | 1999-06-29 | 2000-10-26 | Daimler Chrysler Ag | Oil pump toothed wheel used in I.C. engines is made of a powdered spray-compacted super-eutectic aluminum-silicon alloy |
US6450772B1 (en) * | 1999-10-18 | 2002-09-17 | Sarcos, Lc | Compact molecular drag vacuum pump |
DE10210404A1 (en) * | 2002-03-08 | 2003-09-18 | Leybold Vakuum Gmbh | Method for manufacturing the rotor of a friction vacuum pump and rotor manufactured using this method |
-
2000
- 2000-10-28 DE DE10053664A patent/DE10053664A1/en not_active Withdrawn
-
2001
- 2001-08-09 WO PCT/EP2001/009193 patent/WO2002035100A1/en active Application Filing
- 2001-08-09 JP JP2002538053A patent/JP2004512463A/en active Pending
- 2001-08-09 EP EP01974146A patent/EP1330606B1/en not_active Expired - Lifetime
- 2001-08-09 US US10/415,029 patent/US7097431B2/en not_active Expired - Fee Related
Non-Patent Citations (1)
Title |
---|
See references of WO0235100A1 * |
Also Published As
Publication number | Publication date |
---|---|
US7097431B2 (en) | 2006-08-29 |
EP1330606B1 (en) | 2011-07-13 |
JP2004512463A (en) | 2004-04-22 |
DE10053664A1 (en) | 2002-05-08 |
US20040013529A1 (en) | 2004-01-22 |
WO2002035100A1 (en) | 2002-05-02 |
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