EP1314890A3 - Control system for vacuum pump - Google Patents

Control system for vacuum pump Download PDF

Info

Publication number
EP1314890A3
EP1314890A3 EP02025927A EP02025927A EP1314890A3 EP 1314890 A3 EP1314890 A3 EP 1314890A3 EP 02025927 A EP02025927 A EP 02025927A EP 02025927 A EP02025927 A EP 02025927A EP 1314890 A3 EP1314890 A3 EP 1314890A3
Authority
EP
European Patent Office
Prior art keywords
alternating current
rotational speed
vacuum pump
current motor
predetermined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP02025927A
Other languages
German (de)
French (fr)
Other versions
EP1314890A2 (en
Inventor
Shinya Yamamoto
Masahiro Kawaguchi
Osamu Uchiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Industries Corp
Original Assignee
Toyota Industries Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Industries Corp filed Critical Toyota Industries Corp
Publication of EP1314890A2 publication Critical patent/EP1314890A2/en
Publication of EP1314890A3 publication Critical patent/EP1314890A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/40—Electric motor
    • F04C2240/403—Electric motor with inverter for speed control
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/07—Electric current
    • F04C2270/075—Controlled or regulated

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

A vacuum pump has an alternating current motor, a rotary shaft and a gas transferring body. The alternating current motor runs at a certain speed based on frequency of alternating current and is sufficiently supplied with the alternating current. Gas is transferred from a certain space by the gas transferring body driven by the alternating current motor through the rotary shaft. A method for controlling a vacuum pump includes keeping a rotational speed of the alternating current motor at a second predetermined rotational speed, detecting a value of the alternating current to the alternating current motor, keeping the rotational speed at a first predetermined rotational speed that is higher than the second predetermined rotational speed when the detected alternating current value exceeds a first predetermined value, and keeping the rotational speed at the second predetermined rotational speed when the detected alternating current value becomes equal to a second predetermined value.
EP02025927A 2001-11-21 2002-11-20 Control system for vacuum pump Withdrawn EP1314890A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001356469A JP2003155981A (en) 2001-11-21 2001-11-21 Operation control method for vacuum pump and operation controller thereof
JP2001356469 2001-11-21

Publications (2)

Publication Number Publication Date
EP1314890A2 EP1314890A2 (en) 2003-05-28
EP1314890A3 true EP1314890A3 (en) 2003-08-20

Family

ID=19167980

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02025927A Withdrawn EP1314890A3 (en) 2001-11-21 2002-11-20 Control system for vacuum pump

Country Status (3)

Country Link
US (1) US20030123990A1 (en)
EP (1) EP1314890A3 (en)
JP (1) JP2003155981A (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101816872B (en) * 2004-03-24 2013-12-11 唐纳森公司 Filter elements, air cleaner, assembly, and methods
RU2360405C2 (en) * 2004-07-13 2009-07-10 Делавал Холдинг Аб Regulated vacuum source
FR2883934B1 (en) * 2005-04-05 2010-08-20 Cit Alcatel QUICK ENCLOSURE PUMPING WITH ENERGY LIMITATION
JP4737770B2 (en) * 2006-09-12 2011-08-03 アネスト岩田株式会社 Vacuum pump operation control device and method
US8261564B2 (en) * 2007-05-10 2012-09-11 Spx Corporation Refrigerant recovery apparatus with variable vacuum time and method
KR100775772B1 (en) 2007-05-23 2007-11-12 주식회사 부강스틸 The rotation steel wire drawing system where the rotation speed control means is had both
GB0809976D0 (en) * 2008-06-02 2008-07-09 Edwards Ltd Vacuum pumping systems
DE102008062054B4 (en) 2008-12-12 2019-05-29 Pfeiffer Vacuum Gmbh Arrangement with vacuum pump and method for operating a vacuum pump
TW201139853A (en) * 2009-10-29 2011-11-16 Ulvac Inc Pump unit, evacuation apparatus used for load-lock chamber, and vacuum apparatus
US9080576B2 (en) 2011-02-13 2015-07-14 Applied Materials, Inc. Method and apparatus for controlling a processing system
GB2502134B (en) * 2012-05-18 2015-09-09 Edwards Ltd Method and apparatus for adjusting operating parameters of a vacuum pump arrangement
DE102013108090A1 (en) * 2013-07-29 2015-01-29 Hella Kgaa Hueck & Co. pump assembly
DE102016223782A1 (en) * 2016-11-30 2018-05-30 Leybold Gmbh Method for operating a vacuum pump system
JP7430035B2 (en) * 2019-05-09 2024-02-09 株式会社アルバック Vacuum exhaust equipment and its operating method
DE112020007339T5 (en) * 2020-06-24 2023-06-15 Pierburg Pump Technology Gmbh automotive vacuum pump
WO2021259461A1 (en) * 2020-06-24 2021-12-30 Pierburg Pump Technology Gmbh Motor vehicle vacuum pump
GB2604188A (en) * 2021-02-22 2022-08-31 Edwards Tech Vacuum Engineering Qingdao Co Ltd Control of liquid ring pump

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB986915A (en) * 1962-03-01 1965-03-24 Micafil Ag Improvements in and relating to evacuating arrangements employing a roots pump
US4604036A (en) * 1983-09-09 1986-08-05 Hitachi, Ltd. Torque control apparatus for enclosed compressors
US4664601A (en) * 1984-07-25 1987-05-12 Hitachi, Ltd. Operation control system of rotary displacement type vacuum pump
JPH05231381A (en) * 1992-02-26 1993-09-07 Hitachi Ltd Method and device for controlling vacuum exhaust capacity of dry vacuum pump and dry vacuum pump and semiconductor manufacturing vacuum processor
JPH10220372A (en) * 1996-08-05 1998-08-18 Boc Group Plc:The Vacuum pump state evaluating system

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3569924B2 (en) * 1992-03-19 2004-09-29 松下電器産業株式会社 Fluid rotating device
US5447414A (en) * 1994-05-27 1995-09-05 Emerson Electric Co. Constant air flow control apparatus and method
JP3847357B2 (en) * 1994-06-28 2006-11-22 株式会社荏原製作所 Vacuum exhaust system
US5624394A (en) * 1994-10-28 1997-04-29 Iolab Corporation Vacuum system and a method of operating a vacuum system
US5944049A (en) * 1997-07-15 1999-08-31 Applied Materials, Inc. Apparatus and method for regulating a pressure in a chamber
US6045331A (en) * 1998-08-10 2000-04-04 Gehm; William Fluid pump speed controller
TW470815B (en) * 1999-04-30 2002-01-01 Arumo Technos Kk Method and apparatus for controlling a vacuum pump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB986915A (en) * 1962-03-01 1965-03-24 Micafil Ag Improvements in and relating to evacuating arrangements employing a roots pump
US4604036A (en) * 1983-09-09 1986-08-05 Hitachi, Ltd. Torque control apparatus for enclosed compressors
US4664601A (en) * 1984-07-25 1987-05-12 Hitachi, Ltd. Operation control system of rotary displacement type vacuum pump
JPH05231381A (en) * 1992-02-26 1993-09-07 Hitachi Ltd Method and device for controlling vacuum exhaust capacity of dry vacuum pump and dry vacuum pump and semiconductor manufacturing vacuum processor
JPH10220372A (en) * 1996-08-05 1998-08-18 Boc Group Plc:The Vacuum pump state evaluating system

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 017, no. 686 (M - 1529) 15 December 1993 (1993-12-15) *
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 13 30 November 1998 (1998-11-30) *

Also Published As

Publication number Publication date
JP2003155981A (en) 2003-05-30
US20030123990A1 (en) 2003-07-03
EP1314890A2 (en) 2003-05-28

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