EP1314890A3 - Control system for vacuum pump - Google Patents
Control system for vacuum pump Download PDFInfo
- Publication number
- EP1314890A3 EP1314890A3 EP02025927A EP02025927A EP1314890A3 EP 1314890 A3 EP1314890 A3 EP 1314890A3 EP 02025927 A EP02025927 A EP 02025927A EP 02025927 A EP02025927 A EP 02025927A EP 1314890 A3 EP1314890 A3 EP 1314890A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- alternating current
- rotational speed
- vacuum pump
- current motor
- predetermined
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
- F04C2240/403—Electric motor with inverter for speed control
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/07—Electric current
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/07—Electric current
- F04C2270/075—Controlled or regulated
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001356469A JP2003155981A (en) | 2001-11-21 | 2001-11-21 | Operation control method for vacuum pump and operation controller thereof |
JP2001356469 | 2001-11-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1314890A2 EP1314890A2 (en) | 2003-05-28 |
EP1314890A3 true EP1314890A3 (en) | 2003-08-20 |
Family
ID=19167980
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP02025927A Withdrawn EP1314890A3 (en) | 2001-11-21 | 2002-11-20 | Control system for vacuum pump |
Country Status (3)
Country | Link |
---|---|
US (1) | US20030123990A1 (en) |
EP (1) | EP1314890A3 (en) |
JP (1) | JP2003155981A (en) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101816872B (en) * | 2004-03-24 | 2013-12-11 | 唐纳森公司 | Filter elements, air cleaner, assembly, and methods |
RU2360405C2 (en) * | 2004-07-13 | 2009-07-10 | Делавал Холдинг Аб | Regulated vacuum source |
FR2883934B1 (en) * | 2005-04-05 | 2010-08-20 | Cit Alcatel | QUICK ENCLOSURE PUMPING WITH ENERGY LIMITATION |
JP4737770B2 (en) * | 2006-09-12 | 2011-08-03 | アネスト岩田株式会社 | Vacuum pump operation control device and method |
US8261564B2 (en) * | 2007-05-10 | 2012-09-11 | Spx Corporation | Refrigerant recovery apparatus with variable vacuum time and method |
KR100775772B1 (en) | 2007-05-23 | 2007-11-12 | 주식회사 부강스틸 | The rotation steel wire drawing system where the rotation speed control means is had both |
GB0809976D0 (en) * | 2008-06-02 | 2008-07-09 | Edwards Ltd | Vacuum pumping systems |
DE102008062054B4 (en) | 2008-12-12 | 2019-05-29 | Pfeiffer Vacuum Gmbh | Arrangement with vacuum pump and method for operating a vacuum pump |
TW201139853A (en) * | 2009-10-29 | 2011-11-16 | Ulvac Inc | Pump unit, evacuation apparatus used for load-lock chamber, and vacuum apparatus |
US9080576B2 (en) | 2011-02-13 | 2015-07-14 | Applied Materials, Inc. | Method and apparatus for controlling a processing system |
GB2502134B (en) * | 2012-05-18 | 2015-09-09 | Edwards Ltd | Method and apparatus for adjusting operating parameters of a vacuum pump arrangement |
DE102013108090A1 (en) * | 2013-07-29 | 2015-01-29 | Hella Kgaa Hueck & Co. | pump assembly |
DE102016223782A1 (en) * | 2016-11-30 | 2018-05-30 | Leybold Gmbh | Method for operating a vacuum pump system |
JP7430035B2 (en) * | 2019-05-09 | 2024-02-09 | 株式会社アルバック | Vacuum exhaust equipment and its operating method |
DE112020007339T5 (en) * | 2020-06-24 | 2023-06-15 | Pierburg Pump Technology Gmbh | automotive vacuum pump |
WO2021259461A1 (en) * | 2020-06-24 | 2021-12-30 | Pierburg Pump Technology Gmbh | Motor vehicle vacuum pump |
GB2604188A (en) * | 2021-02-22 | 2022-08-31 | Edwards Tech Vacuum Engineering Qingdao Co Ltd | Control of liquid ring pump |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB986915A (en) * | 1962-03-01 | 1965-03-24 | Micafil Ag | Improvements in and relating to evacuating arrangements employing a roots pump |
US4604036A (en) * | 1983-09-09 | 1986-08-05 | Hitachi, Ltd. | Torque control apparatus for enclosed compressors |
US4664601A (en) * | 1984-07-25 | 1987-05-12 | Hitachi, Ltd. | Operation control system of rotary displacement type vacuum pump |
JPH05231381A (en) * | 1992-02-26 | 1993-09-07 | Hitachi Ltd | Method and device for controlling vacuum exhaust capacity of dry vacuum pump and dry vacuum pump and semiconductor manufacturing vacuum processor |
JPH10220372A (en) * | 1996-08-05 | 1998-08-18 | Boc Group Plc:The | Vacuum pump state evaluating system |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3569924B2 (en) * | 1992-03-19 | 2004-09-29 | 松下電器産業株式会社 | Fluid rotating device |
US5447414A (en) * | 1994-05-27 | 1995-09-05 | Emerson Electric Co. | Constant air flow control apparatus and method |
JP3847357B2 (en) * | 1994-06-28 | 2006-11-22 | 株式会社荏原製作所 | Vacuum exhaust system |
US5624394A (en) * | 1994-10-28 | 1997-04-29 | Iolab Corporation | Vacuum system and a method of operating a vacuum system |
US5944049A (en) * | 1997-07-15 | 1999-08-31 | Applied Materials, Inc. | Apparatus and method for regulating a pressure in a chamber |
US6045331A (en) * | 1998-08-10 | 2000-04-04 | Gehm; William | Fluid pump speed controller |
TW470815B (en) * | 1999-04-30 | 2002-01-01 | Arumo Technos Kk | Method and apparatus for controlling a vacuum pump |
-
2001
- 2001-11-21 JP JP2001356469A patent/JP2003155981A/en active Pending
-
2002
- 2002-11-20 EP EP02025927A patent/EP1314890A3/en not_active Withdrawn
- 2002-11-20 US US10/300,064 patent/US20030123990A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB986915A (en) * | 1962-03-01 | 1965-03-24 | Micafil Ag | Improvements in and relating to evacuating arrangements employing a roots pump |
US4604036A (en) * | 1983-09-09 | 1986-08-05 | Hitachi, Ltd. | Torque control apparatus for enclosed compressors |
US4664601A (en) * | 1984-07-25 | 1987-05-12 | Hitachi, Ltd. | Operation control system of rotary displacement type vacuum pump |
JPH05231381A (en) * | 1992-02-26 | 1993-09-07 | Hitachi Ltd | Method and device for controlling vacuum exhaust capacity of dry vacuum pump and dry vacuum pump and semiconductor manufacturing vacuum processor |
JPH10220372A (en) * | 1996-08-05 | 1998-08-18 | Boc Group Plc:The | Vacuum pump state evaluating system |
Non-Patent Citations (2)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 017, no. 686 (M - 1529) 15 December 1993 (1993-12-15) * |
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 13 30 November 1998 (1998-11-30) * |
Also Published As
Publication number | Publication date |
---|---|
JP2003155981A (en) | 2003-05-30 |
US20030123990A1 (en) | 2003-07-03 |
EP1314890A2 (en) | 2003-05-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20021120 |
|
AK | Designated contracting states |
Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL LT LV MK RO SI |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
AK | Designated contracting states |
Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL LT LV MK RO SI |
|
17Q | First examination report despatched |
Effective date: 20040112 |
|
AKX | Designation fees paid |
Designated state(s): DE FR GB |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20040723 |