EP1276000A2

EP1276000A2 - Polarisation beam splitter and method of producing the same

Info

Publication number: EP1276000A2
Application number: EP02254577A
Authority: EP
Inventors: Mitsuharu Canon Kabushiki Kaisha Sawamura
Original assignee: Canon Inc
Current assignee: Canon Inc
Priority date: 2001-06-29
Filing date: 2002-06-28
Publication date: 2003-01-15
Anticipated expiration: 2022-06-28
Also published as: JP2003014932A; US20050012997A1; DE60221754D1; DE60221754T2; EP1276000B1; US20030107808A1; EP1276000A3; US6859315B2

Abstract

Disclosed is a polarization beam splitter and a method of producing the same, in which the polarization beam splitter has superior polarization separation efficiency and has small angle dependence. A transparent base material having a polarization separation film, comprising a dielectric multilayered film, is cemented at the cemented surface of the beam splitter, to provide an array-like plane type polarization beam splitter, wherein an incidence angle g of light upon the polarization separation film is selected to satisfy a relation g > 45 deg.

Description

This invention relates to a polarization beam splitter and a method of producing the same. More particularly, the invention concerns improvements in efficiency of a polarization beam splitter for use in a liquid crystal projector, for example, having a polarization separation optical system.
As regards polarization beam splitters, conventionally, those having a shape in which a dielectric multilayer film is provided at a 45-deg. prism cemented surface (polarization separation surface) are well known. In dice type elements, usually, the refractive index of a base material (substrate material) is determined on the basis of the Brewster's condition of a film material used for the polarization separation film, and then the base material is chosen. Also, in conventional array-like plane type polarization beam splitters, in many cases, a polarization film is provided on a planar base material of white plate or BLS7, and it is alternately cemented with a base material having a reflection film provided similarly. Then, it is cut at an angle of 45 deg., and thereafter the cut surface is polished. In such case, the refractive index of a film material used as the polarization separation film is determined and, then, the film material is chosen.
Polarization beam splitters having its substrate material and film material determined in the manner as described above, are so optimized to provide a high polarization separation efficiency with respect to a predetermined incidence angle. In some cases, however, with regard to light incident on the polarization beam splitter with an angle different from the predetermined incidence angle, the polarization separation efficiency is not always high. In usual liquid crystal projectors, the incidence angle of light from a light source upon a polarization beam splitter is not always 45 deg., and thus the polarization efficiency may be low in some cases. This is because the Brewster's condition and the optimum film thickness condition are not satisfied, in respect to the incidence light of 45-deg.±αBSL7. In an attempt to solving it, Japanese Laid-Open Patent Application, Laid-Open No. 11-023842, for example, proposes use of a plurality of alternate-layer groups which satisfy the Brewster's condition.
By the way, from the standpoint of characteristics of the polarization film and easiness of production of it, if a base material having a large refractive index and a film material having a large refractive index difference are used, then the S-polarization equivalent refractive index difference becomes large so that a large reflectance is obtainable with a smaller number of layers. This is advantageous in the characteristics of the polarization film. Since the number of layers required for the film is smaller, production of the film becomes easier. However, where a base material such as BSL7 having a low refractive index (Ng = 1.52) has to be used, as disclosed in the aforementioned Japanese Laid-Open Patent Application, Laid-Open No. 11-023842, usable film materials are restricted as like a combination of MgO (or Y₂O₃) and MgF₂, for example. Further, the number of layers becomes large, and there are problems in relation to production errors and cost. Moreover, because of the largeness of the number of layers, particularly the angle dependence of P-component becomes worse. On the other hand, even where a base material having a large refractive index (Ng = 1.7 to 1.8) is usable, although the optional range for usable film materials becomes wide as like combinations of TiO₂ and SiO₂, or Ta₂O₅ (or ZrTiO₄) and Al₂O₃, there are similar disadvantages such as an increase of the number of layers, for example.
On the other hand, polarization beam splitters having an incidence angle of 45 deg. or more are disclosed in Japanese Laid-Open Patent Application, Laid-Open Nos. 6-347642, 6-289222, 7-281024, 6-258525, and 6-281886, for example. However, since they are not of an array-like planar type, no specific consideration has been paid to enable the production of the same without changing conventional processing procedures.
It is accordingly an object of the present invention to address at least one of the problems described above and to provide a polarization beam splitter having small angle dependence and good polarization separation efficiency, without changing conventional processing procedures. Also, it is an object of the present invention to provide a method of producing such polarization beam splitter.
In accordance with an aspect of the present invention, there is provided a polarization beam splitter having an array-like planar shape, characterized in that: a transparent base material having a polarization separation film, being made of a dielectric multilayered film, is cemented at a cemented surface between arrays, and that an incidence angle g of light upon the polarization separation film satisfies a relation g > 45 deg.
In one preferred form of this aspect of the present invention, a polarization separation cemented surface provided by a dielectric multilayered film of an incidence angle g > 45 deg. and a cemented surface provided by an S-polarization reflection film having the same incidence angle with the polarization separation cemented surface, are combined into a pair, and wherein a plurality of such pairs are used and combined into an array-like planar structure.
The angle g may be in a range of 45 deg. < g < 60 deg.
The angle g may be in a range of 49 deg. < g < 56 deg.
The polarization separation film may comprise alternate layers of ZrO₂ as a high refractive index material and MgF₂ as a low refractive index material, wherein a base material may have a refractive index of about 1.52.
The polarization separation film may comprise alternate layers of TiO₂ as a high refractive index material and SiO₂ as a low refractive index material, wherein a base material may have a refractive index of about 1.52.
The polarization separation film may comprise alternate layers of high and low refractive index materials, of a number not greater than fourteen.
The polarization separation film may comprise alternate layers of high and low refractive index materials, of a number not greater than eleven.
In accordance with another aspect of the present invention, there is provided a polarization converting element for transforming non-polarized light into linearly polarized light, comprising: a polarization beam splitter as recited above; and a waveplate for registering a polarization direction of one of two polarized lights, being separated by a polarization separation film of the polarization beam splitter, with a polarization direction of the other polarized light.
The waveplate may be a half waveplate.
In accordance with a further aspect of the present invention, there is provided an image display unit, comprising: an illumination optical system for illuminating an image display element with light from a light source; and a projection optical system for projecting light from the image display element onto a projection surface onto which the light is to be projected; wherein said illumination optical system includes a polarization converting element as recited above.
In one preferred form of this aspect of the pre, a normal to a light entrance surface of a polarization beam splitter provided in said polarization converting element may be inclined with respect to an optical axis of said illumination optical system.
Further, a normal to a light entrance surface of a polarization beam splitter provided in said polarization converting element and an optical axis of said illumination optical system may define an angle larger than zero deg. and smaller than 20 deg.
The normal to a light entrance surface of a polarization beam splitter provided in said polarization converting element and an optical axis of said illumination optical system may define an angle larger than 3 deg. and smaller than 15 deg.
In accordance with a yet further aspect of the present invention, there is provided a method of producing a polarization beam splitter of array-like planar type in which a transparent base material having a polarization separation film, comprising a dielectric multilayered film, is cemented at a cemented surface, characterized in that: an incidence angle g of light upon the polarization separation film is set to satisfy a relation g > 45 deg.; a polarization separation cemented surface provided by a dielectric multilayered film of an incidence angle g > 45 deg. and a cemented surface provided by an S-polarization reflection film having the same incidence angle with the polarization separation cemented surface, are combined into a pair; and a plurality of such pairs are used and combined into an array-like planar structure.
In one preferred form of this aspect of the present invention, the angle g may be in a range of 45 deg. < g < 60 deg.
The polarization separation film may comprise alternate layers of ZrO₂ as a high refractive index material and MgF₂ as a low refractive index material, wherein a base material may have a refractive index of about 1.52.
The polarization separation film may comprise alternate layers of TiO₂ as a high refractive index material and SiO₂ as a low refractive index material, wherein a base material may have a refractive index of about 1.52.
These and other objects, features and advantages of the present invention will become more apparent upon a consideration of the following description of the preferred embodiments of the present invention which are described by way of example only, taken in conjunction with the accompanying drawings, in which:
Figures 1A and 1B are graphs for explaining a transmission refractive index of a polarization beam splitter according to an embodiment of the present invention.
Figures 2A and 2B are schematic and sectional views for explaining an array-like planar type polarization beam splitter according to an embodiment of the present invention, wherein Figure 2A shows a conventional array-like planar type polarization beam splitter, and Figure 2B shows an array-like planar type polarization beam splitter to which the structure of an embodiment of the present invention is applied.
Figure 3 is a schematic and sectional view of a polarization beam splitter according to first to fourth embodiments of the present invention.
Figure 4 is a graph for explaining characteristics of a polarization film in the first embodiment of the present invention.
Figure 5 is a graph for explaining characteristics of a polarization film in the second embodiment of the present invention.
Figure 6 is a graph for explaining characteristics of a polarization film in a comparative example 1.
Figure 7 is a graph for explaining characteristics of a polarization film in the third embodiment of the present invention.
Figure 8 is a graph for explaining characteristics of a polarization film in the fourth embodiment of the present invention.
Figure 9 is a graph for explaining characteristics of a polarization film in a comparative example 2.
Figure 10 is a schematic view of a polarization converting element using a polarization beam splitter according to an embodiment of the present invention.
Figure 11 is a schematic view of an image display unit using a polarization converting element shown in Figure 10.
In accordance with the present invention, having the structure arranged as described above, a polarization beam splitter having small angle dependence and good polarization separation efficiency as well as a method of producing such polarization beam splitter may be provided. This achievement is based on the following findings which were accomplished as a result of diligent investigations made by the inventors of the subject application.
In order to address the problems described above, first, a polarization beam splitter having a dielectric multilayer film provided at a cemented surface of a transparent base material, was set so that the incidence angle g of an optical axis, inside the base material, with respect to the cemented surface (polarization separation surface) satisfied a relation g > 45 deg.
If BSL7 is used as the base material, selectable film refractive index is restricted. Therefore, in order to expand the range for selectable film refractive index, a base material having a high refractive index may be used. However, the range of selectable film refractive index was enlarged by changing the incidence angle upon the cemented surface.
Figures 1A and 1B show this embodiment.
Figure 1A is a graph wherein a film material refractive index is taken on the axis of abscissa, while an S-polarization equivalent refractive index (nCOS) is taken on the axis of ordinates. For example, a curve "45 Equivalent BLS7" in Figure 1A depicts an equivalent refractive index (S-polarization equivalent refractive index: nCOS) of the film with respect to S-polarized light which impinges on the cemented surface at an incidence angle of 45 deg. Also, Figure 1B is a graph in which a film material refractive index is taken on the axis of abscissa, while a P-polarization equivalent refractive index (COS/n) is taken on the axis of ordinates.
Here, as seen from Figure 1A, if the base material is changed from BLS7 to TIH₃, the solid line for "45 Equivalent BSL7" is replaced by a solid line for "45 Equivalent TIH₃". Further, if the incidence angle is changed from 45 deg. to 55 deg., the solid line for "45 Equivalent BSL7" is replaced by a broken line for "55 Equivalent BSL7". Here, since the solid line for "45 Equivalent TIH₃" and the broken line for "55 Equivalent BSL7" are approximately overlapping with each other, it is seen that changing the base material to a material having a high refractive index and enlarging the incidence angle upon the cemented surface produce substantially the same influence.
Further, it is seen from the solid line for "45 Equivalent BSL7" in Figure 1B that, if BSL7 is used for the base material, in order to have the same equivalent refractive index (to satisfy the Brewster's condition), practical low-refractive index materials are restricted only to MgF₂. If, however, the incidence angle is changed, it is seen from the broken line "55 Equivalent BSL7", then, like the solid line of "45 Equivalent TIH₃", materials of TiO₂, Nb₂O₃, Ta₂O₅, HfO₂, ZrO₂, Al₂O₃, and SiO₂, for example, can be used. This is a large advantage in respect to the polarization separation characteristic and to the manufacture.
It was found that: in the structure described above, where a polarization separation cemented surface of an angle g > 45 deg. and a cemented surface of an angle g > 45 deg. having an S-polarization reflection film are used in a pair and if a plurality of such pairs are cemented into a structure of array-like plane type, a beam splitter can be produced by use of a white plate of BSL7 and in accordance with the processes of cementing, cutting and polishing, as like conventionally. Namely, a polarization beam splitter of array-like plane type having a high polarization separation efficiency, without a space, is very advantageous in respect to the production.
Figure 2A is a schematic and sectional view of a polarization beam splitter of conventional array-like plan type, and fig 2B is a schematic view of an array-like planar type polarization beam splitter to which the structure of an embodiment of the present invention as described above is applied.
In Figures 2A and 2B, denoted at W is a split beam width, and denoted at H is a plate thickness in the array-like plane type structure. Denoted at L is a space occupied in the depth direction, and denoted at a is an incidence angle of the optical axis with respect to a glass surface (it is zero deg. in the case of Figure 2A). Denoted at g is an incidence angle of the optical axis with respect to a cemented surface, and it is 45 deg. in the case of Figure 2A.
The incident light is separated by a polarization separation film into a transmitted P component (Tp) and a reflected S component (Rs). Additionally, by means of a reflection film, the component Rs is emitted in the same direction as the component Tp. Here, the dimensional relation can be expressed by an equation (A), below. H = Wxcos(2xg-90)/cosg L = mxWxtana+H/cosa where m is the number of steps or levels.
Now, embodiments of the present invention will be described. It should be noted here that the present invention is not limited at all by these embodiments.

Embodiment 1

In the first embodiment of the present invention, as shown in Figure 3, two BSL7 prisms were cemented to each other, with a polarization separation film sandwiched therebetween, whereby a polarization beam splitter was provided. However, the incidence angle g to the cemented surface (polarization separation surface) was 55 deg., and it was arranged so that light entered from the film side (opposite side of the substrate). Table 1 below shows the film structure of the polarization separation film in this case. In the first embodiment, TiO₂ was used as a high refractive index film, and SiO₂ was used as a low refractive index film, wherein they are cemented to each other by use of an UV-setting adhesive agent.
Figure 4 shows angle dependence spectral characteristics of the polarization separation film in this case. Here, a curve 58.5Tp shows the relation between the transmissivity and the wavelength of P-polarized light which impinges on the cemented surface (polarization separation film) at an incidence angle of 58.5 deg. Also, a curve 58.5Rs shows the relation between the reflectivity and the wavelength of S-polarized light which impinges on the cemented surface at an incidence angle of 58.5 deg. This incidence angle 58.5 deg. deviates from an angle 55 deg. by 3.5 deg. in the positive direction. This deviation corresponds to an angular deviation of +6 deg. in the atmosphere. Similarly, a curve 51.3Tp shows the relation between the transmissivity and the wavelength of P-polarized light which impinges on the cemented surface (polarization separation film) at an incidence angle of 51.3 deg. Also, a curve 51.3Rs shows the relation between the reflectivity and the wavelength of S-polarized light which impinges on the cemented surface (polarization separation surface) at an incidence angle of 51.3 deg. Here, this incidence angle 51.3 deg. deviates from the angle 55 deg., set as described above, by 3.7 deg. in the negative direction. This deviation corresponds to an angular deviation of -6 deg. in the atmosphere. It is seen that, as compared with a comparative example 2 to be described later, even with use of the same BLS7 base material and of a smaller number of layers, good characteristics of higher reflectivity and higher transmissivity and both being less changeable, are obtainable

NO. OF LAYERS MATERIAL

ADHESIVE AGENT d

1 TiO2 99

2 SiO2 193

3 TiO2 77

4 SiO2 150

5 TiO2 56

6 SiO2 117

7 TiO2 48

8 SiO2 72

BASE MATERIAL BSL7
In this embodiment, with the film structure described above, a polarization beam splitter of array-like plane type such as shown in Figure 2B was produced. As regards the shape and dimension, Table 2 below shows the results of comparison made to this example (Example 1) with respect to a conventional example of array-like planar type polarization beam splitter having an incidence angle 45 deg. upon a cemented surface as well as a comparative example 1 of a planer type polarization beam splitter having the same film structure but not arranged into an array structure. Here, in Figures 2A and 2B, the reference character W denotes the light splitting width for an incident light flux upon the polarization beam splitter. Also, denoted at a is the incidence angle of a chief ray of the incident light upon the polarization beam splitter, and denoted by a reference character g is the incidence angle of a chief ray of the incident light upon the polarization separation surface of the polarization beam splitter. Denoted at H is the plate thickness of the array-like polarization beam splitter, and denoted at m is the number of steps (levels) of the arrays constituting the polarization beam splitter. Denoted at L is the length (thickness) of the polarization beam splitter in the optical axis direction (depth direction).
As regards the space L of the polarization beam splitter in the depth direction, those in both of the Embodiment 1 and the Conventional Example may be disadvantageous as compared with the Comparative Example. It should be noted however that, in liquid crystal projectors, the brightness is very important and, therefore, use of a polarization beam splitter according to present Embodiment 1 is very effective. Furthermore, it is seen that, as compared with the Comparative Example 1, the Embodiment 1 made into an array-like plane type has been improved in respect to the space L.

Embodiment 2

In a second embodiment of the present invention, like the Embodiment 1, BSL7 prisms are cemented to each other while sandwiching a polarization separation film therebetween. In accordance with the Embodiment 2, as compared with Comparative Example 2 to be described later, a polarization beam splitter having superior characteristics obtainable with layers of about a half number was produced.
In Embodiment 2, the incidence angle g to the cemented surface (polarization separation surface) is 50 deg. and the light is projected from the film side of the beam splitter (opposite side of the substrate). As regards the film characteristics of the polarization separation film produced in accordance with Embodiment 2, while the spectral characteristics of a light source to be used in a liquid crystal projector have been taken into account, they have been determined to make small the angle dependence (a change in proportion of transmitted P components with a change in angle, as well as a change in proportion of reflected S components) in the range of 430 - 650 nm, and also to assure higher reflectivity and higher reflectivity in the range of 510 - 630 nm.

Table 3 below shows the film structure of the polarization separation film, in which ZrO₂ was used as a high refractive index film and MgF₂ was used as a low refractive index film. They were cemented to each other by using a UV-setting adhesive agent. Figure 5 shows the angle dependence spectral characteristics of the polarization separation film of this example. The axis of ordinate represents Tp or Rs, and the axis of abscissa represents the wavelength. Curves 53.8Tp and 53.8Rs depict the relations, with respect to the wavelength, of the transmissivity and the reflectivity of P polarized light and S polarized light, respectively, impinging on the cemented surface at an angle 53.8 deg. Here, the reason for a deviation of 3.8 deg. in the positive direction from the preset incidence angle 50 deg. is that it corresponds to an angular change of +6 deg. in the atmosphere. Further, curves46.1Tp and 46.1Rs depict the relations, with respect to the wavelength, of the transmissivity and the reflectivity of P polarized light and S polarized light, respectively, impinging on the cemented surface at an angle 46.1 deg. Here, the reason for a deviation of 3.9 deg. in the negative direction from the preset incidence angle 50 deg. is that it corresponds to an angular change of -6 deg. in the atmosphere. It is seen that, as compared with the conventional example in the Comparative Example 1, even with use of the same BLS7 base material, equivalent or superior characteristics are obtainable by layers of an approximately half number.

NO. OF LAYERS	MATERIAL
ADHESIVE AGENT		d
1	ZrO2	217
2	MgF2	130
3	ZrO2	42
4	MgF2	178
5	ZrO2	53
6	MgF2	148
7	ZrO2	116
8	MgF2	83
9	ZrO2	146
10	MgF2	124
11	ZrO2	285
BASE MATERIAL	BSL7

[Comparative Example 2]

Like the Example 1, BSL7 prisms were cemented to each other while sandwiching a polarization separation film therebetween, and a polarization beam splitter was produced. The incidence angle was 45 deg. and the structure was arranged so that light was projected from the film side. Table 4 below shows the film structure of the polarization separation film, in which Y₂O₃ was used as a high refractive index film and MgF₂ was used as a low refractive index film. They were cemented to each other by using a UV-setting adhesive agent. Figure 6 shows the angle dependence spectral characteristics of the polarization separation film.

Curves 49Tp and 49Rs depict the relations, with respect to the wavelength, of the transmissivity and the reflectivity of P polarized light and S polarized light, respectively, impinging on the cemented surface at an angle 49 deg. Here, the reason for a deviation of 4 deg. in the positive direction from the preset incidence angle 45 deg. is that it corresponds to an angular change of +6 deg. in the atmosphere. Further, curves 41Tp and 41Rs depict the relations, with respect to the wavelength, of the transmissivity and the reflectivity of P polarized light and S polarized light, respectively, impinging on the cemented surface at an angle 41 deg. Here, the reason for a deviation of 4 deg. in the negative direction from the preset incidence angle 41 deg. is that it corresponds to an angular change of -6 deg. in the atmosphere. It is seen that, as compared with the

Embodiments

1 and 2, even with use of the same BLS7 base material, the number of layers must be increased considerably in order to obtain similar characteristics. This is very disadvantageous when manufacturing errors are taken into account.

NO. OF LAYERS	MATERIAL
ADHESIVE AGENT		d
1	Y2O3	87
2	MgF2	94
3	Y2O3	57
4	MgF2	137
5	Y2O3	87
6	MgF2	140
7	Y2O3	74
8	MgF2	128
9	Y2O3	76
10	MgF2	143
11	Y2O3	98
12	MgF2	155
13	Y2O3	117
14	MgF2	157
15	Y2O3	109
16	MgF2	157
17	Y2O3	118
18	MgF2	186
19	Y2O3	117
BASE MATERIAL	BSL7

Embodiment 3

Like the Embodiment 1, TIH₃ prisms were cemented to each other while a polarization separation film sandwiched therebetween, and a polarization beam splitter with which superior characteristics are obtainable with layers of a smaller number as compared with a Comparative Example 3 to be described later, was produced. It is to be noted that the incidence angle to the cemented surface (polarization separation surface) is 50 deg. and that light to be projected from the film side of the cemented surface (opposite side of the substrate) is to be handled.
Table 5 below shows the film structure of the polarization separation film of the Embodiment 3, in which TiO₂ was used as a high refractive index film and Al₂O₃ was used as a low refractive index film. They were cemented to each other by using a UV-setting adhesive agent.

Figure 7 shows the angle dependence spectral characteristics of the polarization separation film of this embodiment. Curves 53.3Tp and 53.3Rs depict the relations, with respect to the wavelength, of the transmissivity and the reflectivity of P polarized light and S polarized light, respectively, impinging on the cemented surface at an angle 53.3 deg. Here, the reason for a deviation of 3.3 deg. in the positive direction from the preset incidence angle 50 deg. is that it corresponds to an angular change of +6 deg. in the atmosphere. Further, curves 46.6Tp and 46.6Rs depict the relations, with respect to the wavelength, of the transmissivity and the reflectivity of P polarized light and S polarized light, respectively, impinging on the cemented surface at an angle 46.6 deg. Here, the reason for a deviation of 3.4 deg. in the negative direction from the preset incidence angle 50 deg. is that it corresponds to an angular change of -6 deg. in the atmosphere. It is seen that, as compared with the conventional example of the Comparative Example 3, even with use of the same TIH₃ base material, superior characteristics of reflectivity and transmissivity both being less changeable are obtainable by layers of a smaller number.

NO. OF LAYERS	MATERIAL
ADHESIVE AGENT		d
1	Al2O3	92
2	TiO2	80
3	Al2O3	159
4	TiO2	99
5	Al2O3	102
6	TiO2	88
7	Al2O3	104
8	TiO2	67
9	Al2O3	119
10	TiO2	50
11	Al2O3	85
12	TiO2	185
BASE MATERIAL	TIH3

Embodiment 4

Like the Embodiment 1, TIH₃ prisms were cemented to each other while a polarization separation film sandwiched therebetween, and a polarization beam splitter with which superior characteristics are obtainable with layers of a smaller number as compared with a Comparative Example 3 to be described later, was produced. The incidence angle to the cemented surface (polarization separation surface) is 55 deg. and light to be projected from the film side of the cemented surface (opposite side of the substrate) is to be handled.
Table 6 below shows the film structure of the polarization separation film of the Embodiment 4, in which TiO₂ was used as a high refractive index film and Y₂O₃ was used as a low refractive index film. They were cemented to each other by using a UV-setting adhesive agent having a refractive index 1.62.

Figure 8 shows the angle dependence spectral characteristics of the polarization separation film of this example. Curves 57.9Tp and 57.9Rs depict the relations, with respect to the wavelength, of the transmissivity and the reflectivity of P polarized light and S polarized light, respectively, impinging on the cemented surface at an angle 57.9 deg. Here, the reason for a deviation of 2.9 deg. in the positive direction from the preset incidence angle 55 deg. is that it corresponds to an angular change of +6 deg. in the atmosphere. Further, curves 52.0Tp and 52.0Rs depict the relations, with respect to the wavelength, of the transmissivity and the reflectivity of P polarized light and S polarized light, respectively, impinging on the cemented surface at an angle 52.0 deg. Here, the reason for a deviation of 3.0 deg. in the negative direction from the preset incidence angle 55 deg. is that it corresponds to an angular change of -6 deg. in the atmosphere. It is seen that, as compared with the conventional example of the Comparative Example 3, even with use of the same TIH₃ base material, superior characteristics of higher reflectivity and higher transmissivity, both being less changeable, are obtainable.

NO. OF LAYERS	MATERIAL
ADHESIVE AGENT		d
1	Y2O3	167
2	TiO2	56
3	Y2O3	110
4	TiO2	60
5	Y2O3	117
6	TiO2	65
7	Y2O3	121
8	TiO2	68
9	Y2O3	130
10	TiO2	97
11	Y2O3	143
12	TiO2	99
13	Y2O3	193
14	TiO2	102
BASE MATERIAL	TIH3

[Comparative Example 3]

Like the Example 1, TIH₃ prisms were cemented to each other while a polarization separation film sandwiched therebetween, and a polarization beam splitter was produced. The incidence angle to the polarization separation surface is 45 deg. and light is projected from the film side.
Table 7 below shows the film structure of the polarization separation film, in which TiO₂ was used as a high refractive index film and SiO₂ was used as a low refractive index film. They were cemented to each other by using a UV-setting adhesive agent.

Figure 9 shows the angle dependence spectral characteristics of the polarization separation film of this example. Curves 48.4Tp and 48.4Rs depict the relations, with respect to the wavelength, of the transmissivity and the reflectivity of P polarized light and S polarized light, respectively, impinging on the cemented surface at an angle 48.4 deg. Here, the reason for a deviation of 3.4 deg. in the positive direction from the preset incidence angle 45 deg. is that it corresponds to an angular change of +6 deg. in the atmosphere. Further, curves 41.6Tp and 41.6Rs depict the relations, with respect to the wavelength, of the transmissivity and the reflectivity of P polarized light and S polarized light, respectively, impinging on the cemented surface at an angle 41.6 deg. Here, the reason for a deviation of 3.4 deg. in the negative direction from the preset incidence angle 45 deg. is that it corresponds to an angular change of -6 deg. in the atmosphere. It is seen that, as compared with the Example 3, even with use of the same TIH₃ base material, use of a larger number of layers is necessary, and it is very disadvantageous in relation to the manufacturing errors. Further, in respect to the transmissivity, there are large variations in characteristics as compared with Embodiment 3.

NO. OF LAYERS	MATERIAL
ADHESIVE AGENT		d
1	TiO2	123
2	SiO2	93
3	TiO2	126
4	SiO2	98
5	TiO2	119
6	SiO2	36
7	TiO2	106
8	SiO2	100
9	TiO2	51
10	SiO2	134
11	TiO2	51
12	SiO2	108
13	TiO2	41
14	SiO2	39
15	TiO2	127
BASE MATERIAL	TIH3

While embodiments of a polarization beam splitter according to the present invention have been described, present invention is not limited to them. For example, in the embodiments described above, the incidence angle of light upon the polarization separation film is 50 deg. or 55 deg. However, provided that the incidence angle is in a range greater than 45 deg. and smaller than 60 deg., substantially the same advantageous results as of the above-described examples of the present invention will be attainable. The advantageous effect will be stronger, where the angle is preferably not less than 45 deg. and not greater than 56 deg.
Further, as shown in Figure 10, a polarization beam splitter 100 according to an embodiment of the present invention may be combined with a half waveplate 101, to provide a polarization converting element 102 for transforming non-polarized light into linearly polarized light having a polarization direction being approximately straight. Moreover, as shown in Figure 11, a polarization converting element produced such as described above may be used to convert light from a light source 105 into linearly polarized light, so that an image display unit 110 which includes an illumination optical system 107 for illuminating an image display element 106 (such as a liquid crystal panel or DMD, for example) with the linearly polarized light, and a projection optical system 109 for projecting light from the image display element onto a predetermined plane (screen) 108, may be provided.
In such image display unit, the optical axis of the illumination optical system may preferably be set to define an angle not less than 45 deg. with respect to the polarization separation surface of the polarization converting element described above. Also, to this end, the light entrance surface of the polarization converting element may preferably be disposed with an angle greater than 0 deg. and smaller than 20 deg. with respect to the optical axis from the light source, and more preferably, an angle larger than 3 deg. and smaller than 15 deg.
Additionally, the present invention can be applied not only to a polarization converting element or an image display unit, but also to a video instrument system in which an imagewise signal from a computer or a video instrument is transmitted and it is received by a receiving unit of an image display unit to display an image corresponding to the imagewise signal.
In accordance with the embodiments and examples of the present invention as described above, a polarization beam splitter with superior polarization separation efficiency and small angle dependence, as well as a method of producing a polarization beam splitter to ensure it, can be accomplished. Also, a video instrument system can be structured.
While the invention has been described with reference to the structures disclosed herein, it is not confined to the details set forth and this application is intended to cover such modifications or changes as may come within the purposes of the improvements or the scope of the following claims.

Claims

A polarization beam splitter having an array-like planar shape, characterized in that:

a transparent base material having a polarization separation film, being made of a dielectric multilayered film, is cemented at a cemented surface between arrays, and that an incidence angle g of light upon the polarization separation film satisfies a relation g > 45 deg.
A polarization beam splitter according to Claim 1, wherein a polarization separation cemented surface provided by a dielectric multilayered film of an incidence angle g > 45 deg. and a cemented surface provided by an S-polarization reflection film having the same incidence angle with the polarization separation cemented surface, are combined into a pair, and wherein a plurality of such pairs are used and combined into an array-like planar structure.
A polarization beam splitter according to Claim 1, wherein the angle g is in a range of 45 deg. < g < 60 deg.
A polarization beam splitter according to Claim 1, wherein the angle g is in a range of 49 deg. < g < 56 deg.
A polarization beam splitter according to Claim 1, wherein the polarization separation film comprises alternate layers of ZrO₂ as a high refractive index material and MgF₂ as a low refractive index material, and wherein a base material has a refractive index of about 1.52.
A polarization beam splitter according to Claim 1, wherein the polarization separation film comprises alternate layers of TiO₂ as a high refractive index material and SiO₂ as a low refractive index material, and wherein a base material has a refractive index of about 1.52.
A polarization beam splitter according to Claim 1, wherein the polarization separation film comprises alternate layers of high and low refractive index materials, of a number not greater than fourteen.
A polarization beam splitter according to Claim 1, wherein the polarization separation film comprises alternate layers of high and low refractive index materials, of a number not greater than eleven.
A polarization converting element for transforming non-polarized light into linearly polarized light, comprising:

a polarization beam splitter as recited in Claim 1; and

a waveplate for registering a polarization direction of one of two polarized lights, being separated by a polarization separation film of the polarization beam splitter, with a polarization direction of the other polarized light.
A polarization converting element according to Claim 9, wherein said waveplate is a half waveplate.
An image display unit, comprising:

an illumination optical system for illuminating an image display element with light from a light source; and

a projection optical system for projecting light from the image display element onto a projection surface onto which the light is to be projected;

wherein said illumination optical system includes a polarization converting element as recited in Claim 9.
An image display unit according to Claim 11, wherein a normal to a light entrance surface of a polarization beam splitter provided in said polarization converting element is inclined with respect to an optical axis of said illumination optical system.
An image display unit according to Claim 11, wherein a normal to a light entrance surface of a polarization beam splitter provided in said polarization converting element and an optical axis of said illumination optical system define an angle larger than zero deg. and smaller than 20 deg.
An image display unit according to Claim 11, wherein a normal to a light entrance surface of a polarization beam splitter provided in said polarization converting element and an optical axis of said illumination optical system define an angle larger than 3 deg. and smaller than 15 deg.
A method of producing a polarization beam splitter of array-like planar type in which a transparent base material having a polarization separation film, comprising a dielectric multilayered film, is cemented at a cemented surface, characterized in that:

an incidence angle g of light upon the polarization separation film is set to satisfy a relation g > 45 deg.;

a polarization separation cemented surface provided by a dielectric multilayered film of an incidence angle g > 45 deg. and a cemented surface provided by an S-polarization reflection film having the same incidence angle with the polarization separation cemented surface, are combined into a pair; and

a plurality of such pairs are used and combined into an array-like planar structure.
A method according to Claim 15, wherein the angle g is in a range of 45 deg. < g < 60 deg.
A method according to Claim 15, wherein the polarization separation film comprises alternate layers of ZrO₂ as a high refractive index material and MgF₂ as a low refractive index material, and wherein a base material has a refractive index of about 1.52.
A method according to Claim 15, wherein the polarization separation film comprises alternate layers of TiO₂ as a high refractive index material and SiO₂ as a low refractive index material, and wherein a base material has a refractive index of about 1.52.