EP1246216A3 - Elektrostatisches Mikrorelais, Funkgerät und Messgerät mit dem Mikrorelais versehen, und Schaltverfahren - Google Patents

Elektrostatisches Mikrorelais, Funkgerät und Messgerät mit dem Mikrorelais versehen, und Schaltverfahren Download PDF

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Publication number
EP1246216A3
EP1246216A3 EP02252164A EP02252164A EP1246216A3 EP 1246216 A3 EP1246216 A3 EP 1246216A3 EP 02252164 A EP02252164 A EP 02252164A EP 02252164 A EP02252164 A EP 02252164A EP 1246216 A3 EP1246216 A3 EP 1246216A3
Authority
EP
European Patent Office
Prior art keywords
contact
relay
movable
electrostatic micro
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP02252164A
Other languages
English (en)
French (fr)
Other versions
EP1246216B1 (de
EP1246216A2 (de
Inventor
Tomonori c/o Omron Corporation Seki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Corp
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Corp, Omron Tateisi Electronics Co filed Critical Omron Corp
Publication of EP1246216A2 publication Critical patent/EP1246216A2/de
Publication of EP1246216A3 publication Critical patent/EP1246216A3/de
Application granted granted Critical
Publication of EP1246216B1 publication Critical patent/EP1246216B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00Electrostatic relays; Electro-adhesion relays
    • H01H59/0009Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00Electrostatic relays; Electro-adhesion relays
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00Electrostatic relays; Electro-adhesion relays
    • H01H59/0009Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0063Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation

Landscapes

  • Micromachines (AREA)
EP02252164.5A 2001-03-27 2002-03-26 Elektrostatisches Mikrorelais, Funkgerät und Messgerät mit dem Mikrorelais versehen, und Schaltverfahren Expired - Lifetime EP1246216B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001089900 2001-03-27
JP2001089900A JP3651404B2 (ja) 2001-03-27 2001-03-27 静電マイクロリレー、並びに、該静電マイクロリレーを利用した無線装置及び計測装置

Publications (3)

Publication Number Publication Date
EP1246216A2 EP1246216A2 (de) 2002-10-02
EP1246216A3 true EP1246216A3 (de) 2004-07-21
EP1246216B1 EP1246216B1 (de) 2014-06-04

Family

ID=18944757

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02252164.5A Expired - Lifetime EP1246216B1 (de) 2001-03-27 2002-03-26 Elektrostatisches Mikrorelais, Funkgerät und Messgerät mit dem Mikrorelais versehen, und Schaltverfahren

Country Status (5)

Country Link
EP (1) EP1246216B1 (de)
JP (1) JP3651404B2 (de)
KR (1) KR100455949B1 (de)
CN (1) CN1234144C (de)
TW (1) TW550616B (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100410165C (zh) * 2002-11-19 2008-08-13 宝兰微***公司 小型继电器和相应的用途
DE102004010150B9 (de) * 2004-02-27 2012-01-26 Eads Deutschland Gmbh Hochfrequenz-MEMS-Schalter mit gebogenem Schaltelement und Verfahren zu seiner Herstellung
JP4540443B2 (ja) 2004-10-21 2010-09-08 富士通コンポーネント株式会社 静電リレー
JP2006147540A (ja) * 2004-10-22 2006-06-08 Matsushita Electric Ind Co Ltd 電気機械スイッチ
JP2014130767A (ja) * 2012-12-28 2014-07-10 Omron Corp 静電マイクロリレーおよびその製造方法
KR101595456B1 (ko) 2014-06-30 2016-02-19 대한민국 보안등의 가변식 차광기구
KR101595453B1 (ko) 2014-06-30 2016-02-19 대한민국 보안등의 고정식 차광기구

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0520407A1 (de) * 1991-06-24 1992-12-30 Matsushita Electric Works, Ltd. Elektrostatisches Relais
JP2000113792A (ja) * 1998-10-08 2000-04-21 Omron Corp 静電マイクロリレー
US6054659A (en) * 1998-03-09 2000-04-25 General Motors Corporation Integrated electrostatically-actuated micromachined all-metal micro-relays
JP2000164104A (ja) * 1998-11-26 2000-06-16 Omron Corp 静電マイクロリレー

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0520407A1 (de) * 1991-06-24 1992-12-30 Matsushita Electric Works, Ltd. Elektrostatisches Relais
US6054659A (en) * 1998-03-09 2000-04-25 General Motors Corporation Integrated electrostatically-actuated micromachined all-metal micro-relays
JP2000113792A (ja) * 1998-10-08 2000-04-21 Omron Corp 静電マイクロリレー
JP2000164104A (ja) * 1998-11-26 2000-06-16 Omron Corp 静電マイクロリレー
US20020005341A1 (en) * 1998-11-26 2002-01-17 Tomonori Seki Radio device and measuring device utilizing electrostatic microrelay and electrostatic microrelay

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 07 29 September 2000 (2000-09-29) *
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 09 13 October 2000 (2000-10-13) *

Also Published As

Publication number Publication date
JP2002289081A (ja) 2002-10-04
KR20020076131A (ko) 2002-10-09
TW550616B (en) 2003-09-01
EP1246216B1 (de) 2014-06-04
JP3651404B2 (ja) 2005-05-25
CN1234144C (zh) 2005-12-28
CN1378225A (zh) 2002-11-06
EP1246216A2 (de) 2002-10-02
KR100455949B1 (ko) 2004-11-08

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