EP1169616A1 - Scanning using position transmission for triggering the recording of measured values - Google Patents
Scanning using position transmission for triggering the recording of measured valuesInfo
- Publication number
- EP1169616A1 EP1169616A1 EP01909453A EP01909453A EP1169616A1 EP 1169616 A1 EP1169616 A1 EP 1169616A1 EP 01909453 A EP01909453 A EP 01909453A EP 01909453 A EP01909453 A EP 01909453A EP 1169616 A1 EP1169616 A1 EP 1169616A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- sensor
- measuring
- controller
- signals
- measured values
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
Definitions
- the invention relates to a method for measuring, in particular, surface topologies in microscopic resolution, in which a measuring sensor and a sample to be detected are moved relative to one another in the xy direction, the movement being controlled by means of a controller, which records the measured values of the sensor, whereby After starting the sensor and moving the sensor at defined intervals, the sensor is read out and individual detected profiles which are displaced from one another in a dimension perpendicular to the profile direction are combined to form a measuring surface after the measurement has been carried out.
- the invention further relates to a device for carrying out the method with a distance sensor arranged above a sample surface and a sample carrier, which can be moved by motor in the xy direction relative to one another, a controller for the travel movement and a controller which, on the one hand, has the sensor for recording the sensor measured values and on the other hand is connected to the control for the movement.
- Such surface measuring devices are used to inspect technical surfaces in microscopic resolution. During the inspection, surface heights can be measured at defined locations on a sample.
- the measuring device is also equipped with a precise coordinate control.
- the device is used in all areas of microstructure technologies.
- the spatial resolution of the sensor is on the order of 1 ⁇ m.
- the table and sensor are started in quick succession via a software start signal.
- individual profiles which are displaced from one another in a dimension perpendicular to the profile direction, are combined to form a measuring surface after the measurement has been carried out.
- the location x of the i-th measuring point can thus be determined subsequently as follows (the starting point is the reference point):
- the invention is therefore based on the object of carrying out a method of the type mentioned at the outset in such a way that the local accuracy in the measurement of location-related measurement signals is improved.
- the invention solves this problem in accordance with the characterizing part of claim 1 in that the travel control is started via a software command to start the travel movement, position-triggering pulses for location-based reading of the sensor are taken at discrete and constant spatial distances from the moving element. location-based signals derived from the basic signals obtained in this way by means of electronic data processing are used to trigger the measurement recording of the sensor and the measured values obtained are stored and then transmitted asynchronously to the controller.
- a position transmitter is provided on the movable element, the signals of which are transmitted by means of an interface upstream of the sensor and downstream of the travel control into location-based derived trigger signals for triggering the measured value recording of the sensor are converted and that the direction-dependent location increments are summed in a memory, the direction detection being carried out by means of programming logic.
- the problem addressed in the introduction is thus circumvented according to the invention in that only a start signal is required for the traversing movement due to the interposition of the sensor interface and the removal of position signals.
- the measured values determined can be read out asynchronously according to the method according to the invention.
- the sample is preferably arranged on a table which can be moved in the x-y direction.
- the sensor can be moved.
- An incremental angle encoder is provided on the table to take the position-giving trigger pulses, the spatial distances of which are discrete and constant, on the corresponding axis of the motor in whose direction the direction of travel of the measurement profile falls.
- an incremental or absolute measuring position transmitter can also be attached directly to the table, preferably a so-called glass scale.
- the basic signals (primary signals) received by the position transmitters are converted into derived signals by means of electronic data processing, which in turn are location-related.
- a programmable microcontroller is used for this. This micro-controller can also be part of the table control.
- the derived signals serve the absolute (not only incremental) location determination.
- derived signals can be interpreted signals that both by means of digital electronic circuit technology can also be generated using the programming of microprocessors from the input signals present as digital signals. For example, it is possible to digitally divide the basic signal so that only every nth pulse triggers a triggering of the measured value signal (with n> 1). The Ors distance of the measurements is thus enlarged in a defined manner.
- Figure 1 schematic circuit structure of the surface measuring device
- Figure 2 schematic circuit arrangement according to the prior art.
- FIG. 2 The structure of a surface measuring device according to the prior art is shown schematically in Figure 2. It essentially consists of a distance sensor 1 (preferably a laser spot sensor), a controller 2 for the travel movement in the xy direction of a travel table 3 on which a sample to be detected is arranged.
- the sensor 1 is fixed above the sample.
- the table 3 with the sample on it is moved in a continuous movement between two locations, the sensor being read out at defined time intervals at the same time.
- the measured values are transmitted to a controller 4 (primarily a PC) at defined time intervals.
- the controller 4 in each case sends a start signal to the sensor 1 and to the controller 2.
- the table and sensor are hereby started in quick succession. If the travel speed v is assumed to be constant, the location distance can be retrospectively assigned for values measured at defined time intervals.
- Figure 1 shows the schematic structure of a surface measuring device according to the invention.
- This measuring device differs essentially from the known measuring device by a sensor interface 5 interposed between the controller 2 and the sensor 1 and by the fact that the controller 4 only emits a start signal to the controller.
- Position signals are continuously taken at table 3 (for example by means of an angle encoder or a glass scale arranged on table 3), which are fed to interface 5 via the controller.
- the position signals (basic signals) are converted into derived signals that are used to trigger the measurement of the sensor.
- the interface 5 has, in addition to a programming logic, also a memory logic in which the direction-dependent location increments are summed up for the absolute location determination.
- the programming logic includes required for the detection of the directions.
- the stored measured values are then transmitted asynchronously to the controller 4.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The start of the displacement movement is initiated by a software instruction (2, 3) when measuring surface topologies with microscopic resolution. Trigger pulses which serve to trigger the recording of measured values on the sensor (1) are generated in discrete local intervals by a position transmitter. The measured values obtained are stored and then asynchronously transmitted to the controller (4).
Description
SCANNEN MIT POSITIONSGEBUNG ZUR TRIGGERUNG DER MESSWERTAUFNAHME SCANNING WITH POSITIONING TO TRIGGER THE MEASUREMENT RECORDING
Die Erfindung betrifft ein Verfahren zur Messung insbesondere von Oberflachentopologien in mikroskopischer Auflösung, bei dem ein Meßsenεor und eine zu detektierende Probe relativ zueinander in x-y-Richtung verfahren werden, wobei die Verfahrbewegung mittels eines Controllers, der die Meßwerte des Sensors aufnimmt, gesteuert wird, wobei nach dem Start von Sensor und Verfahrbewegung in definierten Abständen der Sensor ausgelesen wird und einzelne detektierte Profile, die voneinander in einer senkrechten zur Profilrichtung liegenden Dimension ortsverscho- ben sind, nach erfolgter Messung zu einer Meßfläche zusammengefaßt werden.The invention relates to a method for measuring, in particular, surface topologies in microscopic resolution, in which a measuring sensor and a sample to be detected are moved relative to one another in the xy direction, the movement being controlled by means of a controller, which records the measured values of the sensor, whereby After starting the sensor and moving the sensor at defined intervals, the sensor is read out and individual detected profiles which are displaced from one another in a dimension perpendicular to the profile direction are combined to form a measuring surface after the measurement has been carried out.
Die Erfindung betrifft weiterhin eine Vorrichtung zur Durchführung des Verfahrens mit einem oberhalb einer Probenoberfläche angeordneten Abstandsεenεor und einem Probenträger, die relativ zueinander in x-y-Richtung motorisch verfahrbar sind, eine Steuerung für die Verfahrbewegung und einem Controller, der einerseits mit dem Sensor zur Aufnahme der Sensormeßwerte und andererseits mit der Steuerung für die Verfahrbewegung verbunden ist.The invention further relates to a device for carrying out the method with a distance sensor arranged above a sample surface and a sample carrier, which can be moved by motor in the xy direction relative to one another, a controller for the travel movement and a controller which, on the one hand, has the sensor for recording the sensor measured values and on the other hand is connected to the control for the movement.
Derartige Oberflächen-Meßgeräte dienen der Inspektion technischer Oberflächen in mikroskopischer Auflösung. Bei der Inspektion können an definierten Orten einer Probe Oberflächenhöhen gemessen werden. Das Meßgerät ist zusätzlich mit einer präzisen Koordinaten-Steuerung ausgestattet. Anwendung findet das Gerät in allen Bereichen der Mikrostrukturtechnologien.
Die Ortsauflösung des Sensors liegt in der Größenordnung von 1 μm.Such surface measuring devices are used to inspect technical surfaces in microscopic resolution. During the inspection, surface heights can be measured at defined locations on a sample. The measuring device is also equipped with a precise coordinate control. The device is used in all areas of microstructure technologies. The spatial resolution of the sensor is on the order of 1 μm.
Stand der Technik ist es, daß zur Messung von Höhenprofilen der die Probe tragende Tisch in einer kontinuierlichen Bewegung zwischen zwei Orten verfahren wird, wobei gleichzeitig in definierten Zeitabständen der Sensor ausgelesen wird.State of the art is that for measuring height profiles the table carrying the sample is moved in a continuous movement between two locations, the sensor being read out at defined time intervals at the same time.
Über ein Software-Start-Signal werden Tisch und Sensor dabei kurz hintereinander gestartet. Zur Messung zusammenhängender Ortsbereiche in beiden Dimensionen werden einzelne Profile, die voneinander in einer senkrecht zur Profilrichtung liegenden Dimension ortsverschoben sind, nach erfolgter Messung zu einer Meßfläche zusammengefaßt.The table and sensor are started in quick succession via a software start signal. For the measurement of coherent spatial areas in both dimensions, individual profiles, which are displaced from one another in a dimension perpendicular to the profile direction, are combined to form a measuring surface after the measurement has been carried out.
Der Abstand benachbarter Meßpunkte dx des derart gemessenen Profils läßt sich wie folgt beschreiben:The distance between adjacent measuring points dx of the profile measured in this way can be described as follows:
dx = v*dtdx = v * dt
Bei als konstant angenommener Verfahrgeschwindigkeit v bei in Zeitabständen von dt gemessenen Werten kann somit der Ort x des i-ten Meßpunktes wie folgt nachträglich bestimmt werden (der Startpunkt gilt als Bezugspunkt) :If the travel speed v is assumed to be constant with values measured at time intervals of dt, the location x of the i-th measuring point can thus be determined subsequently as follows (the starting point is the reference point):
X(i) = i*dxX (i) = i * dx
Die Problematik dieses bekannten Verfahrens besteht darin, daß der Start von Tisch und Sensorauslesung mit einem nicht konstanten Zeitverzug behaftet ist. Ursache hierfür ist, daß die Tischsteuerung und der Sensor von einem Controller softwaremäßig angesteuert werden und daß es sich bei dem verwendeten Controller in der Regel nicht um ein Echtheitssystem handelt. Hieraus leitet sich eine Ortsungenauigkeit des Startpunktes ab.The problem with this known method is that the start of the table and sensor reading is associated with a non-constant time delay. The reason for this is that the table control and the sensor are controlled by software from a controller and that the controller used is generally not an authenticity system. An inaccuracy of the starting point is derived from this.
Diese Ortsungenauigkeit ist aufgrund der zeitbezogenen Auεle- sung gemäß der obengenannten Gleichung geschwindigkeitsproportional. Sensoren, die aufgrund ihrer hohen Grenzfrequenz
schneller (d.h. in kürzeren Zeitabständen) ausgelesen werden können, erlauben bei gleichbleibender Ortsauflösung eine höhere Verfahrgeschwindigkeit v. Hierbei erhöht sich jedoch der Einfluß der Problematik. Eine weitere Schwierigkeit besteht in der Nicht-Konstanz der Verfahrgeschwindigkeit v.This inaccuracy in location is speed-proportional due to the time-related reading according to the above equation. Sensors due to their high cutoff frequency read faster (ie in shorter time intervals) allow a higher travel speed v. However, this increases the influence of the problem. Another difficulty is the inconsistency of the travel speed v.
Gemäß der obengenannten Gleichung treten dann Ortsungenauigkei- ten auf. Ursache für die Nicht-Konstanz ist u.a. das Beschleunigungsverhalten des Tisches aus Gründen der Massenträgheit, dem seitens der Tischsteuerung mit einer Beschleunigungs- und Abbrems-Rampenfunktion Rechnung getragen werden muß.Inaccuracies in location then occur in accordance with the above-mentioned equation. The reason for the inconsistency is the acceleration behavior of the table due to inertia, which must be taken into account by the table control with an acceleration and deceleration ramp function.
Der Erfindung liegt daher die Aufgabe zugrunde, ein Verfahren der eingangs genannten Art so zu führen, daß die örtliche Genauigkeit bei der Messung von ortsbezogenen Meßsignalen verbessert wird.The invention is therefore based on the object of carrying out a method of the type mentioned at the outset in such a way that the local accuracy in the measurement of location-related measurement signals is improved.
Die Erfindung löst diese Aufgabe gemäß dem kennzeichnenden Teil des Anspruchs 1 dadurch, daß über einen Software-Befehl die Verfahrsteuerung zum Starten der Verfahrbewegung veranlaßt wird, in diskreten und konstanten Ortsabstanden von dem verfahrenden Element poεitionsgebende Trigger- Impulse zur ortsbezogenen Auslesung des Sensors abgenommen werden, aus den so gewonnenen Grundsignalen mittels elektroniεcher Datenverarbeitung abgeleitete ihrerseits ortsbezogene Signale erzeugt werden, die zur Triggerung der Meßwertaufnahme des Sensors dienen und die erhaltenen Meßwerte gespeichert und dann asynchron zum Controller übertragen werden.The invention solves this problem in accordance with the characterizing part of claim 1 in that the travel control is started via a software command to start the travel movement, position-triggering pulses for location-based reading of the sensor are taken at discrete and constant spatial distances from the moving element. location-based signals derived from the basic signals obtained in this way by means of electronic data processing are used to trigger the measurement recording of the sensor and the measured values obtained are stored and then transmitted asynchronously to the controller.
Vorrichtungsmäßig wir die Aufgabe gemäß dem kennzeichnenden Teil des Anspruchs 2 gelöst, nämlich dadurch, daß an dem verfahrbaren Element ein Positionsgeber vorgesehen ist, dessen Signale mittels eines dem Sensor vorgeschalteten und der Verfahrsteuerung nachgeschalteten Interfaces in ortsbezogene abgeleitete Trigger-Signale zur Triggerung der Meßwertaufnahme des Sensors umgewandelt werden und daß die richtungsabhängigen Ortsinkremente in einem Speicher summiert werden, wobei die Richtungserkennung mittels einer Programmierlogik erfolgt.
Die in der Einleitung angesprochene Problematik wird erfindungsgemäß somit dadurch umgangen, daß durch die Zwischenschaltung des Sensor- Interfaces und die Abnahme von Positionεsigna- len lediglich ein Startsignal für die Verfahrbewegung nötig ist.In terms of the device, we achieved the object according to the characterizing part of claim 2, namely in that a position transmitter is provided on the movable element, the signals of which are transmitted by means of an interface upstream of the sensor and downstream of the travel control into location-based derived trigger signals for triggering the measured value recording of the sensor are converted and that the direction-dependent location increments are summed in a memory, the direction detection being carried out by means of programming logic. The problem addressed in the introduction is thus circumvented according to the invention in that only a start signal is required for the traversing movement due to the interposition of the sensor interface and the removal of position signals.
Statt der dem Controller zugeführten Meßwerten in definierten Zeitabständen können gemäß dem erfindungsgemäßen Verfahren die ermittelten Meßwerte asynchron ausgelesen werden.Instead of the measured values supplied to the controller at defined time intervals, the measured values determined can be read out asynchronously according to the method according to the invention.
Bevorzugterweise ist die Probe auf einem in x-y-Richtung verfahrbaren Tisch angeordnet. Es ist jedoch auch denkbar (gemäß Anspruch 4), daß der Senεor verfahrbar iεt .The sample is preferably arranged on a table which can be moved in the x-y direction. However, it is also conceivable (according to claim 4) that the sensor can be moved.
Es wird jedoch im folgenden die Erfindung am Beispiel des verfahrbaren Tisches erläutert :However, the invention is explained below using the example of the movable table:
Zur Abnahme der positionsgebenden Trigger- Impulse, deren Orts- abstände diskret und konstant sind, wird ein inkrementeller Winkel-Encoder am Tisch vorgesehen, und zwar an der entsprechenden Achse desjenigen Motors, in dessen Richtung die Verfahrrichtung des Meßprofils fällt.An incremental angle encoder is provided on the table to take the position-giving trigger pulses, the spatial distances of which are discrete and constant, on the corresponding axis of the motor in whose direction the direction of travel of the measurement profile falls.
Als Alternative dazu kann aber auch ein inkrementeller oder absolut mesεender Positionsgeber direkt am Tisch angebracht sein, vorzugsweise ein sogenannter Glasmaßstab.As an alternative, however, an incremental or absolute measuring position transmitter can also be attached directly to the table, preferably a so-called glass scale.
Die von den Positionsgebern erhaltenen Grundsignale (Primärsignale) werden mittels elektronischer Datenverarbeitung zu abgeleiteten Signalen umgewandelt, die ihrerseits ortsbezogen sind. Insbesondere wird hierzu ein programmierbarer MikroController eingesetzt. Dieser Mikro-Controller kann auch Bestandteil der Tischεteuerung sein. Die abgeleiteten Signale dienen der absoluten (nicht nur inkrementeilen) Ortsbestimmung.The basic signals (primary signals) received by the position transmitters are converted into derived signals by means of electronic data processing, which in turn are location-related. In particular, a programmable microcontroller is used for this. This micro-controller can also be part of the table control. The derived signals serve the absolute (not only incremental) location determination.
Als "abgeleitete" Signale können Signale aufgefaßt werden, die sowohl mittels digitaler elektronischer Schaltungstechnik als
auch mit Hilfe der Programmierung von Mikroprozessoren aus den als Digitalsignale vorliegenden Eingangssignalen erzeugt werden. So ist es z.B. möglich, eine digitale Teilung des Grundsi- gnals vorzunehmen, so daß nur jeder n-te Impuls eine Triggerung des Meßwertsignals auslöst, (mit n>l) . Damit wird der Orsab- εtand der Messungen definiert vergrößert.As "derived" signals can be interpreted signals that both by means of digital electronic circuit technology can also be generated using the programming of microprocessors from the input signals present as digital signals. For example, it is possible to digitally divide the basic signal so that only every nth pulse triggers a triggering of the measured value signal (with n> 1). The Ors distance of the measurements is thus enlarged in a defined manner.
Die Datenverarbeitung setzt neben einer Programmierlogik auch eine Speicherlogik voraus, da eine Summation der richtungsabhängigen Ortsinkremente zur absoluten Ortsbestimmung nötig ist. Die Erkennung der Richtungen erfolgt innerhalb der Progammier- logik.In addition to programming logic, data processing also requires memory logic, since a summation of the direction-dependent location increments is necessary for absolute location determination. The detection of the directions takes place within the programming logic.
Die Erfindung wird im folgenden anhand von Zeichnungen dargestellt.The invention is illustrated below with reference to drawings.
Es zeigen:Show it:
Bild 1: schematiεcher Schaltungsaufbau des Oberflächen-Meßgeräts,Figure 1: schematic circuit structure of the surface measuring device,
Bild 2 : schematische Schaltungsanordnung gemäß Stand der Technik .Figure 2: schematic circuit arrangement according to the prior art.
In Bild 2 ist schematisch der Aufbau eines Oberflächenmeßgeräts gemäß Stand der Technik dargestellt. Es besteht im wesentlichen aus einem Abstandεsensor 1 (vorzugsweiεe ein Laserfleck-Sensor) , einer Steuerung 2 für die Verfahrbewegung in x-y-Richtung eines Verfahrtisches 3 , auf dem eine zu detektierende Probe angeordnet ist. Der Sensor 1 ist oberhalb der Probe fest angeordnet. Der Tisch 3 mit der drauf befindlichen Probe wird in einer kontinuierlichen Bewegung zwischen zwei Orten verfahren, wobei gleichzeitig in definierten Zeitabständen der Sensor ausgelesen wird. Die Meßwerte werden in definierten Zeitabständen einem Controller 4 (vornehmlich ein PC) übertragen. Der Controller 4 sendet jeweilε ein Startsignal an den Sensor 1 sowie an die Steuerung 2. Hiermit werden Tisch und Sensor kurz hintereinander gestartet.
Bei als konstant angenommener Verfahrgeschwindigkeit v kann hierbei bei in definierten Zeitabständen gemessenen Werten der Ortsabstand nachträglich zugeordnet werden.The structure of a surface measuring device according to the prior art is shown schematically in Figure 2. It essentially consists of a distance sensor 1 (preferably a laser spot sensor), a controller 2 for the travel movement in the xy direction of a travel table 3 on which a sample to be detected is arranged. The sensor 1 is fixed above the sample. The table 3 with the sample on it is moved in a continuous movement between two locations, the sensor being read out at defined time intervals at the same time. The measured values are transmitted to a controller 4 (primarily a PC) at defined time intervals. The controller 4 in each case sends a start signal to the sensor 1 and to the controller 2. The table and sensor are hereby started in quick succession. If the travel speed v is assumed to be constant, the location distance can be retrospectively assigned for values measured at defined time intervals.
In Bild 1 iεt der schematische Aufbau eines Oberflächenmeßgeräts gemäß der Erfindung dargestellt. Dieses Meßgerät unterscheidet sich im wesentlichen von dem bekannten Meßgerät durch ein zwischen der Steuerung 2 und dem Sensor 1 zwischengeschaltetes Sensor- Interface 5 und dadurch, daß der Controller 4 lediglich an die Steuerung ein Startsignal abgibt.Figure 1 shows the schematic structure of a surface measuring device according to the invention. This measuring device differs essentially from the known measuring device by a sensor interface 5 interposed between the controller 2 and the sensor 1 and by the fact that the controller 4 only emits a start signal to the controller.
Am Tisch 3 werden laufend Positionssignale abgenommen (beispielsweise mittels eines Winkelcodierers oder eines am Tisch 3 angeordneten Glasmaßstabs) , die über die Steuerung dem Interface 5 zugeführt werden. In diesem Interface werden die Positionssignale (Grundsignale) in abgeleitete Signale umgewandelt, die zur Triggerung der Meßwertaufnahme des Sensors dienen. Hierzu weist das Interface 5 neben einer Programmierlogik auch eine Speicherlogik auf, in der die richtungsabhängigen Ortsinkremente zur absoluten Ortsbestimmung aufsummiert werden. Die Programmierlogik ist u.a. für die Erkennung der Richtungen erforderlich. Die gespeicherten Meßwerte werden dann asynchron zum Controller 4 übertragen.Position signals are continuously taken at table 3 (for example by means of an angle encoder or a glass scale arranged on table 3), which are fed to interface 5 via the controller. In this interface, the position signals (basic signals) are converted into derived signals that are used to trigger the measurement of the sensor. For this purpose, the interface 5 has, in addition to a programming logic, also a memory logic in which the direction-dependent location increments are summed up for the absolute location determination. The programming logic includes required for the detection of the directions. The stored measured values are then transmitted asynchronously to the controller 4.
Auf diese Weise (also durch die abεolute Ortsbestimmung mit Hilfe der abgeleiteten Signale) wird die örtliche Genauigkeit der Messung der ortsbezogenen Meßsignale gegenüber der in Bild 2 dargestellten Methode erheblich verbeεsert.
In this way (that is, by means of the absolute location determination with the aid of the derived signals), the local accuracy of the measurement of the location-based measurement signals is considerably improved compared to the method shown in FIG. 2.
Claims
1. Verfahren zur Messung insbeεondere zur Meεsung von Ober- flächentopologien in mikroskopischer Auflösung, bei dem ein Meßεenεor und eine zu detektierende Probe relativ zueinander in x-y-Richtung verfahren werden, wobei die Verfahrbewegung mittels eines Controllers, der die Meßwerte des Sensors aufnimmt, gesteuert wird, wobei nach dem Start von Sensor und Verfahrbewegung in definierten Abständen der Sensor ausgeleεen wird und einzelne detektierte Profile, die voneinander in einer senkrechten zur Profilrichtung liegenden Dimension ortsverschoben sind, nach erfolgter Messung zu einer Meßfläche zusammengefaßt werden, dadurch gekennzeichnet, daß über einen software-Befehl die Verfahrsteuerung zum Starten der Verf hrbewegung veranlaßt wird, in diskreten und konstanten Ortsabstanden von dem verfahrenden Element positionsgebende Trigger- Impulse zur ortsbezogenen Auslesung des Sensors abgenommen werden, aus den so gewonnenen Grundsignalen mittels elektronischer Datenverarbeitung abgeleitete ihrerseits ortsbezogene Signale erzeugt werden, die zur Triggerung der Meßwertaufnahme des Sensors dienen und die erhaltenen Meßwerte gespeichert und dann asynchron zum Controller übertragen werden.
1. A method for measuring, in particular for measuring surface topologies in microscopic resolution, in which a measuring sensor and a sample to be detected are moved relative to one another in the xy direction, the moving movement being controlled by means of a controller which records the measured values of the sensor , whereby after the start of the sensor and the traversing movement, the sensor is read out at defined intervals and individual detected profiles, which are displaced from each other in a dimension perpendicular to the profile direction, are combined into a measuring surface after the measurement, characterized in that a software Command the process control is caused to start the movement, positional trigger pulses for location-based reading of the sensor are taken from the moving element in discrete and constant spatial distances from the basic signals thus obtained by means of electronic data processing ng derived, in turn, location-related signals are generated which are used to trigger the measured value recording of the sensor and the measured values obtained are stored and then transmitted asynchronously to the controller.
2. Vorrichtung zur Durchführung des Verfahrens nach Anspruch 1 mit einem oberhalb einer Probenoberfläche angeordneten Abstands-Sensor und einem Probenträger, die relativ zueinander in x-y-Richtung motorisch verfahrbar sind, einer Steuerung für die Verfahrbewegung und einem Controller, der einerεeits mit dem Sensor zur Aufnahme der Sensor-Meßwerte und andererseits mit der Steuerung für die Verfahrbewegung verbunden ist, dadurch gekennzeichnet, daß an dem verfahrbaren Element (1,3) ein Positionsgeber vorgesehen ist, dessen Signale mittels eines dem Sensor (1) vorgeschalteten und der Verfahrenssteuerung (2) nachgeschalteten Interfaces in ortsbezogene abgeleitete Trigger-Signale zur Triggerung der Meßwertaufnahme deε Sensors (1) umgewandelt werden und daß die richtungsabhängigen Ortsinkremente in einem Speicher summiert werden, wobei die Richtungserkennung mittels einer Programmierlogik erfolgt.2. Device for carrying out the method according to claim 1 with a distance sensor arranged above a sample surface and a sample holder, which can be moved relative to one another in the xy direction by a motor, a controller for the movement and a controller, on the one hand, with the sensor for recording the sensor measured values and, on the other hand, is connected to the control for the travel movement, characterized in that a position transmitter is provided on the movable element (1, 3), the signals of which are connected upstream of the sensor (1) and downstream of the process control (2) Interfaces are converted into location-based derived trigger signals for triggering the measured value recording of the sensor (1) and that the direction-dependent location increments are summed in a memory, the direction detection being carried out by means of programming logic.
3. Vorrichtung nach Anspruch 2 , dadurch gekennzeichnet, daß die Probe auf einem in x-y-Richtung verfahrbaren Tisch3. Apparatus according to claim 2, characterized in that the sample on a table movable in the x-y direction
(3) angeordnet ist.(3) is arranged.
4. Vorrichtung nach Anspruch 2 , dadurch gekennzeichnet , daß der Sensor (1) in x-y-Richtung verfahrbar ist.4. The device according to claim 2, characterized in that the sensor (1) is movable in the x-y direction.
5. Vorrichtung nach einem der Ansprüche 2 bis 4, dadurch gekennzeichnet, daß zur Abnahme der positionsgebenden Trigger- Impulse am verfahrbaren Element (1,3) ein inkrementeller Winkel-Encoder vorgesehen ist, der an der Achse des Motors angebracht ist, in deεsen Richtung die Verfahrrichtung des Meßprofils fällt.
5. Device according to one of claims 2 to 4, characterized in that an incremental angle encoder which is attached to the axis of the motor is provided in deεsen direction for taking the position-giving trigger pulses on the movable element (1,3) the direction of travel of the measuring profile falls.
6. Vorrichtung nach einem der Ansprüche 2 bis 4, dadurch gekennzeichnet, daß zur Abnahme der positionsgebenden Trigger- Impulse am verfahrbaren Element (1,3) selbεt ein inkrementeller oder absolut meεεender Poεitionεgeber angebracht ist.6. Device according to one of claims 2 to 4, characterized in that an incremental or absolutely measuring transmitter position sensor is attached to the movable element (1, 3) to take the position-giving trigger pulses.
7. Vorrichtung nach Anspruch 6, dadurch gekennzeichnet, daß der Positionsgeber ein Glasmaßstab ist.7. The device according to claim 6, characterized in that the position transmitter is a glass scale.
8. Vorrichtung nach einem der Ansprüche 2 bis 7, dadurch gekennzeichnet, daß das zur Ableitung der Grundsignale vorgesehene Interface (8) einen programmierbaren und speichernden Mikrocontroller aufweist.8. Device according to one of claims 2 to 7, characterized in that the interface (8) provided for deriving the basic signals has a programmable and storing microcontroller.
9. Vorrichtung nach Anspruch 8 , dadurch gekennzeichnet, daß der Mikrocontroller Bestandteil der Verfahrsteuerung (2) ist.9. The device according to claim 8, characterized in that the microcontroller is part of the travel control (2).
10. Vorrichtung nach einem der Ansprüche 2 bis 9, dadurch gekennzeichnet, daß der Controller (4) ein PC ist.10. Device according to one of claims 2 to 9, characterized in that the controller (4) is a PC.
11. Vorrichtung nach einem der Ansprüche 2 bis 10, dadurch gekennzeichnet, daß der Sensor (1) ein optisch arbeitender Sensor ist.11. Device according to one of claims 2 to 10, characterized in that the sensor (1) is an optically working sensor.
12. Vorrichtung nach Anspruch 11, dadurch gekennzeichnet, daß der Sensor (1) ein Laserfleck-Sensor ist.
12. The apparatus according to claim 11, characterized in that the sensor (1) is a laser spot sensor.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10001800 | 2000-01-18 | ||
DE10001800A DE10001800C2 (en) | 2000-01-18 | 2000-01-18 | Method and device for measuring, in particular, surface topologies in microscopic resolution |
PCT/DE2001/000089 WO2001053775A1 (en) | 2000-01-18 | 2001-01-11 | Scanning using position transmission for triggering the recording of measured values |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1169616A1 true EP1169616A1 (en) | 2002-01-09 |
Family
ID=7627812
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01909453A Withdrawn EP1169616A1 (en) | 2000-01-18 | 2001-01-11 | Scanning using position transmission for triggering the recording of measured values |
Country Status (5)
Country | Link |
---|---|
US (1) | US6853459B2 (en) |
EP (1) | EP1169616A1 (en) |
JP (1) | JP2003520950A (en) |
DE (1) | DE10001800C2 (en) |
WO (1) | WO2001053775A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7167615B1 (en) | 1999-11-05 | 2007-01-23 | Board Of Regents, The University Of Texas System | Resonant waveguide-grating filters and sensors and methods for making and using same |
DE602006009202D1 (en) | 2005-11-08 | 2009-10-29 | Mitutoyo Corp | form measuring instrument |
CN102538651B (en) * | 2011-12-30 | 2014-04-30 | 中国航天科技集团公司第六研究院第十一研究所 | Displacement sensor width measuring method achieved by adopting finite state machine |
ES2857587T3 (en) * | 2017-02-27 | 2021-09-29 | Kulzer & Co Gmbh | Gyro Sensor 3D Scanner |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4705395A (en) * | 1984-10-03 | 1987-11-10 | Diffracto Ltd. | Triangulation data integrity |
DK0404597T3 (en) | 1989-06-23 | 1997-01-06 | Rank Taylor Hobson Ltd | Metrological apparatus and method for calibrating the same |
US5382806A (en) * | 1991-05-07 | 1995-01-17 | Kensington Laboratories, Inc. | Specimen carrier platform and scanning assembly |
CA2112792A1 (en) | 1993-01-29 | 1994-07-30 | Donald F. Rogowski | Paper surface roughness analyzer |
DE4315745A1 (en) | 1993-05-11 | 1994-11-17 | Ba Be D Gmbh | Method for determining the surface quality of a test specimen (test piece) |
JPH07120250A (en) * | 1993-10-25 | 1995-05-12 | Olympus Optical Co Ltd | Scanning probe microscope |
DE4429416A1 (en) * | 1994-08-19 | 1996-02-22 | Velzel Christiaan H F | Method and interference microscope for microscoping an object to achieve a resolution beyond the diffraction limit (super resolution) |
US5557156A (en) * | 1994-12-02 | 1996-09-17 | Digital Instruments, Inc. | Scan control for scanning probe microscopes |
US5729015A (en) * | 1995-01-30 | 1998-03-17 | Olympus Optical Co., Ltd. | Position control system for scanning probe microscope |
GB2310557B (en) * | 1996-02-21 | 2000-05-10 | Rank Taylor Hobson Ltd | Image processing apparatus |
US5965896A (en) * | 1997-02-26 | 1999-10-12 | Marton & Associates, Inc. | Apparatus and method for scratch wear testing of thin films |
US6034803A (en) * | 1997-04-30 | 2000-03-07 | K2 T, Inc. | Method and apparatus for directing energy based range detection sensor |
DE19727123A1 (en) | 1997-06-26 | 1999-01-07 | Om Engineering Gmbh | Device for contactless measurement of surface, especially human skin or skin replica |
DE19821372A1 (en) * | 1998-05-13 | 1999-11-18 | Zeiss Carl Fa | Coordinate measuring appliance including movable scanner and mechanism with drives across which scanner travels to scan workpiece and with control unit and memory |
US6459823B2 (en) * | 1998-10-28 | 2002-10-01 | Hewlett-Packard Company | Apparatus and method of increasing scanner resolution |
JP4034906B2 (en) * | 1999-04-27 | 2008-01-16 | 株式会社ミツトヨ | Surface texture measuring machine |
-
2000
- 2000-01-18 DE DE10001800A patent/DE10001800C2/en not_active Expired - Lifetime
-
2001
- 2001-01-11 EP EP01909453A patent/EP1169616A1/en not_active Withdrawn
- 2001-01-11 WO PCT/DE2001/000089 patent/WO2001053775A1/en not_active Application Discontinuation
- 2001-01-11 US US09/936,827 patent/US6853459B2/en not_active Expired - Fee Related
- 2001-01-11 JP JP2001554016A patent/JP2003520950A/en active Pending
Non-Patent Citations (1)
Title |
---|
See references of WO0153775A1 * |
Also Published As
Publication number | Publication date |
---|---|
DE10001800A1 (en) | 2001-08-02 |
DE10001800C2 (en) | 2002-07-18 |
US20020135782A1 (en) | 2002-09-26 |
JP2003520950A (en) | 2003-07-08 |
WO2001053775A1 (en) | 2001-07-26 |
US6853459B2 (en) | 2005-02-08 |
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