EP1153000B1 - Procede de fabrication d'un bol en materiau composite thermostructural, notamment pour une installation de production de silicium monocristallin - Google Patents
Procede de fabrication d'un bol en materiau composite thermostructural, notamment pour une installation de production de silicium monocristallin Download PDFInfo
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- EP1153000B1 EP1153000B1 EP00985317A EP00985317A EP1153000B1 EP 1153000 B1 EP1153000 B1 EP 1153000B1 EP 00985317 A EP00985317 A EP 00985317A EP 00985317 A EP00985317 A EP 00985317A EP 1153000 B1 EP1153000 B1 EP 1153000B1
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- Prior art keywords
- bowl
- preform
- consolidated
- carbon
- composite material
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- D—TEXTILES; PAPER
- D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
- D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
- D04H3/00—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length
- D04H3/002—Inorganic yarns or filaments
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/71—Ceramic products containing macroscopic reinforcing agents
- C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
- C04B35/80—Fibres, filaments, whiskers, platelets, or the like
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/71—Ceramic products containing macroscopic reinforcing agents
- C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
- C04B35/80—Fibres, filaments, whiskers, platelets, or the like
- C04B35/83—Carbon fibres in a carbon matrix
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
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- D—TEXTILES; PAPER
- D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
- D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
- D04H13/00—Other non-woven fabrics
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- D—TEXTILES; PAPER
- D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
- D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
- D04H3/00—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length
- D04H3/02—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the method of forming fleeces or layers, e.g. reorientation of yarns or filaments
- D04H3/07—Non-woven fabrics formed wholly or mainly of yarns or like filamentary material of substantial length characterised by the method of forming fleeces or layers, e.g. reorientation of yarns or filaments otherwise than in a plane, e.g. in a tubular way
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/48—Organic compounds becoming part of a ceramic after heat treatment, e.g. carbonising phenol resins
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/52—Constituents or additives characterised by their shapes
- C04B2235/5208—Fibers
- C04B2235/5216—Inorganic
- C04B2235/524—Non-oxidic, e.g. borides, carbides, silicides or nitrides
- C04B2235/5248—Carbon, e.g. graphite
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/52—Constituents or additives characterised by their shapes
- C04B2235/5208—Fibers
- C04B2235/5252—Fibers having a specific pre-form
- C04B2235/5256—Two-dimensional, e.g. woven structures
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/602—Making the green bodies or pre-forms by moulding
- C04B2235/6028—Shaping around a core which is removed later
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/612—Machining
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/614—Gas infiltration of green bodies or pre-forms
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/616—Liquid infiltration of green bodies or pre-forms
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- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/94—Products characterised by their shape
Definitions
- the invention relates to the manufacture of bowls from material thermostructural composite.
- One field of application of the invention is more particularly the manufacture of bowls intended to receive crucibles containing molten metal, such as silicon.
- thermostructural composite material a material comprising a fibrous reinforcement of refractory fibers, for example made of carbon or ceramic fibers, densified by a matrix refractory, for example carbon or ceramic.
- the materials carbon / carbon composites (C / C) and matrix composite materials ceramics (CMC) are examples of composite materials Thermostructural.
- a well-known process for producing silicon monocrystalline intended more particularly for the manufacture of products semiconductor, consists of melting silicon in a crucible, bringing into contact with the liquid silicon bath a crystal germ having the desired crystal arrangement, to initiate solidification from silicon contained in the crucible, with the desired crystal arrangement, and at mechanically pull a monocrystalline silicon ingot out of the crucible thus obtained.
- This process is known as the process Czochralski, or "CZ" process.
- the crucible containing the molten silicon is usually made of quartz (SiO 2 ).
- the crucible is placed in a bowl which is generally made of graphite, it being noted that it has also been proposed to make it at least partially in C / C composite material.
- the bowl rests by its bottom on a support.
- the bottom of the bowl must be machined, in particular to form a centering surface and a support area.
- the requirements of very high purity imply using pure raw materials, non-polluting processes and purification processes in the final state or in an intermediate state of manufacture of the bowl.
- purification methods by treatment at high temperature (over 2000 ° C) under a neutral or reactive atmosphere (for example halogen) are known and commonly used.
- the manufacture of a part of composite material C / C or more usually made of thermostructural composite material includes usually making a fiber preform having a shape corresponding to that of the part to be produced and constituting the fibrous reinforcement of the composite material, and the densification of the preform by the matrix.
- filament winding consisting of winding wires on a mandrel having a shape corresponding to that of the preform to achieve
- layup consisting of superimposing layers or strata of two-dimensional fibrous texture on a shape adapted to the shape of the preform to be made, the superimposed layers possibly being linked between them by needling or by sewing, and again weaving or three-dimensional knitting.
- the densification of the preform can be carried out well known by liquid or gas.
- Densification by route liquid consists of impregnating the preform - or pre-impregnating the filaments or strata which constitute it - by a precursor of the matrix, for example a carbon or ceramic precursor resin, and transform the precursor by heat treatment.
- Densification by gas, or chemical vapor infiltration consists of placing the preform in an enclosure and to admit into the enclosure a phase gaseous matrix precursor. The conditions in particular of temperature and pressure are adjusted to allow phase gaseous to diffuse within the porosity of the preform and, on contact fibers, to form on them a deposit of the material constituting the matrix by decomposition of a constituent of the gas phase or reaction between several constituents.
- the object of the invention is to propose a manufacturing process a bowl in thermostructural composite material which allows overcome these difficulties, while remaining simple and economical.
- the preform can be produced by filament winding without excessive difficulty. It would be otherwise if a complete bowl preform was to be obtained by filament winding.
- the presence of an axial hole promotes the flow of the gas phase and thereby densification.
- a stiffened bowl preform is produced or consolidated, before densification by chemical phase infiltration steam.
- a consolidated bowl preform is produced by partial densification of a fibrous structure having the form desired, the partial densification being at least sufficient to give the preform an outfit allowing it to be manipulated.
- Densification partial can be carried out by liquid, with impregnation by a precursor of the material constituting the matrix of the composite material and transformation of the precursor by heat treatment, or by gas.
- the preform can be consolidated by impregnation with a carbon precursor, for example chosen from phenolic resins, furanics, epoxy and polyimides, and transformation of the precursor.
- a carbon precursor for example chosen from phenolic resins, furanics, epoxy and polyimides, and transformation of the precursor.
- the realization of the consolidated preform includes advantageously the realization of a winding by means of an impregnated wire by said precursor.
- Two consolidated preforms can be produced simultaneously on a mandrel having a shape corresponding to that of two bowl parts facing each other, by carrying out the filament winding on the mandrel, and by cutting the winding produced, in its middle part.
- the densification of the preform by chemical infiltration in vapor phase provides a carbon matrix which has the continuity necessary to avoid pollution of the installation of production of monocrystalline silicon by particles from fibers or a resin coke formed on the fibers to consolidate the preform.
- a carbon matrix obtained by chemical vapor infiltration also has better corrosion resistance in contact with the crucible high temperature quartz.
- the consolidated bowl preform is produced at from wire free of surface treatment, such as, for example, a controlled oxidation by electrochemical or other means.
- the wire is including a carbon wire.
- the absence of surface treatment generally provided on commercial wires to provide functions surface promoting bond with organic matrices, contributes to better dimensional stability by avoiding the appearance of constraints internal during the development of the composite material.
- the process includes a step consisting in carrying out a final phase chemical infiltration phase steam after plugging the passage through the plug, the latter being preferably in thermostructural composite material.
- the final step infiltration can include the formation of a matrix phase of different nature from that previously formed during the stages of consolidation of the bowl preform and subsequent densification. So, in the case of a preform densified with carbon, the final step infiltration can consist of depositing a ceramic matrix phase, for example in silicon carbide. Such an external matrix phase provides protection of the composite material against oxidation.
- the bowl is subjected to a treatment of purification and stabilization at high temperature, preferably at temperature above 2200 ° C.
- Purification can be carried out under chlorine atmosphere, as is well known for graphite. She allows to evacuate impurities likely to pollute the silicon in the when the bowl is used as a crucible support containing silicon to make monocrystalline silicon ingots.
- Such a purification treatment could be carried out at the stage of the consolidated bowl preform.
- the heat treatment then contributes in addition to avoid dimensional variations during the continuation of the manufacturing process. Since the shutter plug on the the bottom of the bowl will also have undergone a purification treatment, the purification after chemical vapor infiltration then may not be necessary.
- a protective coating may be formed at least from the inside of the bowl.
- a coating can be made of pyrolytic carbon, or pyrocarbon, obtained by chemical vapor deposition, or by ceramic, for example silicon carbide (SiC) also obtained by chemical vapor infiltration.
- SiC silicon carbide
- the field of application of the invention is more particularly the production of bowls in composite material thermostructural for the support of crucibles in production of monocrystalline silicon ingots.
- FIG. 1 very schematically shows such a bowl made of composite material, for example made of C / C composite material, which supports a crucible 5, generally made of quartz.
- the bowl 1 rests on an annular support formed by a ring 2 mounted at the end of a shaft 3, forming with it a recess 4.
- the bowl has a bottom part 1 a and a periphery part 1 b having a substantially cylindrical portion which is connected to the bottom part by a portion with a rounded profile.
- the bottom part of the bowl 1 is machined to form a centering surface corresponding to the step 4 and a bearing surface on the ring 2.
- the assembly After filling the crucible with silicon, the assembly is placed in an oven and the temperature in the oven is brought to a value sufficient to cause liquefaction of silicon. At this temperature, the crucible softens and follows the shape of the bowl. A germ showing the desired crystal arrangement is then brought into contact with the silicon then extracted slowly by forming a column between the germ and the bath. An ingot is thus pulled at low speed, up to a length that can be 1 to 2 m.
- thermostructural composite materials are suitable particularly for making bowls for this application.
- the invention also includes the production of bowls in CMC type composite materials, with fibrous reinforcement made of ceramic fibers (for example SiC fibers) and also ceramic matrix (for example also in SiC), the CMC development technologies are well known.
- the fibrous reinforcement is made from threads as available commercially but usually free of surface treatment intended to provide surface functions favoring the connection with an organic matrix when these threads are used to form composite fiber / resin materials not intended for applications at high temperatures.
- the absence of surface avoids internal stresses during the manufacturing the composite material with the method of the invention.
- a first step 10 of the method (FIG. 2) consists in providing a mandrel 12 (Figure 3A). This one has a shape corresponding to that of two parts of the perimeter of bowls to be made upside down. Has his axial ends, the mandrel is completed by rings 14 which have an annular recess 16 formed in their outer surface, on their outskirts.
- the mandrel 12 and the rings 14 are for example metallic.
- the assembly is mounted and axially immobilized on an axis 18 which passes through through central passages of the rings 14 and is connected to a motor rotational drive (not shown).
- a second step 20 of the method consists in carrying out a filament winding on the mandrel 12.
- the winding 22 is produced by means of a wire pre-impregnated with a liquid carbon precursor, for example a phenolic resin. At the axial ends of the mandrel, the winding extends until a partial winding of the rings 14 at the recesses 16. The winding is continued until reaching the desired thickness for the preforms corresponding to the parts of the edges of bowls located head to tail ( Figure 3B).
- the rings 14 facilitate the stopping of the filament winding at the axial ends of it.
- the rings 14 could be produced in one piece with the chuck 12. To avoid too large a winding thickness at the end zones of the mandrel where the diameter decreases relatively sharply, the winding may include several buns 24 ', 24 ", .... stepped on different diameters.
- the blank 26 formed by the winding 22, and supported by the mandrel 12 is placed in an oven to carry out the polymerization of the phenolic resin impregnating the winding wire (step 30 of the process).
- the blank 26 is cut radially in the middle to obtain two half-shells 28 which are removed from the mandrel 12 (FIG. 3C), each having an axial passage 32.
- Each half-shell 28 is then heat treated (step 50) to carbonize the phenolic resin and obtain a consolidated bowl preform comprising an axial passage 32 at the level of the background.
- the consolidation of the filament winding consists of a densification by the carbon matrix resulting from the transformation of the phenolic resin.
- a partially densified preform is obtained, that is to say having an accessible residual porosity, while having a sufficient hold to be handled.
- the purified bowl preform is placed in a enclosure to undergo a chemical densification stage in the steam (step 60 of the process). Densification is carried out to fill at least partially the residual porosity of the consolidated preform with pyrolytic carbon. This is obtained in a well known manner in itself from a gas phase containing a hydrocarbon, such as methane or natural gas, constituting the precursor of carbon.
- a hydrocarbon such as methane or natural gas
- bowl preforms can be densified simultaneously inside the same enclosure.
- the preforms are arranged one above the other, being axially aligned and providing intervals between them in which the gas phase can circulate.
- a chemical infiltration process in vapor phase with directed flow of the gas phase, as described in US Patent 5,904,957 can be used.
- Stage 60 of chemical vapor infiltration contributes not only to complete the densification of the preform, but also to form a continuous matrix with a controlled microstructure and able to block possible particles of carbon of the consolidation resin fibers or coke grains, so that possible pollution by these particles or grains during use of the bowl is avoided.
- the carbon matrix obtained by chemical phase infiltration steam also has better resistance to corrosion on contact of a high temperature quartz crucible.
- the next step 70 of the method consists in carrying out machining in the bottom part of the bowl in order to fix a stopper 34 therein to close the passage 32 (FIG. 3D).
- the plug 34 is made in two pieces 35, 37 for example of C / C composite material (step 80), having undergone if necessary a carbon purification step.
- the part 35 has a cup shape having a lip-shaped periphery 35 a resting on the rim of the passage 32, on the inside of the bowl while the part 37, also in the shape of a cup, has a rim 37 a pressing on the edge of passage 32 on the outside.
- connection between the parts 35 and 37 can be carried out by screwing, the part 35 having a projecting central part which is screwed into a housing of the part 37.
- the parts 35 and 37 enclose the flange 32 a of the opening 32.
- the parts 35 and 37 constituting the 34 of composite material C / C can be produced by any known method. For example, preforms are formed by superimposing two-dimensional layers in the form of carbon fiber discs. The layers, for example of fabric, are linked together by needling or by sewing. Densification by a carbon matrix is then carried out by a liquid route or by chemical vapor infiltration.
- step 90 After mounting the plug 34 (step 90), a new step final 100 of densification of a final phase of carbon matrix obtained by chemical vapor infiltration can be carried out so to perfect the assembly of the plug 34 with the bottom part of the preform 28 and complete the densification of the latter.
- a 36 in bowl composite material C / C is then obtained ready to be used, possibly after final finishing machining of the bottom part and cap 34.
- the next step 110 of the method consists in carrying out a purification of the carbon from the bowl obtained when, for the application envisaged, the bowl to be produced must be free of impurities. It's like that for monocrystalline silicon drawing installations intended for manufacture of semiconductor products, silicon to be initially not contaminated with impurities.
- Carbon purification can be obtained by heat treatment at a temperature included preferably between 2200 ° C and 3000 ° C, for example equal to approximately 2400 ° C, under a non-oxidizing atmosphere, for example under a chlorine atmosphere, and at a pressure preferably below 100 kPa, for example equal to around 10 kPa. Such heat treatment under chlorine is well known per se for the purification of graphite.
- This heat treatment also achieves dimensional stabilization of the consolidated bowl preform.
- the purification could be performed at the consolidated bowl preform stage, after step 50.
- the step final purification after chemical vapor infiltration, may be omitted.
- the bowl is intended to receive a quartz crucible
- the crucible is in fact brought to a temperature of approximately 1600 ° C. at which the quartz softens, flows by marrying the shape of a support bowl, and tends to be reactive.
- the coating protection can be pyrolytic carbon, or pyrocarbon, obtained by chemical vapor deposition, or ceramic, for example silicon carbide (SiC), also obtained by phase infiltration steam.
- SiC silicon carbide
- an SiC deposit can be obtained by chemical vapor deposition from a gas phase containing a SiC precursor such as MTS (methyltrichlorosilane).
- the protective coating can be formed in continuity of the final densification step 100, before the final heat treatment possible purification.
- bowl protection can be achieved by interposing an intermediate layer between the bowl and the crucible bowl shape, for example a composite protective layer thermostructural such as a C / C composite obtained by densification of a fibrous preform formed from carbon felt or strata two-dimensional carbon fibers.
- a composite protective layer thermostructural such as a C / C composite obtained by densification of a fibrous preform formed from carbon felt or strata two-dimensional carbon fibers.
- Figure 1 shows such a protective layer 6 filling the inner face of the bowl 1.
- This protective layer is consumable, a re-filling of the bowl being carried out periodically.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Textile Engineering (AREA)
- Metallurgy (AREA)
- Crystallography & Structural Chemistry (AREA)
- Composite Materials (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
- réaliser par bobinage filamentaire une préforme de bol présentant un passage axial au niveau du fond,
- densifier la préforme de bol par infiltration chimique en phase vapeur, et
- obturer le passage par un bouchon.
- la figure 1 est une demi-vue en coupe très schématique montrant un bol en matériau composite utilisé comme support de creuset dans une installation de production de lingots de silicium ;
- la figure 2 est un diagramme montrant des étapes successives d'un premier mode de mise en oeuvre d'un procédé conforme à l'invention ; et
- les figures 3A à 3D sont des demi-vues en coupe qui montrent les étapes successives de réalisation d'un bol en matériau composite selon le procédé de la figure 2.
Claims (23)
- Procédé de fabrication d'un bol en matériau composite thermostructural formé d'un renfort fibreux densifié par une matrice, caractérisé en ce qu'il comprend les étapes qui consistent à :réaliser par bobinage filamentaire une préforme de bol (28) présentant un passage axial (32) au niveau du fond,densifier la préforme de bol par infiltration chimique en phase vapeur, etobturer le passage par un bouchon (34).
- Procédé selon la revendication 1, caractérisé en ce que l'on réalise une préforme de bol consolidée avant infiltration chimique en phase vapeur.
- Procédé selon l'une quelconque des revendications 1 et 2, caractérisé en ce que la préforme de bol (28) consolidée est réalisée par bobinage d'un fil imprégné par un précurseur dudit matériau constitutif de la matrice et transformation du précurseur par traitement thermique.
- Procédé selon la revendication 3, caractérisé en ce que la préforme de bol (28) consolidée est réalisée par bobinage d'un fil imprégné par un précurseur de carbone et transformation du précurseur.
- Procédé selon la revendication 4, caractérisé en ce que le précurseur de carbone est choisi parmi les résines phénoliques, furaniques, époxy et polyimides.
- Procédé selon l'une quelconque des revendications 3, 4 et 5, caractérisé en ce que l'on réalise simultanément deux préformes consolidées, en réalisant le bobinage sur un mandrin (12) ayant une forme correspondant à celle de deux parties de pourtour de bol tête-bêche, et en tronçonnant le bobinage réalisé (22), dans sa partie médiane.
- Procédé selon l'une quelconque des revendications 1 à 6, caractérisé en ce que la préforme de bol est réalisée à partir de fil exempt de traitement de surface apportant des fonctions de surface.
- Procédé selon l'une quelconque des revendications 1 à 7, caractérisé en ce que la préforme de bol est réalisée à partir de fil en carbone.
- Procédé selon l'une quelconque des revendications 1 à 8, caractérisé en ce que le bol est soumis à un traitement de purification et stabilisation à haute température.
- Procédé selon l'une quelconque des revendications 1 à 8, caractérisé en ce qu'un traitement de purification et stabilisation à haute température est réalisé à un stade de préforme de bol consolidée.
- Procédé selon l'une quelconque des revendications 9 et 10, caractérisé en ce que le traitement de purification et stabilisation est réalisé à une température supérieure à 2200°C.
- Procédé selon l'une quelconque des revendications 1 à 11, caractérisé en ce que la densification de la préforme de bol est réalisée par formation d'une matrice en carbone.
- Procédé selon l'une quelconque des revendications 1 à 12, caractérisé en ce que le bouchon (34) est réalisé en deux parties (35,37) assemblées l'une à l'autre en enserrant le rebord du passage axial de la préforme.
- Procédé selon l'une quelconque des revendications 1 à 13, caractérisé en ce que le passage (32) est obturé par un bouchon (34) en matériau composite thermostructural.
- Procédé selon l'une quelconque des revendications 1 à 14, caractérisé en ce qu'il comporte une étape consistant à réaliser une étape finale d'infiltration chimique en phase vapeur après obturation du passage (32) par le bouchon (34).
- Procédé selon la revendication 15, caractérisé en ce que l'étape finale d'infiltration chimique en phase vapeur comprend la formation d'une phase de matrice céramique.
- Procédé selon la revendication 16, caractérisé en ce que la phase de matrice céramique est en carbure de silicium.
- Procédé selon l'une quelconque des revendications 1 à 17, caractérisé en ce que l'on forme un revêtement de protection au moins sur la face intérieure du bol.
- Procédé selon la revendication 18, caractérisé en ce que l'on forme un revêtement de protection en pyrocarbone.
- Procédé selon la revendication 18, caractérisé en ce que l'on forme un revêtement de protection en carbure de silicium.
- Procédé selon l'une quelconque des revendications 1 à 20, caractérisé en ce que l'on munit la face intérieure du bol d'une couche de protection.
- Procédé selon la revendication 21, caractérisé en ce que la couche de protection est en matériau composite thermostructural.
- Procédé selon la revendication 22, caractérisé en ce que plusieurs préformes de bol consolidées sont densifiées simultanément par infiltration chimique en phase vapeur.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9914766 | 1999-11-24 | ||
FR9914766A FR2801304B1 (fr) | 1999-11-24 | 1999-11-24 | Procede de fabrication d'un bol en materiau composite thermostructural, notamment pour une installation de production de silicium monocristallin |
PCT/FR2000/003275 WO2001038255A1 (fr) | 1999-11-24 | 2000-11-24 | Procede de fabrication d'un bol en materiau composite thermostructural, notamment pour une installation de production de silicium monocristallin |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1153000A1 EP1153000A1 (fr) | 2001-11-14 |
EP1153000B1 true EP1153000B1 (fr) | 2003-10-22 |
Family
ID=9552472
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00985317A Expired - Lifetime EP1153000B1 (fr) | 1999-11-24 | 2000-11-24 | Procede de fabrication d'un bol en materiau composite thermostructural, notamment pour une installation de production de silicium monocristallin |
Country Status (7)
Country | Link |
---|---|
US (1) | US6783621B1 (fr) |
EP (1) | EP1153000B1 (fr) |
JP (1) | JP2003514759A (fr) |
KR (1) | KR100694913B1 (fr) |
DE (1) | DE60006072T2 (fr) |
FR (1) | FR2801304B1 (fr) |
WO (1) | WO2001038255A1 (fr) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2818291B1 (fr) * | 2000-12-19 | 2003-11-07 | Snecma Moteurs | Densification de substrats poreux creux par infiltration chimique en phase vapeur |
DE10321785A1 (de) * | 2003-05-14 | 2004-12-16 | Sgl Carbon Ag | Dauerhafter CFC-Stütztiegel für Hochtemperaturprozesse beim Ziehen von Halbleiterkristallen |
JP5415945B2 (ja) | 2006-07-11 | 2014-02-12 | ローディア インコーポレイティド | 固体表面上に特有の性質を付与する且つ無機固体粒子及びコポリマーを含む複合コアセルベートの水性分散液 |
WO2009137097A1 (fr) * | 2008-05-09 | 2009-11-12 | Rhodia Inc. | Nanoparticules hybrides |
TW201019480A (en) * | 2008-08-27 | 2010-05-16 | Bp Corp North America Inc | High temperature support apparatus and method of use for casting materials |
BR112013017815B1 (pt) | 2011-01-12 | 2020-05-12 | Compagnie Chomarat | Estruturas de compósito laminado e métodos para fabricar e usar as mesmas |
SG10201709699RA (en) * | 2013-05-23 | 2017-12-28 | Applied Materials Inc | A coated liner assembly for a semiconductor processing chamber |
JP6042273B2 (ja) * | 2013-06-26 | 2016-12-14 | 東洋炭素株式会社 | SiC被膜形成C/Cコンポジットの使用方法 |
JP6614380B1 (ja) * | 2019-03-20 | 2019-12-04 | 信越半導体株式会社 | 単結晶製造装置 |
CN112778012A (zh) * | 2021-01-08 | 2021-05-11 | 中国科学院上海应用物理研究所 | 一种高温熔盐管道的制备方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59102880A (ja) * | 1982-12-02 | 1984-06-14 | 東レ株式会社 | 高温耐熱性材料 |
JPH0343250Y2 (fr) * | 1986-06-27 | 1991-09-10 | ||
EP0630875B1 (fr) * | 1988-04-28 | 1999-08-04 | Mitsubishi Jukogyo Kabushiki Kaisha | Matériaux composites en carbone renforcés par des fibres de carbone, procédé de leur fabrication et murs interieurs des réacteurs de fusion nucléaire les utilisant |
SU1699755A1 (ru) * | 1989-06-08 | 1991-12-23 | Предприятие П/Я В-2859 | Способ заглушки отверстий крупногабаритных графитовых тиглей |
JPH05508885A (ja) * | 1990-06-29 | 1993-12-09 | フレックスリン サービシズ リミテッド | 強化複合材の製造方法及びこの方法に用いるためのフィラメント材料 |
US5482257A (en) * | 1992-09-25 | 1996-01-09 | Martin Marietta Energy Systems, Inc. | Non-graphite crucible for high temperature applications |
US5858486A (en) * | 1995-02-27 | 1999-01-12 | Sgl Carbon Composites, Inc. | High purity carbon/carbon composite useful as a crucible susceptor |
FR2733254B1 (fr) * | 1995-04-18 | 1997-07-18 | Europ Propulsion | Procede d'infiltration chimique en phase vapeur pour la densification de substrats poreux disposes en piles annulaires |
KR20000022158A (ko) * | 1996-06-27 | 2000-04-25 | 도요탄소 가부시키가이샤 | 단결정 인상용 도가니 및 그 제조방법 |
JP3116005B2 (ja) * | 1996-11-26 | 2000-12-11 | 日本カーボン株式会社 | 半導体単結晶引上げ用c/c製ルツボの製法 |
JPH10167878A (ja) * | 1996-12-05 | 1998-06-23 | Toyo Tanso Kk | 単結晶引き上げ用ルツボ |
JPH10330185A (ja) * | 1997-05-28 | 1998-12-15 | Toyo Tanso Kk | 単結晶引き上げ用ルツボ及びその製造方法 |
DE19747090A1 (de) * | 1997-10-24 | 1999-04-29 | Leybold Systems Gmbh | Staubabscheider |
US5928448A (en) * | 1997-11-01 | 1999-07-27 | Northrop Grumman Corporation | Dowel adhesive method for repair of ceramic matrix composites |
JPH11255586A (ja) * | 1998-03-12 | 1999-09-21 | Sumitomo Metal Ind Ltd | 単結晶引き上げ用炭素繊維強化炭素材るつぼおよびその製造方法 |
JP4514846B2 (ja) * | 1999-02-24 | 2010-07-28 | 東洋炭素株式会社 | 高純度炭素繊維強化炭素複合材料とその製造方法 |
-
1999
- 1999-11-24 FR FR9914766A patent/FR2801304B1/fr not_active Expired - Fee Related
-
2000
- 2000-11-24 JP JP2001539815A patent/JP2003514759A/ja not_active Ceased
- 2000-11-24 US US09/889,860 patent/US6783621B1/en not_active Expired - Fee Related
- 2000-11-24 WO PCT/FR2000/003275 patent/WO2001038255A1/fr active IP Right Grant
- 2000-11-24 KR KR1020017008038A patent/KR100694913B1/ko not_active IP Right Cessation
- 2000-11-24 DE DE60006072T patent/DE60006072T2/de not_active Expired - Lifetime
- 2000-11-24 EP EP00985317A patent/EP1153000B1/fr not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO2001038255A1 (fr) | 2001-05-31 |
FR2801304A1 (fr) | 2001-05-25 |
KR20010089693A (ko) | 2001-10-08 |
DE60006072T2 (de) | 2004-07-08 |
KR100694913B1 (ko) | 2007-03-14 |
JP2003514759A (ja) | 2003-04-22 |
US6783621B1 (en) | 2004-08-31 |
DE60006072D1 (de) | 2003-11-27 |
EP1153000A1 (fr) | 2001-11-14 |
FR2801304B1 (fr) | 2002-02-15 |
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