EP1150016A1 - Cooling system for vacuum pump and method for its realisation - Google Patents

Cooling system for vacuum pump and method for its realisation Download PDF

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Publication number
EP1150016A1
EP1150016A1 EP01420076A EP01420076A EP1150016A1 EP 1150016 A1 EP1150016 A1 EP 1150016A1 EP 01420076 A EP01420076 A EP 01420076A EP 01420076 A EP01420076 A EP 01420076A EP 1150016 A1 EP1150016 A1 EP 1150016A1
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EP
European Patent Office
Prior art keywords
tube
vacuum pump
pump body
cooling system
expansion
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
EP01420076A
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German (de)
French (fr)
Inventor
Francois Houze
Francois Besson
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Alcatel Lucent SAS
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Alcatel CIT SA
Alcatel SA
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Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Publication of EP1150016A1 publication Critical patent/EP1150016A1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49229—Prime mover or fluid pump making
    • Y10T29/49236—Fluid pump or compressor making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49803—Magnetically shaping

Definitions

  • the present invention relates to vacuum pumps, especially the primary vacuum pumps used in the semiconductor to lower the pressure in the chambers processes from the atmosphere.
  • the body temperature of a vacuum pump must be controlled, on the one hand to avoid seizures due to thermal expansions, on the other hand to keep the gases pumped at appropriate temperatures avoiding their transformation under solid deposits in the pump.
  • the vacuum pumps operate in a controlled clean room environment, in which cooling systems cannot use a air circulation.
  • the temperature control of the pump body must be carried out by circulation of a cooling.
  • the temperature of a pump body at vacuum is relatively high, so there is a risk significant corrosion of the cooling system walls the pump by the coolant, and a risk of deposition of material on the walls of the cooling circuit.
  • a current solution for cooling a pump vacuum is to use an anticorrosive coating in the cooling system.
  • This anticorrosion coating by example of polytetrafluoroethylene type, is deposited on the parts pump body statics so as to isolate the liquid from cooling such as deionized water relative to materials constituting the body of the vacuum pump.
  • One drawback is that such anticorrosion coating is generally made of insulating material which reduces heat exchange and the ability to circuit cooling.
  • Another disadvantage is the risk of local defects in continuity of any coating by deposit of matter. As a result, reliability and efficiency are not satisfactory.
  • the invention aims to design a new structure for vacuum pump cooling system, and a method for its realization, ensuring both good conduction between the coolant and the pump body vacuum, further reducing the risk of corrosion by the liquid cooling, and reduce production costs.
  • the invention must make it possible to use suitable materials which are suitable for both coolant and materials forming the vacuum pump body, and to avoid any overheating likely to degrade the anticorrosion properties materials used.
  • the invention also aims to facilitate subsequent change anticorrosive materials, which change may be necessary depending on the conditions of use.
  • the idea which is the basis of the present invention consists to use the expansion technique to apply it in a way new to the realization of an anticorrosion wall in a circuit vacuum pump body cooling.
  • the invention provides a system of vacuum pump cooling including a circuit cooling in which a coolant circulates in the vacuum pump body and is isolated from the constituent material the vacuum pump body by at least one layer of material anticorrosion preventing corrosion of the vacuum pump body by the cooling liquid ; said layer of anticorrosion material includes at least one tube of corrosion resistant material and good thermal conductor, expanded in corresponding housing of the vacuum pump body.
  • the vacuum pump body is made of cast iron.
  • the tube can then advantageously be produced in stainless steel.
  • the coolant can be water deionized. The expansion is carried out cold, and thus avoids the degradation of stainless steel when assembling the tube in the vacuum pump body, which degradation could occur if the tube was adapted by heat treatment or by overmolding.
  • tubes made of a metal or alloy such as copper, the monel, the inconel.
  • the expansion allows the use of these materials, without degrading their anti-corrosion properties.
  • the interface between the tube and the pump body vacuum can advantageously be smooth.
  • the interface between the tube and the body of vacuum pump can be rough.
  • the material forming the tube is expanded over the entire length of the pump housing which receives it.
  • the invention also provides a method of making of such a vacuum pump cooling system, comprising a expansion step carrying out the radial expansion of the tube beyond of its elastic limit in the corresponding housing of the body of vacuum pump, applying pressure inside the tube appropriate.
  • Appropriate pressure can be applied by a sleeve expandable powered by pressurized hydraulic fluid.
  • the appropriate pressure can be applied by a mechanical expansion tool.
  • a vacuum pump comprises a vacuum pump body 1, for example in cast iron, in which pumping chambers 2 and 3 are produced receiving a rotor driven by a shaft such as shafts 4 and 5.
  • the end parts of the vacuum pump body 1 may consist of added housings, containing rolling bearings and gears for the support and the mechanical drive of shafts 4 and 5, all bathed in oil.
  • the control of the vacuum pump temperature is provided by a cooling circuit in which a liquid cooling circulates while being isolated from the constituent material the vacuum pump body 1.
  • the pump body is produced in vacuum 1 of the through bores such as bores 6 and 7, arranged in areas suitable for cooling the body vacuum pump 1, especially in the end parts of the vacuum pump 1.
  • Each bore 6 or 7 constitutes a housing in which is adapted a tube 8 or 9 of material resistant to corrosion by coolant flowing through the bore central 10 or 11 respectively of tube 8 or 9.
  • Tube 8 or 9 is expanded in the housing or bore corresponding 6 or 7.
  • the tube 8 or 9 is cylindrical in revolution and passes through the body of vacuum pump 1 along a substantially straight path. This arrangement allows, for assembly, a deformation of the tube 8 or 9 by mechanical expansion.
  • the material forming the tube 8 or 9 is preferably expanded over the entire length of the bore or housing corresponding 6 or 7 of the vacuum pump body 1. This optimizes mechanical contact between tube 8 or 9 and the pump body vacuum 1, and therefore the heat transmission between the liquid cooling and the vacuum pump body 1.
  • the material forming the tube 8 or 9 is deformed in radial expansion by the expansion into the tube transition zones which protrude on either side of the corresponding bore or housing 6 or 7 of the vacuum pump body 1.
  • this expansion produces and lets subsist, in the outlet zones of the tubes 8 and 9, the collars 12 to 15 end or larger tube diameter areas, from end faces 16 and 17 of the vacuum pump body.
  • the pump body vacuum 1 is made of cast steel, and tube 8 or 9 is made of steel stainless.
  • the coolant can then be water deionized, in particular.
  • the vacuum pump body 1 can be in cast iron, and the tube 8 or 9 can be of a metal or alloy such as copper, monel, inconel, in particular.
  • the tube 8 or 9 is made of a material unassailable by coolant.
  • the interface between the tube 8 or 9 and the vacuum pump body 1 is smooth.
  • bore 6 or 7 is conformed to a state of smooth surface, so the interface will remain smooth after assembly of the tube 8 or 9 in the vacuum pump body 1.
  • the tube 8 Before expansion, in FIG. 2, the tube 8 has a outer diameter less than the diameter of the bore 6 of the body of vacuum pump 1, and the surface condition of the peripheral face 18 of bore 6 has the appropriate structure suitable for metal forming the tube 8.
  • FIG. 4 a mechanical expansion tool that can be used for the implementation of the present invention.
  • the part essential of the expansion tool is a sleeve 19 in which are distributed several peripheral rollers such as rollers 20 and 21, coaxial with the general axis of the tool and mounted rotating in the sleeve 19, partially projecting from its periphery.
  • the rollers 20 and 21 are biased radially towards the outside by a conical axial rod 22 which can be moved axially in the sleeve 19 while being maneuvered from the end 23 of the tool.
  • a support ring 24 can be moved relative to the sleeve 19, by screwing on a threaded part 25 of the tool.
  • the tool In use, the tool is engaged inside the bore of a tube such as tube 8, and is rotated axial. During this rotation, by simultaneous pulling of the rod conical axial 22, the rollers 20 and 21 are moved apart radially which gradually flow the material constituting the tube 8, causing its expansion by deformation beyond the capacities elastic deformation of the material.
  • the tool thus formed as illustrated in Figure 4 can ensure the expansion of a section of limited length of a tube. So, to carry out the expansion on the entire length of a tube 8 as illustrated in FIG. 1, the appropriate pressure is applied inside the tube 8 by the expansion tool in succession along several sections tubes 8 distributed longitudinally, until deformation of tube 8 along its entire length.
  • the expansion described above is a expansion mechanical.
  • the appropriate pressure is applied by an expandable sleeve supplied by a hydraulic fluid under pressure.
  • the invention allows for a mechanical connection effective cold tubes of inert material inside a vacuum pump body 1, without altering the anti-corrosion properties of the material forming the tube, and ensuring excellent thermal conduction between the tube and the vacuum pump body 1.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressor (AREA)

Abstract

Selon l'invention, le système de refroidissement de pompe à vide comprend des tubes (8, 9) dudgeonnés selon toute leur longueur dans des alésages (6, 7) traversants du corps de pompe à vide (1). Les tubes (8, 9) peuvent être en acier inoxydable, engagés dans un corps de pompe à vide (1) en fonte. On évite ainsi tout risque de corrosion du corps de pompe à vide (1) par un liquide de refroidissement traversant les tubes (8, 9) pour refroidir le corps de pompe à vide (1). <IMAGE>According to the invention, the vacuum pump cooling system comprises tubes (8, 9) expanded along their entire length in bores (6, 7) passing through the vacuum pump body (1). The tubes (8, 9) can be made of stainless steel, engaged in a cast iron vacuum pump body (1). This avoids any risk of corrosion of the vacuum pump body (1) by a coolant passing through the tubes (8, 9) to cool the vacuum pump body (1). <IMAGE>

Description

La présente invention concerne les pompes à vide, notamment les pompes à vide primaires utilisées dans l'industrie du semi-conducteur pour abaisser la pression dans les chambres de procédés à partir de l'atmosphère.The present invention relates to vacuum pumps, especially the primary vacuum pumps used in the semiconductor to lower the pressure in the chambers processes from the atmosphere.

Ces pompes à vide doivent résister à des agressions multiples, résultant notamment du fait que les gaz pompés hors de la chambre de procédés sont très corrosifs et imposent l'utilisation de matériaux particuliers pour réaliser le corps de pompe à vide.These vacuum pumps must resist attack multiple, resulting in particular from the fact that the gases pumped out of the process chamber are very corrosive and impose the use of special materials to make the body of vacuum pump.

De préférence, la température du corps d'une pompe à vide doit être maítrisée, d'une part pour éviter les grippages dus aux dilatations thermiques, d'autre part pour maintenir les gaz pompés à des températures appropriées évitant leur transformation sous forme de dépôts solides dans la pompe.Preferably the body temperature of a vacuum pump must be controlled, on the one hand to avoid seizures due to thermal expansions, on the other hand to keep the gases pumped at appropriate temperatures avoiding their transformation under solid deposits in the pump.

Egalement, les pompes à vide fonctionnent dans un environnement contrôlé de type salle blanche, dans lequel les systèmes de refroidissement ne peuvent pas faire appel à une circulation d'air. Il en résulte que le contrôle de température du corps de pompe doit s'effectuer par circulation d'un liquide de refroidissement.Also, the vacuum pumps operate in a controlled clean room environment, in which cooling systems cannot use a air circulation. As a result, the temperature control of the pump body must be carried out by circulation of a cooling.

En fonctionnement, la température d'un corps de pompe à vide est relativement élevée, de sorte qu'il existe un risque important de corrosion des parois du circuit de refroidissement de la pompe par le liquide de refroidissement, et un risque de dépôt de matière sur les parois du circuit de refroidissement.In operation, the temperature of a pump body at vacuum is relatively high, so there is a risk significant corrosion of the cooling system walls the pump by the coolant, and a risk of deposition of material on the walls of the cooling circuit.

Une solution actuelle de refroidissement d'une pompe à vide consiste à utiliser un revêtement anticorrosion dans le circuit de refroidissement. Ce revêtement anticorrosion, par exemple de type polytétrafluoroéthylène, est déposé sur les pièces statiques du corps de pompe de manière à isoler le liquide de refroidissement tel que l'eau désionisée par rapport aux matériaux constituant le corps de la pompe à vide. Un inconvénient est qu'un tel revêtement anticorrosion est généralement en matériau isolant thermique, ce qui réduit l'échange thermique et la capacité de refroidissement du circuit. Un autre inconvénient est le risque de défauts locaux de continuité de tout revêtement par dépôt de matière. Il en résulte que la fiabilité et l'efficacité ne sont pas satisfaisantes.A current solution for cooling a pump vacuum is to use an anticorrosive coating in the cooling system. This anticorrosion coating, by example of polytetrafluoroethylene type, is deposited on the parts pump body statics so as to isolate the liquid from cooling such as deionized water relative to materials constituting the body of the vacuum pump. One drawback is that such anticorrosion coating is generally made of insulating material which reduces heat exchange and the ability to circuit cooling. Another disadvantage is the risk of local defects in continuity of any coating by deposit of matter. As a result, reliability and efficiency are not satisfactory.

On a également proposé de rapporter sur le corps de la pompe à vide des pièces métalliques assurant à la fois la conduction du liquide de refroidissement, la résistance à la corrosion, et le passage de chaleur entre le corps de pompe à vide et le liquide de refroidissement. Cette solution augmente l'encombrement de la pompe, et augmente également le coût de production de la pompe à vide.It has also been proposed to report on the body of the vacuum pump for metal parts ensuring both coolant conduction, resistance to corrosion, and the passage of heat between the vacuum pump body and coolant. This solution increases the size of the pump, and also increases the cost of vacuum pump production.

Le document JP 05 118 288 décrit une pompe à vide dont chaque carter à roulements et engrenages est refroidi par un fluide traversant un tube en acier inoxydable surmoulé dans la masse du carter. Cette solution présente plusieurs inconvénients. Tout d'abord, l'opération de surmoulage est toujours délicate, à cause de la difficulté de mise en place et de maintien du tube dans le moule de coulée. Ensuite, le tube surmoulé est si étroitement lié au carter qu'il est pratiquement impossible de le changer ultérieurement. Et surtout, le surmoulage s'effectue à température de coulée du métal constituant le corps de carter, qui est généralement un métal fondant à température élevée qui fait perdre au tube ses propriétés anticorrosion. Il en résulte que la protection contre la corrosion est insuffisante.Document JP 05 118 288 describes a vacuum pump whose each bearing and gear case is cooled by a fluid through a stainless steel tube overmolded in the mass of the casing. This solution has several drawbacks. All first, the overmolding operation is always delicate, because difficulty installing and holding the tube in the casting mold. Then the overmolded tube is so tightly linked it is almost impossible to change it later. And above all, the overmolding takes place at temperature casting the metal constituting the housing body, which is generally a metal melting at high temperature which causes loss to the tube its anticorrosion properties. As a result, the corrosion protection is insufficient.

On connaít par ailleurs la technique de dudgeonnage, utilisée notamment pour réaliser une liaison mécanique rigide entre l'extrémité d'un tube et une plaque support. Pour cela, un outil de dudgeonnage est introduit à l'intérieur du tronçon d'extrémité de tube, et déforme radialement le tube au-delà de sa limite élastique pour rattraper le jeu entre son diamètre extérieur et un alésage prévu dans la plaque ; puis l'outil de dudgeonnage poursuit la déformation radiale en matant le tube pour assurer la liaison mécanique entre le tube et la plaque support.We also know the technique of expansion, used in particular to make a rigid mechanical connection between the end of a tube and a support plate. For this, a expansion is introduced inside the end section of tube, and radially deforms the tube beyond its elastic limit to compensate for the play between its outside diameter and a bore provided in the plate; then the expansion tool continues the radial deformation by matting the tube to ensure the connection mechanics between the tube and the support plate.

L'invention vise à concevoir une nouvelle structure de système de refroidissement de pompe à vide, et un procédé pour sa réalisation, permettant d'assurer à la fois une bonne conduction thermique entre le liquide de refroidissement et le corps de pompe à vide, de réduire encore les risques de corrosion par le liquide de refroidissement, et de réduire les coûts de production. L'invention doit permettre d'utiliser des matériaux appropriés qui soient adaptés à la fois au liquide de refroidissement et aux matériaux formant le corps de pompe à vide, et à éviter tout échauffement susceptible de dégrader les propriétés anticorrosion des matériaux employés.The invention aims to design a new structure for vacuum pump cooling system, and a method for its realization, ensuring both good conduction between the coolant and the pump body vacuum, further reducing the risk of corrosion by the liquid cooling, and reduce production costs. The invention must make it possible to use suitable materials which are suitable for both coolant and materials forming the vacuum pump body, and to avoid any overheating likely to degrade the anticorrosion properties materials used.

L'invention vise aussi à faciliter le changement ultérieur des matériaux anticorrosion, changement qui peut s'avérer nécessaire en fonction des conditions d'utilisation.The invention also aims to facilitate subsequent change anticorrosive materials, which change may be necessary depending on the conditions of use.

L'idée qui est à la base de la présente invention consiste à utiliser la technique de dudgeonnage pour l'appliquer de manière nouvelle à la réalisation d'une paroi anticorrosion dans un circuit de refroidissement de corps de pompe à vide.The idea which is the basis of the present invention consists to use the expansion technique to apply it in a way new to the realization of an anticorrosion wall in a circuit vacuum pump body cooling.

Pour cela, l'invention prévoit un système de refroidissement de pompe à vide comprenant un circuit de refroidissement dans lequel un liquide de refroidissement circule dans le corps de pompe à vide et est isolé du matériau constituant le corps de pompe à vide par au moins une couche de matière anticorrosion évitant la corrosion du corps de pompe à vide par le liquide de refroidissement ; ladite couche de matière anticorrosion comprend au moins un tube de matériau résistant à la corrosion et bon conducteur thermique, dudgeonné dans un logement correspondant du corps de pompe à vide.For this, the invention provides a system of vacuum pump cooling including a circuit cooling in which a coolant circulates in the vacuum pump body and is isolated from the constituent material the vacuum pump body by at least one layer of material anticorrosion preventing corrosion of the vacuum pump body by the cooling liquid ; said layer of anticorrosion material includes at least one tube of corrosion resistant material and good thermal conductor, expanded in corresponding housing of the vacuum pump body.

Dans les applications courantes, le corps de pompe à vide est en fonte. Le tube peut alors être avantageusement réalisé en acier inoxydable. Le liquide de refroidissement peut être de l'eau désionisée. Le dudgeonnage s'effectue à froid, et évite ainsi la dégradation de l'acier inoxydable lors de l'assemblage du tube dans le corps de pompe à vide, dégradation qui pourrait être produite si l'on adaptait le tube par un traitement thermique ou par surmoulage.In common applications, the vacuum pump body is made of cast iron. The tube can then advantageously be produced in stainless steel. The coolant can be water deionized. The expansion is carried out cold, and thus avoids the degradation of stainless steel when assembling the tube in the vacuum pump body, which degradation could occur if the tube was adapted by heat treatment or by overmolding.

Avec un corps de pompe à vide en fonte, on peut utiliser, en alternative, des tubes en un métal ou alliage tel que le cuivre, le monel, l'inconel. Le dudgeonnage permet l'usage de ces matières, sans dégrader leurs propriétés anticorrosion.With a cast iron vacuum pump body, alternatively, tubes made of a metal or alloy such as copper, the monel, the inconel. The expansion allows the use of these materials, without degrading their anti-corrosion properties.

Dans tous les cas, on choisit un tube en un matériau inattaquable par le liquide de refroidissement. La technique de dudgeonnage permet un grand choix de matériaux, et donc une adaptation efficace à différents liquides de refroidissement et à différents matériaux constituant le corps de pompe à vide.In all cases, we choose a tube made of a material unassailable by coolant. The technique of expansion allows a large choice of materials, and therefore a efficient adaptation to different coolants and different materials constituting the vacuum pump body.

Dans le cas d'un tube en acier inoxydable, relativement peu malléable, l'interface entre le tube et le corps de pompe à vide peut avantageusement être lisse.In the case of a stainless steel tube, relatively not very malleable, the interface between the tube and the pump body vacuum can advantageously be smooth.

Par contre, lorsqu'on utilise un tube en un matériau plus ductile tel que le cuivre, l'interface entre le tube et le corps de pompe à vide peut être rugueuse. Par exemple, on peut prévoir dans le corps de pompe à vide un alésage dont l'état de surface est rugueux avant l'étape de dudgeonnage.On the other hand, when using a tube made of a more material ductile such as copper, the interface between the tube and the body of vacuum pump can be rough. For example, we can plan in the vacuum pump body a bore whose surface condition is rough before the expansion step.

De préférence, le matériau formant le tube est dudgeonné sur toute la longueur du logement de corps de pompe qui le reçoit.Preferably, the material forming the tube is expanded over the entire length of the pump housing which receives it.

L'invention prévoit également un procédé de réalisation d'un tel système de refroidissement de pompe à vide, comprenant une étape de dudgeonnage réalisant l'expansion radiale du tube au-delà de sa limite élastique dans le logement correspondant du corps de pompe à vide, en appliquant à l'intérieur du tube une pression appropriée.The invention also provides a method of making of such a vacuum pump cooling system, comprising a expansion step carrying out the radial expansion of the tube beyond of its elastic limit in the corresponding housing of the body of vacuum pump, applying pressure inside the tube appropriate.

La pression appropriée peut être appliquée par un manchon expansible alimenté par un fluide hydraulique sous pression.Appropriate pressure can be applied by a sleeve expandable powered by pressurized hydraulic fluid.

En alternative, la pression appropriée peut être appliquée par un outil de dudgeonnage mécanique.Alternatively, the appropriate pressure can be applied by a mechanical expansion tool.

D'autres objets, caractéristiques et avantages de la présente invention ressortiront de la description suivante de modes de réalisation particuliers, faite en relation avec les figures jointes, parmi lesquelles:

  • la figure 1 illustre schématiquement, en coupe, un corps de pompe à vide avec un système de refroidissement selon un mode de réalisation de la présente invention ;
  • les figures 2 et 3 illustrent deux étapes successives de dudgeonnage d'un tube dans un corps de pompe à vide ; et
  • la figure 4 illustre une structure possible d'outil de dudgeonnage mécanique.
Other objects, characteristics and advantages of the present invention will emerge from the following description of particular embodiments, given in relation to the attached figures, among which:
  • Figure 1 schematically illustrates, in section, a vacuum pump body with a cooling system according to an embodiment of the present invention;
  • Figures 2 and 3 illustrate two successive stages of expansion of a tube in a vacuum pump body; and
  • FIG. 4 illustrates a possible structure of a mechanical expansion tool.

Dans le mode de réalisation illustré sur la figure 1, une pompe à vide comprend un corps de pompe à vide 1, par exemple en fonte, dans lequel sont réalisées des chambres de pompage 2 et 3 recevant un rotor entraíné par un arbre tel que les arbres 4 et 5. De façon connue, les parties d'extrémités du corps de pompe à vide 1 peuvent être constituées de carters rapportés, contenant des paliers à roulements et des engrenages pour le support et l'entraínement mécanique des arbres 4 et 5, le tout baignant dans de l'huile.In the embodiment illustrated in FIG. 1, a vacuum pump comprises a vacuum pump body 1, for example in cast iron, in which pumping chambers 2 and 3 are produced receiving a rotor driven by a shaft such as shafts 4 and 5. In known manner, the end parts of the vacuum pump body 1 may consist of added housings, containing rolling bearings and gears for the support and the mechanical drive of shafts 4 and 5, all bathed in oil.

La maítrise de la température de la pompe à vide est assurée par un circuit de refroidissement dans lequel un liquide de refroidissement circule tout en étant isolé du matériau constituant le corps de pompe à vide 1.The control of the vacuum pump temperature is provided by a cooling circuit in which a liquid cooling circulates while being isolated from the constituent material the vacuum pump body 1.

Selon l'invention, on réalise dans le corps de pompe à vide 1 des alésages traversants tels que les alésages 6 et 7, disposés en des zones appropriées pour le refroidissement du corps de pompe à vide 1, notamment dans les parties d'extrémités de la pompe à vide 1. Chaque alésage 6 ou 7 constitue un logement dans lequel est adapté un tube 8 ou 9 en matériau résistant à la corrosion par le liquide de refroidissement qui parcourt l'alésage central 10 ou 11 respectif du tube 8 ou 9.According to the invention, the pump body is produced in vacuum 1 of the through bores such as bores 6 and 7, arranged in areas suitable for cooling the body vacuum pump 1, especially in the end parts of the vacuum pump 1. Each bore 6 or 7 constitutes a housing in which is adapted a tube 8 or 9 of material resistant to corrosion by coolant flowing through the bore central 10 or 11 respectively of tube 8 or 9.

Le tube 8 ou 9 est dudgeonné dans le logement ou alésage correspondant 6 ou 7.Tube 8 or 9 is expanded in the housing or bore corresponding 6 or 7.

Dans le mode de réalisation illustré sur la figure, le tube 8 ou 9 est cylindrique de révolution et traverse le corps de pompe à vide 1 selon un trajet sensiblement rectiligne. Cette disposition autorise, pour l'assemblage, une déformation du tube 8 ou 9 par dudgeonnage mécanique.In the embodiment illustrated in the figure, the tube 8 or 9 is cylindrical in revolution and passes through the body of vacuum pump 1 along a substantially straight path. This arrangement allows, for assembly, a deformation of the tube 8 or 9 by mechanical expansion.

Le matériau formant le tube 8 ou 9 est de préférence dudgeonné sur toute la longueur de l'alésage ou logement correspondant 6 ou 7 du corps de pompe à vide 1. On optimise ainsi le contact mécanique entre le tube 8 ou 9 et le corps de pompe à vide 1, et donc la transmission de chaleur entre le liquide de refroidissement et le corps de pompe à vide 1.The material forming the tube 8 or 9 is preferably expanded over the entire length of the bore or housing corresponding 6 or 7 of the vacuum pump body 1. This optimizes mechanical contact between tube 8 or 9 and the pump body vacuum 1, and therefore the heat transmission between the liquid cooling and the vacuum pump body 1.

De préférence, le matériau formant le tube 8 ou 9 est déformé en expansion radiale par le dudgeonnage jusque dans les zones de transition de tube qui dépassent de part et d'autre de l'alésage ou logement correspondant 6 ou 7 du corps de pompe à vide 1. En pratique, cette expansion produit et laisse subsister, dans les zones de sortie des tubes 8 et 9, des collets 12 à 15 d'extrémité ou zones de plus grand diamètre de tube, à partir des faces d'extrémité 16 et 17 du corps de pompe à vide. De cette façon, on optimise les contacts mécaniques et les transmissions de chaleur, et on évite tout risque de corrosion dans les interstices entre le corps de pompe à vide 1 et le tube 8 ou 9.Preferably, the material forming the tube 8 or 9 is deformed in radial expansion by the expansion into the tube transition zones which protrude on either side of the corresponding bore or housing 6 or 7 of the vacuum pump body 1. In practice, this expansion produces and lets subsist, in the outlet zones of the tubes 8 and 9, the collars 12 to 15 end or larger tube diameter areas, from end faces 16 and 17 of the vacuum pump body. Of this way, we optimize the mechanical contacts and transmission heat, and avoids any risk of corrosion in the interstices between the vacuum pump body 1 and the tube 8 or 9.

Dans un premier mode de réalisation, le corps de pompe à vide 1 est en fonte d'acier, et le tube 8 ou 9 est en acier inoxydable. Le liquide de refroidissement peut alors être de l'eau désionisée, notamment.In a first embodiment, the pump body vacuum 1 is made of cast steel, and tube 8 or 9 is made of steel stainless. The coolant can then be water deionized, in particular.

En alternative, le corps de pompe à vide 1 peut être en fonte, et le tube 8 ou 9 peut être en un métal ou alliage tel que le cuivre, le monel, l'inconel, notamment.Alternatively, the vacuum pump body 1 can be in cast iron, and the tube 8 or 9 can be of a metal or alloy such as copper, monel, inconel, in particular.

Dans tous les cas, le tube 8 ou 9 est en un matériau inattaquable par le liquide de refroidissement.In all cases, the tube 8 or 9 is made of a material unassailable by coolant.

Dans les modes de réalisation dans lesquels le métal du tube 8 ou 9 est peu ductile, on peut avantageusement prévoir que l'interface entre le tube 8 ou 9 et le corps de pompe à vide 1 est lisse. En d'autres termes, avant d'engager le tube 8 ou 9 dans l'alésage 6 ou 7, l'alésage 6 ou 7 est conformé avec un état de surface lisse, de sorte que l'interface restera lisse après assemblage du tube 8 ou 9 dans le corps de pompe à vide 1.In the embodiments in which the metal of the tube 8 or 9 is not very ductile, it can advantageously be provided that the interface between the tube 8 or 9 and the vacuum pump body 1 is smooth. In other words, before engaging tube 8 or 9 in bore 6 or 7, bore 6 or 7 is conformed to a state of smooth surface, so the interface will remain smooth after assembly of the tube 8 or 9 in the vacuum pump body 1.

Par contre, dans les cas où le matériau formant le tube 8 ou 9 est ductile, on peut trouver avantage à prévoir une interface rugueuse entre le tube 8 ou 9 et le corps de pompe à vide 1. On augmente ainsi la surface de contact, pour favoriser l'échange thermique.By cons, in cases where the material forming the tube 8 or 9 is ductile, it may be advantageous to provide an interface rough between tube 8 or 9 and the vacuum pump body 1. We thus increases the contact surface, to favor the exchange thermal.

L'opération de dudgeonnage est illustrée sur les figures 2 et 3. Avant dudgeonnage, sur la figure 2, le tube 8 présente un diamètre extérieur inférieur au diamètre de l'alésage 6 du corps de pompe à vide 1, et l'état de surface de la face périphérique 18 de l'alésage 6 présente la structure appropriée convenant au métal formant le tube 8.The expansion operation is illustrated in Figures 2 and 3. Before expansion, in FIG. 2, the tube 8 has a outer diameter less than the diameter of the bore 6 of the body of vacuum pump 1, and the surface condition of the peripheral face 18 of bore 6 has the appropriate structure suitable for metal forming the tube 8.

Après dudgeonnage, comme illustré sur la figure 3, le diamètre extérieur du tube 8 a été augmenté par la pression exercée à l'intérieur du tube 8 par l'outil de dudgeonnage inséré dans l'alésage central 10 du tube 8, et la face extérieure du tube 8 est engagée contre la face périphérique 18 de l'alésage dans le corps de pompe à vide 1. After expansion, as illustrated in Figure 3, the outside diameter of tube 8 has been increased by the pressure exerted inside the tube 8 by the expansion tool inserted in the central bore 10 of the tube 8, and the outer face of the tube 8 is engaged against the peripheral face 18 of the bore in the body vacuum pump 1.

A titre d'illustration, on a représenté schématiquement sur la figure 4 un outil de dudgeonnage mécanique pouvant être utilisé pour la mise en oeuvre de la présente invention. La partie essentielle de l'outil de dudgeonnage est un manchon 19 dans lequel sont répartis plusieurs rouleaux périphériques tels que les rouleaux 20 et 21, coaxiaux avec l'axe général de l'outil et montés à rotation dans le manchon 19 en dépassant partiellement de sa périphérie. Les rouleaux 20 et 21 sont sollicités radialement vers l'extérieur par une tige axiale conique 22 pouvant être déplacée axialement dans le manchon 19 en étant manoeuvrée depuis l'extrémité postérieure 23 de l'outil. Une bague d'appui 24 peut être déplacée par rapport au manchon 19, par vissage sur une partie filetée 25 de l'outil.By way of illustration, there is shown schematically in Figure 4 a mechanical expansion tool that can be used for the implementation of the present invention. The part essential of the expansion tool is a sleeve 19 in which are distributed several peripheral rollers such as rollers 20 and 21, coaxial with the general axis of the tool and mounted rotating in the sleeve 19, partially projecting from its periphery. The rollers 20 and 21 are biased radially towards the outside by a conical axial rod 22 which can be moved axially in the sleeve 19 while being maneuvered from the end 23 of the tool. A support ring 24 can be moved relative to the sleeve 19, by screwing on a threaded part 25 of the tool.

En utilisation, l'outil est engagé à l'intérieur de l'alésage d'un tube tel que le tube 8, et est entraíné en rotation axiale. Lors de cette rotation, par traction simultanée de la tige axiale conique 22, on écarte radialement les rouleaux 20 et 21 qui viennent progressivement faire fluer la matière constituant le tube 8, provoquant son expansion par déformation au-delà des capacités de déformation élastique du matériau.In use, the tool is engaged inside the bore of a tube such as tube 8, and is rotated axial. During this rotation, by simultaneous pulling of the rod conical axial 22, the rollers 20 and 21 are moved apart radially which gradually flow the material constituting the tube 8, causing its expansion by deformation beyond the capacities elastic deformation of the material.

On comprend que l'outil ainsi constitué tel qu'illustré sur la figure 4 peut assurer le dudgeonnage d'un tronçon de longueur limitée d'un tube. Ainsi, pour réaliser le dudgeonnage sur toute la longueur d'un tube 8 tel qu'illustré sur la figure 1, la pression appropriée est appliquée à l'intérieur du tube 8 par l'outil de dudgeonnage en succession selon plusieurs tronçons partiels de tube 8 répartis longitudinalement, jusqu'à déformation du tube 8 selon toute sa longueur.It is understood that the tool thus formed as illustrated in Figure 4 can ensure the expansion of a section of limited length of a tube. So, to carry out the expansion on the entire length of a tube 8 as illustrated in FIG. 1, the appropriate pressure is applied inside the tube 8 by the expansion tool in succession along several sections tubes 8 distributed longitudinally, until deformation of tube 8 along its entire length.

Le dudgeonnage décrit ci-dessus est un dudgeonnage mécanique. En alternative, on peut réaliser un dudgeonnage hydraulique. Dans ce cas, la pression appropriée est appliquée par un manchon expansible alimenté par un fluide hydraulique sous pression.The expansion described above is a expansion mechanical. As an alternative, we can carry out an expansion hydraulic. In this case, the appropriate pressure is applied by an expandable sleeve supplied by a hydraulic fluid under pressure.

L'invention permet de réaliser une liaison mécanique efficace à froid des tubes en matériau inerte à l'intérieur d'un corps de pompe à vide 1, sans altérer les propriétés anticorrosion du matériau formant le tube, et en assurant une excellente conduction thermique entre le tube et le corps de pompe à vide 1.The invention allows for a mechanical connection effective cold tubes of inert material inside a vacuum pump body 1, without altering the anti-corrosion properties of the material forming the tube, and ensuring excellent thermal conduction between the tube and the vacuum pump body 1.

La présente invention n'est pas limitée aux modes de réalisation qui ont été explicitement décrits, mais elle en inclut les diverses variantes et généralisations qui sont à la portée de l'homme du métier.The present invention is not limited to the modes of which have been explicitly described, but it includes the various variants and generalizations which are within the reach of the skilled person.

Claims (14)

Système de refroidissement de pompe à vide, comprenant un circuit de refroidissement dans lequel un liquide de refroidissement circule dans le corps de pompe à vide (1) et est isolé du matériau constituant le corps de pompe à vide (1) par au moins une couche de matière anticorrosion évitant la corrosion du corps de pompe à vide (1) par le liquide de refroidissement, caractérisé en ce que ladite couche de matière anticorrosion comprend au moins un tube (8, 9) de matériau résistant à la corrosion et bon conducteur thermique, dudgeonné dans un logement (6, 7) correspondant du corps de pompe à vide (1).Vacuum pump cooling system, comprising a cooling circuit in which a coolant circulates in the vacuum pump body (1) and is isolated from the material constituting the vacuum pump body (1) by at least one layer of anti-corrosion material preventing corrosion of the vacuum pump body (1) by the coolant, characterized in that said layer of anti-corrosion material comprises at least one tube (8, 9) of corrosion-resistant material and good thermal conductor , expanded in a corresponding housing (6, 7) of the vacuum pump body (1). Système de refroidissement selon la revendication 1, caractérisé en ce que le corps de pompe à vide (1) est en fonte, et le tube (8, 9) est en acier inoxydable.Cooling system according to claim 1, characterized in that the vacuum pump body (1) is made of cast iron, and the tube (8, 9) is made of stainless steel. Système de refroidissement selon la revendication 2, caractérisé en ce que le liquide de refroidissement est de l'eau désionisée.Cooling system according to claim 2, characterized in that the coolant is deionized water. Système de refroidissement selon la revendication 1, caractérisé en ce que le corps de pompe à vide (1) est en fonte, et le tube (8, 9) est en un métal ou alliage tel que le cuivre, le monel, l'inconel.Cooling system according to claim 1, characterized in that the vacuum pump body (1) is made of cast iron, and the tube (8, 9) is made of a metal or alloy such as copper, monel, inconel . Système de refroidissement selon la revendication 1, caractérisé en ce que le tube (8, 9) est en un matériau inattaquable par le liquide de refroidissement.Cooling system according to claim 1, characterized in that the tube (8, 9) is made of a material which cannot be attacked by the coolant. Système de refroidissement selon l'une des revendications 2 ou 3, caractérisé en ce que l'interface entre le tube (8, 9) et le corps de pompe à vide (1) est lisse.Cooling system according to one of claims 2 or 3, characterized in that the interface between the tube (8, 9) and the vacuum pump body (1) is smooth. Système de refroidissement selon la revendication 1, caractérisé en ce que le matériau formant le tube (8, 9) est ductile, et l'interface entre le tube (8, 9) et le corps de pompe à vide (1) est rugueuse.Cooling system according to claim 1, characterized in that the material forming the tube (8, 9) is ductile, and the interface between the tube (8, 9) and the vacuum pump body (1) is rough. Système de refroidissement selon l'une quelconque des revendications 1 à 7, caractérisé en ce que le tube (8, 9) est cylindrique de révolution et traverse le corps de pompe à vide (1) selon un trajet sensiblement rectiligne.Cooling system according to any one of Claims 1 to 7, characterized in that the tube (8, 9) is cylindrical in revolution and passes through the vacuum pump body (1) along a substantially straight path. Système de refroidissement selon la revendication 8, caractérisé en ce que le matériau formant le tube (8, 9) est dudgeonné sur toute la longueur dudit logement correspondant (6, 7) du corps de pompe à vide (1).Cooling system according to claim 8, characterized in that the material forming the tube (8, 9) is expanded over the entire length of said corresponding housing (6, 7) of the vacuum pump body (1). Système de refroidissement selon la revendication 9, caractérisé en ce que le matériau formant le tube (8, 9) est déformé en expansion radiale par le dudgeonnage jusque dans les zones de transition de tube qui dépassent de part et d'autre dudit logement correspondant (6, 7) du corps de pompe à vide (1), laissant subsister des collets (12-15) d'extrémité.Cooling system according to claim 9, characterized in that the material forming the tube (8, 9) is deformed in radial expansion by the expansion in the tube transition zones which project on either side of said corresponding housing ( 6, 7) of the vacuum pump body (1), leaving end collars (12-15). Procédé de réalisation d'un système de refroidissement de pompe à vide selon l'une quelconque des revendications 1 à 10, caractérisé en ce qu'il comprend une étape de dudgeonnage, réalisant l'expansion radiale du tube (8, 9) au-delà de sa limite élastique dans le logement correspondant (6, 7) du corps de pompe à vide, en appliquant à l'intérieur du tube (8, 9) une pression appropriée.Method for producing a vacuum pump cooling system according to any one of Claims 1 to 10, characterized in that it comprises a expansion step, carrying out the radial expansion of the tube (8, 9) at- beyond its elastic limit in the corresponding housing (6, 7) of the vacuum pump body, applying to the inside of the tube (8, 9) an appropriate pressure. Procédé selon la revendication 11, caractérisé en ce que la pression appropriée est appliquée par un manchon expansible alimenté par un fluide hydraulique sous pression.Method according to claim 11, characterized in that the appropriate pressure is applied by an expandable sleeve supplied by a pressurized hydraulic fluid. Procédé selon la revendication 11, caractérisé en ce que la pression appropriée est appliquée par un outil de dudgeonnage mécanique.Method according to claim 11, characterized in that the appropriate pressure is applied by a mechanical expansion tool. Procédé selon la revendication 13, caractérisé en ce que la pression appropriée est appliquée par l'outil de dudgeonnage en succession selon plusieurs tronçons partiels de tube répartis longitudinalement jusqu'à déformation du tube (8) selon toute sa longueur.Method according to claim 13, characterized in that the appropriate pressure is applied by the expansion tool in succession along several partial sections of tube distributed longitudinally until the tube (8) is deformed along its entire length.
EP01420076A 2000-04-06 2001-03-30 Cooling system for vacuum pump and method for its realisation Withdrawn EP1150016A1 (en)

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FR0004393A FR2807477B1 (en) 2000-04-06 2000-04-06 VACUUM PUMP COOLING SYSTEM, AND METHOD FOR THE PRODUCTION THEREOF

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JP2002005023A (en) 2002-01-09
US6530762B2 (en) 2003-03-11

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