EP1141611B1 - System for conveying liquids without pulsing - Google Patents

System for conveying liquids without pulsing Download PDF

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Publication number
EP1141611B1
EP1141611B1 EP99957334A EP99957334A EP1141611B1 EP 1141611 B1 EP1141611 B1 EP 1141611B1 EP 99957334 A EP99957334 A EP 99957334A EP 99957334 A EP99957334 A EP 99957334A EP 1141611 B1 EP1141611 B1 EP 1141611B1
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EP
European Patent Office
Prior art keywords
pressure
tanks
storage tank
small
liquid
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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EP99957334A
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German (de)
French (fr)
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EP1141611A1 (en
Inventor
Claus Dusemund
Klaus Freissler
Wilfried Jammer
Michael Poth
Alberto Dix
Eberhard Tempel
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BASF SE
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Merck Patent GmbH
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members
    • F04B9/08—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid
    • F04B9/12—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air
    • F04B9/129—Piston machines or pumps characterised by the driving or driven means to or from their working members the means being fluid the fluid being elastic, e.g. steam or air having plural pumping chambers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0396—Involving pressure control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2278—Pressure modulating relays or followers
    • Y10T137/2365—Plural series units
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4673—Plural tanks or compartments with parallel flow

Definitions

  • the present invention relates to a liquid delivery system for pulsation-free delivery of liquids used for high purity, liquid chemicals in the Semiconductor industry can be used.
  • a liquid delivery system which shows the features of the preamble of claim 1 and which an arrangement for damping vibrations in closed liquid conveying systems having. It has a flow line in a circulation system, a consumer, a return line and a circulation pump on. To absorb pressure surges if the circulation pump fails are outside the actual circulation system in front of the circulation pump series-connected, with check valves Damper tank connected. In this system the real one Pumping of liquids is effected by the circulation pump.
  • the object of the present invention was therefore to provide a system to provide which as few moving parts as possible, such.
  • the task is solved by a liquid delivery system pulsation-free delivery, which liquids in a recirculation cycle promotes and has at least one intermediate container.
  • the object of the invention is achieved by a liquid delivery system for the pulsation-free delivery of liquids according to claim 1.
  • the present invention relates to such a pulsation-free Liquid delivery system in its special configurations, like it characterized by claims 2 to 7, as well as a method to operate a liquid circuit in this conveyor system, which characterized by claims 8 to 14.
  • At least two are parallel switched small pressure vessels integrated, which by means of a Pressure difference to the storage tank convey the liquid chemicals and replace a pump.
  • the one of the small containers (D1 or D2) connected in parallel in the filled one Condition a pressure on, which results from a height difference of at least 0.5 m between the storage tank (B1) and the height of the small one Containers are located at a lower level than the storage tank.
  • Each one of the small pressure vessels becomes the storage vessel connected to it filled, because of a pressure difference resulting from a height difference of at least 0.5 m between the storage container and the parallel pressure vessels, which are on a lower level located as the storage tank, while the other small pressure vessel is pressurized and the liquid from it is promoted starting in the circulation, with the regulation of the liquid flow done by electronically controllable valves.
  • the one of the connected in parallel small container is pressurized from a Height difference of 1 m between the storage tank and the two parallel switched containers results.
  • the pressure containers can be filled from the storage container be done by passing the liquid through a slight positive pressure communicating pipelines is conveyed into the pressure vessel.
  • the Pressure is reduced to the internal pressure of the storage container (B1).
  • This pressure reduction can be done by a valve, an orifice plate or a Pipe narrowing.
  • a development of the invention can in particular done by a conveyor system, the storage container one Has overpressure greater than or equal to 0.05 bar, the small pressure vessel are designed as containers for high pressure.
  • the pressure drops depending on the flow rate.
  • the residual pressure can, as stated above, by a Valve, an orifice or a pipe constriction on the internal pressure of the Storage or storage container can be reduced.
  • the liquid delivery system according to the invention enables the delivery of liquids in a recirculation circuit, with only one larger storage container or storage container (day tank) is required.
  • a particular advantage of this conveyor system is that a pump can two small pressure vessels connected in parallel is replaced.
  • the other promotes by applying a higher overpressure (2 -6 bar) to the storage tank the liquid in the circuit.
  • This can be done by appropriately switching electronically controllable valves accomplish.
  • the pressure to the internal pressure of the storage container B1 by means of a valve, a Aperture or pipe constriction reduced. Filling the storage tank from the outside by means of pumps (semi-pump system) or by Printing (printing system done).
  • the system combines the advantages of pumping systems through the one larger pressure vessels can be saved with those of the pressure systems.
  • the latter are characterized by a continuous flow and due to the lack of moving wear parts.
  • This system is advantageous when used as a supply system for electronic chemicals, since there are significant improvements compared to particle reduction Pump systems were found.
  • Another essential one The advantage over known supply systems is the low pulsation Driving style of the entire system.
  • the pumps When using pump systems with a recirculation circuit, the pumps are in the semiconductor industry around the clock in operation (typical value: 99.9% up-time a year). Through this continuous use, often in addition In the presence of very aggressive chemicals, the pumps need more and more Maintenance. In order to avoid interruptions in the chemical supply, the pumps must always be designed redundantly, d. H. to have to in the event of a malfunction, pumps can be installed in parallel, which automatically replace them be switched on.
  • the semipump system according to the invention has a significant impact fewer wear parts and the maintenance effort is corresponding lower.
  • the inventive one System compared to vacuum pressure systems, the inventive one System the following advantages:
  • B1 represents a storage container or mixing container which can be filled by pumping or pressure.
  • B1 and the pressure vessels D1 and D2 are on different levels, so that there is a minimal static height difference between the level of D1 max (D2) max and that of the vessel B1 min , which is sufficient to fill the pressure vessel.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Pipeline Systems (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Abstract

A system tot the pulsation-free delivery of liquids, which system may be used for high-purity, liquid chemicals in the semiconductor industry.

Description

Die vorliegende Erfindung betrifft ein Flüssigkeitsförderssystem zur pulsationsfreien Förderung von Flüssigkeiten, das für hochreine, flüssige Chemikalien in der Halbleiterindustrie eingesetzt werden kann.The present invention relates to a liquid delivery system for pulsation-free delivery of liquids used for high purity, liquid chemicals in the Semiconductor industry can be used.

In Produktionsverfahren der Halbleiterindustrie werden üblicherweise hochreine Chemikalien eingesetzt, an die sehr hohe Anforderungen bezüglich der Partikelfreiheit gestellt werden. Da es sich bei den verwendeten Chemikalien häufig um stark ätzende oder oxidierende Substanzen handelt werden entsprechend hohe Ansprüche an die Reinheit bzw. Resistenz der mit den Chemikalien in Berührung kommenden Materialien gestellt. Besonders kritisch bezüglich der Partikelfreisetzung sind in diesem Zusammenhang Stellen, an denen die Chemikalien mit beweglichen Teilen im System in Berührung kommen. Die Anforderungen an die Partikelfreiheit wachsen ständig und bisher bekannte Vorrichtungen können diese neuen Anforderungen nicht in zufriedenstellender Weise erfüllen.In production processes in the semiconductor industry are common high-purity chemicals are used, to which very high demands are made particle-free. Since it is used Chemicals often around strongly caustic or oxidizing substances accordingly high demands are made on the purity or resistance of the materials that come into contact with the chemicals posed. Are particularly critical with regard to the particle release in this Connections where the chemicals move Parts in the system come into contact. The requirements for particle freedom grow constantly and previously known devices can do not satisfactorily meet these new requirements.

Aus WO86/03263 ist ein Flüssigkeitsfördersystem bekannt, das die Merkmale des Oberbegriffs von Anspruch 1 zeigt und das eine Anordnung zur Dämpfung von Schwingungen in geschlossenen Flüssigkeitsfördersystemen aufweist. Es weist in einem Zirkulationssystem eine Vorlaufleitung, einen Verbraucher, eine Rücklaufleitung und eine Umwälzpumpe auf. Zum Auffangen von Druckstößen beim Ausfall der Umwälzpumpe sind außerhalb des eigentlichen Zirkulationssystems vor der Umwälzpumpe in Reihe geschaltete, mit Rückschlagventilen versehene Dämpfungsbehälter angeschlossen. In diesem System wird die eigentliche Förderung der Flüssigkeiten durch die Umwälzpumpe bewirkt.From WO86 / 03263 a liquid delivery system is known which shows the features of the preamble of claim 1 and which an arrangement for damping vibrations in closed liquid conveying systems having. It has a flow line in a circulation system, a consumer, a return line and a circulation pump on. To absorb pressure surges if the circulation pump fails are outside the actual circulation system in front of the circulation pump series-connected, with check valves Damper tank connected. In this system the real one Pumping of liquids is effected by the circulation pump.

Aufgabe der vorliegenden Erfindung war es daher, ein System zur Verfügung zu stellen, welches möglichst wenige bewegliche Teile, wie z. B. Pumpen aufweist.The object of the present invention was therefore to provide a system to provide which as few moving parts as possible, such. B. Has pumps.

Die Lösung der Aufgabe erfolgt durch ein Flüssigkeitsfördersystem zur pulsationsfreien Förderung, welches Flüssigkeiten in einem Rezirkulationskreislauf fördert und mindestens einen Zwischenbehälter aufweist. The task is solved by a liquid delivery system pulsation-free delivery, which liquids in a recirculation cycle promotes and has at least one intermediate container.

Insbesondere erfolgt die Lösung der erfindungsgemäßen Aufgabe durch ein Flüssigkeitsfördersystem zur pulsationsfreien Förderung von Flüssigkeiten nach Anspruch 1.In particular, the object of the invention is achieved by a liquid delivery system for the pulsation-free delivery of liquids according to claim 1.

Gegenstand der vorliegenden Erfindung ist ein solches pulsationsfreies Flüssigkeitsfördersystem in seinen besonderen Ausgestaltungen, wie es durch die Ansprüche 2 bis 7 charakterisiert ist, ebenso wie ein Verfahren zum Betrieb eines Flüssigkeitskreislaufs in diesem Fördersystem, welches durch die Ansprüche 8 bis 14 charakterisiert ist.The present invention relates to such a pulsation-free Liquid delivery system in its special configurations, like it characterized by claims 2 to 7, as well as a method to operate a liquid circuit in this conveyor system, which characterized by claims 8 to 14.

In diesem erfindungsgemäßen System sind also mindestens zwei parallel geschaltete kleine Druckbehälter eingebunden, welche mittels einer Druckdifferenz zum Speicherbehälter die flüssigen Chemikalien fördern und eine Pumpe ersetzen.In this system according to the invention, at least two are parallel switched small pressure vessels integrated, which by means of a Pressure difference to the storage tank convey the liquid chemicals and replace a pump.

Von diesen zwei parallel geschalteten kleinen Druckbehältern (D1, D2) wird der eine mittels einer Pumpe befüllt, während der andere mit einem Überdruck im Vergleich zum Lagerbehälter (B1) beaufschlagt wird und die Flüssigkeit von ihm ausgehend im Kreislauf fördert, wobei die Regelung des Flüssigkeitsstroms durch elektrisch steuerbare Ventile erfolgt. Of these two small pressure vessels (D1, D2) connected in parallel one is filled with a pump, while the other is filled with a Overpressure compared to the storage container (B1) and the Fluid from it promotes circulation, taking the scheme of the liquid flow takes place through electrically controllable valves.

Charakteristisch ist für dieses Fördersystem, daß der kleine Behälter (D1 oder D2), welcher den höheren Druck aufweist, einen Überdruck von 2 bis 6 bar besitzt, und daß die beiden kleinen Behälter der Anlage im Betrieb abwechselnd mit Druck beaufschlagt werden, wodurch ein kontinuierlicher Flüssigkeitsstrom erzeugt wird.It is characteristic of this conveyor system that the small container (D1 or D2), which has the higher pressure, an overpressure of 2 to 6 bar, and that the two small containers of the system in operation be alternately pressurized, creating a continuous Liquid flow is generated.

In einer Ausgestaltung der Erfindung weist der eine der parallel geschalteten kleinen Behälter (D1 oder D2) im befüllten Zustand einen Druck auf, welcher sich aus einer Höhendifferenz von mindestens 0,5 m zwischen dem Lagertank (B1) und der Höhe der kleinen Behälter ergibt, die sich auf einer tieferen Ebene befinden als der Lagertank. Jeweils einer der kleinen Druckbehälter wird aus dem mit ihm verbundenen Lagerbehälter befüllt, und zwar aufgrund einer Druckdifferenz, die sich aus einer Höhendifferenz von mindestens 0,5 m zwischen dem Lagerbehälter und den parallel geschalteten Druckbehältern, welche sich auf einer tieferen Ebene befinden als der Lagertank, ergibt, während der andere kleine Druckbehälter mit einem Überdruck beaufschlagt wird und die Flüssigkeit von ihm ausgehend im Kreislauf gefördert wird, wobei die Regelung des Flüssigkeitsstroms durch elektronisch steuerbare Ventile erfolgt.In one embodiment of the invention, the one of the small containers (D1 or D2) connected in parallel in the filled one Condition a pressure on, which results from a height difference of at least 0.5 m between the storage tank (B1) and the height of the small one Containers are located at a lower level than the storage tank. Each one of the small pressure vessels becomes the storage vessel connected to it filled, because of a pressure difference resulting from a height difference of at least 0.5 m between the storage container and the parallel pressure vessels, which are on a lower level located as the storage tank, while the other small pressure vessel is pressurized and the liquid from it is promoted starting in the circulation, with the regulation of the liquid flow done by electronically controllable valves.

In einer besonderen Ausführungsform ist der eine der parallel geschalteten kleinen Behälter mit einem Druck beaufschlagt, der sich aus einer Höhendifferenz von 1 m zwischen dem Lagertank und den beiden parallel geschalteten Behältern ergibt.In a special embodiment, the one of the connected in parallel small container is pressurized from a Height difference of 1 m between the storage tank and the two parallel switched containers results.

Gemäß einer Weiterbildung kann die Befüllung der Druckbehälter aus dem Lagerbehälter erfolgen, indem die Flüssigkeit mittels leichtem Überdruck durch kommunizierende Rohrleitungen in die Druckbehälter gefördert wird.According to a further development, the pressure containers can be filled from the storage container be done by passing the liquid through a slight positive pressure communicating pipelines is conveyed into the pressure vessel.

Am Ende des Rezirkulationskreislaufs (RK) des Fördersystems wird der Druck auf den Innendruck des Lagerbehälter (B1) reduziert wird.At the end of the recirculation cycle (RK) of the conveyor system, the Pressure is reduced to the internal pressure of the storage container (B1).

Diese Druckreduzierung kann durch ein Ventil, eine Blende oder eine Rohrverengung erfolgen. This pressure reduction can be done by a valve, an orifice plate or a Pipe narrowing.

Eine Weiterbildung der Erfindung kann insbesondere durch ein Fördersystem erfolgen, dessen Lagerbehälter einen Überdruck von größer gleich 0,05 bar aufweist, wobei die kleinen Druckbehälter als Behälter für hohen Druck ausgelegt sind.A development of the invention can in particular done by a conveyor system, the storage container one Has overpressure greater than or equal to 0.05 bar, the small pressure vessel are designed as containers for high pressure.

Im gesamten Rezirkulationskreislauf fällt der Druck in Abhängigkeit von dem Förderstrom ab. Der Restdruck kann, wie oben gesagt, durch ein Ventil, eine Blende oder eine Rohrverengung auf den Innendruck des Speicher- oder Lagerbehälters reduziert werden.In the entire recirculation cycle, the pressure drops depending on the flow rate. The residual pressure can, as stated above, by a Valve, an orifice or a pipe constriction on the internal pressure of the Storage or storage container can be reduced.

Das erfindungsgemäße Flüssigkeitsfördersystem ermöglicht die Förderung von Flüssigkeiten in einem Rezirkulationskreislauf, wobei nur ein größerer Speicherbehälter oder Lagerbehälter (Day-Tank) benötigt wird.The liquid delivery system according to the invention enables the delivery of liquids in a recirculation circuit, with only one larger storage container or storage container (day tank) is required.

Ein besonderer Vorteil dieses Fördersystems ist, daß eine Pumpe durch zwei parallel geschaltete, kleine Druckbehälter ersetzt wird. Diese Druckbehälter besitzen, ein Volumen von 1-200 l. Während der eine Druckbehälter durch die Druckdifferenz, die sich aus der statische Höhendifferenz (> 0,5 m) des Speicher- oder Lagerbehälters (B1) zu den Druckbehältern (D1, D2) ergibt, oder mittels einer Pumpe befüllt wird, fördert der andere durch Anlegen eines höheren Überdrucks (2 -6 bar) zum Speicherbehälter die Flüssigkeit im Kreislauf. Dies läßt sich durch entsprechendes Schalten von elektronisch steuerbaren Ventilen bewerkstelligen. Am Ende des Rezirkulationskreislaufes wird der Druck auf den Innendruck des Lagerbehälter B1 mittels eines Ventils, einer Blende oder Rohrverengung vermindert. Die Befüllung des Lagertanks von außen kann mittels Pumpen (Semi-Pumpsystem) oder auch durch Druck (Drucksystem erfolgen).A particular advantage of this conveyor system is that a pump can two small pressure vessels connected in parallel is replaced. This Have pressure vessels, a volume of 1-200 l. During the one pressure vessel due to the pressure difference that arises from the static height difference (> 0.5 m) of the storage or storage container (B1) to the pressure vessels (D1, D2), or by means of a pump is filled, the other promotes by applying a higher overpressure (2 -6 bar) to the storage tank the liquid in the circuit. This can be done by appropriately switching electronically controllable valves accomplish. At the end of the recirculation cycle, the pressure to the internal pressure of the storage container B1 by means of a valve, a Aperture or pipe constriction reduced. Filling the storage tank from the outside by means of pumps (semi-pump system) or by Printing (printing system done).

Die Befüllung der Druckbehälter D1 bzw. D2 aus dem Speicherbehälter B1 läßt sich auch durch einen leichten Überdruck in B1 (>0.05 bar) bewerkstelligen (s.o.). In diesem Fall muß aber B1 der Druckbehälterverordnung genügen.Filling the pressure vessels D1 or D2 from the storage vessel B1 can also be achieved with a slight overpressure in B1 (> 0.05 bar) (so.). In this case, however, B1 of the Pressure Vessel Ordinance must be met suffice.

Durch den hier beschriebenen Aufbau des erfindungsgemäßen Fördersystems ergeben sich folgende Vorteile gegenüber herkömmlichen Systemen: Due to the construction of the conveyor system according to the invention described here The following advantages result over conventional systems:

Das System kombiniert die Vorteile von Pumpsystemen, durch die ein größerer Druckbehälter eingespart werden kann, mit denen der Drucksysteme. Letztere zeichnen sich durch einen kontinuierlichen Fluß und durch das Fehlen von beweglichen Verschleißteilen aus. Dieses System ist vorteilhaft im Einsatz als Versorgungssystem von Elektronikchemikalien, da besonders bei der Partikelreduktion deutliche Verbesserungen gegenüber Pumpsystemen gefunden wurden. Ein anderer wesentlicher Vorteil gegenüber bekannten Versorgungssystemen ist die pulsationsarme Fahrweise des gesamten Systems.The system combines the advantages of pumping systems through the one larger pressure vessels can be saved with those of the pressure systems. The latter are characterized by a continuous flow and due to the lack of moving wear parts. This system is advantageous when used as a supply system for electronic chemicals, since there are significant improvements compared to particle reduction Pump systems were found. Another essential one The advantage over known supply systems is the low pulsation Driving style of the entire system.

Weiterhin ist dieses System erheblich preisgünstiger als andere übliche Drucksysteme, bei denen z. B. mit zwei größeren Lagerbehältern (Druckbehältern, > 3 bar) gearbeitet wird, da hier nur ein druckloser Lagerbehälter und zwei kleine Druckbehälter ( >2 bar) benötigt werden.Furthermore, this system is considerably cheaper than other common ones Printing systems in which e.g. B. with two larger storage tanks (pressure tanks, > 3 bar) is used, since there is only one unpressurized storage container and two small pressure vessels (> 2 bar) are required.

Der durch das System erzeugte kontinuierliche, gleichmäßige Flüssigkeitsfluß ist mit einer Partikelreduktion verbunden. Dadurch arbeiten in den Kreislauf eingebaute Filter effektiver, weil dieses System im Gegensatz zu mit Membran- oder Faltenbalgpumpen aufgebauten System pulsationsfrei läuft. Es unterliegt auch der Druck an den Entnahmestellen (POU) keiner Pulsation und läßt sich sehr stabil halten.The continuous, steady flow of liquid produced by the system is associated with particle reduction. This will work in the circuit built-in filter more effectively because this system is opposed to a system built with diaphragm or bellows pumps runs pulsation-free. It is also subject to pressure at the tapping points (POU) no pulsation and can be kept very stable.

Ein ganz besonderer Vorteil des erfindungsgemäßen Systems besteht in der Reduktion mechanisch beweglicher Teile:

  • Das Fördersystem besitzt außer den Ventilen keine beweglichen Teile. Auf Pumpen wird innerhalb des Rezirkulationskreislaufes verzichtet. Auf diese Weise ist das System im Betrieb deutlich sicherer in Bezug auf Störungsanfälligkeit. Es ist weniger Service notwendig und es ergeben sich geringere Standzeiten, in denen Verschleißteile wie z.B. Pumpenteile ausgetauscht werden müssen
  • Da die Flüssigkeit nicht durch die mechanisch beweglichen Teile der Pumpe gefördert wird , wie z.B. beim Faltenbalg-, beziehungsweise bei Membran- oder Kreiselpumpen, werden weniger Partikel in die Flüssigkeit abgegeben, was bei der Förderung von Elektronikchemikalien von besonderem Vorteil ist.
A very special advantage of the system according to the invention is the reduction of mechanically moving parts:
  • The conveyor system has no moving parts apart from the valves. Pumps are not used within the recirculation circuit. In this way, the system is significantly safer in terms of susceptibility to failure. Less service is required and there is less downtime during which wear parts such as pump parts have to be replaced
  • Since the liquid is not conveyed by the mechanically moving parts of the pump, such as in bellows pumps, or in diaphragm or centrifugal pumps, fewer particles are released into the liquid, which is of particular advantage when pumping electronic chemicals.

Vergleicht man das erfindungsgemäße System mit herkömmlichen Pumpsystemen, ergeben sich demnach folgende Vorteile:If you compare the system according to the invention with conventional pump systems, This results in the following advantages:

Bei Einsatz von Pumpsystemen mit Rezirkulationskreislauf sind die Pumpen in der Halbleiterindustrie rund um die Uhr im betrieb (typischer Wert: 99,9 % up-time im Jahr). Durch diesen Dauereinsatz, oft noch dazu in Gegenwart sehr aggressiver Chemikalien bedürfen die Pumpen ständiger Wartung. Um Unterbrechungen bei der Chemikalienförderung zu vermeiden, müssen die Pumpen immer redundant ausgelegt sein, d. h. es müssen im Störfall parallel Pumpen vorhanden sein, die automatisch ersatzweise eingeschaltet werden.When using pump systems with a recirculation circuit, the pumps are in the semiconductor industry around the clock in operation (typical value: 99.9% up-time a year). Through this continuous use, often in addition In the presence of very aggressive chemicals, the pumps need more and more Maintenance. In order to avoid interruptions in the chemical supply, the pumps must always be designed redundantly, d. H. to have to in the event of a malfunction, pumps can be installed in parallel, which automatically replace them be switched on.

Im Vergleich dazu weist das erfindungsgemäße Semipumpsystem wesentlich weniger Verschleißteile auf und der Wartungsaufwand ist entsprechend geringer.In comparison, the semipump system according to the invention has a significant impact fewer wear parts and the maintenance effort is corresponding lower.

Desweiteren werden von der Halbleiterindustrie fast nur noch Druckluftpumpen, d. h. Membran- und Faltenbalgpumpen, aus Kunststoff (meist PTFE) eingesetzt. Diese Pumpen verursachen mehr oder weniger starke Pulsationen in der zu fördernden Flüssigkeit (Druckschwankungen), was die Filtrationsleistung von Membranfiltern deutlich mindert. Außerdem geben, wie oben schon erwähnt, mechanisch bewegliche Teile der Pumpen (Ventile, Membran, Faltenbalg) unerwünschte Partikel in das zu fördernde Medium ab.Furthermore, the semiconductor industry almost only uses compressed air pumps, d. H. Diaphragm and bellows pumps, made of plastic (mostly PTFE) is used. These pumps cause more or less powerful Pulsations in the liquid to be pumped (pressure fluctuations) what significantly reduces the filtration performance of membrane filters. Also give As already mentioned above, mechanically moving parts of the pumps (Valves, membrane, bellows) unwanted particles in the pumped Medium.

im Vergleich zu Vakuum-Druck-Systemen weist das erfindungsgemäße System folgende Vorteile auf:compared to vacuum pressure systems, the inventive one System the following advantages:

Zum Befüllen der Druckbehälter in Vakuum-Druck-Systemen ist das Anlegen eines Vakuums notwendig, wodurch die flüssige Chemikalie von einem Speicherbehälter in die Druck- bzw. Vakuumbehälter befördert wird. Dieses Prinzip ist begrenzt durch die Förderleistung der Vakuumpumpenleistung. Auch kann bei Verwendung von gesättigten Lösungen von Gasen (z. B. NH4OH 28 %, HCI 36 % usw.) nur ein sehr schwacher Unterdruck angelegt werden, da die sonst ein Ausgasen verursacht wird, was mit einer Konzentrationsänderung verbunden wäre. In order to fill the pressure vessels in vacuum pressure systems, a vacuum is necessary, as a result of which the liquid chemical is conveyed from a storage vessel into the pressure or vacuum vessels. This principle is limited by the delivery rate of the vacuum pump output. Also, when using saturated solutions of gases (e.g. NH 4 OH 28%, HCI 36% etc.), only a very weak negative pressure can be applied, as this would otherwise cause outgassing, which would be associated with a change in concentration.

Zum besseren Verständnis und zur Verdeutlichung wird im folgenden beispielhaft ein Fließschema eines solchen Fördersystems gegeben.For better understanding and clarification, the following is an example given a flow diagram of such a conveyor system.

Fig. 1 zeigt eine Skizze eines Chemikalienförder- bzw. Chemikalienversorgungssystems mit Chemikalienrezirkulationseinheit, worin B1 einen Speicherbehälter oder Mischbehälter darstellt, der durch Pumpen oder Druck befüllt werden kann. B1 und die Druckbehälter D1 und D2 befinden sich auf verschiedenen Ebenen, so daß sich zwischen dem Füllstandsniveau von D1 max (D2)max und dem des Behälters B1min eine minimale statische Höhendifferenz ergibt, die ausreicht um den Druckbehälter zu befüllen.1 shows a sketch of a chemical delivery or chemical supply system with a chemical recirculation unit, in which B1 represents a storage container or mixing container which can be filled by pumping or pressure. B1 and the pressure vessels D1 and D2 are on different levels, so that there is a minimal static height difference between the level of D1 max (D2) max and that of the vessel B1 min , which is sufficient to fill the pressure vessel.

Fig. 2 zeigt eine Pumpeneinheit, mit der das erfindungsgemäße Fördersystem versehen sein kann. Es handelt sich um einen Ausschnitt der Fig 1.

C1
Chemikalienzuleitung (aus Misch- und Transportbehälter)
RK
Rezirkulationskreislauf
B1
Lagerbehälter (Day-Tank)
D1, D2
Druckbehälter (5 bis 200 I, bis 6 bar)
V1.1, V1.2
Befüllungsventile
V2.1, V2.2
Ventile auf Druckseite
V3.1, V3.2
N2-Einlaßventile
V4.1, V4.2
N2-Entlüftungsventile
V5
Ventil zum Steuern der Durchflußmenge oder des Durchflusses
V6
Ventil zum POU
POU
Chemikalienabnahmestelle (point of use)
F
Filtrationselemente
S
Füllstandssensor (optional)
Fig. 2 shows a pump unit with which the conveyor system according to the invention can be provided. It is a section of FIG. 1.
C1
Chemical supply line (from mixing and transport container)
RK
recirculation
B1
Storage tank (day tank)
D1, D2
Pressure vessel (5 to 200 I, up to 6 bar)
V1.1, V1.2
filling valves
V2.1, V2.2
Valves on the pressure side
V3.1, V3.2
N 2 inlet valves
V4.1, V4.2
N 2 vent valves
V5
Valve to control the flow rate or flow
V6
Valve to the POU
POU
Chemical collection point (point of use)
F
filtration elements
S
Level sensor (optional)

Claims (13)

  1. Liquid-delivery system for pulsation-free delivery of liquids, having a recirculation circuit, a storage tank (B1) and at least two pressure tanks (D1, D2) connected in parallel, characterized in that the recirculation circuit (RK) contains
    a) the storage tank (B1) and
    b) the at least two small pressure tanks (D1, D2) connected in parallel, which have a volume of 1 - 200 1 and which by means of a pressure difference relative to the storage tank deliver the liquid and replace a pump, the two small pressure tanks being alternately pressurized during operation, as a result of which a continuous liquid flow is produced, the liquid flow being controlled by electrically controllable valves (V 1.1, V 1.2, V 2.1, V 2.2, V 5, V 6).
  2. Delivery system according to Claim 1, characterized in that the recirculation circuit (RK) has a means of reducing pressure in the return to the storage tank (B1).
  3. Delivery system according to Claim 2, characterized in that a valve, a restrictor or a pipe constriction is located in the return to the storage tank (B1) in order to reduce the pressure in the recirculation circuit (RK).
  4. Delivery system according to Claims 1 to 2, characterized in that the storage tank (B1) is designed for a positive pressure of greater than or equal to 0.1 bar, and the pressure tanks (D1 and D2) are designed as tanks for operating at a positive pressure of 2 to 6 bar.
  5. Delivery system according to Claims 1 to 2, characterized in that filters (F) are fitted in the recirculation circuit (RK).
  6. Delivery system according to one or more of Claims 1 to 5, characterized in that the storage tank (B1) is at a higher level than the tanks (D1 and D2) connected in parallel, so that a height difference results between the storage tank (B1) and the tanks (D1 and D2) connected in parallel.
  7. Method for operating a liquid circuit in the liquid-delivery system according to Claim 1, characterized in that, of the at least two small pressure tanks (D1, D2) connected in parallel, one pressure tank is filled, whereas the other is pressurized with a positive pressure compared with the storage tank (B1) and delivers the liquid in the circuit, the control of the liquid flow being effected by the electrically controllable valves.
  8. Method according to Claim 7, characterized in that the small pressure tanks (D1 and D2) are alternately pressurized, as a result of which a continuous liquid flow is produced.
  9. Method according to Claims 7 to 8, characterized in that the small tanks (D1 and D2) are alternately pressurized with a positive pressure of 2 to 6 bar.
  10. Method according to Claims 7 to 8, characterized in that in one of the small tanks (D1 or D2) connected in parallel a pressure is set, which pressure results from a height difference between the storage tank (B1) and the height of the small tanks, which are located at a lower level than the storage tank.
  11. Method according to Claim 10, characterized in that in one of the small tanks (D1 or D2) connected in parallel a pressure is set, which pressure results from a height difference of at least 0.5 m.
  12. Method according to Claim 10, characterized in that one of the small tanks (D1 or D2) connected in parallel has a pressure which results from a height difference of up to 1 m.
  13. Method according to Claim 10, characterized in that the pressure tanks (D1, D2) are filled from the storage tank (B1) by the liquid being delivered into the pressure tanks through communicating pipelines by means of a slight positive pressure.
EP99957334A 1998-12-14 1999-12-02 System for conveying liquids without pulsing Expired - Lifetime EP1141611B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19857593A DE19857593A1 (en) 1998-12-14 1998-12-14 System for the pulsation-free delivery of liquids
DE19857593 1998-12-14
PCT/EP1999/009408 WO2000036329A1 (en) 1998-12-14 1999-12-02 System for conveying liquids without pulsing

Publications (2)

Publication Number Publication Date
EP1141611A1 EP1141611A1 (en) 2001-10-10
EP1141611B1 true EP1141611B1 (en) 2003-11-05

Family

ID=7891006

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99957334A Expired - Lifetime EP1141611B1 (en) 1998-12-14 1999-12-02 System for conveying liquids without pulsing

Country Status (7)

Country Link
US (1) US6623248B1 (en)
EP (1) EP1141611B1 (en)
JP (1) JP2002532656A (en)
AT (1) ATE253709T1 (en)
DE (2) DE19857593A1 (en)
TW (1) TW469323B (en)
WO (1) WO2000036329A1 (en)

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US7540143B1 (en) 2005-06-30 2009-06-02 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Boiler and pressure balls monopropellant thermal rocket engine
US9765769B2 (en) 2015-04-22 2017-09-19 C. Anthony Cox Sterile liquid pump with single use elements
US10030674B2 (en) 2015-04-22 2018-07-24 C. Anthony Cox Sterile liquid pump with single use elements
CN109268687A (en) * 2018-10-16 2019-01-25 迈得医疗工业设备股份有限公司 Liquid feed device
US11761582B2 (en) * 2019-09-05 2023-09-19 Dhf America, Llc Pressure regulation system and method for a fluidic product having particles
CN114636106A (en) * 2022-03-15 2022-06-17 中国电子科技集团公司第十研究所 Portable mobile liquid drainage device
JP7223195B1 (en) 2022-06-24 2023-02-15 岩井ファルマテック株式会社 Liquid delivery system

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Also Published As

Publication number Publication date
EP1141611A1 (en) 2001-10-10
DE59907661D1 (en) 2003-12-11
ATE253709T1 (en) 2003-11-15
TW469323B (en) 2001-12-21
US6623248B1 (en) 2003-09-23
JP2002532656A (en) 2002-10-02
DE19857593A1 (en) 2000-06-15
WO2000036329A1 (en) 2000-06-22

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