EP1129231B1 - Method for vacuum coating metal components - Google Patents

Method for vacuum coating metal components Download PDF

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Publication number
EP1129231B1
EP1129231B1 EP99959190A EP99959190A EP1129231B1 EP 1129231 B1 EP1129231 B1 EP 1129231B1 EP 99959190 A EP99959190 A EP 99959190A EP 99959190 A EP99959190 A EP 99959190A EP 1129231 B1 EP1129231 B1 EP 1129231B1
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EP
European Patent Office
Prior art keywords
metal components
oxide layer
vacuum coating
coating metal
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP99959190A
Other languages
German (de)
French (fr)
Other versions
EP1129231A2 (en
Inventor
Lutz Wolkers
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP1129231A2 publication Critical patent/EP1129231A2/en
Application granted granted Critical
Publication of EP1129231B1 publication Critical patent/EP1129231B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C23C28/3215—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer at least one MCrAlX layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising

Definitions

  • metal components with an oxide layer it is often necessary to have metal components with an oxide layer to provide in order to determine the components on their surface impart mechanical or chemical properties; oxide layers are also used as an adhesion promoter layer Metal components often required, so in further process steps Coatings made on the metal components can be.
  • US 5,763,107 discloses a method of making a Thermal insulation layer for superalloys, in which below the Thermal insulation layer a platinum-enriched aluminum layer is present, on which a thin oxide layer is applied becomes.
  • the thin oxide layer is preferably created by easy heating in an oxygen-containing The atmosphere.
  • the invention has for its object a method for Propose creating a homogeneous oxide layer on metal components, with which the oxide layer is controlled and reproducible can be applied.
  • a method for producing a homogeneous oxide layer on metal components in which the metal components are heated uniformly in all their areas in a vacuum chamber and after reaching a predetermined temperature with an oxygen-argon mixture for a predetermined period of time about 10 minutes with a predetermined pressure between 1x10 -3 and 8x10 -2 mbar.
  • the turbine blades are accommodated in a chamber which is evacuated.
  • the described method can be modified in such a way that the metal components to be provided with an oxide layer via special gas showers with the oxygen-argon mixture component-specific to a particular to produce a homogeneous oxide layer.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Description

Häufig ist es erforderlich, Metallbauteile mit einer Oxidschicht zu versehen, um den Bauteilen an ihrer Oberfläche bestimmte mechanische oder chemische Eigenschaften zu verleihen; auch als Haftvermittlerschicht werden Oxidschichten auf Metallbauteilen häufig benötigt, damit in weiteren Prozeßschritten Beschichtungen auf den Metallbauteilen vorgenommen werden können. Dies gilt z. B für Turbinenschaufeln darstellende Metallbauteile, die zunächst mit einer Bond- bzw. Oxidationsschutzschicht z. B. aus MCrAlY ("M" steht hier für verschiedene Metalle) oder PtAl bedeckt sind und später mit einer Oxidschicht als Haftvermittlerschicht zu versehen sind.It is often necessary to have metal components with an oxide layer to provide in order to determine the components on their surface impart mechanical or chemical properties; oxide layers are also used as an adhesion promoter layer Metal components often required, so in further process steps Coatings made on the metal components can be. This applies e.g. B representing turbine blades Metal components, initially with a bond or oxidation protection layer z. B. from MCrAlY ("M" stands for various metals) or PtAl and later covered with an oxide layer as an adhesion promoter layer.

Die US 5,763,107 offenbart ein Verfahren zum Herstellen einer Wärmedämmschicht für Superlegierungen, bei der unterhalb der Wärmedämmschicht eine Platin angereicherte Aluminiumschicht vorhanden ist, auf die eine dünne Oxidschicht aufgebracht wird. Die dünne Oxidschicht entsteht vorzugsweise durch einfaches Hochheizen in einer sauerstoffenthaltenden Atmosphäre.US 5,763,107 discloses a method of making a Thermal insulation layer for superalloys, in which below the Thermal insulation layer a platinum-enriched aluminum layer is present, on which a thin oxide layer is applied becomes. The thin oxide layer is preferably created by easy heating in an oxygen-containing The atmosphere.

Der Erfindung liegt die Aufgabe zugrunde, ein Verfahren zum Erzeugen einer homogenen Oxidschicht auf Metallbauteilen vorzuschlagen, mit dem sich die Oxidschicht kontrolliert und reproduzierbar aufbringen läßt.The invention has for its object a method for Propose creating a homogeneous oxide layer on metal components, with which the oxide layer is controlled and reproducible can be applied.

Zur Lösung dieser Aufgabe wird gemäß Anspruch 1 ein Verfahren zum Erzeugen einer homogenen Oxidschicht auf Metallbauteilen vorgeschlagen, bei dem die Metallbauteile in allen ihren Bereichen in einer Vakuumkammer gleichmäßig erwärmt werden und nach Erreichen einer vorgegebenen Temperatur mit einem Sauerstoff -Argon Gemisch für eine vorgegebene Zeitdauer von etwa 10 Min. mit einem vorbestimmten Druck zwischen 1x10-3 und 8x10-2 mbar beaufschlagt werden.To achieve this object, a method for producing a homogeneous oxide layer on metal components is proposed, in which the metal components are heated uniformly in all their areas in a vacuum chamber and after reaching a predetermined temperature with an oxygen-argon mixture for a predetermined period of time about 10 minutes with a predetermined pressure between 1x10 -3 and 8x10 -2 mbar.

Ein wesentlicher Vorteil des erfindungsgemäßen Verfahrens besteht darin, daß mit ihm homogene Oxidschichten kontrolliert auf mit MCrAlY oder PtAl beschichteten Metallbauteilen aufbringbar und reproduzierbar sind, also in ihrer Schichtdicke und Struktur gezielt erzeugt werden können. Damit besteht die Möglichkeit, die Oxidationsschicht im Hinblick auf Haftungsund andere mechanische oder chemische Eigenschaften gezielt als eine eigenständige Schicht zu optimieren.There is a significant advantage of the method according to the invention in that it controls homogeneous oxide layers on metal components coated with MCrAlY or PtAl can be applied and reproduced, that is to say in their layer thickness and structure can be created in a targeted manner. So that exists the possibility of considering the oxidation layer Haftungsund other mechanical or chemical properties to optimize as a separate layer.

Bei einer bevorzugten Ausführungsform des erfindungsgemäßen Verfahrens zum Erzeugen einer homogenen Oxidschicht auf Turbinenschaufeln, die als Basismaterial Nickel- oder Kobaltbasis aufweisen und mit MCrAlY oder PtAl beschichtet sind, werden die Turbinenschaufeln in einer Kammer untergebracht, die evakuiert wird. Danach erfolgt unter Berücksichtigung der Masseverteilung der Turbinenschaufeln eine Elektronenbestrahlung mit unterschiedlicher Dosierung für den Fuß, das Blatt und die Kopfplatte der Turbinenschaufeln, wobei wegen der größeren Masse in den Füßen und in der Kopfplatte dort eine erheblich höhere Dosierung an Elektronenbestrahlung als für das Blatt vorgesehen wird. Hat die Turbinenschaufel überall gleich eine Mindesttemperatur von etwa 750 bis 850°C erreicht, dann wird für eine Mindestzeit von etwa 10 Minuten ein Sauerstoff-Argon-Gemisch mit einem Partialdruck zwischen 1x10-3 und 8x10-2mbar in die evakuierte Kammer eingefüllt. Ergebnis ist eine Turbinenschaufel, die eine homogene Oxidschicht mit einer Dicke zwischen 0,01 bis 5 µm hat.In a preferred embodiment of the method according to the invention for producing a homogeneous oxide layer on turbine blades which have a nickel or cobalt base material and which are coated with MCrAlY or PtAl, the turbine blades are accommodated in a chamber which is evacuated. Then, taking into account the mass distribution of the turbine blades, electron irradiation with different doses for the foot, the blade and the top plate of the turbine blades takes place, whereby due to the greater mass in the feet and in the top plate there is a considerably higher dose of electron radiation than for the blade , If the turbine blade has reached a minimum temperature of around 750 to 850 ° C everywhere, an oxygen-argon mixture with a partial pressure between 1x10 -3 and 8x10 -2 mbar is filled into the evacuated chamber for a minimum of around 10 minutes. The result is a turbine blade that has a homogeneous oxide layer with a thickness between 0.01 and 5 µm.

Das beschriebene Verfahren kann in der Weise abgeändert werden, daß die mit einer Oxidschicht zu versehenden Metallbauteile über spezielle Gasduschen mit dem Sauerstoff-Argon-Gemisch bauteilspezifisch beaufschlagt werden, um eine besonders homogene Oxidschicht zu erzeugen.The described method can be modified in such a way that the metal components to be provided with an oxide layer via special gas showers with the oxygen-argon mixture component-specific to a particular to produce a homogeneous oxide layer.

Claims (1)

  1. Process for vacuum coating metal components, in which
    the metal components, in all their regions, are uniformly preheated in a vacuum chamber by means of electron irradiation to a temperature of approximately 800°C,
    characterized in that,
    after the predetermined temperature has been reached, in order to produce a homogeneous oxide layer on metal components coated with MCrAlY or PtAl, the said metal components are exposed to an oxygen/argon mixture for a time of approximately 10 minutes at a pressure of between 1 × 10-3 and 8 × 10-2 mbar.
EP99959190A 1998-09-30 1999-09-30 Method for vacuum coating metal components Expired - Lifetime EP1129231B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19845803 1998-09-30
DE19845803A DE19845803C2 (en) 1998-09-30 1998-09-30 Process for vacuum coating metal components
PCT/DE1999/003236 WO2000018977A2 (en) 1998-09-30 1999-09-30 Method for vacuum coating metal components

Publications (2)

Publication Number Publication Date
EP1129231A2 EP1129231A2 (en) 2001-09-05
EP1129231B1 true EP1129231B1 (en) 2002-11-20

Family

ID=7883452

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EP99959190A Expired - Lifetime EP1129231B1 (en) 1998-09-30 1999-09-30 Method for vacuum coating metal components

Country Status (5)

Country Link
US (1) US6589608B2 (en)
EP (1) EP1129231B1 (en)
JP (1) JP2002525435A (en)
DE (2) DE19845803C2 (en)
WO (1) WO2000018977A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1436441B2 (en) 2001-09-10 2012-11-28 University Of Virginia Patent Foundation Method for applying metallic alloy coatings and coated component
DE10232289B4 (en) * 2002-07-16 2005-04-14 Von Ardenne Anlagentechnik Gmbh Method and arrangement for producing a homogeneous oxide layer on a metal component
US20050123783A1 (en) * 2003-07-31 2005-06-09 Gregory Otto J. Composite used for thermal spray instrumentation and method for making the same

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6047348B2 (en) * 1980-07-04 1985-10-21 株式会社東芝 heat treatment equipment
US5514482A (en) * 1984-04-25 1996-05-07 Alliedsignal Inc. Thermal barrier coating system for superalloy components
JPS61194168A (en) * 1985-02-20 1986-08-28 Ishikawajima Harima Heavy Ind Co Ltd Treatment for passivation of stainless steel pipe
JP2768952B2 (en) * 1988-08-04 1998-06-25 忠弘 大見 Metal oxidation treatment apparatus and metal oxidation treatment method
US5262245A (en) * 1988-08-12 1993-11-16 United Technologies Corporation Advanced thermal barrier coated superalloy components
JP3037768B2 (en) * 1991-02-18 2000-05-08 大阪酸素工業株式会社 Passivation processing equipment
GB9426257D0 (en) * 1994-12-24 1995-03-01 Rolls Royce Plc Thermal barrier coating for a superalloy article and method of application
DE19703338C2 (en) * 1996-12-27 1998-11-12 Ardenne Anlagentech Gmbh Process for preheating workpieces during vacuum coating

Also Published As

Publication number Publication date
WO2000018977A3 (en) 2000-06-08
DE59903499D1 (en) 2003-01-02
JP2002525435A (en) 2002-08-13
EP1129231A2 (en) 2001-09-05
WO2000018977A2 (en) 2000-04-06
US20010031314A1 (en) 2001-10-18
US6589608B2 (en) 2003-07-08
DE19845803A1 (en) 2000-04-20
DE19845803C2 (en) 2002-10-17

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