EP1089593A3 - Ceramic heater - Google Patents

Ceramic heater Download PDF

Info

Publication number
EP1089593A3
EP1089593A3 EP00308583A EP00308583A EP1089593A3 EP 1089593 A3 EP1089593 A3 EP 1089593A3 EP 00308583 A EP00308583 A EP 00308583A EP 00308583 A EP00308583 A EP 00308583A EP 1089593 A3 EP1089593 A3 EP 1089593A3
Authority
EP
European Patent Office
Prior art keywords
heating elements
ceramic substrate
resistance
plural planar
ceramic heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00308583A
Other languages
German (de)
French (fr)
Other versions
EP1089593A2 (en
Inventor
Atsuo c/o NGK Insulators Ltd. Yamada
Shinji c/o NGK Insulators Ltd. Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of EP1089593A2 publication Critical patent/EP1089593A2/en
Publication of EP1089593A3 publication Critical patent/EP1089593A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • H05B3/143—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Surface Heating Bodies (AREA)

Abstract

A ceramic heater comprising a ceramic substrate having a heating face, and a resistance heat generator buried in the ceramic substrate, wherein the resistance heat generator comprises plural planar resistance heating elements arranged in a layered fashion as viewed in a thickness direction of the ceramic substrate, and each of said plural planar heating elements comprises a heat generation density-increased portion, and the heat generation density-increased portions of the respective plural planar heating elements are located in different portions, respectively.
EP00308583A 1999-10-01 2000-09-29 Ceramic heater Withdrawn EP1089593A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP28111599 1999-10-01
JP28111599A JP2001102157A (en) 1999-10-01 1999-10-01 Ceramic heater

Publications (2)

Publication Number Publication Date
EP1089593A2 EP1089593A2 (en) 2001-04-04
EP1089593A3 true EP1089593A3 (en) 2002-08-28

Family

ID=17634573

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00308583A Withdrawn EP1089593A3 (en) 1999-10-01 2000-09-29 Ceramic heater

Country Status (4)

Country Link
EP (1) EP1089593A3 (en)
JP (1) JP2001102157A (en)
KR (1) KR20010067260A (en)
TW (1) TW483285B (en)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6423949B1 (en) 1999-05-19 2002-07-23 Applied Materials, Inc. Multi-zone resistive heater
US6617553B2 (en) * 1999-05-19 2003-09-09 Applied Materials, Inc. Multi-zone resistive heater
JP3293594B2 (en) * 1999-06-29 2002-06-17 住友電気工業株式会社 Apparatus and method for heating protective member of optical fiber fusion spliced part
JP4744016B2 (en) * 2001-06-29 2011-08-10 京セラ株式会社 Manufacturing method of ceramic heater
JP3897563B2 (en) 2001-10-24 2007-03-28 日本碍子株式会社 Heating device
JP3925702B2 (en) 2002-03-18 2007-06-06 日本碍子株式会社 Ceramic heater
JP4026761B2 (en) 2002-03-28 2007-12-26 日本碍子株式会社 Ceramic heater
JP2005197074A (en) 2004-01-07 2005-07-21 Ngk Insulators Ltd Resistance heating element and heater
JP2005285355A (en) 2004-03-26 2005-10-13 Ngk Insulators Ltd Heating apparatus
TWI281833B (en) 2004-10-28 2007-05-21 Kyocera Corp Heater, wafer heating apparatus and method for manufacturing heater
JP4640842B2 (en) * 2006-10-11 2011-03-02 日本碍子株式会社 Heating device
KR101177749B1 (en) * 2007-11-27 2012-08-29 주식회사 코미코 Ceramic heater, method for manufacturing the same, and apparatus for depositing a thin film having the same
KR101525634B1 (en) * 2009-03-30 2015-06-03 엔지케이 인슐레이터 엘티디 Ceramic heater and method for producing same
US8637794B2 (en) * 2009-10-21 2014-01-28 Lam Research Corporation Heating plate with planar heating zones for semiconductor processing
US8791392B2 (en) 2010-10-22 2014-07-29 Lam Research Corporation Methods of fault detection for multiplexed heater array
US9633875B2 (en) * 2015-03-13 2017-04-25 Varian Semiconductor Equipment Associates, Inc. Apparatus for improving temperature uniformity of a workpiece
JP6567895B2 (en) * 2015-06-29 2019-08-28 京セラ株式会社 Sample holder and sample processing apparatus equipped with the same
KR102348108B1 (en) 2015-10-05 2022-01-10 주식회사 미코세라믹스 Substrate heating apparatus with enhanced temperature uniformity characteristic
JP6767833B2 (en) * 2016-09-29 2020-10-14 日本特殊陶業株式会社 Heating device
JP7303820B2 (en) * 2017-11-21 2023-07-05 ワトロー エレクトリック マニュファクチュアリング カンパニー Multi-zone pedestal heater with no vias
JP2020064841A (en) * 2018-10-11 2020-04-23 日本発條株式会社 Stage, film forming apparatus, and film processing apparatus
EP3866565B1 (en) * 2018-10-11 2024-04-17 NHK Spring Co., Ltd. Stage, film forming device, and film processing device
KR102608397B1 (en) * 2018-10-16 2023-12-01 주식회사 미코세라믹스 Middle zone independent control ceramic heater
KR102437076B1 (en) 2021-08-30 2022-08-29 주식회사 미코세라믹스 Substrate heating apparatus with enhanced temperature uniformity characteristic
KR20240025376A (en) 2022-08-18 2024-02-27 주식회사 미코세라믹스 Substrate heating apparatus with supressed crack generation
KR102615529B1 (en) * 2023-09-19 2023-12-19 주식회사 제스코 An electrostatic chuck with a two-layer heater pattern

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5331134A (en) * 1992-05-21 1994-07-19 Shin-Etsu Chemical Co., Ltd. Double-layered ceramic heater
JPH08236599A (en) * 1995-02-28 1996-09-13 Kyocera Corp Wafer holder
JPH08274147A (en) * 1995-03-30 1996-10-18 Kyocera Corp Wafer holding device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5331134A (en) * 1992-05-21 1994-07-19 Shin-Etsu Chemical Co., Ltd. Double-layered ceramic heater
JPH08236599A (en) * 1995-02-28 1996-09-13 Kyocera Corp Wafer holder
JPH08274147A (en) * 1995-03-30 1996-10-18 Kyocera Corp Wafer holding device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 01 31 January 1997 (1997-01-31) *
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 02 28 February 1997 (1997-02-28) *

Also Published As

Publication number Publication date
TW483285B (en) 2002-04-11
JP2001102157A (en) 2001-04-13
EP1089593A2 (en) 2001-04-04
KR20010067260A (en) 2001-07-12

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