EP1075897A1 - Lapping machine with two plates - Google Patents

Lapping machine with two plates Download PDF

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Publication number
EP1075897A1
EP1075897A1 EP00113746A EP00113746A EP1075897A1 EP 1075897 A1 EP1075897 A1 EP 1075897A1 EP 00113746 A EP00113746 A EP 00113746A EP 00113746 A EP00113746 A EP 00113746A EP 1075897 A1 EP1075897 A1 EP 1075897A1
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EP
European Patent Office
Prior art keywords
disc
drive shaft
axially parallel
working
grinding machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00113746A
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German (de)
French (fr)
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EP1075897B1 (en
Inventor
Volker Von Mackensen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Peter Wolters AG
Peter Wolters Werkzeugmaschinen GmbH
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Peter Wolters AG
Peter Wolters Werkzeugmaschinen GmbH
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Publication of EP1075897A1 publication Critical patent/EP1075897A1/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/11Lapping tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents

Definitions

  • the invention relates to a two-disc fine grinding machine according to the Preamble of claim 1.
  • From DE 195 47 085 is a lapping or polishing machine with an upper and one lower working disc, of which at least one by one Drive is driven in rotation. Between the work surfaces of the lower and upper Working disk, several rotor disks are arranged, the openings for Include workpieces and a toothing on the circumference, the Tooth teeth with an inner and an outer pin ring are engaged Rotation and propulsion of the rotor disks if at least one pin ring is in Rotation is offset. It is also a source of the supply of flowable Work equipment or lubricant provided that entered between the work surfaces becomes. External and internal interceptors catch the inside and outside of the Workers leaving the working gap and feed it to a filtration system. A what can either use a recycling tank or some other Connect process.
  • Cooling channels are provided in the carrier disk, to which a cooling medium is fed.
  • the invention has for its object to a two-disc grinding machine create the effort for the supply of the working fluid and the coolant reduced and optimal cooling is guaranteed.
  • the carrier disks are formed at least one radially sealed chamber which over axially parallel bores of the carrier disc is connected to the working surfaces.
  • At least one axially parallel channel is provided in each shaft, which is connected to a Source of cooling lubricant connected via a stationary feed device is.
  • an internally closed cooling circuit instead of an internally closed cooling circuit, as was previously the case, an open circuit is provided and the coolant is also lubricating or Work equipment. It is understood that a suitable cooling unit is provided is to bring the cooling lubricant to a low temperature before it Worktops is fed. Catching the radially from the gap between cooling lubricant emerging from the work surfaces is carried out in a known manner, about as described in DE 195 47 085, to which express reference is made becomes. The cooling lubricant collected can be recycled or filtered, before it is fed back to the work discs via the cooling unit.
  • the construction according to the invention ensures that the active ones Grinding zones at the top and bottom and therefore also below the workpieces be optimally cooled. The chips are also optimally removed. Through the The measure according to the invention increases the cutting performance and the service life of the grinding wheels considerably.
  • the drive shafts two or have more axially parallel channels, which with the feed device and with in Circumferential direction offset points of the chambers are connected.
  • the axially parallel channels can be formed with the help of a sleeve that is rotatably in the hollow drive shaft sits and on the outside one or more axially parallel Has grooves that form the cooling channels.
  • the chambers in the carrier disks can be connected via at least one connecting channel in the carrier disc via a radial hole in the drive shaft with the axially parallel channels in the drive shaft.
  • Another one Embodiment of the invention has the lower carrier disc spokes, which Connect the hub to a support section. The connecting channel can then in one or several spokes.
  • the feed device on the drive shafts is according to a further embodiment the invention with a stationary distributor ring surrounding the drive shaft provided, on which at least one feed line is attached. This is over a radial hole in the distributor ring is connected to an axially parallel ring chamber, which is formed between the distributor ring and the drive shaft. About a radial The bore in the drive shaft is then the annular chamber with at least one axially parallel channel connected in the drive shaft.
  • Fig. 1 is described in more detail, but with the explanation of such Parts are omitted in detail, which are usually components of grinding, lapping, Represent polishing or other two-disc machines.
  • a machine housing 10 of the fine grinding machine with lapping kinematics according to FIG. 1 has a lower part 12 and an upper part 14.
  • the upper part is 14 relative to the lower part 12 about a vertical axis.
  • the upper Part has an upper grinding wheel 16, which is composed of a carrier wheel 18 and a work disc 20 attached thereto by screwing.
  • the Grinding wheel 16 is oscillating but non-rotatably on an upper vertical drive shaft 22 suspended on which a gear 24 sits, which is not shown in detail Is driven by a suitable drive for the purpose of rotation of the Grinding wheel 16.
  • the drive shaft 22 is of a stationary one Surround feed device 26, which will be discussed in more detail below.
  • the feed device 26 is connected to two lines 28, 30, via which one Cooling lubricant is supplied.
  • the source of cooling lubricant is not shown. It has a filter and cooling unit for cooling the liquid and a pump to generate sufficient pressure.
  • the management of the Coolant to the grinding wheel 16 occurs through the hollow drive shaft 22 way to be described further below.
  • the carrier disk 18 has an inclined channel 32 which is in connection with a labyrinth 34, which contains several chambers for receiving the supplied Coolant.
  • the work disk 20 is with a pattern of axially parallel Provide through holes 36 through which liquid emerges to the work surface can.
  • the grinding wheel 16 can be described and not described with the aid Medium vertically are moved towards a lower grinding wheel 40 which is made up of a lower support plate 42 and a lower working plate 44.
  • the lower grinding wheel 40 is fixed in height, but is vertical Drive shaft 46 rotated. Again sits on the drive shaft 46 Gear 48, which can be driven by a drive motor, not shown.
  • Gear 48 which can be driven by a drive motor, not shown.
  • a further supply device 50 for cooling lubricant provided which is connected to two lines 52, 54.
  • the lines 52, 54 are like lines 28, 30 with a source of cooled and filtered Cooling lubricant connected. This can be identical to that for the lines 28, 30
  • the supply of the cooling lubricant to the lower grinding wheel 40 takes place via the hollow drive shaft 46 in a manner to be described and Wise.
  • the lower carrier plate 42 has a support section 56 which is screwed together is connected to the working disc 44, a hub 58 and spokes 60 between hub 58 and support section 56.
  • the support section 56 again has a cooling labyrinth 62, which is similar to the cooling labyrinth 34 and that with a pattern of axially parallel through holes 64 in the working disc 44 the facing work surface is connected.
  • the cooling labyrinth 42 is over Channels 66 in the spokes 60 are connected to the feed in the drive shaft 46 in a manner that will be described below.
  • a ring 70 can be seen, which is arranged stationary and surrounds the drive shaft 22 and with one surrounding the drive shaft and with this rotating sleeve 72 forms an annular chamber 74 which over a radial bore 76 or 78 is connected to the line 28 or 30.
  • radial bores 80 and 82 are radial bores 80 and 82, respectively intended.
  • the radial bores are connected to axially parallel channels 84 and 86, which are formed by a sleeve 88 which is rotatably within the hollow Wave 22 sits.
  • the attachment of the bushing 88 is not dealt with in detail.
  • the ring body 90 has a first Channel arrangement 92 and a second channel arrangement 94, which one Connect axially parallel channel 84 or 86 to a channel 32 in the carrier disk 18, around cooling lubricant at several circumferentially spaced locations initiate into the labyrinth 34.
  • the grinding wheel 16 is surrounded by a hood 96 which is adjustable in height on Housing part 14 is attached.
  • An adjustment cylinder 98 is used for adjustment. How 1, the side wall of the hood 96 extends over the work surface the grinding wheel 16 downward when the grinding wheel 16 in Is lowered towards the lower grinding wheel 40. This is left in Fig. 1 by the dashed double line indicated.
  • An arrangement designated 100 is used for measuring purposes during grinding, on what is not discussed further. It has a guided through the hollow shaft 22 Rod that is led out of the shaft 22 at the upper end.
  • the feed device 50 has a feed ring 110 on, which stationary surrounds the lower end of the drive shaft 46 and the one with the two Lines 52, 54 is connected.
  • Radial bores 112, 114 are with a Annulus 116 communicates between the ring 50 and one on the shaft 46 seated socket 118 is formed.
  • Bushing 118 and shaft 46 are aligned radial bores, which are in connection with axially parallel Channels 120, 122 in the shaft 46. These are formed by axially parallel grooves a sleeve 124 which is rotatably arranged in the hollow shaft 46.
  • the annular chamber 116 is sealed by an upper and a lower lip seal, as well as chamber 74 of distributor 26 on the upper shaft 22. With the help of one built on the other side of the seals Pressure from air or a liquid under pressure will improve sealing maintain and prevents the cooling lubricant introduced under pressure escapes.
  • the axially parallel channels 120, 122 are via upper radial bores in the shaft 46 in communication with the channels 66 in the spokes 60, the hub assembly 58 has connecting channels, but not provided with reference numerals are.
  • the cooling lubricant can therefore also in rotation of the grinding wheel 40 in the cooling labyrinths 62 are fed in and from there via the holes 64 to Exit the work surface.
  • An inner pin ring 126 is connected to an inner shaft 128 within the shaft 46 driven by a toothed belt drive 130, which is driven by a motor 132 is driven. Furthermore, an outer pin collar 134 is shown, which the grinding wheel 40 surrounds and can also be driven in rotation, which is not shown here is. Only one lifting device 136 is shown, but in detail not to be described and with which the pin collar 134 is adjustable in height is. This applies in particular to lowering the pin collar 134 during loading and unloading of the workpieces. As is known, the pin wreaths are not used to drive the shown, toothed rotor discs on the circumference.
  • a rod 138 in the inner shaft 128 with an upper plate 140 is another Part of the measuring device shown in Fig. 2. This will be discussed in detail not received.
  • the cooling lubricant escaping radially outwards is through a side wall 142, which surrounds the lower grinding wheel 40 like a trough.
  • the Cooling lubricant is collected in a tub, then filtered and cooled and fed again.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)

Abstract

The twin-disc precision grinder has a housing (10) and a top and bottom operating disc (20.44) each of which is fixed to a support disc (18,42). A top and bottom vertical drive shaft drive the operating discs which are pivot mounted in the housing by means of roller bearings and are driven by a motor via gears.. A cooler cools the operating discs by means of cooling fluid. The surface of the support disc facing the operating disc has at least one radially sealed chamber (34,62) connected to the operating surface by means of axially parallel holes (36,64) in the operating discs. Each shaft (22,46) has at least one axially parallel duct supplied with cooling lubricating fluid by means of a stationary inlet (26,50).

Description

Die Erfindung bezieht sich auf eine Zweischeiben-Feinschleifmaschine nach dem Oberbegriff des Patentanspruchs 1.The invention relates to a two-disc fine grinding machine according to the Preamble of claim 1.

Aus DE 195 47 085 ist eine Läpp- oder Poliermaschine mit einer oberen und einer unteren Arbeitsscheibe bekannt geworden, von denen mindestens eine von einem Antrieb drehend angetrieben ist. Zwischen den Arbeitsflächen der unteren und oberen Arbeitsscheibe sind mehrere Läuferscheiben angeordnet, die Öffnungen zur Aufnahme von Werkstücken aufweisen sowie eine Zahnung am Umfang, wobei die Zahnung mit einem inneren und einem äußeren Stiftkranz in Eingriff ist zwecks Verdrehung und Vortrieb der Läuferscheiben, wenn mindestens ein Stiftkranz in Drehung versetzt wird. Ferner ist eine Quelle für die Zufuhr von fließfähigem Arbeitsmittel oder Schmiermittel vorgesehen, das zwischen die Arbeitsflächen eingetragen wird. Äußere und innere Abfangmittel fangen das innen und außen aus dem Arbeitsspalt austretende Mittel ab und führen es einer Filtrieranlage zu. Eine Welche kann die Kanäle wahlweise mit einem Recyclingtank oder einem anderweitigen Ablauf verbinden. From DE 195 47 085 is a lapping or polishing machine with an upper and one lower working disc, of which at least one by one Drive is driven in rotation. Between the work surfaces of the lower and upper Working disk, several rotor disks are arranged, the openings for Include workpieces and a toothing on the circumference, the Tooth teeth with an inner and an outer pin ring are engaged Rotation and propulsion of the rotor disks if at least one pin ring is in Rotation is offset. It is also a source of the supply of flowable Work equipment or lubricant provided that entered between the work surfaces becomes. External and internal interceptors catch the inside and outside of the Workers leaving the working gap and feed it to a filtration system. A what can either use a recycling tank or some other Connect process.

Es ist ferner bekannt, derartige Arbeitsmaschinen auch zu kühlen, indem insbesondere in der Trägerscheibe Kühlkanäle vorgesehen sind, denen ein Kühlmedium zugeführt wird.It is also known to cool such machines, in particular by Cooling channels are provided in the carrier disk, to which a cooling medium is fed.

Der Erfindung liegt die Aufgabe zugrunde, eine Zweischeiben-Schleifmaschine zu schaffen, bei der der Aufwand für die Zufuhr des Arbeitsmittels und des Kühlmittels verringert und eine optimale Kühlung gewährleistet ist.The invention has for its object to a two-disc grinding machine create the effort for the supply of the working fluid and the coolant reduced and optimal cooling is guaranteed.

Diese Aufgabe wird durch die Merkmale des Patentanspruchs 1 gelöst.This object is achieved by the features of patent claim 1.

Bei der erfindungsgemäßen Zweischeiben-Feinschleifmaschine, die normalerweise eine Läppkinematik hat, ist in der der jeweiligen Arbeitsscheibe zugekehrten Fläche der Trägerscheiben mindestens eine radial abgedichtete Kammer geformt, die über achsparallele Bohrungen der Trägerscheibe mit deren Arbeitsflächen verbunden ist. In jeder Welle ist mindestens ein achsparalleler Kanal vorgesehen, der mit einer Quelle für Kühlschmierflüssigkeit über eine stationäre Zuführvorrichtung verbunden ist.In the two-disc fine grinding machine according to the invention, which normally has lapping kinematics in the surface facing the respective work disc the carrier disks are formed at least one radially sealed chamber which over axially parallel bores of the carrier disc is connected to the working surfaces. At least one axially parallel channel is provided in each shaft, which is connected to a Source of cooling lubricant connected via a stationary feed device is.

Anstelle eines intern geschlossenen Kühlkreislaufes, wie dieser bisher üblich war, wird ein offener Kreislauf vorgesehen, und das Kühlmittel ist gleichzeitig Schmier- bzw. Arbeitsmittel. Es versteht sich, daß ein geeignetes Kühlaggregat vorgesehen ist, um das Kühlschmiermittel auf eine niedrige Temperatur zu bringen, bevor es den Arbeitsflächen zugeführt wird. Das Auffangen des radial aus dem Spalt zwischen den Arbeitsflächen austretenden Kühlschmiermittels erfolgt in bekannter Weise, etwa wie in DE 195 47 085 beschrieben, worauf ausdrücklich Bezug genommen wird. Die aufgefangene Kühlschmierflüssigkeit kann recycelt bzw. gefiltert werden, bevor sie über das Kühlaggregat erneut den Arbeitsscheiben zugeführt wird. Mit Hilfe der erfindungsgemäßen Konstruktion ist sichergestellt, daß die aktiven Schleifzonen gleichzeitig oben und unten und somit auch unterhalb der Werkstücke optimal gekühlt werden. Ferner werden die Späne optimal abgeführt. Durch die erfindungsgemäße Maßnahme erhöhen sich die Zerspanleistung und die Standzeit der Schleifscheiben erheblich.Instead of an internally closed cooling circuit, as was previously the case, an open circuit is provided and the coolant is also lubricating or Work equipment. It is understood that a suitable cooling unit is provided is to bring the cooling lubricant to a low temperature before it Worktops is fed. Catching the radially from the gap between cooling lubricant emerging from the work surfaces is carried out in a known manner, about as described in DE 195 47 085, to which express reference is made becomes. The cooling lubricant collected can be recycled or filtered, before it is fed back to the work discs via the cooling unit. With The construction according to the invention ensures that the active ones Grinding zones at the top and bottom and therefore also below the workpieces be optimally cooled. The chips are also optimally removed. Through the The measure according to the invention increases the cutting performance and the service life of the grinding wheels considerably.

In einer Ausgestaltung der Erfindung ist vorgesehen, daß die Antriebswellen zwei oder mehr achsparallele Kanäle aufweisen, die mit der Zuführvorrichtung und mit in Umlaufrichtung versetzt angeordneten Stellen der Kammern verbunden sind. Die achsparallelen Kanäle können mit Hilfe einer Hülse gebildet werden, die drehfest in der hohlen Antriebswelle sitzt und an der Außenseite einen oder mehrere achsparallele Nuten aufweist, welche die Kühlkanäle bilden.In one embodiment of the invention it is provided that the drive shafts two or have more axially parallel channels, which with the feed device and with in Circumferential direction offset points of the chambers are connected. The axially parallel channels can be formed with the help of a sleeve that is rotatably in the hollow drive shaft sits and on the outside one or more axially parallel Has grooves that form the cooling channels.

Die Kammern in den Trägerscheiben können über mindestens einen Verbindungskanal in der Trägerscheibe über eine radiale Bohrung in der Antriebswelle mit den achsparallelen Kanälen in der Antriebswelle verbunden sein. Nach einer anderen Ausgestaltung der Erfindung hat die untere Trägerscheibe Speichen, welche eine Nabe mit einem Tragabschnitt verbinden. Der Verbindungskanal kann dann in einer oder mehreren Speichen geformt sein.The chambers in the carrier disks can be connected via at least one connecting channel in the carrier disc via a radial hole in the drive shaft with the axially parallel channels in the drive shaft. Another one Embodiment of the invention has the lower carrier disc spokes, which Connect the hub to a support section. The connecting channel can then in one or several spokes.

Die Zuführvorrichtung an den Antriebswellen wird nach einer weiteren Ausgestaltung der Erfindung mit einem die Antriebswelle umgebenden stationären Verteilerring versehen, an dem mindestens eine Zuführleitung angebracht ist. Diese ist über eine radiale Bohrung im Verteilerring mit einer achsparallelen Ringkammer verbunden, die zwischen Verteilerring und Antriebswelle ausgebildet ist. Über eine radiale Bohrung in der Antriebswelle ist dann die Ringkammer mit mindestens einem achsparallelen Kanal in der Antriebswelle verbunden.The feed device on the drive shafts is according to a further embodiment the invention with a stationary distributor ring surrounding the drive shaft provided, on which at least one feed line is attached. This is over a radial hole in the distributor ring is connected to an axially parallel ring chamber, which is formed between the distributor ring and the drive shaft. About a radial The bore in the drive shaft is then the annular chamber with at least one axially parallel channel connected in the drive shaft.

Die Erfindung wird nachfolgend anhand eines in Zeichnungen dargestellten Ausführungsbeispiels näher erläutert.

  • Fig. 1 zeigt im Schnitt eine Feinschleifmaschine nach der Erfindung.
  • Fig. 2 zeigt vergrößert den oberen Teil der Maschine nach Fig. 1.
  • Fig. 3 zeigt vergrößert den unteren Teil der Maschine nach Fig. 1.
  • The invention is explained in more detail below with reference to an embodiment shown in the drawings.
  • Fig. 1 shows in section a fine grinding machine according to the invention.
  • FIG. 2 shows an enlarged view of the upper part of the machine according to FIG. 1.
  • 3 shows an enlarged view of the lower part of the machine according to FIG. 1.
  • Zunächst wird Fig. 1 näher beschrieben, wobei jedoch auf die Erläuterung solcher Teile im Detail verzichtet wird, die üblicherweise Bestandteile von Schleif-, Läpp-, Polier- oder sonstigen Zweischeibenmaschinen darstellen.First, Fig. 1 is described in more detail, but with the explanation of such Parts are omitted in detail, which are usually components of grinding, lapping, Represent polishing or other two-disc machines.

    Ein Maschinengehäuse 10 der Feinschleifmaschine mit Läppkinematik nach Fig. 1 weist einen unteren Teil 12 und einen oberen Teil 14 auf. Der obere Teil 14 ist gegenüber dem unteren Teil 12 um eine vertikale Achse verschwenkbar. Der obere Teil weist eine obere Schleifscheibe 16 auf, die sich aus einer Trägerscheibe 18 und einer daran durch Verschraubung befestigten Arbeitsscheibe 20 zusammensetzt. Die Schleifscheibe 16 ist pendelnd, jedoch drehfest an einer oberen vertikalen Antriebswelle 22 aufgehängt, auf der ein Zahnrad 24 sitzt, das auf nicht näher dargestellte Art und Weise von einem geeigneten Antrieb angetrieben ist zwecks Rotation der Schleifscheibe 16. Am oberen Ende ist die Antriebswelle 22 von einer stationären Zuführvorrichtung 26 umgeben, auf die weiter unten noch näher eingegangen wird. Die Zuführvorrichtung 26 ist mit zwei Leitungen 28, 30 verbunden, über die eine Kühlschmierflüssigkeit zugeführt wird. Die Quelle für Kühlschmierflüssigkeit ist nicht dargestellt. Sie weist ein Filter- und Kühlaggregat zur Kühlung der Flüssigkeit auf sowie eine Pumpe zur Erzeugung eines ausreichenden Druckes. Die Leitung der Kühlflüssigkeit zur Schleifscheibe 16 erfolgt durch die hohle Antriebswelle 22 auf weiter unten noch zu beschreibende Art und Weise. In Fig. 1 ist zu erkennen, daß die Trägerscheibe 18 einen schrägen Kanal 32 aufweist, der in Verbindung ist mit einem Labyrinth 34, das mehrere Kammern enthält zur Aufnahme der zugeführten Kühlschmierflüssigkeit. Die Arbeitsscheibe 20 ist mit einem Muster von achsparallelen Durchbohrungen 36 versehen, über die Flüssigkeit zur Arbeitsfläche austreten kann.A machine housing 10 of the fine grinding machine with lapping kinematics according to FIG. 1 has a lower part 12 and an upper part 14. The upper part is 14 relative to the lower part 12 about a vertical axis. The upper Part has an upper grinding wheel 16, which is composed of a carrier wheel 18 and a work disc 20 attached thereto by screwing. The Grinding wheel 16 is oscillating but non-rotatably on an upper vertical drive shaft 22 suspended on which a gear 24 sits, which is not shown in detail Is driven by a suitable drive for the purpose of rotation of the Grinding wheel 16. At the upper end, the drive shaft 22 is of a stationary one Surround feed device 26, which will be discussed in more detail below. The feed device 26 is connected to two lines 28, 30, via which one Cooling lubricant is supplied. The source of cooling lubricant is not shown. It has a filter and cooling unit for cooling the liquid and a pump to generate sufficient pressure. The management of the Coolant to the grinding wheel 16 occurs through the hollow drive shaft 22 way to be described further below. In Fig. 1 it can be seen that the carrier disk 18 has an inclined channel 32 which is in connection with a labyrinth 34, which contains several chambers for receiving the supplied Coolant. The work disk 20 is with a pattern of axially parallel Provide through holes 36 through which liquid emerges to the work surface can.

    Die Schleifscheibe 16 kann mit Hilfe nicht näher dargestellter und beschriebener Mittel vertikal bewegt werden in Richtung einer unteren Schleifscheibe 40, die aus einer unteren Trägerscheibe 42 und einer unteren Arbeitsscheibe 44 besteht. Die untere Schleifscheibe 40 ist in der Höhe fest, wird jedoch über eine vertikale Antriebswelle 46 in Drehung versetzt. Auf der Antriebswelle 46 sitzt wiederum ein Zahnrad 48, das von einem nicht gezeigten Antriebsmotor antreibbar ist. Am unteren Ende der Antriebswelle 46 ist eine weitere Zuführvorrichtung 50 für Kühlschmiermittel vorgesehen, die mit zwei Leitungen 52, 54 in Verbindung steht. Die Leitungen 52, 54 sind wie die Leitungen 28, 30 mit einer Quelle für gekühltes und gefiltertes Kühlschmiermittel verbunden. Diese kann identisch mit der für die Leitungen 28, 30 sein. Die Zufuhr des Kühlschmiermittels zur unteren Schleifscheibe 40 erfolgt über die hohle Antriebswelle 46 auf eine noch zu beschreibende Art und Weise. The grinding wheel 16 can be described and not described with the aid Medium vertically are moved towards a lower grinding wheel 40 which is made up of a lower support plate 42 and a lower working plate 44. The lower grinding wheel 40 is fixed in height, but is vertical Drive shaft 46 rotated. Again sits on the drive shaft 46 Gear 48, which can be driven by a drive motor, not shown. At the bottom At the end of the drive shaft 46 is a further supply device 50 for cooling lubricant provided which is connected to two lines 52, 54. The lines 52, 54 are like lines 28, 30 with a source of cooled and filtered Cooling lubricant connected. This can be identical to that for the lines 28, 30 The supply of the cooling lubricant to the lower grinding wheel 40 takes place via the hollow drive shaft 46 in a manner to be described and Wise.

    Die untere Trägerscheibe 42 weist einen Tragabschnitt 56 auf, der über eine Verschraubung mit der Arbeitsscheibe 44 verbunden ist, eine Nabe 58 sowie Speichen 60 zwischen Nabe 58 und Tragabschnitt 56. Der Tragabschnitt 56 weist wiederum ein Kühllabyrinth 62 auf, das ähnliche wie das Kühllabyrinth 34 ausgebildet ist und das über ein Muster achsparalleler Durchbohrungen 64 in der Arbeitsscheibe 44 mit der zugekehrten Arbeitsfläche in Verbindung steht. Das Kühllabyrinth 42 ist über Kanäle 66 in den Speichen 60 mit der Zuführung in der Antriebswelle 46 verbunden auf eine Art und Weise, die weiter unten noch beschrieben wird.The lower carrier plate 42 has a support section 56 which is screwed together is connected to the working disc 44, a hub 58 and spokes 60 between hub 58 and support section 56. The support section 56 again has a cooling labyrinth 62, which is similar to the cooling labyrinth 34 and that with a pattern of axially parallel through holes 64 in the working disc 44 the facing work surface is connected. The cooling labyrinth 42 is over Channels 66 in the spokes 60 are connected to the feed in the drive shaft 46 in a manner that will be described below.

    Aus Fig. 2 geht die Zuführvorrichtung 26 für die Kühlschmierflüssigkeit zur oberen Schleifscheibe 16 deutlicher hervor. Man erkennt einen Ring 70, der stationär angeordnet ist und die Antriebswelle 22 umgibt und mit einer die Antriebswelle umgebenden und mit dieser mitdrehenden Buchse 72 eine Ringkammer 74 bildet, die über eine radiale Bohrung 76 bzw. 78 mit der Leitung 28 bzw. 30 verbunden ist. In der Buchse 72 und dazu ausgerichtet in der Welle 22 sind radiale Bohrungen 80 bzw. 82 vorgesehen. Die radialen Bohrungen sind verbunden mit achsparallelen Kanälen 84 bzw. 86, welche von einer Hülse 88 gebildet sind, die drehfest innerhalb der hohlen Welle 22 sitzt. Auf die Anbringung der Buchse 88 wird im einzelnen nicht eingegangen. Wie erkennbar, ist mithin jeweils ein achsparalleler Kanal in der Welle 22 mit einer Leitung 28 bzw. 30 verbunden. Es ist jedoch auch denkbar, mehr als zwei achsparallele Kanäle vorzusehen und mit der Ringkammer 74 zu verbinden. 2, the supply device 26 for the cooling lubricant goes to the upper one Grinding wheel 16 more clearly. A ring 70 can be seen, which is arranged stationary and surrounds the drive shaft 22 and with one surrounding the drive shaft and with this rotating sleeve 72 forms an annular chamber 74 which over a radial bore 76 or 78 is connected to the line 28 or 30. In the Bushing 72 and aligned with it in shaft 22 are radial bores 80 and 82, respectively intended. The radial bores are connected to axially parallel channels 84 and 86, which are formed by a sleeve 88 which is rotatably within the hollow Wave 22 sits. The attachment of the bushing 88 is not dealt with in detail. As can be seen, there is therefore an axially parallel channel in the shaft 22 connected to a line 28 or 30. However, it is also conceivable to have more than two Provide axially parallel channels and connect to the annular chamber 74.

    Am unteren Ende der Welle 22 sitzt ein Ringkörper drehfest auf der Welle, der seinerseits mit der Trägerscheibe 18 verschraubt ist. Der Ringkörper 90 weist eine erste Kanalanordnung 92 und eine zweite Kanalanordnung 94 auf, welche einen achsparallelen Kanal 84 bzw. 86 mit einem Kanal 32 in der Trägerscheibe 18 verbinden, um an mehreren in Umfangsrichtung beabstandeten Stellen Kühlschmiermittel in das Labyrinth 34 einzuleiten.At the lower end of the shaft 22, an annular body sits on the shaft in a rotationally fixed manner is screwed to the carrier disk 18. The ring body 90 has a first Channel arrangement 92 and a second channel arrangement 94, which one Connect axially parallel channel 84 or 86 to a channel 32 in the carrier disk 18, around cooling lubricant at several circumferentially spaced locations initiate into the labyrinth 34.

    Die Schleifscheibe 16 ist von einer Haube 96 umgeben, die höhenverstellbar am Gehäuseteil 14 angebracht ist. Zur Verstellung dient ein Verstellzylinder 98. Wie aus Fig. 1 hervorgeht, erstreckt sich die Seitenwand der Haube 96 über die Arbeitsfläche der Schleifscheibe 16 nach unten hinaus, wenn die Schleifscheibe 16 in Richtung unterer Schleifscheibe 40 abgesenkt wird. Dies ist in Fig. 1 links durch die gestrichelte Doppellinie angedeutet.The grinding wheel 16 is surrounded by a hood 96 which is adjustable in height on Housing part 14 is attached. An adjustment cylinder 98 is used for adjustment. How 1, the side wall of the hood 96 extends over the work surface the grinding wheel 16 downward when the grinding wheel 16 in Is lowered towards the lower grinding wheel 40. This is left in Fig. 1 by the dashed double line indicated.

    Eine mit 100 bezeichnete Anordnung dient Meßzwecken beim Schleifen, worauf nicht weiter eingegangen wird. Sie weist eine durch die hohle Welle 22 geführte Stange auf, die am oberen Ende aus der Welle 22 herausgeführt ist.An arrangement designated 100 is used for measuring purposes during grinding, on what is not discussed further. It has a guided through the hollow shaft 22 Rod that is led out of the shaft 22 at the upper end.

    Wie aus Fig. 3 zu erkennen, weist die Zuführvorrichtung 50 einen Zuführring 110 auf, der stationär das untere Ende der Antriebswelle 46 umgibt und der mit den beiden Leitungen 52, 54 verbunden ist. Radiale Bohrungen 112, 114 sind mit einer Ringkammer 116 in Verbindung, die zwischen dem Ring 50 und einer auf der Welle 46 sitzenden Buchse 118 gebildet ist. Die Buchse 118 und die Welle 46 weisen ausgerichtete radiale Bohrungen auf, die in Verbindung stehen mit achsparallelen Kanälen 120, 122 in der Welle 46. Diese werden gebildet durch achsparallele Nuten einer Hülse 124, die drehfest in der hohlen Welle 46 angeordnet ist. Wie erkennbar, ist die Ringkammer 116 durch eine obere und eine untere Lippendichtung abgedichtet, ebenso wie die Kammer 74 der Verteilvorrichtung 26 an der oberen Welle 22. Mit Hilfe eines jeweils auf der anderen Seite der Dichtungen aufgebauten Drucks durch Luft oder eine Flüssigkeit unter Druck wird eine verbesserte Abdichtung erhalten und verhindert, daß das unter Druck eingeleitete Kühlschmiermittel entweicht.As can be seen from FIG. 3, the feed device 50 has a feed ring 110 on, which stationary surrounds the lower end of the drive shaft 46 and the one with the two Lines 52, 54 is connected. Radial bores 112, 114 are with a Annulus 116 communicates between the ring 50 and one on the shaft 46 seated socket 118 is formed. Bushing 118 and shaft 46 are aligned radial bores, which are in connection with axially parallel Channels 120, 122 in the shaft 46. These are formed by axially parallel grooves a sleeve 124 which is rotatably arranged in the hollow shaft 46. How recognizable the annular chamber 116 is sealed by an upper and a lower lip seal, as well as chamber 74 of distributor 26 on the upper shaft 22. With the help of one built on the other side of the seals Pressure from air or a liquid under pressure will improve sealing maintain and prevents the cooling lubricant introduced under pressure escapes.

    Die achsparallelen Kanäle 120, 122 sind über obere radiale Bohrungen in der Welle 46 mit den Kanälen 66 in den Speichen 60 in Verbindung, wobei die Nabenanordnung 58 Verbindungskanäle aufweist, die jedoch nicht mit Bezugszeichen versehen sind. Das Kühlschmiermittel kann daher auch bei Drehung der Schleifscheibe 40 in die Kühllabyrinthe 62 eingespeist werden und von dort über die Bohrungen 64 zur Arbeitsfläche hin austreten. The axially parallel channels 120, 122 are via upper radial bores in the shaft 46 in communication with the channels 66 in the spokes 60, the hub assembly 58 has connecting channels, but not provided with reference numerals are. The cooling lubricant can therefore also in rotation of the grinding wheel 40 in the cooling labyrinths 62 are fed in and from there via the holes 64 to Exit the work surface.

    Ein innerer Stiftkranz 126 wird über eine Innenwelle 128 innerhalb der Welle 46 angetrieben, und zwar über einen Zahnriemenantrieb 130, der von einem Motor 132 angetrieben ist. Ferner ist ein äußerer Stiftkranz 134 gezeigt, der die Schleifscheibe 40 umgibt und ebenfalls drehend angetrieben sein kann, was hier jedoch nicht dargestellt ist. Es ist lediglich eine Hubvorrichtung 136 gezeigt, die jedoch im einzelnen nicht beschrieben werden soll und mit der der Stiftkranz 134 in der Höhe verstellbar ist. Dies gilt insbesondere zum Absenken des Stiftkranzes 134 beim Be- und Entladen der Werkstücke. Wie bekannt, dienen die Stiftkränze zum Antrieb der nicht gezeigten, am Umfang gezahnten Läuferscheiben.An inner pin ring 126 is connected to an inner shaft 128 within the shaft 46 driven by a toothed belt drive 130, which is driven by a motor 132 is driven. Furthermore, an outer pin collar 134 is shown, which the grinding wheel 40 surrounds and can also be driven in rotation, which is not shown here is. Only one lifting device 136 is shown, but in detail not to be described and with which the pin collar 134 is adjustable in height is. This applies in particular to lowering the pin collar 134 during loading and unloading of the workpieces. As is known, the pin wreaths are not used to drive the shown, toothed rotor discs on the circumference.

    Eine Stange 138 in der inneren Welle 128 mit einem oberen Teller 140 ist ein weiteres Teil der in Fig. 2 dargestellten Meßvorrichtung. Auf diese wird im einzelnen nicht eingegangen.A rod 138 in the inner shaft 128 with an upper plate 140 is another Part of the measuring device shown in Fig. 2. This will be discussed in detail not received.

    Das radial nach außen austretende Kühlschmiermittel wird durch eine Seitenwand 142, welche die untere Schleifscheibe 40 wannenartig umgibt, aufgefangen. Das Kühlschmiermittel wird in einer Wanne gesammelt, dann gefiltert sowie gekühlt und erneut zugeführt. Entsprechend wird auch das zwischen innerem Stiftkranz 126 und dem Innenrand der Schleifscheibe 40 austretende Kühlschmiermittel nach unten geleitet und auf nicht gezeigte Art und Weise aufgefangen, damit es dem Kreislauf wieder zugeführt werden kann.The cooling lubricant escaping radially outwards is through a side wall 142, which surrounds the lower grinding wheel 40 like a trough. The Cooling lubricant is collected in a tub, then filtered and cooled and fed again. Correspondingly, that between the inner crown 126 and coolant emerging from the inner edge of the grinding wheel 40 downward directed and collected in a manner not shown, so that it is circulatory can be fed again.

    Claims (6)

    Zweischeiben-Feinschleifmaschine mit einem Maschinengehäuse, einer oberen und einer unteren Arbeitsscheibe, die jeweils an einer Trägerscheibe befestigt sind, einer oberen und einer unteren vertikalen Antriebswelle zum Antrieb der Arbeitsscheiben, die mittels Rollenlager im Maschinengehäuse drehbar gelagert und von einem Motor über Getriebemittel antreibbar sind, und mit einer Kühlvorrichtung, die mittels Kühlflüssigkeit die Arbeitsscheiben kühlt, dadurch gekennzeichnet, daß in der der jeweiligen Arbeitsscheibe (20, 44) zugekehrten Fläche der Trägerscheibe (18, 42) mindestens eine radial abgedichtete Kammer (34, 62) geformt ist, die über achsparallele Bohrungen (36, 64) der Arbeitsscheiben (20, 44) mit deren Arbeitsfläche verbunden ist, und jede Welle (22, 46) mindestens einen achsparallelen Kanal (86, 88, 120, 122) aufweist, dem von einer Quelle für Kühlschmierflüssigkeit über eine stationäre Zuführvorrichtung (26, 50) Kühlschmierflüssigkeit zugeführt wird.Two-disc fine grinding machine with a machine housing, an upper one and a lower working disc, each attached to a carrier disc are, an upper and a lower vertical drive shaft for driving the Working disks that are rotatably mounted in the machine housing by means of roller bearings and can be driven by a motor via transmission means, and with a cooling device, which cools the working disks by means of coolant characterized in that facing the respective work disc (20, 44) Surface of the carrier disc (18, 42) at least one radially sealed chamber (34, 62) is formed, the axially parallel bores (36, 64) of the working disks (20, 44) is connected to the working surface thereof, and each shaft (22, 46) has at least one axially parallel channel (86, 88, 120, 122), that of a source of cooling lubricant via a stationary feed device (26, 50) Cooling lubricant is supplied. Zweischeiben-Schleifmaschine nach Anspruch 1, dadurch gekennzeichnet, daß mindestens eine der Arbeitswellen (22, 46) zwei oder mehr achsparallele Kanäle (86, 88, 120, 122) aufweist, die mit der Zuführvorrichtung (26, 50) und mit in Umfangsrichtung versetzt angeordneten Stellen der Kammern (34, 62) verbunden sind.Two-disc grinding machine according to claim 1, characterized in that at least one of the working shafts (22, 46) has two or more axially parallel channels (86, 88, 120, 122), which with the feed device (26, 50) and with in Locations of the chambers (34, 62) arranged offset in the circumferential direction are connected are. Zweischeiben-Schleifmaschine nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß die Kammern (34, 62) über mindestens einen Verbindungskanal (32, 66) in der Trägerscheibe (18, 42) über eine radiale Bohrung in der Antriebswelle (22, 46) mit dem achsparallelen Kanal (86, 88, 120, 122) in der Antriebswelle (22, 46) verbunden ist.Two-disc grinding machine according to claim 1 or 2, characterized in that that the chambers (34, 62) via at least one connecting channel (32, 66) in the carrier disc (18, 42) via a radial bore in the drive shaft (22, 46) with the axially parallel channel (86, 88, 120, 122) in the drive shaft (22, 46) is connected. Zweischeiben-Schleifmaschine nach Anspruch 3, dadurch gekennzeichnet, daß die untere Trägerscheibe (42) einen mit der Arbeitsscheibe (44) verbundenen Tragschnitt (56), eine auf der Antriebswelle (46) sitzende Nabe (58) und Speichen (60) zwischen Nabe und Tragabschnitt aufweist und der Verbindungskanal (66) durch eine Speiche (60) geführt ist.Two-disc grinding machine according to claim 3, characterized in that the lower carrier disc (42) is connected to the working disc (44) Carrying cut (56), a hub (58) seated on the drive shaft (46) and Has spokes (60) between the hub and the support section and the connecting channel (66) is guided through a spoke (60). Zweischeiben-Schleifmaschine nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß die Zuführvorrichtung (26, 50) einen die Antriebswelle (22, 46) im Abstand zur Trägerscheibe umgebenen stationären Verteilerring (70,110) aufweist, an dem mindestens eine Zuführleitung (28, 30, 52, 54) angebracht ist, die über eine radiale Bohrung (76, 78, 112, 114) im Verteilerring mit einer achsparallelen Ringkammer (74, 116) zwischen Verteilerring und Antriebswelle verbunden ist.Two-disc grinding machine according to one of claims 1 to 4, characterized characterized in that the feed device (26, 50) drives the drive shaft (22, 46) stationary distributor ring (70, 110) surrounded at a distance from the carrier disk on which at least one feed line (28, 30, 52, 54) is attached, via a radial bore (76, 78, 112, 114) in the distributor ring with a Axial parallel ring chamber (74, 116) between the distributor ring and the drive shaft connected is. Zweischeiben-Schleifmaschine nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, daß in der hohlen Antriebswelle (22, 46) eine Hülse (88, 124) angeordnet ist, die an der Außenseite mindestens eine achsparallele Nut aufweist zur Bildung des achsparallelen Kanals (86, 88, 120, 122).Two-disc grinding machine according to one of claims 1 to 5, characterized characterized in that a sleeve (88, 124) in the hollow drive shaft (22, 46) is arranged, which has at least one axially parallel groove on the outside to form the axially parallel channel (86, 88, 120, 122).
    EP20000113746 1999-08-10 2000-06-29 Lapping machine with two plates Expired - Lifetime EP1075897B1 (en)

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    DE1999137784 DE19937784B4 (en) 1999-08-10 1999-08-10 Two slices of fine grinding machine

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    EP1366854A1 (en) * 2002-05-29 2003-12-03 PETER WOLTERS Werkzeugmaschinen GmbH Double sided polisher apparatus
    WO2004060610A2 (en) * 2002-12-27 2004-07-22 Ebara Corporation Substrate holding mechanism, substrate polishing apparatus and substrate polishing method
    CN100566938C (en) * 2002-12-27 2009-12-09 株式会社荏原制作所 Substrate polishing apparatus
    CN102666015A (en) * 2009-11-05 2012-09-12 彼特沃尔特斯有限公司 Device and method for the double-sided processing of flat work pieces with optimized supply of the liquid working medium
    CN107671728A (en) * 2017-11-15 2018-02-09 深圳赛贝尔自动化设备有限公司 A kind of upper disk magnetism servo-electric motor water-cooling of polishing grinding machine

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    DE10159832A1 (en) * 2001-12-06 2003-06-26 Wacker Siltronic Halbleitermat Semiconductor wafer made from silicon used in the production of electronic components comprises a polished front side and a polished rear side
    DE10218483B4 (en) * 2002-04-25 2004-09-23 Siltronic Ag Device for simultaneously machining workpieces on both sides of material
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    DE102007013058B4 (en) 2007-03-19 2024-01-11 Lapmaster Wolters Gmbh Method for grinding several semiconductor wafers simultaneously
    DE102007056628B4 (en) 2007-03-19 2019-03-14 Siltronic Ag Method and apparatus for simultaneously grinding a plurality of semiconductor wafers
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    DE102010032501B4 (en) 2010-07-28 2019-03-28 Siltronic Ag Method and device for dressing the working layers of a double-side sanding device
    DE102010042040A1 (en) 2010-10-06 2012-04-12 Siltronic Ag Method for material removal processing of sides of semiconductor wafers in e.g. microelectronics, involves bringing side of wafer in contact with sandpaper, so that material removal from side of wafer is caused in processing step
    DE102011003006B4 (en) 2011-01-21 2013-02-07 Siltronic Ag A method for providing each a level working layer on each of the two working wheels of a double-sided processing device
    DE102011003008B4 (en) 2011-01-21 2018-07-12 Siltronic Ag Guide cage and method for simultaneous two-sided material abrading processing of semiconductor wafers
    DE102011080323A1 (en) 2011-08-03 2013-02-07 Siltronic Ag Method for simultaneously abrasive processing e.g. front surface of single crystalline silicon wafer in semiconductor industry, involves locating wafer and ring in recess of rotor disk such that edge of recess of disk guides wafer and ring
    DE102011082857B4 (en) 2011-09-16 2020-02-20 Siltronic Ag Process for simultaneous machining of at least three workpieces on both sides
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    WO2004060610A2 (en) * 2002-12-27 2004-07-22 Ebara Corporation Substrate holding mechanism, substrate polishing apparatus and substrate polishing method
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    CN102666015A (en) * 2009-11-05 2012-09-12 彼特沃尔特斯有限公司 Device and method for the double-sided processing of flat work pieces with optimized supply of the liquid working medium
    CN107671728A (en) * 2017-11-15 2018-02-09 深圳赛贝尔自动化设备有限公司 A kind of upper disk magnetism servo-electric motor water-cooling of polishing grinding machine

    Also Published As

    Publication number Publication date
    EP1075897B1 (en) 2006-09-13
    DE19937784A1 (en) 2001-02-22
    DE19937784B4 (en) 2006-02-16
    DE50013453D1 (en) 2006-10-26

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