EP1071112A3 - Scanning charged-particle beam instrument - Google Patents

Scanning charged-particle beam instrument Download PDF

Info

Publication number
EP1071112A3
EP1071112A3 EP00305774A EP00305774A EP1071112A3 EP 1071112 A3 EP1071112 A3 EP 1071112A3 EP 00305774 A EP00305774 A EP 00305774A EP 00305774 A EP00305774 A EP 00305774A EP 1071112 A3 EP1071112 A3 EP 1071112A3
Authority
EP
European Patent Office
Prior art keywords
center
stage
image
mechanical rotation
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00305774A
Other languages
German (de)
French (fr)
Other versions
EP1071112B1 (en
EP1071112A2 (en
Inventor
Atsushi Yamada
Tsutomu Negishi
Toshiharu Kobayashi
Norio Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Publication of EP1071112A2 publication Critical patent/EP1071112A2/en
Publication of EP1071112A3 publication Critical patent/EP1071112A3/en
Application granted granted Critical
Publication of EP1071112B1 publication Critical patent/EP1071112B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20242—Eucentric movement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

There is disclosed a scanning electron charged-particle beam instrument in which the image does not escape during rotation even if the center of mechanical rotation is not coincident with the center of the image. The instrument is so operated that the center position of the image is fixed when a mechanical rotation is made if the center of mechanical rotation is not coincident with the center of the image. For this purpose, when the specimen stage assembly is rotated mechanically, the X-stage of the specimen stage assembly is driven to move in the X-direction. The Y-stage of the stage assembly is driven to move in the Y-direction. The distance L between the center of mechanical rotation and the moving speed of the X-Y stage are interlinked. The apparent speed of the rotational speed of the image on the viewing screen is made constant irrespective of the distance L. In practice, the moving speed of the X-Y stage is increased with increasing the distance L.
EP00305774A 1999-07-19 2000-07-07 Scanning charged-particle beam instrument Expired - Lifetime EP1071112B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP20426699 1999-07-19
JP20426699A JP3859396B2 (en) 1999-07-19 1999-07-19 Sample image observation method and scanning charged particle beam apparatus in scanning charged particle beam apparatus

Publications (3)

Publication Number Publication Date
EP1071112A2 EP1071112A2 (en) 2001-01-24
EP1071112A3 true EP1071112A3 (en) 2001-04-18
EP1071112B1 EP1071112B1 (en) 2006-07-05

Family

ID=16487632

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00305774A Expired - Lifetime EP1071112B1 (en) 1999-07-19 2000-07-07 Scanning charged-particle beam instrument

Country Status (4)

Country Link
US (1) US6444991B1 (en)
EP (1) EP1071112B1 (en)
JP (1) JP3859396B2 (en)
DE (1) DE60029166T2 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3934854B2 (en) * 2000-05-29 2007-06-20 株式会社日立製作所 Scanning electron microscope
GB2381947B (en) * 2001-11-09 2004-01-07 Leica Microsys Lithography Ltd Electron beam lithography machine
US6777688B2 (en) * 2002-09-16 2004-08-17 National University Of Singapore Rotational stage for high speed, large area scanning in focused beam systems
JP4691391B2 (en) 2005-05-12 2011-06-01 独立行政法人理化学研究所 electronic microscope
JP2007164992A (en) * 2005-12-09 2007-06-28 Sii Nanotechnology Inc Compound charged particle beam device
JP5268324B2 (en) * 2007-10-29 2013-08-21 株式会社日立ハイテクノロジーズ Charged particle beam microscope and microscope method
JP5479950B2 (en) * 2010-03-03 2014-04-23 オリンパス株式会社 Microscope device and observation position reproduction method
JP5624815B2 (en) * 2010-07-02 2014-11-12 株式会社キーエンス Magnification observation apparatus and magnification observation method
JP5788719B2 (en) 2011-06-09 2015-10-07 株式会社日立ハイテクノロジーズ Stage device and control method of stage device
JP5851218B2 (en) * 2011-11-29 2016-02-03 日本電子株式会社 Sample analyzer
JP5934521B2 (en) * 2012-03-01 2016-06-15 日本電子株式会社 Sample analyzer
DE102012205317B4 (en) 2012-03-30 2018-06-28 Carl Zeiss Microscopy Gmbh Method for adjusting a position of a carrier element in a particle beam device, computer program product and particle beam device
JP2016205899A (en) * 2015-04-17 2016-12-08 株式会社ミツトヨ Control method and device of turntable
JP7360978B2 (en) * 2020-03-18 2023-10-13 株式会社日立ハイテクサイエンス Charged particle beam device
CZ309943B6 (en) 2020-08-07 2024-02-21 Tescan Group, A.S. Method of operation of an equipment with a beam of charged particles

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4627009A (en) * 1983-05-24 1986-12-02 Nanometrics Inc. Microscope stage assembly and control system
US4803358A (en) * 1987-03-18 1989-02-07 Hitachi, Ltd. Scanning electron microscope
US5684856A (en) * 1991-09-18 1997-11-04 Canon Kabushiki Kaisha Stage device and pattern transfer system using the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4833903B1 (en) * 1969-04-08 1973-10-17
JPS6376251A (en) 1986-09-17 1988-04-06 Toshiba Corp Sample stage for scanning electron microscope
US5481111A (en) * 1994-01-03 1996-01-02 Philips Electronics North America Corporation Electron microscope having a goniometer controlled from the image frame of reference
JP3014274B2 (en) * 1994-06-29 2000-02-28 株式会社日立製作所 Biaxial tilt sample fine-movement device and image relief correction method
JP3544438B2 (en) * 1996-09-30 2004-07-21 セイコーインスツルメンツ株式会社 Processing equipment using ion beam

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4627009A (en) * 1983-05-24 1986-12-02 Nanometrics Inc. Microscope stage assembly and control system
US4803358A (en) * 1987-03-18 1989-02-07 Hitachi, Ltd. Scanning electron microscope
US5684856A (en) * 1991-09-18 1997-11-04 Canon Kabushiki Kaisha Stage device and pattern transfer system using the same

Also Published As

Publication number Publication date
EP1071112B1 (en) 2006-07-05
JP3859396B2 (en) 2006-12-20
DE60029166T2 (en) 2007-06-06
DE60029166D1 (en) 2006-08-17
US6444991B1 (en) 2002-09-03
JP2001035433A (en) 2001-02-09
EP1071112A2 (en) 2001-01-24

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