EP1061262A3 - Turbo-molecular pump - Google Patents

Turbo-molecular pump Download PDF

Info

Publication number
EP1061262A3
EP1061262A3 EP00112625A EP00112625A EP1061262A3 EP 1061262 A3 EP1061262 A3 EP 1061262A3 EP 00112625 A EP00112625 A EP 00112625A EP 00112625 A EP00112625 A EP 00112625A EP 1061262 A3 EP1061262 A3 EP 1061262A3
Authority
EP
European Patent Office
Prior art keywords
turbo
stator
casing
rotor
molecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00112625A
Other languages
German (de)
French (fr)
Other versions
EP1061262A2 (en
EP1061262B1 (en
Inventor
Atsushi c/o Ebara Corporation Shiokawa
Hiroshi c/o Ebara Corporation Sobukawa
Hiroyuki c/o Ebara Corporation Kawasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of EP1061262A2 publication Critical patent/EP1061262A2/en
Publication of EP1061262A3 publication Critical patent/EP1061262A3/en
Application granted granted Critical
Publication of EP1061262B1 publication Critical patent/EP1061262B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

A turbo-molecular pump includes a casing having an intake port (14a), a stator (S) fixedly mounted in the casing (14), and a rotor (R) supported in the casing (14) for rotation relatively to the stator. The stator and the rotor make up a turbine blade pumping section (L1) and a groove pumping section (L2) for evacuating gas. A scattering prevention member (50) is provided for preventing fragments of the rotor (R) from being scattered through the intake port (14a).
EP00112625A 1999-06-14 2000-06-14 Turbo-molecular pump Expired - Lifetime EP1061262B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16663799 1999-06-14
JP16663799 1999-06-14

Publications (3)

Publication Number Publication Date
EP1061262A2 EP1061262A2 (en) 2000-12-20
EP1061262A3 true EP1061262A3 (en) 2002-03-06
EP1061262B1 EP1061262B1 (en) 2007-12-26

Family

ID=15834982

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00112625A Expired - Lifetime EP1061262B1 (en) 1999-06-14 2000-06-14 Turbo-molecular pump

Country Status (3)

Country Link
EP (1) EP1061262B1 (en)
KR (1) KR20010007349A (en)
DE (1) DE60037554T2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8147222B2 (en) * 2007-05-15 2012-04-03 Agilent Technologies, Inc. Vacuum divider for differential pumping of a vacuum system
DE102007027354A1 (en) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Turbo molecular pump
JP5412239B2 (en) 2009-02-24 2014-02-12 株式会社島津製作所 Turbo molecular pump and particle trap for turbo molecular pump
CN109185588B (en) * 2018-10-10 2020-05-15 北京遥感设备研究所 Gas circuit rotary joint structure with double-layer stator structure

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4787829A (en) * 1986-05-08 1988-11-29 Mitsubishi Denki Kabushiki Kaisha Turbomolecular pump
EP0332107A1 (en) * 1988-03-07 1989-09-13 Kabushiki Kaisha Toshiba Turbomolecular pump and method of operating the same
US5528618A (en) * 1992-09-23 1996-06-18 The United States Of America As Represented By The Secretary Of The Air Force Photolytic iodine laser system with turbo-molecular blower

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4787829A (en) * 1986-05-08 1988-11-29 Mitsubishi Denki Kabushiki Kaisha Turbomolecular pump
EP0332107A1 (en) * 1988-03-07 1989-09-13 Kabushiki Kaisha Toshiba Turbomolecular pump and method of operating the same
US5528618A (en) * 1992-09-23 1996-06-18 The United States Of America As Represented By The Secretary Of The Air Force Photolytic iodine laser system with turbo-molecular blower

Also Published As

Publication number Publication date
KR20010007349A (en) 2001-01-26
DE60037554D1 (en) 2008-02-07
DE60037554T2 (en) 2009-01-08
EP1061262A2 (en) 2000-12-20
EP1061262B1 (en) 2007-12-26

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