EP1039487A3 - Thin film layer sequence on a substrate - Google Patents

Thin film layer sequence on a substrate Download PDF

Info

Publication number
EP1039487A3
EP1039487A3 EP00103863A EP00103863A EP1039487A3 EP 1039487 A3 EP1039487 A3 EP 1039487A3 EP 00103863 A EP00103863 A EP 00103863A EP 00103863 A EP00103863 A EP 00103863A EP 1039487 A3 EP1039487 A3 EP 1039487A3
Authority
EP
European Patent Office
Prior art keywords
substrate
thin film
layer sequence
film layer
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00103863A
Other languages
German (de)
French (fr)
Other versions
EP1039487A2 (en
EP1039487B1 (en
Inventor
Martin Schallner
Soeren Steinert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ericsson AB
Original Assignee
Marconi Communications GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marconi Communications GmbH filed Critical Marconi Communications GmbH
Publication of EP1039487A2 publication Critical patent/EP1039487A2/en
Publication of EP1039487A3 publication Critical patent/EP1039487A3/en
Application granted granted Critical
Publication of EP1039487B1 publication Critical patent/EP1039487B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H01C17/242—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by laser
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9335—Product by special process
    • Y10S428/934—Electrical process
    • Y10S428/935—Electroplating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9335—Product by special process
    • Y10S428/938—Vapor deposition or gas diffusion
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12389—All metal or with adjacent metals having variation in thickness
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12486—Laterally noncoextensive components [e.g., embedded, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12639—Adjacent, identical composition, components
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12896—Ag-base component

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The layer sequence has a sputtered electrically conducting coating strengthened by a layer that can also be electrically conducting and that is applied to the conducting layer by another method. The conducting coating is less to generally not strengthened by the strengthening layer in a trimming region.
EP00103863A 1999-03-25 2000-02-24 Thin film layer sequence on a substrate for trimming of an electronic circuit Expired - Lifetime EP1039487B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19913466A DE19913466A1 (en) 1999-03-25 1999-03-25 Layer sequence built up on a substrate using thin-film technology
DE19913466 1999-03-25

Publications (3)

Publication Number Publication Date
EP1039487A2 EP1039487A2 (en) 2000-09-27
EP1039487A3 true EP1039487A3 (en) 2004-01-02
EP1039487B1 EP1039487B1 (en) 2007-05-09

Family

ID=7902319

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00103863A Expired - Lifetime EP1039487B1 (en) 1999-03-25 2000-02-24 Thin film layer sequence on a substrate for trimming of an electronic circuit

Country Status (4)

Country Link
US (1) US7018720B1 (en)
EP (1) EP1039487B1 (en)
AT (1) ATE362186T1 (en)
DE (2) DE19913466A1 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4288530A (en) * 1979-10-15 1981-09-08 Motorola, Inc. Method of tuning apparatus by low power laser beam removal
US4301439A (en) * 1978-12-26 1981-11-17 Electro Materials Corp. Of America Film type resistor and method of producing same
US4338506A (en) * 1979-09-07 1982-07-06 Motorola, Inc. Method of trimming thick film capacitor
US4626822A (en) * 1985-05-02 1986-12-02 Motorola, Inc. Thick film resistor element with coarse and fine adjustment provision
EP0957529A1 (en) * 1998-05-13 1999-11-17 Robert Bosch Gmbh Method for tuning the resonance frequency of a ring resonator

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3556951A (en) * 1967-08-04 1971-01-19 Sylvania Electric Prod Method of forming leads on semiconductor devices
DE2409312C3 (en) * 1974-02-27 1981-01-08 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Semiconductor arrangement with a metal layer arranged on the semiconductor surface and method for its production
US4357395A (en) * 1980-08-22 1982-11-02 General Electric Company Transfer lamination of vapor deposited foils, method and product
JPH0678590B2 (en) * 1988-09-19 1994-10-05 パイオニア株式会社 Stamper manufacturing method
US5167776A (en) * 1991-04-16 1992-12-01 Hewlett-Packard Company Thermal inkjet printhead orifice plate and method of manufacture
US5261593A (en) * 1992-08-19 1993-11-16 Sheldahl, Inc. Direct application of unpackaged integrated circuit to flexible printed circuit
US5374792A (en) * 1993-01-04 1994-12-20 General Electric Company Micromechanical moving structures including multiple contact switching system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4301439A (en) * 1978-12-26 1981-11-17 Electro Materials Corp. Of America Film type resistor and method of producing same
US4338506A (en) * 1979-09-07 1982-07-06 Motorola, Inc. Method of trimming thick film capacitor
US4288530A (en) * 1979-10-15 1981-09-08 Motorola, Inc. Method of tuning apparatus by low power laser beam removal
US4626822A (en) * 1985-05-02 1986-12-02 Motorola, Inc. Thick film resistor element with coarse and fine adjustment provision
EP0957529A1 (en) * 1998-05-13 1999-11-17 Robert Bosch Gmbh Method for tuning the resonance frequency of a ring resonator

Also Published As

Publication number Publication date
DE50014312D1 (en) 2007-06-21
DE19913466A1 (en) 2000-09-28
EP1039487A2 (en) 2000-09-27
EP1039487B1 (en) 2007-05-09
US7018720B1 (en) 2006-03-28
ATE362186T1 (en) 2007-06-15

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