EP1036031A1 - Device for discharging a liquid - Google Patents

Device for discharging a liquid

Info

Publication number
EP1036031A1
EP1036031A1 EP98965678A EP98965678A EP1036031A1 EP 1036031 A1 EP1036031 A1 EP 1036031A1 EP 98965678 A EP98965678 A EP 98965678A EP 98965678 A EP98965678 A EP 98965678A EP 1036031 A1 EP1036031 A1 EP 1036031A1
Authority
EP
European Patent Office
Prior art keywords
container
liquid
bellows
movable element
dispensed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98965678A
Other languages
German (de)
French (fr)
Other versions
EP1036031B1 (en
Inventor
Robert Boos
Uwe Müller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Steag Microtech GmbH
Original Assignee
Steag Microtech GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Steag Microtech GmbH filed Critical Steag Microtech GmbH
Publication of EP1036031A1 publication Critical patent/EP1036031A1/en
Application granted granted Critical
Publication of EP1036031B1 publication Critical patent/EP1036031B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
    • B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
    • B67D7/0227—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants by an ejection plunger
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D1/00—Apparatus or devices for dispensing beverages on draught
    • B67D1/08—Details
    • B67D1/10—Pump mechanism
    • B67D1/101—Pump mechanism of the piston-cylinder type
    • B67D1/102—Pump mechanism of the piston-cylinder type for one liquid component only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms

Definitions

  • the invention relates to a device for dispensing a liquid with a container containing the liquid and with a movable element for reducing the container volume.
  • Devices of this type are known, for example, from DE 42 19 161 A in connection with pumps, in which the container or a cavity is designed in the form of a cylinder in which a piston is moved to change the container volume.
  • the piston is sealed to the cylinder wall by means of a seal. Due to the frictional forces between the seal and the
  • the inner wall of the cylinder creates abrasion and particles that lead to contamination of the liquid to be discharged.
  • Such devices are therefore not suitable for dispensing high-purity liquids, for example in connection with chemicals or other liquids which are used, for example, in the treatment or cleaning in the field of chip manufacture, which require very pure treatment media.
  • a device in which a bellows represents the container containing the liquid.
  • a disadvantage of this arrangement is that when the bellows or container volume changes, the pressure that occurs in the bellows represents a large contact surface on the bellows and therefore, even with a uniform stroke movement, the volume and thus also the application rate of the fluid to be pumped over the entire stroke range not uniform and constant.
  • the invention is therefore based on the object of providing a device which is of simple construction, avoids particle formation during operation and thus contamination of the liquid to be dispensed, and enables the liquid to be dispensed over the period of dispensing with a constant volume per unit of time .
  • the object is achieved according to the invention with a device for dispensing a liquid, with a container containing the liquid and a movable element for reducing the volume of the container, the movable element being movable in the container without contact and being liquid-tightly connected to an inner wall of the container, and the connection between the movable element and an inner wall of the container is a bellows, the interior of which, facing away from the container, together with a housing, closes off from the outside.
  • NEN space forms which contains a spindle as a drive device which is connected to the movable element in the interior of the bellows.
  • the interior of the container, in which the liquid to be dispensed is located is also reliably and reliably closed off with respect to the movable element, without reducing the mobility of the element to reduce the container volume or to produce it the application pressure for the liquid is impaired.
  • a major advantage of this device according to the invention over conventional dispensing devices, as is the case for example with pumps, is that no seal is required between the movable element and the inner surface of the container. Frictional forces therefore do not occur between the movable element and the container wall, so that no particles can be formed which could contaminate the liquid contained in the container to be dispensed.
  • the pressure to be applied to the liquid to be dispensed is much more uniform due to the fact that there are no uneven frictional forces. This results in a much more even and pulsation-free application of the liquid.
  • the device according to the invention also has considerable advantages with regard to diaphragm pumps, since when a bellows is used as a connection between the movable element and an inner wall of the container, pumping always takes place regardless of the container volume, that is to say regardless of the start or end of the pumping process. a constant volume per unit of time is possible because, unlike diaphragm pumps, the container volume is linearly related to the movement of the movable element or to the degree of drive of this element over the entire pumping process.
  • the movable element can be in contact with the inner surface of the container during its movement, a contact-free movement of the element in the container is particularly advantageous for the reasons already mentioned, since this reliably prevents abrasion.
  • the movable element is connected to a drive device within the bellows, hereinafter referred to as bellows for short. Since the bellows completely seals the inside of the container from the outside, no measures are necessary to protect the drive device from the liquid to be dispensed. In conventional devices with sealing elements between the movable element and the inner wall of the container, liquid passage on the sealing elements cannot be reliably avoided even if the sealing elements are undamaged. These difficulties and leaks that occur as a result, which are particularly disadvantageous in the case of aggressive liquids, are reliably avoided with the device according to the invention.
  • the drive device can therefore be constructed more simply and can be manufactured with less expensive components.
  • the drive device comprises a movable rod, preferably a servo axis or a spindle, wherein this rod, servo axis or spindle can be constructed in a very simple manner and nevertheless very much over the stroke range allows uniform linear movement at a very constant speed, so that the liquid is dispensed per unit of time with a very constant volume.
  • the rod, servo axis or spindle is driven, moved or rotated by a motor.
  • the entire drive device is preferably surrounded by a housing, which is preferably attached to an outer wall of the container, the housing and the interior of the bellows forming a space which is closed off from the outside.
  • This structure is not only structurally simple, both in terms of production and maintenance, but also forms a reliable protection against a chemically aggressive environment towards the outside, as is the case with chemical plants and in particular also with plants for the treatment and manufacture of semiconductor chips Case is.
  • the space formed by the housing of the drive device and the bellows is filled with an inert, neutral gas, which can additionally have an overpressure in order to introduce aggressive vapors into it Avoid space safely.
  • At least one sensor is arranged in the space formed by the housing and the bellows, which detects whether liquid to be dispensed comes out of the container in this space, for example when the bellows or connection points between the bellows and the movable element or the container wall is leaking.
  • the sensor it is advantageous to arrange the sensor near the bellows.
  • the material from which the bellows is made preferably consists of a material which is not attacked by the liquid to be dispensed.
  • the present apparatus is' particularly for the appropriation for introducing a liquid into a carrier stream suitable.
  • a very uniform introduction of the liquid into the carrier stream is particularly important.
  • the device according to the invention can advantageously be used in connection with a system for treating semiconductor substrates. This is because high-purity liquids must be used and any contamination must be avoided, which is caused, for example, by the movement of seals between the movable element and the inner wall of the container due to abrasion. This advantage is particularly desirable in connection with a liquid volume per unit of time that is uniform over the application period.
  • the liquid to be dispensed is preferably hydrogen fluoride, which is fed into a stream of distilled water, both of which are then introduced into a treatment tank for rinsing and cleaning semiconductor substrates.
  • PTFE polytetrafluoroethylene
  • the figure shows a container 1 for a liquid to be dispensed, for example hydrogen fluoride.
  • the container is cylindrical.
  • a movable element 2 in the present case a plate with a diameter that is smaller than the inner diameter of the cylindrical container 1, is connected to a drive device 4 via a connecting piece 3.
  • the movable element 2 and the bellows 5 are formed in one piece.
  • the movable element 2 and the bellows 5 are made, for example, from the solid of a PTFE workpiece, the bellows being formed by making cuts or notches in the bellows area, offset from the outside and inside, so that the bellows function is created.
  • An outlet opening 7 with an outlet valve 8 and an inlet opening 9 with an inlet valve 10 are provided on the side wall 11 of the container 1 facing away from the movable element 2.
  • a safety or overload connection or valve 12 in the cylinder there is a safety or overload connection or valve 12, as well as a vent connection or valve 13.
  • a housing 15 is flanged from the outside and surrounds the entire drive device 4.
  • the housing 15 forms, together with the housing and the interior space formed by the movable element 2 and the bellows 5, a common space which is closed off from the outside. This space is controllably connected to the outside space via an inlet valve 16.
  • the drive device has a motor 17, a planetary gear 18 and a belt gear 19 which drive a real spindle 20 which is connected to the movable element 2 via the connecting piece 3.
  • a liquid or gas sensor 21 is arranged within the space formed by the bellows 5 and the movable element 2 and detects the leakage of the liquid to be discharged when a leak occurs in the bellows 5.
  • the device according to the invention works as follows.
  • the movable element 2 is moved from right to left by folding the bellows 5 by means of the spindle 20 (the figure is to be viewed here in landscape format), the liquid to be dispensed is sucked into the container 1 via the inlet valve 10 and the inlet opening 9.
  • the spindle 20 is moved in the opposite direction, so that the movable element 2 at a Nem stroke, which is indicated by the arrow 22, expels the liquid through the outlet opening 7 and the now open outlet valve 8 by folding out the bellows 5.
  • the movable element 2 can be moved with the spindle 20 at a very uniform speed over a long period of time, so that the outlet volume per unit of time remains very uniform and constant over the application period.
  • the invention was previously explained on the basis of a preferred exemplary embodiment. However, numerous configurations and modifications are possible for the person skilled in the art without departing from the inventive concept.
  • the attachment device can also be implemented differently than in the exemplary embodiment shown.
  • the container 1 can also be square and the inlet and outlet openings for the liquid to be discharged can also be arranged on the outer circumference of the container 1.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Containers And Packaging Bodies Having A Special Means To Remove Contents (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
  • Devices For Dispensing Beverages (AREA)

Abstract

An apparatus for discharging a liquid from a container is provided. A mobile unit is disposed in the container in such a way as to be movable therein in a contact-free manner for reducing the volume of the container. A bellows connects the mobile unit in a liquid-tight manner to an inner wall of the container. An interior chamber of the bellows that faces away from the container, together with a housing, form a space that is closed off against the exterior. A spindle, as a drive apparatus, is disposed in this space. The spindle is connected to the mobile unit in the interior chamber of the bellows.

Description

Vorrichtung zum Ausbringen einer Flüssigkeit Device for dispensing a liquid
Die Erfindung betrifft eine Vorrichtung zum Ausbringen einer Flüssigkeit mit einem die Flüssigkeit enthaltenden Behälter und mit einem beweglichen Element zur Verkleinerung des Behältervolumens.The invention relates to a device for dispensing a liquid with a container containing the liquid and with a movable element for reducing the container volume.
Vorrichtungen dieser Art sind beispielsweise aus der DE 42 19 161 A im Zusammenhang mit Pumpen bekannt, bei denen der Behälter bzw. ein Hohlraum in Form eines Zylinders ausgebildet ist, in dem ein Kolben zur Veränderung des Behältervolumens bewegt wird. Der Kolben ist dabei mittels einer Dichtung zur Zylinderwand hin abgedichtet. Auf Grund der Reibungskräfte zwischen der Dichtung und derDevices of this type are known, for example, from DE 42 19 161 A in connection with pumps, in which the container or a cavity is designed in the form of a cylinder in which a piston is moved to change the container volume. The piston is sealed to the cylinder wall by means of a seal. Due to the frictional forces between the seal and the
Zylinderinnenwand entstehen Abriebe und Partikel, die zur Kontaminierung der auszubringenden Flüssigkeit führen. Derartige Vorrichtungen sind daher zum Ausbringen hochreiner Flüssigkeiten beispielsweise im Zusammenhang mit Chemikalien oder sonstigen Flüssigkeiten nicht geeignet, die etwa bei der Behandlung oder Reinigung auf dem Gebiet der Chip-Fertigung eingesetzt werden, die sehr reine Behandlungsmedien erfordern.The inner wall of the cylinder creates abrasion and particles that lead to contamination of the liquid to be discharged. Such devices are therefore not suitable for dispensing high-purity liquids, for example in connection with chemicals or other liquids which are used, for example, in the treatment or cleaning in the field of chip manufacture, which require very pure treatment media.
Aus den Druckschriften US 33 18 257, WO 96/10 534 AI und US 48 86 189 sind Pumpenanordnungen bekannt, bei denen zur Abdichtung des Flüssigkeitsbehälters und zur Änderung des Behältervolumens Membranen vorgesehen sind, die durch Antriebsmittel, seien sie mechanischer oder hydraulischer Natur in ihrer Lage verändert werden. Ein gleichmäßiges, impulsfreies Ausbringen einer Flüssigkeit ist mit diesen Einrichtungen nicht möglich, weil eine gleichmäßige, impulsfreie Veränderung des Behältervolumens nicht möglich ist. Mit diesen Vorrichtungen ist daher eine über einen bestimmten Zeitraum hinweg gleichmäßige Ausbringung mit konstanten Volumen pro Zeiteinheit nicht möglich.From the publications US 33 18 257, WO 96/10 534 AI and US 48 86 189 pump arrangements are known in which membranes are provided for sealing the liquid container and for changing the container volume, which are driven by drive means, be they mechanical or hydraulic in nature Location to be changed. A uniform, pulse-free dispensing of a liquid is not possible with these devices because a uniform, pulse-free change in the container volume is not possible is. With these devices, it is therefore not possible to apply the product uniformly over a certain period of time with constant volumes per unit of time.
Aus der FR 13 82 439 ist eine Vorrichtung bekannt, bei der ein Faltenbalg den die Flüssigkeit enthaltenden Behälter darstellt. Ein Nachteil dieser Anordnung besteht darin, daß bei einer Veränderung des Faltenbalg- bzw. Behältervolumens der dabei auftretende Druck im Faltenbalg eine große Angriffsfläche am Faltenbalg darstellt und daher auch bei gleichmäßiger Hubbewegung das Volumen und damit auch die Ausbringmenge des zu pumpenden Fluids über den gesamten Hubbereich hinweg nicht gleichmäßig und konstant erfolgt .From FR 13 82 439 a device is known in which a bellows represents the container containing the liquid. A disadvantage of this arrangement is that when the bellows or container volume changes, the pressure that occurs in the bellows represents a large contact surface on the bellows and therefore, even with a uniform stroke movement, the volume and thus also the application rate of the fluid to be pumped over the entire stroke range not uniform and constant.
Der Erfindung liegt daher die Aufgabe zugrunde, eine Vorrichtung zu schaffen, die einfach aufgebaut ist, eine Partikelbildung während des Betriebs und damit eine Kontamination der auszubringenden Flüssigkeit vermeidet, und das Ausbringen der Flüssigkeit über den Zeitraum der Ausbringung hinweg mit einem konstanten Volumen pro Zeiteinheit ermöglicht.The invention is therefore based on the object of providing a device which is of simple construction, avoids particle formation during operation and thus contamination of the liquid to be dispensed, and enables the liquid to be dispensed over the period of dispensing with a constant volume per unit of time .
Die gestellte Aufgabe wird erfindungsgemäß gelöst mit ei- ner Vorrichtung zum Ausbringen einer Flüssigkeit, mit einem die Flüssigkeit enthaltenden Behälter und einem beweglichen Element zum Verkleinern des Behältervolumens, wobei das bewegliche Element berührungsfrei im Behälter beweglich und flüssigkeitsdicht mit einer Innenwand des Behälters verbunden ist, und die Verbindung zwischen dem beweglichen Element und einer Innenwand des Behälters ein Faltenbalg ist, dessen vom Behälter abgewandter Innenraum zusammen mit einem Gehäuse einem nach außen abgeschlosse- nen Raum bildet, der eine Spindel als Antriebsvorrichtung enthält, die im Innenraum des Faltenbalgs mit dem beweglichen Element verbunden ist.The object is achieved according to the invention with a device for dispensing a liquid, with a container containing the liquid and a movable element for reducing the volume of the container, the movable element being movable in the container without contact and being liquid-tightly connected to an inner wall of the container, and the connection between the movable element and an inner wall of the container is a bellows, the interior of which, facing away from the container, together with a housing, closes off from the outside. NEN space forms which contains a spindle as a drive device which is connected to the movable element in the interior of the bellows.
Durch das erfindungsgemäße Merkmal, einen Faltenbalg zu verwenden, wird der Innenraum des Behälters, in dem sich die auszubringende Flüssigkeit befindet, auch hinsichtlich des beweglichen Elements nach außen sicher und zuverlässig abgeschlossen, ohne daß die Beweglichkeit des Elements zur Verringerung des Behältervolumens bzw. zur Erzeugung des Ausbringdrucks für die Flüssigkeit beeinträchtigt ist. Ein wesentlicher Vorteil dieser erfindungsgemäßen Vorrichtung gegenüber herkömmlichen Ausbringvorrichtungen, wie dies beispielsweise bei Pumpen der Fall ist, besteht darin, daß keine Dichtung zwischen dem beweglichen Element und der Innenfläche des Behälters erforderlich ist. Reibungskräfte treten daher zwischen dem beweglichen Element und der Behälterwandung nicht auf, so daß auch keine Partikel gebildet werden können, die die auszubringende, im Behälter enthaltene Flüssigkeit verunreinigen könnten. Darüber hinaus ist der auf die auszubringende Flüssigkeit auszuübende Druck auf Grund der Tatsache wesentlich gleichmäßiger, daß keine ungleichmäßigen Reibungskräfte auftreten. Dadurch ergibt sich ein wesentlich gleichmäßigeres und pulsationsfreies Ausbringen der Flüssigkeit .Due to the inventive feature of using a bellows, the interior of the container, in which the liquid to be dispensed is located, is also reliably and reliably closed off with respect to the movable element, without reducing the mobility of the element to reduce the container volume or to produce it the application pressure for the liquid is impaired. A major advantage of this device according to the invention over conventional dispensing devices, as is the case for example with pumps, is that no seal is required between the movable element and the inner surface of the container. Frictional forces therefore do not occur between the movable element and the container wall, so that no particles can be formed which could contaminate the liquid contained in the container to be dispensed. In addition, the pressure to be applied to the liquid to be dispensed is much more uniform due to the fact that there are no uneven frictional forces. This results in a much more even and pulsation-free application of the liquid.
Auch im Hinblick auf Membranpumpen weist die erfindungsgemäße Vorrichtung erhebliche Vorteile auf, da bei der Verwendung eines Faltenbalgs als Verbindung zwischen dem beweglichen Element und einer Innenwand des Behälters unabhängig von dem Behältervolumen, also unabhängig vom Beginn oder dem Ende des Pumpvorgangs, immer das Pumpen ei- nes konstanten Volumens pro Zeiteinheit möglich ist, da das Behältervolumen im Gegensatz zu Membranpumpen über den gesamten Pumpvorgang hinweg in linearer Beziehung zur Bewegung des beweglichen Elements bzw. zum Maß des An- triebs dieses Elements steht .The device according to the invention also has considerable advantages with regard to diaphragm pumps, since when a bellows is used as a connection between the movable element and an inner wall of the container, pumping always takes place regardless of the container volume, that is to say regardless of the start or end of the pumping process. a constant volume per unit of time is possible because, unlike diaphragm pumps, the container volume is linearly related to the movement of the movable element or to the degree of drive of this element over the entire pumping process.
Obgleich das bewegliche Element während seiner Bewegung mit der Innenfläche des Behälters in Berührung stehen kann, ist eine berührungsfreie Bewegung des Elements im Behälter aus den bereits genannten Gründen besonders vorteilhaft, da dadurch ein Abrieb sicher vermieden bleibt.Although the movable element can be in contact with the inner surface of the container during its movement, a contact-free movement of the element in the container is particularly advantageous for the reasons already mentioned, since this reliably prevents abrasion.
Das bewegliche Element ist innerhalb des Faltenbalgs, nachfolgend kurz als Balg bezeichnet, mit einer Antriebs- einrichtung verbunden. Da der Balg das Innere des Behälters vollständig nach außen abdichtet, sind keine Maßnahmen erforderlich, die Antriebseinrichtung vor der auszubringenden Flüssigkeit zu schützen. Bei herkömmlichen Vorrichtungen mit Dichtungselementen zwischen dem beweg- liehen Element und der Behälterinnenwand kann ein Flüssigkeitsdurchtritt an den Dichtungselementen auch dann nicht zuverlässig vermieden werden, wenn die Dichtungselemente unbeschädigt sind. Diese dadurch auftretenden Schwierigkeiten und Austritte, die insbesondere bei ag- gressiven Flüssigkeiten sehr nachteilig sind, werden mit der erfindungsgemäßen Vorrichtung sicher vermieden. Die Antriebseinrichtung kann daher einfacher aufgebaut und mit kostengünstigeren Bauelementen gefertigt werden.The movable element is connected to a drive device within the bellows, hereinafter referred to as bellows for short. Since the bellows completely seals the inside of the container from the outside, no measures are necessary to protect the drive device from the liquid to be dispensed. In conventional devices with sealing elements between the movable element and the inner wall of the container, liquid passage on the sealing elements cannot be reliably avoided even if the sealing elements are undamaged. These difficulties and leaks that occur as a result, which are particularly disadvantageous in the case of aggressive liquids, are reliably avoided with the device according to the invention. The drive device can therefore be constructed more simply and can be manufactured with less expensive components.
Die Antriebseinrichtung umfaßt eine bewegliche Stange, vorzugsweise eine Servoachse oder eine Spindel, wobei diese Stange, Servoachse oder Spindel sehr einfach aufgebaut sein kann und dennoch eine über den Hubbereich sehr gleichmäßige lineare Bewegung mit sehr konstanter Geschwindigkeit erlaubt, so daß das Ausbringen der Flüssigkeit pro Zeiteinheit mit einem sehr konstanten Volumen erfolgt. Die Stange, Servoachse oder Spindel wird dabei mit einem Motor angetrieben, bewegt oder gedreht.The drive device comprises a movable rod, preferably a servo axis or a spindle, wherein this rod, servo axis or spindle can be constructed in a very simple manner and nevertheless very much over the stroke range allows uniform linear movement at a very constant speed, so that the liquid is dispensed per unit of time with a very constant volume. The rod, servo axis or spindle is driven, moved or rotated by a motor.
Vorzugsweise ist die gesamte Antriebseinrichtung mit einem Gehäuse umgeben ist, das vorzugsweise an einer Außenwand des Behälters angebracht ist, wobei das Gehäuse und der Innenraum des Balgs einen nach außen abgeschlossenen Raum bilden. Dieser Aufbau ist nicht nur konstruktiv einfach, sowohl hinsichtlich des Herstellungs- als auch des Wartungsaufwands, sondern bildet auch zum Außenraum hin einen zuverlässigen Schutz gegen eine chemisch aggressive Umgebung, wie dies bei chemischen Anlagen und insbesondere auch bei Anlagen zur Behandlung und Fertigung von Halbleiterchips der Fall ist . Um die Antriebseinrichtung noch besser gegen Einflüsse von außen zu schützen, ist der durch das Gehäuse der Antriebseinrichtung und den Balg gebildete Raum mit einem inerten, neutralen Gas gefüllt, das darüber hinaus zusätzlich noch einen Überdruck aufweisen kann, um das Einbringen von aggressiven Dämpfen in diesen Raum sicher zu vermeiden.The entire drive device is preferably surrounded by a housing, which is preferably attached to an outer wall of the container, the housing and the interior of the bellows forming a space which is closed off from the outside. This structure is not only structurally simple, both in terms of production and maintenance, but also forms a reliable protection against a chemically aggressive environment towards the outside, as is the case with chemical plants and in particular also with plants for the treatment and manufacture of semiconductor chips Case is. In order to protect the drive device even better against influences from outside, the space formed by the housing of the drive device and the bellows is filled with an inert, neutral gas, which can additionally have an overpressure in order to introduce aggressive vapors into it Avoid space safely.
Gemäß einer weiteren Ausfuhrungsform der Erfindung ist in dem durch das Gehäuse und dem Balg gebildeten Raum mindestens ein Sensor angeordnet, der feststellt, ob auszubringende Flüssigkeit aus dem Behälter in diesem Raum gelangt, beispielsweise dann, wenn der Balg oder Verbin- dungsstellen zwischen dem Balg und dem beweglichen Element oder der Behälterwand undicht sind. In diesem Falle ist es vorteilhaft, den Sensor nahe dem Balg anzuordnen. Es ist jedoch auch möglich, einen Sensor alternativ oder zusätzlich dazu in diesem Raum vorzusehen, mit dem festgestellt werden kann, ob Gase von außen in diesen gelangen.According to a further embodiment of the invention, at least one sensor is arranged in the space formed by the housing and the bellows, which detects whether liquid to be dispensed comes out of the container in this space, for example when the bellows or connection points between the bellows and the movable element or the container wall is leaking. In this case, it is advantageous to arrange the sensor near the bellows. However, it is also possible to use a sensor alternatively or in addition to provide in this room, with which it can be determined whether gases from outside get into it.
Vorzugsweise besteht das Material, aus dem der Balg gefertigt ist, aus einem Stoff, der von der auszubringenden Flüssigkeit nicht angegriffen wird.The material from which the bellows is made preferably consists of a material which is not attacked by the liquid to be dispensed.
Die vorliegende Vorrichtung ist 'insbesondere für die Ver- wendung zum Einleiten einer Flüssigkeit in einem Trägerstrom geeignet. In diesem Falle ist ein sehr gleichmäßiges Einbringen der Flüssigkeit in den Trägerstrom besonders wichtig.The present apparatus is' particularly for the appropriation for introducing a liquid into a carrier stream suitable. In this case, a very uniform introduction of the liquid into the carrier stream is particularly important.
Mit Vorteil ist die erfindungsgemäße Vorrichtung im Zusammenhang mit einer Anlage zum Behandeln von Halbleitersubstraten verwendbar. Dies deshalb, weil dabei hochreine Flüssigkeiten verwendet werden müssen und jegliche Verunreinigungen zu vermeiden sind, die beispielsweise durch die Bewegung von Dichtungen zwischen dem beweglichen Element und der Behälterinnenwand herkömmlicher Vorrichtungen durch Abrieb entstehen. Dieser Vorteil ist in Verbindung mit einem über den Ausbringzeitraum gleichmäßigen Flüssigkeitsvolumen pro Zeiteinheit besonders erwünscht .The device according to the invention can advantageously be used in connection with a system for treating semiconductor substrates. This is because high-purity liquids must be used and any contamination must be avoided, which is caused, for example, by the movement of seals between the movable element and the inner wall of the container due to abrasion. This advantage is particularly desirable in connection with a liquid volume per unit of time that is uniform over the application period.
Bei Verwendung der erfindungsgemäßen Vorrichtung im Zusammenhang mit der Behandlung von Halbleitersubstraten in der Halbleiterchip-Fertigung ist die auszubringende Flüssigkeit vorzugsweise Fluorwasserstoff, der in einen Strom aus destilliertem Wasser eingespeist wird, wobei beide dann zum Spülen und Reinigen von Halbleitersubstraten in einen Behandlungstank eingeleitet werden. In diesem Falle ist Polytetrafluorethylen (PTFE) als Material für den Balg besonders geeignet .When using the device according to the invention in connection with the treatment of semiconductor substrates in semiconductor chip production, the liquid to be dispensed is preferably hydrogen fluoride, which is fed into a stream of distilled water, both of which are then introduced into a treatment tank for rinsing and cleaning semiconductor substrates. In this case polytetrafluoroethylene (PTFE) is particularly suitable as a material for the bellows.
Die Erfindung wird nachstehend anhand eines bevorzugten Ausführungsbeispiels unter Bezugnahme auf die einzige Zeichnung näher erläutert.The invention is explained below with reference to a preferred embodiment with reference to the single drawing.
Die Figur zeigt einen Behälter 1 für eine auszubringende Flüssigkeit, beispielsweise Fluorwasserstoff. Im darge- stellten Ausführungsbeispiel ist der Behälter zylinder- förmig. Ein bewegliches Element 2, im vorliegenden Fall eine Platte mit einem Durchmesser, der kleiner als der Innendurchmesser des zylindrischen Behälters 1 ist, ist über ein Verbindungsstück 3 mit einer Antriebseinrichtung 4 verbunden.The figure shows a container 1 for a liquid to be dispensed, for example hydrogen fluoride. In the exemplary embodiment shown, the container is cylindrical. A movable element 2, in the present case a plate with a diameter that is smaller than the inner diameter of the cylindrical container 1, is connected to a drive device 4 via a connecting piece 3.
Am Außenumfang des beweglichen Elements 2 befindet sich ein Balg 5, der einerseits mit dem beweglichen Element 2 und andererseits mit der Innenfläche einer Seitenwand 6 des Behälters 1 flüssigkeitsdicht verbunden ist. Gemäß einer besonders vorteilhaften Ausfuhrungsform der Erfindung sind das bewegliche Element 2 und der Balg 5 einstückig ausgebildet. Das bewegliche Element 2 und der Balg 5 werden dabei beispielsweise aus dem Vollen eines PTFE-Werkstücks gefertigt, wobei der Balg dadurch gebildet wird, daß jeweils versetzt von außen und innen im Balgbereich Schnitte oder Kerben ausgeführt werden, so daß dadurch die Balgfunktion entsteht.On the outer circumference of the movable element 2 there is a bellows 5, which is connected on the one hand to the movable element 2 and on the other hand to the inner surface of a side wall 6 of the container 1 in a liquid-tight manner. According to a particularly advantageous embodiment of the invention, the movable element 2 and the bellows 5 are formed in one piece. The movable element 2 and the bellows 5 are made, for example, from the solid of a PTFE workpiece, the bellows being formed by making cuts or notches in the bellows area, offset from the outside and inside, so that the bellows function is created.
Eine Austrittsöffnung 7 mit einem Austrittsventil 8, sowie eine Eintrittsöffnung 9 mit einem Eintrittsventil 10 ist an der dem beweglichen Element 2 abgewandten Seitenwand 11 des Behälters 1 vorgesehen. In der Zylindersei- tenwand befindet sich ein Sicherheits- oder Uberlastan- schluß oder -ventil 12, sowie ein Entlüftungsansschluß oder -ventil 13.An outlet opening 7 with an outlet valve 8 and an inlet opening 9 with an inlet valve 10 are provided on the side wall 11 of the container 1 facing away from the movable element 2. In the cylinder there is a safety or overload connection or valve 12, as well as a vent connection or valve 13.
An der Seitenwand 6, durch die der Antrieb des beweglichen Elements 2 erfolgt, ist von außen ein Gehäuse 15 angeflanscht, das die gesamte Antriebsvorrichtung 4 umgibt. Das Gehäuse 15 bildet zusammen mit dem Gehäuse und dem vom beweglichen Element 2 und vom Balg 5 gebildeten Innenraum einen gemeinsamen Raum, der nach außen abgeschlossen ist. Dieser Raum steht über ein Einlaßventil 16 steuerbar mit dem Außenraum in Verbindung.On the side wall 6, through which the movable element 2 is driven, a housing 15 is flanged from the outside and surrounds the entire drive device 4. The housing 15 forms, together with the housing and the interior space formed by the movable element 2 and the bellows 5, a common space which is closed off from the outside. This space is controllably connected to the outside space via an inlet valve 16.
Die Antriebsvorrichtung weist einen Motor 17, ein Plane- tengetriebe 18 sowie ein Riemengetriebe 19 auf, die eine reale Spindel 20 antreiben, die über das Verbindungsstück 3 mit dem beweglichen Element 2 verbunden ist.The drive device has a motor 17, a planetary gear 18 and a belt gear 19 which drive a real spindle 20 which is connected to the movable element 2 via the connecting piece 3.
Innerhalb des vom Balg 5 und dem beweglichen Element 2 gebildeten Raumes ist ein Flussigkeits- bzw. Gassensor 21 angeordnet, der bei Auftreten eines Lecks im Balg 5 das Austreten der auszubringenden Flüssigkeit feststellt.A liquid or gas sensor 21 is arranged within the space formed by the bellows 5 and the movable element 2 and detects the leakage of the liquid to be discharged when a leak occurs in the bellows 5.
Die erfindungsgemäße Vorrichtung arbeitet folgendermaßen.The device according to the invention works as follows.
Wenn das bewegliche Element 2 unter Zusammenfalten des Balgs 5 mittels der Spindel 20 von rechts nach links bewegt wird (die Figur ist hierbei im Querformat zu betrachten) , wird über das Eintrittsventil 10 und über die Eintrittsöffnung 9 die auszubringende Flüssigkeit in dem Behälter 1 gesaugt. Zum Ausbringen der im Behälter 1 enthaltenen Flüssigkeit wird die Spindel 20 in umgekehrter Richtung bewegt, so daß das bewegliche Element 2 bei ei- nem Hub, der durch den Pfeil 22 angedeutet ist, unter Ausfaltung des Balgs 5 die Flüssigkeit durch die Aus- trittsöffnung 7 und das jetzt offene Austrittsventil 8 austreibt. Das bewegliche Element 2 kann dabei mit der Spindel 20 über einen langen Zeitraum hinweg mit sehr gleichmäßiger Geschwindigkeit bewegt werden, so daß das Austrittsvolumen pro Zeiteinheit über den Ausbringzeitraum hinweg sehr gleichmäßig und konstant bleibt . Bei der Hin- und Herbewegung des Elements 2 treten keine Rei- bungskräfte und damit auch keine Partikelbildungen auf, weil das bewegliche Element 2 nicht mit der Innenfläche des Behälters 1 in Berührung steht. Die Abdichtung des Innenraums des Behälters 1 nach außen erfolgt mit dem Balg 5, der eine Linearbewegung des Elements 2 ohne Par- tikelbildung zuläßt.If the movable element 2 is moved from right to left by folding the bellows 5 by means of the spindle 20 (the figure is to be viewed here in landscape format), the liquid to be dispensed is sucked into the container 1 via the inlet valve 10 and the inlet opening 9. To dispense the liquid contained in the container 1, the spindle 20 is moved in the opposite direction, so that the movable element 2 at a Nem stroke, which is indicated by the arrow 22, expels the liquid through the outlet opening 7 and the now open outlet valve 8 by folding out the bellows 5. The movable element 2 can be moved with the spindle 20 at a very uniform speed over a long period of time, so that the outlet volume per unit of time remains very uniform and constant over the application period. When the element 2 is moved back and forth, no frictional forces and therefore no particle formation occur because the movable element 2 is not in contact with the inner surface of the container 1. The interior of the container 1 is sealed off from the outside with the bellows 5, which permits a linear movement of the element 2 without the formation of particles.
Die Erfindung wurde zuvor anhand eines bevorzugten Aus- führungsbeispiels erläutert. Dem Fachmann sind jedoch zahlreiche Ausgestaltungen und Modifikationen möglich, ohne daß dadurch der Erfindungsgedanke verlassen wird. Beispielsweise kann die Anbringungsvorrichtung auch anders als bei dem dargestellten Ausführungsbeispiel realisiert sein. Der Behälter 1 kann auch quadratisch und die Ein- und Austrittsδffnungen für die auszubringende Flüs- sigkeit können auch an dem Außenumfang des Behälters 1 angeordnet sein. The invention was previously explained on the basis of a preferred exemplary embodiment. However, numerous configurations and modifications are possible for the person skilled in the art without departing from the inventive concept. For example, the attachment device can also be implemented differently than in the exemplary embodiment shown. The container 1 can also be square and the inlet and outlet openings for the liquid to be discharged can also be arranged on the outer circumference of the container 1.

Claims

Patentansprüche claims
1. Vorrichtung zum Ausbringen einer Flüssigkeit, mit einem die Flüssigkeit enthaltenden Behälter (1) und einem beweglichen Element (2) zum Verkleinern des Behältervolumens, wobei das bewegliche Element (2) berührungsfrei im Behälter beweglich und flüssigkeitsdicht mit einer Innenwand des Behälters (1) verbünden ist, und die Ver- bindung zwischen dem beweglichen Element (2) und einer Innenwand des Behälters (1) ein Faltenbalg (5) ist, dessen vom Behälter (1) abgewandter Innenraum zusammen mit einem Gehäuse (15) einem nach außen abgeschlossenen Raum bildet, der eine Spindel als An- triebsvorrichtung enthält, die im Innenraum des Faltenbalgs (5) mit dem beweglichen Element (2) verbunden ist.1. Device for dispensing a liquid, with a container (1) containing the liquid and a movable element (2) for reducing the container volume, the movable element (2) being movable in the container without contact and being liquid-tight with an inner wall of the container (1) is connected, and the connection between the movable element (2) and an inner wall of the container (1) is a bellows (5), the interior of which faces away from the container (1) together with a housing (15) an enclosed space forms, which contains a spindle as the drive device, which is connected in the interior of the bellows (5) with the movable element (2).
2. Vorrichtung nach Anspruch 1, dadurch gekennzeichnet, daß ein Motor (17) zum Antreiben der Spindel vorgesehen ist .2. Device according to claim 1, characterized in that a motor (17) is provided for driving the spindle.
3. Vorrichtung nach Anspruch 2, dadurch gekennzeichnet, daß der Motor innerhalb des abgeschlossenen Raums angeordnet ist.3. Device according to claim 2, characterized in that the motor is arranged within the closed space.
4. Vorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß der abgeschlossene Raum mit einem Gas gefüllt ist.4. Device according to one of the preceding claims, characterized in that the closed space is filled with a gas.
Vorrichtung nach Anspruch 4, dadurch gekennzeichnet, daß das Gas mit einem Überdruck beaufschlagt ist. Apparatus according to claim 4, characterized in that an excess pressure is applied to the gas.
6. Vorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß im Innenraum des Faltenbalgs ein Lecksensor (21) angeordnet ist.6. Device according to one of the preceding claims, characterized in that a leak sensor (21) is arranged in the interior of the bellows.
7. Vorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß der Faltenbalg (5) aus einem von der auszubringenden Flüssigkeit nicht angreifbaren Material besteht.7. Device according to one of the preceding claims, characterized in that the bellows (5) consists of a material which cannot be attacked by the liquid to be dispensed.
8. Vorrichtung nach einem der vorhergehenden Ansprüche gekennzeichnet durch ihre Verwendung zum Einleiten der auszubringenden Flüssigkeit in einem Trägerstrom.8. Device according to one of the preceding claims, characterized by its use for introducing the liquid to be dispensed into a carrier stream.
9. Vorrichtung nach einem der vorhergehenden Ansprüche, gekennzeichnet durch ihre Verwendung im Zusammenhang mit einer Anlage zum Behandeln von Halbleitersubstraten.9. Device according to one of the preceding claims, characterized by its use in connection with a system for treating semiconductor substrates.
10. Vorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß die auszubringende Flüssigkeit Flußsäure (HF) ist.10. Device according to one of the preceding claims, characterized in that the liquid to be dispensed is hydrofluoric acid (HF).
11. Vorrichtung nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß der Faltenbalg (5) aus Polytetrafluorethylen is . 11. Device according to one of the preceding claims, characterized in that the bellows (5) is made of polytetrafluoroethylene.
EP98965678A 1997-12-01 1998-11-18 Device for discharging a liquid Expired - Lifetime EP1036031B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19753286A DE19753286C2 (en) 1997-12-01 1997-12-01 Device for dispensing a liquid
DE19753286 1997-12-01
PCT/EP1998/007401 WO1999028232A1 (en) 1997-12-01 1998-11-18 Device for discharging a liquid

Publications (2)

Publication Number Publication Date
EP1036031A1 true EP1036031A1 (en) 2000-09-20
EP1036031B1 EP1036031B1 (en) 2001-10-24

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EP98965678A Expired - Lifetime EP1036031B1 (en) 1997-12-01 1998-11-18 Device for discharging a liquid

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US (1) US6360921B1 (en)
EP (1) EP1036031B1 (en)
JP (1) JP2001524431A (en)
KR (1) KR100355061B1 (en)
AT (1) ATE207449T1 (en)
DE (2) DE19753286C2 (en)
TW (1) TW436879B (en)
WO (1) WO1999028232A1 (en)

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Publication number Priority date Publication date Assignee Title
US7080686B2 (en) * 2002-11-13 2006-07-25 David Beckhardt Devices and methods for extraction, transportation and/or release of material

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Publication number Priority date Publication date Assignee Title
FR1382439A (en) * 1964-01-14 1964-12-18 Fluid injector and metering device
BE672131A (en) * 1964-11-12
SE406189B (en) * 1977-06-16 1979-01-29 Autotank Ab DEVICE FOR INSTALLATION OF ELECTRICAL OR ELECTRONIC EQUIPMENT, SEPARATE ELECTRONIC COUNTERS, IN APPARATUS FOR FUEL MINUTION
US4886189A (en) * 1988-02-29 1989-12-12 Vanderjagt John A System for selectively containing metering and dispensing liquids
US5061156A (en) * 1990-05-18 1991-10-29 Tritec Industries, Inc. Bellows-type dispensing pump
KR930008856B1 (en) * 1991-05-15 1993-09-16 금성일렉트론 주식회사 Mixing apparatus for constant ratio of chemical source
FR2677611A1 (en) * 1991-06-11 1992-12-18 Sames Sa ADJUSTABLE CAPACITY TANK FOR LIQUID PRODUCTS.
US5383574A (en) * 1993-07-19 1995-01-24 Microbar Sytems, Inc. System and method for dispensing liquid from storage containers
GB9419791D0 (en) * 1994-09-30 1994-11-16 Rosereed Ltd Pumps

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Title
See references of WO9928232A1 *

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TW436879B (en) 2001-05-28
DE19753286A1 (en) 1999-06-10
EP1036031B1 (en) 2001-10-24
JP2001524431A (en) 2001-12-04
KR100355061B1 (en) 2002-10-05
KR20010032694A (en) 2001-04-25
WO1999028232A1 (en) 1999-06-10
DE59801898D1 (en) 2001-11-29
US6360921B1 (en) 2002-03-26
DE19753286C2 (en) 2001-03-01
ATE207449T1 (en) 2001-11-15

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