EP1036031A1 - Device for discharging a liquid - Google Patents
Device for discharging a liquidInfo
- Publication number
- EP1036031A1 EP1036031A1 EP98965678A EP98965678A EP1036031A1 EP 1036031 A1 EP1036031 A1 EP 1036031A1 EP 98965678 A EP98965678 A EP 98965678A EP 98965678 A EP98965678 A EP 98965678A EP 1036031 A1 EP1036031 A1 EP 1036031A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- container
- liquid
- bellows
- movable element
- dispensed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D7/00—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes
- B67D7/02—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants
- B67D7/0227—Apparatus or devices for transferring liquids from bulk storage containers or reservoirs into vehicles or into portable containers, e.g. for retail sale purposes for transferring liquids other than fuel or lubricants by an ejection plunger
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
- B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
- B67D1/00—Apparatus or devices for dispensing beverages on draught
- B67D1/08—Details
- B67D1/10—Pump mechanism
- B67D1/101—Pump mechanism of the piston-cylinder type
- B67D1/102—Pump mechanism of the piston-cylinder type for one liquid component only
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
Definitions
- the invention relates to a device for dispensing a liquid with a container containing the liquid and with a movable element for reducing the container volume.
- Devices of this type are known, for example, from DE 42 19 161 A in connection with pumps, in which the container or a cavity is designed in the form of a cylinder in which a piston is moved to change the container volume.
- the piston is sealed to the cylinder wall by means of a seal. Due to the frictional forces between the seal and the
- the inner wall of the cylinder creates abrasion and particles that lead to contamination of the liquid to be discharged.
- Such devices are therefore not suitable for dispensing high-purity liquids, for example in connection with chemicals or other liquids which are used, for example, in the treatment or cleaning in the field of chip manufacture, which require very pure treatment media.
- a device in which a bellows represents the container containing the liquid.
- a disadvantage of this arrangement is that when the bellows or container volume changes, the pressure that occurs in the bellows represents a large contact surface on the bellows and therefore, even with a uniform stroke movement, the volume and thus also the application rate of the fluid to be pumped over the entire stroke range not uniform and constant.
- the invention is therefore based on the object of providing a device which is of simple construction, avoids particle formation during operation and thus contamination of the liquid to be dispensed, and enables the liquid to be dispensed over the period of dispensing with a constant volume per unit of time .
- the object is achieved according to the invention with a device for dispensing a liquid, with a container containing the liquid and a movable element for reducing the volume of the container, the movable element being movable in the container without contact and being liquid-tightly connected to an inner wall of the container, and the connection between the movable element and an inner wall of the container is a bellows, the interior of which, facing away from the container, together with a housing, closes off from the outside.
- NEN space forms which contains a spindle as a drive device which is connected to the movable element in the interior of the bellows.
- the interior of the container, in which the liquid to be dispensed is located is also reliably and reliably closed off with respect to the movable element, without reducing the mobility of the element to reduce the container volume or to produce it the application pressure for the liquid is impaired.
- a major advantage of this device according to the invention over conventional dispensing devices, as is the case for example with pumps, is that no seal is required between the movable element and the inner surface of the container. Frictional forces therefore do not occur between the movable element and the container wall, so that no particles can be formed which could contaminate the liquid contained in the container to be dispensed.
- the pressure to be applied to the liquid to be dispensed is much more uniform due to the fact that there are no uneven frictional forces. This results in a much more even and pulsation-free application of the liquid.
- the device according to the invention also has considerable advantages with regard to diaphragm pumps, since when a bellows is used as a connection between the movable element and an inner wall of the container, pumping always takes place regardless of the container volume, that is to say regardless of the start or end of the pumping process. a constant volume per unit of time is possible because, unlike diaphragm pumps, the container volume is linearly related to the movement of the movable element or to the degree of drive of this element over the entire pumping process.
- the movable element can be in contact with the inner surface of the container during its movement, a contact-free movement of the element in the container is particularly advantageous for the reasons already mentioned, since this reliably prevents abrasion.
- the movable element is connected to a drive device within the bellows, hereinafter referred to as bellows for short. Since the bellows completely seals the inside of the container from the outside, no measures are necessary to protect the drive device from the liquid to be dispensed. In conventional devices with sealing elements between the movable element and the inner wall of the container, liquid passage on the sealing elements cannot be reliably avoided even if the sealing elements are undamaged. These difficulties and leaks that occur as a result, which are particularly disadvantageous in the case of aggressive liquids, are reliably avoided with the device according to the invention.
- the drive device can therefore be constructed more simply and can be manufactured with less expensive components.
- the drive device comprises a movable rod, preferably a servo axis or a spindle, wherein this rod, servo axis or spindle can be constructed in a very simple manner and nevertheless very much over the stroke range allows uniform linear movement at a very constant speed, so that the liquid is dispensed per unit of time with a very constant volume.
- the rod, servo axis or spindle is driven, moved or rotated by a motor.
- the entire drive device is preferably surrounded by a housing, which is preferably attached to an outer wall of the container, the housing and the interior of the bellows forming a space which is closed off from the outside.
- This structure is not only structurally simple, both in terms of production and maintenance, but also forms a reliable protection against a chemically aggressive environment towards the outside, as is the case with chemical plants and in particular also with plants for the treatment and manufacture of semiconductor chips Case is.
- the space formed by the housing of the drive device and the bellows is filled with an inert, neutral gas, which can additionally have an overpressure in order to introduce aggressive vapors into it Avoid space safely.
- At least one sensor is arranged in the space formed by the housing and the bellows, which detects whether liquid to be dispensed comes out of the container in this space, for example when the bellows or connection points between the bellows and the movable element or the container wall is leaking.
- the sensor it is advantageous to arrange the sensor near the bellows.
- the material from which the bellows is made preferably consists of a material which is not attacked by the liquid to be dispensed.
- the present apparatus is' particularly for the appropriation for introducing a liquid into a carrier stream suitable.
- a very uniform introduction of the liquid into the carrier stream is particularly important.
- the device according to the invention can advantageously be used in connection with a system for treating semiconductor substrates. This is because high-purity liquids must be used and any contamination must be avoided, which is caused, for example, by the movement of seals between the movable element and the inner wall of the container due to abrasion. This advantage is particularly desirable in connection with a liquid volume per unit of time that is uniform over the application period.
- the liquid to be dispensed is preferably hydrogen fluoride, which is fed into a stream of distilled water, both of which are then introduced into a treatment tank for rinsing and cleaning semiconductor substrates.
- PTFE polytetrafluoroethylene
- the figure shows a container 1 for a liquid to be dispensed, for example hydrogen fluoride.
- the container is cylindrical.
- a movable element 2 in the present case a plate with a diameter that is smaller than the inner diameter of the cylindrical container 1, is connected to a drive device 4 via a connecting piece 3.
- the movable element 2 and the bellows 5 are formed in one piece.
- the movable element 2 and the bellows 5 are made, for example, from the solid of a PTFE workpiece, the bellows being formed by making cuts or notches in the bellows area, offset from the outside and inside, so that the bellows function is created.
- An outlet opening 7 with an outlet valve 8 and an inlet opening 9 with an inlet valve 10 are provided on the side wall 11 of the container 1 facing away from the movable element 2.
- a safety or overload connection or valve 12 in the cylinder there is a safety or overload connection or valve 12, as well as a vent connection or valve 13.
- a housing 15 is flanged from the outside and surrounds the entire drive device 4.
- the housing 15 forms, together with the housing and the interior space formed by the movable element 2 and the bellows 5, a common space which is closed off from the outside. This space is controllably connected to the outside space via an inlet valve 16.
- the drive device has a motor 17, a planetary gear 18 and a belt gear 19 which drive a real spindle 20 which is connected to the movable element 2 via the connecting piece 3.
- a liquid or gas sensor 21 is arranged within the space formed by the bellows 5 and the movable element 2 and detects the leakage of the liquid to be discharged when a leak occurs in the bellows 5.
- the device according to the invention works as follows.
- the movable element 2 is moved from right to left by folding the bellows 5 by means of the spindle 20 (the figure is to be viewed here in landscape format), the liquid to be dispensed is sucked into the container 1 via the inlet valve 10 and the inlet opening 9.
- the spindle 20 is moved in the opposite direction, so that the movable element 2 at a Nem stroke, which is indicated by the arrow 22, expels the liquid through the outlet opening 7 and the now open outlet valve 8 by folding out the bellows 5.
- the movable element 2 can be moved with the spindle 20 at a very uniform speed over a long period of time, so that the outlet volume per unit of time remains very uniform and constant over the application period.
- the invention was previously explained on the basis of a preferred exemplary embodiment. However, numerous configurations and modifications are possible for the person skilled in the art without departing from the inventive concept.
- the attachment device can also be implemented differently than in the exemplary embodiment shown.
- the container 1 can also be square and the inlet and outlet openings for the liquid to be discharged can also be arranged on the outer circumference of the container 1.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Containers And Packaging Bodies Having A Special Means To Remove Contents (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Loading And Unloading Of Fuel Tanks Or Ships (AREA)
- Devices For Dispensing Beverages (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19753286A DE19753286C2 (en) | 1997-12-01 | 1997-12-01 | Device for dispensing a liquid |
DE19753286 | 1997-12-01 | ||
PCT/EP1998/007401 WO1999028232A1 (en) | 1997-12-01 | 1998-11-18 | Device for discharging a liquid |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1036031A1 true EP1036031A1 (en) | 2000-09-20 |
EP1036031B1 EP1036031B1 (en) | 2001-10-24 |
Family
ID=7850415
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98965678A Expired - Lifetime EP1036031B1 (en) | 1997-12-01 | 1998-11-18 | Device for discharging a liquid |
Country Status (8)
Country | Link |
---|---|
US (1) | US6360921B1 (en) |
EP (1) | EP1036031B1 (en) |
JP (1) | JP2001524431A (en) |
KR (1) | KR100355061B1 (en) |
AT (1) | ATE207449T1 (en) |
DE (2) | DE19753286C2 (en) |
TW (1) | TW436879B (en) |
WO (1) | WO1999028232A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7080686B2 (en) * | 2002-11-13 | 2006-07-25 | David Beckhardt | Devices and methods for extraction, transportation and/or release of material |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1382439A (en) * | 1964-01-14 | 1964-12-18 | Fluid injector and metering device | |
BE672131A (en) * | 1964-11-12 | |||
SE406189B (en) * | 1977-06-16 | 1979-01-29 | Autotank Ab | DEVICE FOR INSTALLATION OF ELECTRICAL OR ELECTRONIC EQUIPMENT, SEPARATE ELECTRONIC COUNTERS, IN APPARATUS FOR FUEL MINUTION |
US4886189A (en) * | 1988-02-29 | 1989-12-12 | Vanderjagt John A | System for selectively containing metering and dispensing liquids |
US5061156A (en) * | 1990-05-18 | 1991-10-29 | Tritec Industries, Inc. | Bellows-type dispensing pump |
KR930008856B1 (en) * | 1991-05-15 | 1993-09-16 | 금성일렉트론 주식회사 | Mixing apparatus for constant ratio of chemical source |
FR2677611A1 (en) * | 1991-06-11 | 1992-12-18 | Sames Sa | ADJUSTABLE CAPACITY TANK FOR LIQUID PRODUCTS. |
US5383574A (en) * | 1993-07-19 | 1995-01-24 | Microbar Sytems, Inc. | System and method for dispensing liquid from storage containers |
GB9419791D0 (en) * | 1994-09-30 | 1994-11-16 | Rosereed Ltd | Pumps |
-
1997
- 1997-12-01 DE DE19753286A patent/DE19753286C2/en not_active Expired - Fee Related
-
1998
- 1998-11-18 KR KR1020007005977A patent/KR100355061B1/en not_active IP Right Cessation
- 1998-11-18 WO PCT/EP1998/007401 patent/WO1999028232A1/en active IP Right Grant
- 1998-11-18 DE DE59801898T patent/DE59801898D1/en not_active Expired - Fee Related
- 1998-11-18 US US09/555,988 patent/US6360921B1/en not_active Expired - Fee Related
- 1998-11-18 AT AT98965678T patent/ATE207449T1/en not_active IP Right Cessation
- 1998-11-18 JP JP2000523143A patent/JP2001524431A/en not_active Ceased
- 1998-11-18 EP EP98965678A patent/EP1036031B1/en not_active Expired - Lifetime
- 1998-12-08 TW TW087119550A patent/TW436879B/en active
Non-Patent Citations (1)
Title |
---|
See references of WO9928232A1 * |
Also Published As
Publication number | Publication date |
---|---|
TW436879B (en) | 2001-05-28 |
DE19753286A1 (en) | 1999-06-10 |
EP1036031B1 (en) | 2001-10-24 |
JP2001524431A (en) | 2001-12-04 |
KR100355061B1 (en) | 2002-10-05 |
KR20010032694A (en) | 2001-04-25 |
WO1999028232A1 (en) | 1999-06-10 |
DE59801898D1 (en) | 2001-11-29 |
US6360921B1 (en) | 2002-03-26 |
DE19753286C2 (en) | 2001-03-01 |
ATE207449T1 (en) | 2001-11-15 |
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