EP1003973B1 - Micro pump comprising an inlet control member for its self-priming - Google Patents

Micro pump comprising an inlet control member for its self-priming Download PDF

Info

Publication number
EP1003973B1
EP1003973B1 EP98951326A EP98951326A EP1003973B1 EP 1003973 B1 EP1003973 B1 EP 1003973B1 EP 98951326 A EP98951326 A EP 98951326A EP 98951326 A EP98951326 A EP 98951326A EP 1003973 B1 EP1003973 B1 EP 1003973B1
Authority
EP
European Patent Office
Prior art keywords
plate
orifice
valve
membrane
moving member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP98951326A
Other languages
German (de)
French (fr)
Other versions
EP1003973A1 (en
Inventor
Didier Maillefer
Harald Van Lintel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Debiotech SA
Original Assignee
Westonbridge International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westonbridge International Ltd filed Critical Westonbridge International Ltd
Publication of EP1003973A1 publication Critical patent/EP1003973A1/en
Application granted granted Critical
Publication of EP1003973B1 publication Critical patent/EP1003973B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F04B53/1047—Flap valves the valve being formed by one or more flexible elements
    • F04B53/106—Flap valves the valve being formed by one or more flexible elements the valve being a membrane
    • F04B53/1067—Flap valves the valve being formed by one or more flexible elements the valve being a membrane fixed at its whole periphery and with an opening at its centre

Definitions

  • the invention relates to a fluidic device such as a micropump.
  • a fluidic device such as a micropump.
  • a fluidic device such as a micropump.
  • a fluidic device such as a micropump.
  • said inlet control member being a non-return valve composed of a mobile body and a membrane-shaped part connecting said movable member to the rest of said intermediate plate, interposed between the inlet duct and the pumping chamber and allowing by its elasticity, the movement of said valve between a closed position and a open position, said movable member being traversed by an orifice, between the first and second ends, said valve being shaped so that, in said open position, the movable member does not prevent the flow of the liquid from said port to said pumping chamber and the second end of the movable member being shaped to ensure, in said closed position, tight contact with that of the pads
  • such a device constitutes a micropump for medical use which regularly delivers a quantity controlled drug.
  • the manufacturing of these micropumps is based on micro-machining technologies for silicon or any other material machinable by etching using photolithographic techniques.
  • the micropump is controlled by varying the volume of the pumping chamber (alternating decreases and increases), for example by means of an order by a piezoelectric actuator.
  • European patent application 95904674.9 presents such a self-priming micropump.
  • the inlet valves described in this document cannot be made easily.
  • European patent application 90 810272.6 describes a micropump comprising an inlet member, forming a non-return valve, which does not allow however, not to ensure self-priming of the pump.
  • the object of the present invention is to provide a fluidic device such a micropump comprising an input control member allowing to obtain in a secure manner the self-priming of said device, this member being able to be easily manufactured.
  • this objective is achieved by the fact that the movable member is located over most of the thickness of said intermediate plate, that the membrane-shaped part is located near the other of the platelets and that said orifice has a limited volume.
  • the liquid inlet control member included in the device according to the present invention constitutes a non-return valve of the seat valve type.
  • This non-return valve has a shaped part membrane allowing, by its elasticity, the opening and closing of the valve and a movable member surrounding an orifice intended for the flow of liquid.
  • the movable member also comprises at one of its ends means ensuring the tightness of this inlet valve in its closed position, that is to say that the movable member is in sealed contact support against one plates adjacent to the valve, this plate forming the seat of the valve.
  • the first end of the movable member adjacent to said membrane-shaped part is provided with at least one stop element intended to limit the movement of said valve from the closed position towards the open position, the free end of said abutment element coming to contact of the plate located near the membrane-shaped part in said open position without said stop member preventing the flow of liquid from said orifice to said pumping chamber.
  • the micropumps 10 and 100 comprise a base plate 12, preferably made of glass, traversed right through by two conduits 14, 16 respectively forming an inlet conduit and a micropump outlet duct.
  • An intermediate plate 18 surmounts the base plate 12, this intermediate plate preferably being made of silicon and connected to the base plate 12 by the technique, known per se, of anodic welding.
  • the intermediate plate 18 is surmounted by an upper plate 20 or second plate, preferably glass, the intermediate plate and the second plate being linked together by the same technique as the base plate 12 and the intermediate plate 18.
  • the first plate 12 and the second plate 20 have a substantially equal thickness of the order of 1 mm while the intermediate plate also has a substantially constant thickness but more low, between 0.1 and 0.5 mm, preferably between 0.3 and 0.5 mm and advantageously of the order of 0.3 mm.
  • a portion of the intermediate plate 18 constitutes a membrane pump 22 of substantially circular shape and delimiting, with the face upper of the first plate 12, the pumping chamber 24.
  • the pumping membrane 22 constitutes a movable wall controlled by a actuator 26, 126.
  • the inlet duct 14 is connected to the pumping chamber 24 by one or more several input control members 28 which will be described in more detail below.
  • the pumping chamber 24 is connected to a device for controlling liquid outlet or outlet valve 30 which may be of structure similar to that described in the aforementioned European patent application 95 904674.9.
  • the outlet valve 30 shown includes the elements provided for in the above European patent application, namely an annular rib 32 placed opposite the duct of outlet 16 and in sealing contact with the upper surface of the first plate 12 in the closed position of the outlet valve 30, a membrane flexible 34, and thin layers of silicon oxide 36 and 38 allowing, respectively, to avoid adhesion between the annular rib 32 and the first plate 12, and, on the side of the membrane 34 opposite the first plate 12, to create a preload stressing the top of the rib 32 against the first plate 12.
  • the outlet valve 30 also includes a limiting member 39 disposed at the level of the annular rib 32, on the face of the membrane flexible 34 opposite the first plate 12, this limiting member constituting a stop element coming to bear against the second plate 20 in the open position of the outlet valve 30 in order to limit the spacing of the annular rib 32 relative to the first plate 12.
  • the inlet control member or inlet valve 28 visible on the Figures 1 and 2 in its closed position, is illustrated in more detail in the Figure 3 in which the inlet valve is in its open position.
  • the inlet valve 28 is consists of a movable member 40 surrounded by a membrane-shaped part 42.
  • This membrane 42 is substantially circular with a diameter of on the order of 3 mm, its thickness, preferably substantially constant, is between 10 and 50 ⁇ m, preferably of the order of 25 ⁇ m.
  • the inlet valve (s) 28 constitute non-return valves, part of which abuts against one of the first and second pads, in the closed position of the valve.
  • the movable member 40 surrounds an orifice 44 which passes through the movable member 40 from its first end 45, adjacent to the first plate 12, towards its second end 46, adjacent to the second plate 20.
  • the movable member 40 preferably has an external shape of revolution, for example a substantially cylindrical outer shape with circular section or, as illustrated in Figures 1 to 3, in the shape of a trunk cone, the widest part being directed towards the first plate 12.
  • the orifice 44 its volume constituting a space of connection added to the volume of the pumping chamber 24, it is necessary that it is minimum so as not to constitute too much volume important in relation to the volume of the pumping chamber 24.
  • This orifice 44 can have various shapes such as cylindrical, circular, square or other, truncated cone or pyramid-shaped section. If the technique used to engrave the silicon plate constituting the intermediate plate 18 makes it possible to produce an orifice 44 of small diameter, we can make an orifice 44 having a small and substantially section equal over the entire length of this orifice 44.
  • the orifice 44 has a shape made up of two pyramids with square base whose bases constitute of the ends of said orifice, the central zone of this orifice belonging to the two pyramids.
  • This shape composed of two inverted pyramids having their vertices in contact makes it possible to obtain a shape for the orifice 44 of which the total volume is less than that of a single pyramid engraved from one of the two ends of the movable member 40.
  • an advantageous solution consists in carrying out anisotropic etching from the two ends 45 and 46 of the movable member 40.
  • anisotropic etching For this, we begins to dig hole 44 starting, for example, with the first end 45 of the movable member 40, the etching consisting of a square whose side length decreases as we dig more into the movable member 40.
  • an orifice 44 is produced having a cross section substantially constant over its entire length, for example thanks to a method of reactive ion etching or micro-machining, an orifice 44 of small is obtained diameter, this diameter possibly being of the order of 10 to 100 ⁇ m.
  • the volume of the orifice 40 has a volume at most equal to one fifth, preferably one tenth, of the unit volume of pumping, i.e. the volume moved at each open-close cycle of the pump or the volume moved by each cycle up and down of the pumping membrane 22.
  • the relationship between, on the one hand, the maximum distance between the membrane-shaped part of the nearest wafer and, on the other hand, the thickness of the wafer intermediate is less than 1/20, advantageously of the order of 7 ⁇ m.
  • said membrane-shaped part, the first end of the movable member and the outlet of the orifice are adjacent to the first plate and the outlet of the orifice opens directly into the pumping chamber.
  • annular rib 48 surrounding the inlet of the orifice 44 and allowing, when in contact against the lower surface of the second plate 20, to seal the inlet valve 28.
  • annular rib 48 having a surface of contact as small as possible so that, on the one hand, the surface in front present an optimum surface condition has the smallest surface area possible and, on the other hand, so as to produce an inlet valve 28 which can open for a difference in liquid pressure between the inlet pipe 14 and the relatively small pumping chamber 24.
  • the pressure difference allowing the opening of the inlet valve 28 corresponds to the pressure difference of liquid between the liquid present in the connection space 50 placed upstream of the inlet valve 28 and the liquid pressure in the orifice 44, this pressure being the same as in the pumping chamber 24.
  • the liquid can pass from the orifice 44 to the pumping 24, in the open position of the inlet valve 28, provision is made, on the surface of the first end 45 of the movable member 40 placed in look of the first plate 12, a series of stop elements 52 under the shape of small pillars, one end of which is integral with the first end of the movable member 40 and whose second end, free, comes lean against the upper surface of the first plate 12.
  • these abutment elements 52 constitute limiters of movement for the inlet valve 28 when the latter opens so that, in its opening movement, when the movable member 40 approaches of the first plate 12, we are not in a situation where the surface of the first end of the movable member 40 which surrounds the outlet orifice 44 comes to bear on the first plate 12 by closing thus the exit from orifice 44.
  • the inlet valve 28 When the liquid pressure in the connection space 50 is equal to the liquid pressure in the pumping chamber 24, the inlet valve 28 is closes itself by a recall phenomenon whose origin is explained below. Then, the actuator 26, 126 controls the downward movement of the pumping membrane 22 so that one obtains a liquid pressure in the pumping chamber 24 which is higher than the liquid pressure in the connection space located downstream of the outlet valve 30. In this situation, the outlet valve opens as soon as the pressure difference is sufficient and the liquid flows out of the chamber pumping 24.
  • the inlet valve 28 further comprises a first layer of silicon oxide 54 covering at least the surface of the second end 46 of the movable member 40 capable of entering into contact with the second plate 20 in order to prevent a joining between the valve and the second plate in the closed position of the valve input 28.
  • This first layer of silicon oxide 54 covers at least the annular rib 48 in the area intended to come into contact with the second wafer 20, this thin layer of silicon oxide allowing avoid bonding between the movable member 40 and the second plate 20. So that the inlet valve 28 is closed in its rest position, we advantageously provides layers of silicon oxide 56, 58 arranged on the membrane 42 so that it is subjected to a certain prestressing up the figures.
  • the oxide layer 56 is arranged at the level of the region of the part form of membrane 42 which is adjacent to the movable member 40 and which is turned towards the second plate 20 and the oxide layer 58 is disposed in an area of the membrane 42 furthest from the organ mobile 40, on the opposite face of the first plate 12.
  • the inlet valve 28 being preferably machined within the wafer intermediate 18 in silicon using photolithographic techniques known, it is expected that, preferably, the surface of the first portion 42a turned towards the first plate 12 is parallel to the surface of the first plate 12 placed opposite the inlet valve 28 and either same level as the free end of the stop elements 52 because these two elements are machined simultaneously. So these two elements are placed at an identical distance from said first plate 12 when the valve 28 is closed.
  • the free end of the stop elements 52 is planar and parallel to the surface of the first plate 12 adjacent to the pumping chamber 24.
  • the inlet valve 28 in FIG. 5 does not have the layers of oxides 54, 56 and 58 of Figure 3 because it is shaped, during its manufacturing, to be naturally, that is to say in its rest position, in closed position. In the absence of layer 54, it is expected that at least the surface of the annular rib 48 facing the second plate 20 and / or at least the surface of the second plate 20 placed opposite the annular rib 48 is treated, for example coated with an anti-adhesion layer, to avoid the connection between the valve 28 in the closed position and the second plate 20.
  • an inlet valve 28 can be made with a membrane 42 in steps, such as that of FIG. 5, and comprising some or all of the silicon oxide layers 54, 56 and 58 in the figure 3. If a layer 58 is provided, it will preferably be limited to the first portion 42a of the membrane 42.
  • the variant embodiment illustrated in FIG. 6 corresponds to a non-return valve 28 in closed position whose position has been reversed with respect to that of FIG. 3.
  • the membrane 42 is located near the second plate 20 and the seat of the valve 28 is formed by the annular zone of the upper face of the first plate 12 facing the annular rib 48 directed towards the bottom of Figure 6 and placed on the second end 46 of the movable member 40.
  • the stop elements 52 On the side of the first end 45 of the movable member 40, adjacent to the second plate 20 and extended by the membrane 42, are arranged the stop elements 52 and the movable member is extended radially by the membrane 42.
  • the orifice 44 has the same characteristics and can be made of the same way as in the case of the embodiments presented previously.
  • the micropump comprising a inlet valve 28 according to one of the embodiments which have just been described, it remains identical to that of a micropump of the type of those which are described in the aforementioned European applications

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Details Of Reciprocating Pumps (AREA)

Description

L'invention concerne un dispositif fluidique tel qu'une micropompe comprenant au moins une première plaquette, une deuxième plaquette, une plaque intermédiaire disposée entre lesdites première et deuxième plaquettes, une chambre de pompage délimitée par ladite première plaquette et ladite plaquette intermédiaire et des organes de contrôle d'entrée et de sortie communicant avec ladite chambre de pompage, des conduits d'entrée et de sortie traversant de part en part une desdites première et deuxième plaquettes, ledit organe de contrôle d'entrée étant une valve anti-retour composée d'un organe mobile et d'une partie en forme de membrane reliant ledit organe mobile au reste de ladite plaquette intermédiaire, interposée entre le conduit d'entrée et la chambre de pompage et permettant par son élasticité, le mouvement de ladite valve entre une position fermée et une position ouverte, ledit organe mobile étant traversé par un orifice, entre les première et deuxième extrémités, ladite valve étant conformée de sorte que, dans ladite position ouverte, l'organe mobile n'empêche pas l'écoulement du liquide depuis ledit orifice vers ladite chambre de pompage et la deuxième extrémité de l'organe mobile étant conformée pour assurer, dans ladite position fermée, un contact étanche avec celle des plaquettes formant le siège de la valve .The invention relates to a fluidic device such as a micropump. comprising at least a first plate, a second plate, a intermediate plate disposed between said first and second wafers, a pumping chamber delimited by said first wafer and said intermediate plate and input control and outlet communicating with said pumping chamber, inlet conduits and exit crossing right through one of said first and second platelets, said inlet control member being a non-return valve composed of a mobile body and a membrane-shaped part connecting said movable member to the rest of said intermediate plate, interposed between the inlet duct and the pumping chamber and allowing by its elasticity, the movement of said valve between a closed position and a open position, said movable member being traversed by an orifice, between the first and second ends, said valve being shaped so that, in said open position, the movable member does not prevent the flow of the liquid from said port to said pumping chamber and the second end of the movable member being shaped to ensure, in said closed position, tight contact with that of the pads forming the valve seat.

Par exemple, mais non exclusivement, un tel dispositif constitue une micropompe à usage médical qui délivre régulièrement une quantité contrôlée de médicament. La fabrication de ces micropompes est basée sur les technologies de micro-usinage du silicium ou de tout autre matériau usinable par gravure à l'aide de techniques photolithographiques. Pour l'application particulière précitée, et dans d'autres cas encore, il est nécessaire de réaliser un organe de contrôle d'entrée permettant l'auto-amorçage de la micropompe. La commande de la micropompe s'effectue en faisant varier le volume de la chambre de pompage (alternance de diminutions et d'augmentations), par exemple au moyen d'une commande par un actionneur piézo-électrique.For example, but not exclusively, such a device constitutes a micropump for medical use which regularly delivers a quantity controlled drug. The manufacturing of these micropumps is based on micro-machining technologies for silicon or any other material machinable by etching using photolithographic techniques. For the aforementioned particular application, and in still other cases it is necessary to make an input control device allowing self-priming of the micropump. The micropump is controlled by varying the volume of the pumping chamber (alternating decreases and increases), for example by means of an order by a piezoelectric actuator.

La demande de brevet européen 95904674.9 présente une telle micropompe auto-amorçante. Toutefois, les clapets d'entrées décrits dans ce document ne peuvent pas être réalisés facilement. European patent application 95904674.9 presents such a self-priming micropump. However, the inlet valves described in this document cannot be made easily.

La demande de brevet européen 90 810272.6 décrit une micropompe comportant un organe d'entrée, formant une valve anti-retour, qui ne permet cependant pas d'assurer l'auto-amorçage de la pompe.European patent application 90 810272.6 describes a micropump comprising an inlet member, forming a non-return valve, which does not allow however, not to ensure self-priming of the pump.

L'objet de la présente invention est de fournir dispositif fluidique tel qu'une micropompe comprenant un organe de contrôle d'entrée permettant d'obtenir de façon sûre l'auto-amorçage dudit dispositif, cet organe pouvant être facilement fabriqué.The object of the present invention is to provide a fluidic device such a micropump comprising an input control member allowing to obtain in a secure manner the self-priming of said device, this member being able to be easily manufactured.

Selon l'invention, on atteint cet objectif par le fait que l'organe mobile est situé sur la majeure partie de l'épaisseur de ladite plaquette intermédiaire, que la partie en forme de membrane est située à proximité de l'autre des plaquettes et que ledit orifice présente un volume limité.According to the invention, this objective is achieved by the fact that the movable member is located over most of the thickness of said intermediate plate, that the membrane-shaped part is located near the other of the platelets and that said orifice has a limited volume.

On comprend que l'organe de contrôle d'entrée de liquide compris dans le dispositif selon la présente invention constitue une valve anti-retour du type valve à siège. Cette valve anti-retour comporte une partie en forme de membrane permettant, par son élasticité, l'ouverture et la fermeture de la valve et un organe mobile entourant un orifice destiné à l'écoulement de liquide. L'organe mobile comprend également à l'une de ses extrémités des moyens assurant l'étanchéité de cette valve d'entrée dans sa position fermée, c'est-à-dire que l'organe mobile est en appui de contact étanche contre l'une des plaquettes adjacentes à la valve, cette plaquette formant le siège de la valve.It is understood that the liquid inlet control member included in the device according to the present invention constitutes a non-return valve of the seat valve type. This non-return valve has a shaped part membrane allowing, by its elasticity, the opening and closing of the valve and a movable member surrounding an orifice intended for the flow of liquid. The movable member also comprises at one of its ends means ensuring the tightness of this inlet valve in its closed position, that is to say that the movable member is in sealed contact support against one plates adjacent to the valve, this plate forming the seat of the valve.

Selon une caractéristique de l'invention, pour éviter que l'organe mobile n'obstrue l'entrée de la chambre de pompage, il est prévu, de préférence, que la première extrémité de l'organe mobile adjacente à ladite partie en forme de membrane est munie d'au moins un élément de butée destiné à limiter le mouvement de ladite valve depuis la position fermée vers la position ouverte, l'extrémité libre dudit élément de butée venant au contact de la plaquette située à proximité de la partie en forme de membrane dans ladite position ouverte sans que ledit élément de butée empêche l'écoulement du liquide depuis ledit orifice vers ladite chambre de pompage.According to a characteristic of the invention, to avoid that the movable member does not obstruct the entry of the pumping chamber, provision is made for preferably, that the first end of the movable member adjacent to said membrane-shaped part is provided with at least one stop element intended to limit the movement of said valve from the closed position towards the open position, the free end of said abutment element coming to contact of the plate located near the membrane-shaped part in said open position without said stop member preventing the flow of liquid from said orifice to said pumping chamber.

L'invention sera mieux comprise et des caractéristiques secondaires et leurs avantages apparaítront au cours de la description de modes de réalisation donnée ci-dessous à titre d'exemple.The invention will be better understood and secondary characteristics and their advantages will become apparent during the description of modes of realization given below by way of example.

Il est entendu que la description et les dessins qui suivent ne sont donnés qu'à titre indicatif et non limitatif. Il sera fait référence aux dessins annexés, dans lesquels :

  • la figure 1 représente, en coupe longitudinale, un premier type de micropompe selon l'invention ;
  • la figure 2 est une vue analogue à celle de la figure 1 concernant un deuxième type de micropompe, les figures 1 et 2 représentant l'organe de contrôle d'entrée de liquide dans sa position fermée ;
  • la figure 3 est une vue agrandie d'un détail des figures 1 ou 2, ce détail concernant la zone de la micropompe comportant l'organe de contrôle d'entrée de liquide ou valve d'entrée ;
  • la figure 4 représente partiellement et schématiquement, en vue de dessous selon la direction IV-IV, la valve d'entrée de la figure 3 ;
  • la figure 5 est une vue analogue à celle de la figure 3 représentant une variante de réalisation de la valve anti-retour, en position fermée, cette valve constituant l'organe de contrôle d'entrée de la micropompe selon la présente invention, et,
  • la figure 6 représente la zone de la micropompe telle qu'illustrée à la figure 3 munie d'une variante de réalisation de la valve anti-retour pour l'entrée du liquide.
It is understood that the description and the drawings which follow are given for information only and are not limiting. Reference will be made to the accompanying drawings, in which:
  • FIG. 1 represents, in longitudinal section, a first type of micropump according to the invention;
  • Figure 2 is a view similar to that of Figure 1 concerning a second type of micropump, Figures 1 and 2 showing the liquid inlet control member in its closed position;
  • Figure 3 is an enlarged view of a detail of Figures 1 or 2, this detail concerning the area of the micropump comprising the liquid inlet control member or inlet valve;
  • Figure 4 partially and schematically shows, in bottom view in the direction IV-IV, the inlet valve of Figure 3;
  • FIG. 5 is a view similar to that of FIG. 3 showing an alternative embodiment of the non-return valve, in the closed position, this valve constituting the inlet control member of the micropump according to the present invention, and,
  • FIG. 6 represents the zone of the micropump as illustrated in FIG. 3 provided with an alternative embodiment of the non-return valve for the entry of the liquid.

D'une façon générale, pour le fonctionnement des micropompes illustrées aux figures 1 et 2, on pourra se reporter à la demande de brevet européen précitée 95 904674.9 qui expose également le procédé de fabrication de telles micropompes. Afin de mieux visualiser les différents éléments représentés sur les figures 1 et 2, il faut noter que les épaisseurs des diverses plaquettes composant la micropompe ont été largement exagérées par rapport à l'échelle utilisée dans le sens longitudinal.Generally, for the operation of micropumps illustrated in Figures 1 and 2, reference may be made to the patent application cited above 95 904674.9 which also describes the process for manufacture of such micropumps. In order to better visualize the different elements shown in Figures 1 and 2, it should be noted that the thicknesses various platelets making up the micropump have been widely exaggerated compared to the scale used in the longitudinal direction.

En référence aux figures 1 et 2, les micropompes 10 et 100 comportent une plaquette de base 12, de préférence en verre, traversée de part en part par deux conduits 14, 16 formant respectivement un conduit d'entrée et un conduit de sortie de la micropompe.With reference to FIGS. 1 and 2, the micropumps 10 and 100 comprise a base plate 12, preferably made of glass, traversed right through by two conduits 14, 16 respectively forming an inlet conduit and a micropump outlet duct.

Une plaquette intermédiaire 18 surmonte la plaquette de base 12, cette plaquette intermédiaire étant de préférence en silicium et reliée à la plaquette de base 12 par la technique, connue en soi, de soudage anodique.An intermediate plate 18 surmounts the base plate 12, this intermediate plate preferably being made of silicon and connected to the base plate 12 by the technique, known per se, of anodic welding.

La plaquette intermédiaire 18 est surmontée d'une plaquette supérieure 20 ou deuxième plaquette, de préférence en verre, la plaquette intermédiaire et la deuxième plaquette étant reliées entre elles par la même technique que la plaquette de base 12 et la plaquette intermédiaire 18. The intermediate plate 18 is surmounted by an upper plate 20 or second plate, preferably glass, the intermediate plate and the second plate being linked together by the same technique as the base plate 12 and the intermediate plate 18.

La première plaquette 12 et la deuxième plaquette 20 présentent une épaisseur sensiblement égale de l'ordre de 1 mm alors que la plaquette intermédiaire présente une épaisseur également sensiblement constante mais plus faible, entre 0,1 et 0,5 mm, de préférence entre 0,3 et 0,5 mm et avantageusement de l'ordre de 0,3 mm.The first plate 12 and the second plate 20 have a substantially equal thickness of the order of 1 mm while the intermediate plate also has a substantially constant thickness but more low, between 0.1 and 0.5 mm, preferably between 0.3 and 0.5 mm and advantageously of the order of 0.3 mm.

Une portion de la plaquette intermédiaire 18 constitue une membrane de pompage 22 de forme sensiblement circulaire et délimitant, avec la face supérieure de la première plaquette 12, la chambre de pompage 24. En effet, la membrane de pompage 22 constitue une paroi mobile commandée par un dispositif d'actionnement 26, 126.A portion of the intermediate plate 18 constitutes a membrane pump 22 of substantially circular shape and delimiting, with the face upper of the first plate 12, the pumping chamber 24. In fact, the pumping membrane 22 constitutes a movable wall controlled by a actuator 26, 126.

Le conduit d'entrée 14 est relié à la chambre de pompage 24 par un ou plusieurs organes de contrôle d'entrée 28 qui sera décrit plus en détail ci-après. La chambre de pompage 24 est reliée à un organe de contrôle de sortie de liquide ou clapet de sortie 30 pouvant être de structure analogue à celui qui est décrit dans la demande de brevet européenne précitée 95 904674.9.The inlet duct 14 is connected to the pumping chamber 24 by one or more several input control members 28 which will be described in more detail below. The pumping chamber 24 is connected to a device for controlling liquid outlet or outlet valve 30 which may be of structure similar to that described in the aforementioned European patent application 95 904674.9.

Dans le cas des figures 1 et 2, la valve de sortie 30 représentée comporte les éléments prévus dans la demande de brevet européenne ci-dessus, à savoir une nervure annulaire 32 placée en regard du conduit de sortie 16 et en contact d'étanchéité avec la surface supérieure de la première plaquette 12 dans la position fermée de la valve de sortie 30, une membrane flexible 34, et des fines couches d'oxyde de silicium 36 et 38 permettant, respectivement, d'éviter une adhérence entre la nervure annulaire 32 et la première plaquette 12, et, du côté de la membrane 34 opposée à la première plaquette 12, de créer une précontrainte sollicitant le sommet de la nervure 32 contre la première plaquette 12.In the case of Figures 1 and 2, the outlet valve 30 shown includes the elements provided for in the above European patent application, namely an annular rib 32 placed opposite the duct of outlet 16 and in sealing contact with the upper surface of the first plate 12 in the closed position of the outlet valve 30, a membrane flexible 34, and thin layers of silicon oxide 36 and 38 allowing, respectively, to avoid adhesion between the annular rib 32 and the first plate 12, and, on the side of the membrane 34 opposite the first plate 12, to create a preload stressing the top of the rib 32 against the first plate 12.

La valve de sortie 30 comporte également un organe limitateur 39 disposé au niveau de la nervure annulaire 32, sur la face de la membrane flexible 34 opposée à la première plaquette 12, cet organe limitateur constituant un élément de butée venant prendre appui contre la deuxième plaquette 20 dans la position d'ouverture de la valve de sortie 30 afin de limiter l'écartement de la nervure annulaire 32 par rapport à la première plaquette 12.The outlet valve 30 also includes a limiting member 39 disposed at the level of the annular rib 32, on the face of the membrane flexible 34 opposite the first plate 12, this limiting member constituting a stop element coming to bear against the second plate 20 in the open position of the outlet valve 30 in order to limit the spacing of the annular rib 32 relative to the first plate 12.

L'organe de contrôle d'entrée ou valve d'entrée 28, visible sur les figures 1 et 2 dans sa position fermée, est illustré de façon plus détaillée à la figure 3 dans laquelle la valve d'entrée est dans sa position ouverte. The inlet control member or inlet valve 28, visible on the Figures 1 and 2 in its closed position, is illustrated in more detail in the Figure 3 in which the inlet valve is in its open position.

Comme on peut le voir sur les figures précitées, la valve d'entrée 28 se compose d'un organe mobile 40 entouré d'une partie en forme de membrane 42. Cette membrane 42 est sensiblement circulaire avec un diamètre de l'ordre de 3 mm, son épaisseur, de préférence sensiblement constante, est comprise entre 10 et 50 µm, de préférence de l'ordre de 25 µm.As can be seen in the above figures, the inlet valve 28 is consists of a movable member 40 surrounded by a membrane-shaped part 42. This membrane 42 is substantially circular with a diameter of on the order of 3 mm, its thickness, preferably substantially constant, is between 10 and 50 μm, preferably of the order of 25 μm.

Comme la valve de sortie 30, la ou les valves d'entrée 28 constituent des clapets anti-retour dont une partie vient en butée contre une des première et deuxième plaquettes, dans la position fermée de la valve.Like the outlet valve 30, the inlet valve (s) 28 constitute non-return valves, part of which abuts against one of the first and second pads, in the closed position of the valve.

L'organe mobile 40 entoure un orifice 44 qui traverse l'organe mobile 40 depuis sa première extrémité 45, adjacente à la première plaquette 12, vers sa deuxième extrémité 46, adjacente à la deuxième plaquette 20.The movable member 40 surrounds an orifice 44 which passes through the movable member 40 from its first end 45, adjacent to the first plate 12, towards its second end 46, adjacent to the second plate 20.

L'organe mobile 40 possède, de préférence une forme extérieure de révolution, par exemple une forme extérieure sensiblement cylindrique à section circulaire ou, comme illustré sur les figures 1 à 3, en forme de tronc de cône, la partie la plus large étant dirigée vers la première plaquette 12.The movable member 40 preferably has an external shape of revolution, for example a substantially cylindrical outer shape with circular section or, as illustrated in Figures 1 to 3, in the shape of a trunk cone, the widest part being directed towards the first plate 12.

En ce qui concerne l'orifice 44, son volume constituant un espace de liaison venant s'ajouter au volume de la chambre de pompage 24, il est nécessaire qu'il soit minimum afin de ne pas constituer un volume trop important par rapport au volume de la chambre de pompage 24.As regards the orifice 44, its volume constituting a space of connection added to the volume of the pumping chamber 24, it is necessary that it is minimum so as not to constitute too much volume important in relation to the volume of the pumping chamber 24.

Cet orifice 44 peut présenter diverses formes telles que cylindrique, à section circulaire, carrée ou autres, en tronc de cône ou en forme de pyramide. Si la technique utilisée pour graver la plaque de silicium constituant la plaque intermédiaire 18 permet de réaliser un orifice 44 de faible diamètre, on pourra réaliser un orifice 44 présentant une section faible et sensiblement égale sur toute la longueur de cet orifice 44.This orifice 44 can have various shapes such as cylindrical, circular, square or other, truncated cone or pyramid-shaped section. If the technique used to engrave the silicon plate constituting the intermediate plate 18 makes it possible to produce an orifice 44 of small diameter, we can make an orifice 44 having a small and substantially section equal over the entire length of this orifice 44.

Par contre, si la technique de gravure utilisée pour réaliser l'orifice 44 ne permet pas de réaliser un orifice de section sensiblement constante et relativement faible sur toute sa longueur, on privilégiera le mode de fabrication décrit ci-dessous.On the other hand, if the engraving technique used to make hole 44 does not make it possible to produce an orifice of substantially constant section and relatively small over its entire length, we will favor the manufacturing method described below.

Dans un mode préférentiel selon l'invention, l'orifice 44 possède une forme composée de deux pyramides à base carrée dont les bases constituent des extrémités dudit orifice, la zone centrale de cet orifice appartenant aux deux pyramides. Cette forme composée de deux pyramides inversées ayant leurs sommets en contact permet d'obtenir une forme pour l'orifice 44 dont le volume total est inférieur à celui d'une seule pyramide gravée depuis l'une des deux extrémités de l'organe mobile 40. In a preferred embodiment according to the invention, the orifice 44 has a shape made up of two pyramids with square base whose bases constitute of the ends of said orifice, the central zone of this orifice belonging to the two pyramids. This shape composed of two inverted pyramids having their vertices in contact makes it possible to obtain a shape for the orifice 44 of which the total volume is less than that of a single pyramid engraved from one of the two ends of the movable member 40.

Pour réaliser un tel orifice 44 en forme de double pyramide inversée, une solution avantageuse consiste à réaliser une gravure anisotropique depuis les deux extrémités 45 et 46 de l'organe mobile 40. Pour cela, on commence à creuser l'orifice 44 en commençant, par exemple, par la première extrémité 45 de l'organe mobile 40, la gravure étant constituée d'un carré dont la longueur du côté va en diminuant au fur et à mesure que l'on creuse davantage au sein de l'organe mobile 40. De cette manière, on obtient une première portion inférieure d'orifice 44 dont la section va en diminuant jusqu'à devenir nulle à l'endroit correspondant au sommet de la pyramide ainsi constituée.To make such an orifice 44 in the form of an inverted double pyramid, an advantageous solution consists in carrying out anisotropic etching from the two ends 45 and 46 of the movable member 40. For this, we begins to dig hole 44 starting, for example, with the first end 45 of the movable member 40, the etching consisting of a square whose side length decreases as we dig more into the movable member 40. In this way, we obtain a first lower portion of orifice 44, the section of which decreases until it becomes zero at the place corresponding to the top of the pyramid thus constituted.

Pour réaliser un orifice 44 débouchant, on réalise le même type de gravure que celle qui vient d'être décrite en partant cette fois ci depuis la deuxième extrémité 46 de l'organe mobile 40, l'orifice 44 étant alors entièrement réalisé lorsque, lors de la deuxième gravure, on atteint la première portion de l'orifice 44 précitée pour ainsi former un orifice 44 débouchant.To make an opening 44 opening, the same type of engraving as that just described, starting this time from the second end 46 of the movable member 40, the orifice 44 then being fully realized when, during the second engraving, the first portion of the aforementioned orifice 44 thereby forming an orifice 44 opening.

On peut donc s'arranger pour obtenir deux pyramides inversées ayant leurs sommets superposés, ou bien, de préférence, deux pyramides ayant une portion de volume en commun, de sorte que la section minimum de l'orifice 44 soit suffisamment importante.We can therefore arrange to obtain two inverted pyramids having their vertices superimposed, or, preferably, two pyramids having a portion of volume in common, so that the minimum section of the orifice 44 is sufficiently large.

Pour fixer les idées, voici quelques ordres de grandeur pour les dimensions de l'orifice 44 :

  • section à l'entrée ou à la sortie de l'orifice 44 : de l'ordre de 200 µm,
  • section au niveau du centre de l'orifice 44 : de l'ordre de 50 µm,
  • longueur de l'orifice 44 : au moins la moitié de l'épaisseur de la plaquette intermédiaire 18.
To fix the ideas, here are some orders of magnitude for the dimensions of hole 44:
  • section at the inlet or outlet of the orifice 44: of the order of 200 μm,
  • section at the center of orifice 44: of the order of 50 μm,
  • length of the orifice 44: at least half the thickness of the intermediate plate 18.

Dans le cas où on réalise un orifice 44 présentant une section sensiblement constante sur toute sa longueur, par exemple grâce à une méthode de gravure ou micro-usinage ionique réactif, on obtient un orifice 44 de petit diamètre, ce diamètre pouvant être de l'ordre de 10 à 100 µm.In the case where an orifice 44 is produced having a cross section substantially constant over its entire length, for example thanks to a method of reactive ion etching or micro-machining, an orifice 44 of small is obtained diameter, this diameter possibly being of the order of 10 to 100 μm.

De cette manière, on réussit à minimiser le volume de la chambre de pompage 14, du fait que la membrane 42, dont la surface tournée en direction de la première plaquette délimite une portion de la chambre de pompage, se trouve très proche de la première plaquette 12.In this way, we succeed in minimizing the volume of the pumping 14, because the membrane 42, the surface of which turned in direction of the first plate delimits a portion of the chamber pumping, is very close to the first plate 12.

De préférence, le volume de l'orifice 40 présente un volume au plus égal à un cinquième, de préférence un dixième, du volume unitaire de pompage, c'est-à-dire le volume déplacé à chaque cycle ouverture-fermeture de la pompe ou encore le volume déplacé par chaque cycle montée-descente de la membrane de pompage 22.Preferably, the volume of the orifice 40 has a volume at most equal to one fifth, preferably one tenth, of the unit volume of pumping, i.e. the volume moved at each open-close cycle of the pump or the volume moved by each cycle up and down of the pumping membrane 22.

Pour parvenir à ce résultat, de préférence, le rapport entre, d'une part, la distance maximum séparant la partie en forme de membrane de la plaquette la plus proche et, d'autre part, l'épaisseur de la plaquette intermédiaire est inférieure à 1/20, avantageusement de l'ordre de 7 µm. En outre, de préférence, ladite partie en forme de membrane, la première extrémité de l'organe mobile et la sortie de l'orifice sont adjacentes à la première plaquette et la sortie de l'orifice débouche directement dans la chambre de pompage.To achieve this result, preferably, the relationship between, on the one hand, the maximum distance between the membrane-shaped part of the nearest wafer and, on the other hand, the thickness of the wafer intermediate is less than 1/20, advantageously of the order of 7 μm. In in addition, preferably, said membrane-shaped part, the first end of the movable member and the outlet of the orifice are adjacent to the first plate and the outlet of the orifice opens directly into the pumping chamber.

Au niveau de la deuxième extrémité 46 de l'organe mobile 40, on trouve une nervure annulaire 48 entourant l'entrée de l'orifice 44 et permettant, lorsqu'elle est en contact contre la surface inférieure de la deuxième plaquette 20, d'assurer l'étanchéité de la valve d'entrée 28. On privilégiera bien sûr une nervure annulaire 48 possédant une surface de contact aussi faible que possible afin que, d'une part, la surface devant présenter un état de surface optimum présente une superficie la plus faible possible et, d'autre part, de façon à réaliser une valve d'entrée 28 pouvant s'ouvrir pour une différence de pression de liquide entre le conduit d'entrée 14 et la chambre de pompage 24 relativement faible.At the second end 46 of the movable member 40, we finds an annular rib 48 surrounding the inlet of the orifice 44 and allowing, when in contact against the lower surface of the second plate 20, to seal the inlet valve 28. will of course favor an annular rib 48 having a surface of contact as small as possible so that, on the one hand, the surface in front present an optimum surface condition has the smallest surface area possible and, on the other hand, so as to produce an inlet valve 28 which can open for a difference in liquid pressure between the inlet pipe 14 and the relatively small pumping chamber 24.

En effet, on comprend que la différence de pression permettant l'ouverture de la valve d'entrée 28, correspond à la différence de pression de liquide entre le liquide présent dans l'espace de liaison 50 placé en amont de la valve d'entrée 28 et la pression de liquide dans l'orifice 44, cette pression étant la même que dans la chambre de pompage 24.Indeed, we understand that the pressure difference allowing the opening of the inlet valve 28 corresponds to the pressure difference of liquid between the liquid present in the connection space 50 placed upstream of the inlet valve 28 and the liquid pressure in the orifice 44, this pressure being the same as in the pumping chamber 24.

Comme on peut le voir sur la figure 3, lorsque du liquide arrive dans le conduit d'entrée 14, celui-ci passe alors dans l'espace de liaison 50 et permet, à partir d'une certaine pression, d'ouvrir la valve d'entrée 28, l'organe mobile 40 s'abaissant alors grâce à l'élasticité de la membrane 42. Le liquide peut alors passer de l'espace de liaison 50 dans l'orifice 44.As can be seen in Figure 3, when liquid enters the inlet duct 14, this then passes into the connection space 50 and allows, from a certain pressure, to open the inlet valve 28, the movable member 40 then lowering thanks to the elasticity of the membrane 42. The liquid can then pass from the connection space 50 into the orifice 44.

Selon une caractéristique particulièrement avantageuse de la présente invention, afin que le liquide puisse passer de l'orifice 44 à la chambre de pompage 24, dans la position ouverte de la valve d'entrée 28, il est prévu, sur la surface de la première extrémité 45 de l'organe mobile 40 placé en regard de la première plaquette 12, une série d'éléments de butée 52 sous la forme de petits piliers dont une extrémité est solidaire de la première extrémité de l'organe mobile 40 et dont la deuxième extrémité, libre, vient s'appuyer contre la surface supérieure de la première plaquette 12. On comprend que ces éléments de butée 52 constituent des limitateurs de mouvement pour la valve d'entrée 28 lorsque celle-ci s'ouvre de façon que, dans son mouvement d'ouverture, lorsque l'organe mobile 40 se rapproche de la première plaquette 12, on ne se trouve pas dans une situation où la surface de la première extrémité de l'organe mobile 40 qui entoure la sortie de l'orifice 44 vienne s'appuyer sur la première plaquette 12 en bouchant ainsi la sortie de l'orifice 44.According to a particularly advantageous characteristic of the present invention, so that the liquid can pass from the orifice 44 to the pumping 24, in the open position of the inlet valve 28, provision is made, on the surface of the first end 45 of the movable member 40 placed in look of the first plate 12, a series of stop elements 52 under the shape of small pillars, one end of which is integral with the first end of the movable member 40 and whose second end, free, comes lean against the upper surface of the first plate 12. We understands that these abutment elements 52 constitute limiters of movement for the inlet valve 28 when the latter opens so that, in its opening movement, when the movable member 40 approaches of the first plate 12, we are not in a situation where the surface of the first end of the movable member 40 which surrounds the outlet orifice 44 comes to bear on the first plate 12 by closing thus the exit from orifice 44.

Comme on peut le voir de façon plus précise sur la figure 4, on prévoit toute une série d'éléments de butée 52 répartis sur la première extrémité de l'organe mobile 40. Ainsi, après être entré dans l'orifice 44, le liquide peut s'écouler en direction de la chambre de pompage 24 en contournant ces éléments de butée 52.As can be seen more precisely in Figure 4, it is expected a whole series of stop elements 52 distributed over the first end of the movable member 40. Thus, after entering the orifice 44, the liquid can flow towards the pumping chamber 24 bypassing these stop elements 52.

Lorsque la pression de liquide dans l'espace de liaison 50 est égale à la pression de liquide dans la chambre de pompage 24, la valve d'entrée 28 se referme d'elle-même par un phénomène de rappel dont l'origine est expliquée plus loin. Ensuite, le dispositif d'actionnement 26, 126 commande le mouvement vers le bas de la membrane de pompage 22 de sorte que l'on obtient une pression de liquide dans la chambre de pompage 24 qui est supérieure à la pression de liquide dans l'espace de liaison situé en aval de la valve de sortie 30. Dans cette situation, la valve de sortie s'ouvre dès que la différence de pression est suffisante et le liquide s'écoule hors de la chambre de pompage 24.When the liquid pressure in the connection space 50 is equal to the liquid pressure in the pumping chamber 24, the inlet valve 28 is closes itself by a recall phenomenon whose origin is explained below. Then, the actuator 26, 126 controls the downward movement of the pumping membrane 22 so that one obtains a liquid pressure in the pumping chamber 24 which is higher than the liquid pressure in the connection space located downstream of the outlet valve 30. In this situation, the outlet valve opens as soon as the pressure difference is sufficient and the liquid flows out of the chamber pumping 24.

Lorsque la pression de liquide dans la chambre de pompage 24 est égale à la pression de liquide dans l'espace de liaison situé en aval de la valve de sortie 30, cette dernière se referme. Après cela, le dispositif d'actionnement 26, 126 permet le relâchement de la membrane de pompage 22 qui remonte et donne à la chambre de pompage son volume maximum. Un nouveau cycle de pompage identique à celui qui vient d'être décrit peut alors débuter.When the liquid pressure in the pumping chamber 24 is equal to the liquid pressure in the connection space located downstream of the outlet valve 30, the latter closes. After that, the device actuation 26, 126 allows the release of the pumping membrane 22 which rises and gives the pumping chamber its maximum volume. A new pumping cycle identical to the one just described can so start.

Il est prévu que la valve d'entrée 28 comprenne en outre une première couche d'oxyde de silicium 54 recouvrant au moins la surface de la deuxième extrémité 46 de l'organe mobile 40 susceptible de rentrer en contact avec la deuxième plaquette 20 afin d'empêcher une solidarisation entre la valve et la deuxième plaquette dans la position fermée de la valve d'entrée 28.It is expected that the inlet valve 28 further comprises a first layer of silicon oxide 54 covering at least the surface of the second end 46 of the movable member 40 capable of entering into contact with the second plate 20 in order to prevent a joining between the valve and the second plate in the closed position of the valve input 28.

Cette première couche d'oxyde de silicium 54 recouvre au moins la nervure annulaire 48 dans la zone destinée à rentrer en contact avec la deuxième plaquette 20, cette fine couche d'oxyde de silicium permettant d'éviter un collage entre l'organe mobile 40 et la deuxième plaquette 20. Afin que la valve d'entrée 28 soit fermée dans sa position de repos, on prévoit, de façon avantageuse, des couches d'oxyde de silicium 56, 58 disposées sur la membrane 42 afin que celle-ci soit soumise à une certaine précontrainte vers le haut des figures.This first layer of silicon oxide 54 covers at least the annular rib 48 in the area intended to come into contact with the second wafer 20, this thin layer of silicon oxide allowing avoid bonding between the movable member 40 and the second plate 20. So that the inlet valve 28 is closed in its rest position, we advantageously provides layers of silicon oxide 56, 58 arranged on the membrane 42 so that it is subjected to a certain prestressing up the figures.

La couche d'oxyde 56 est disposée au niveau de la zone de la partie en forme de membrane 42 qui est adjacente à l'organe mobile 40 et qui est tournée en direction de la deuxième plaquette 20 et la couche d'oxyde 58 est disposée dans une zone de la membrane 42 la plus éloignée de l'organe mobile 40, sur la face en regard de la première plaquette 12.The oxide layer 56 is arranged at the level of the region of the part form of membrane 42 which is adjacent to the movable member 40 and which is turned towards the second plate 20 and the oxide layer 58 is disposed in an area of the membrane 42 furthest from the organ mobile 40, on the opposite face of the first plate 12.

Comme on peut le voir sur la variante de réalisation illustrée sur la figure 5, afin de réduire le volume de la chambre de pompage 24, il est possible de réaliser une membrane 42 ne présentant pas une épaisseur constante.As can be seen in the alternative embodiment illustrated in the Figure 5, in order to reduce the volume of the pumping chamber 24, it is possible to produce a membrane 42 not having a constant thickness.

Ainsi, comme on peut le voir sur la figure 5, on peut prévoir que la surface de la membrane 42 tournée vers la première plaquette 12 présente un décrochement 60 circulaire et centré autour de l'orifice 44 de sorte qu'une première portion 42a de la membrane 42 s'étendant sur une surface annulaire la plus éloignée de l'organe mobile 40 se trouve très proche de la première plaquette 12, alors qu'une deuxième portion 42b de la membrane 42 située sur un anneau contigu à l'organe mobile 40 se trouve à une distance plus grande de la première plaquette 12 que la première portion 42a de membrane.Thus, as can be seen in Figure 5, we can predict that the surface of the membrane 42 facing the first plate 12 has a recess 60 circular and centered around the orifice 44 so that a first portion 42a of the membrane 42 extending over a surface annular furthest from the movable member 40 is very close to the first plate 12, while a second portion 42b of the membrane 42 located on a ring contiguous to the movable member 40 is located at a greater distance from the first plate 12 than the first portion 42a membrane.

La valve d'entrée 28 étant, de préférence, usinée au sein de la plaquette intermédiaire 18 en silicium au moyen des techniques photolithographiques connues, il est prévu que, de préférence,la surface de la première portion 42a tournée en direction de la première plaquette 12 soit parallèle à la surface de la première plaquette 12 placée en regard de la valve d'entrée 28 et soit au même niveau que l'extrémité libre des éléments de butée 52 car ces deux éléments sont usinés simultanément. Ainsi ces deux éléments sont placés à une distance identique de ladite première plaquette 12 lorsque la valve 28 est fermée. De façon préférentielle, l'extrémité libre des éléments de butée 52 est plane et parallèle à la surface de la première plaquette 12 adjacente à la chambre de pompage 24.The inlet valve 28 being preferably machined within the wafer intermediate 18 in silicon using photolithographic techniques known, it is expected that, preferably, the surface of the first portion 42a turned towards the first plate 12 is parallel to the surface of the first plate 12 placed opposite the inlet valve 28 and either same level as the free end of the stop elements 52 because these two elements are machined simultaneously. So these two elements are placed at an identical distance from said first plate 12 when the valve 28 is closed. Preferably, the free end of the stop elements 52 is planar and parallel to the surface of the first plate 12 adjacent to the pumping chamber 24.

La valve d'entrée 28 de la figure 5 ne comporte pas les couches d'oxydes 54, 56 et 58 de la figure 3 car elle est conformée, lors de sa fabrication, pour être naturellement, c'est-à-dire dans sa position de repos, en position fermée. En l'absence de la couche 54, il est prévu qu'au moins la surface de la nervure annulaire 48 faisant face à la deuxième plaquette 20 et/ou qu'au moins la surface de la deuxième plaquette 20 placée en regard de la nervure annulaire 48 soit traitée, par exemple revêtue d'une couche anti-adhésion, pour éviter la solidarisation entre la valve 28 en position fermée et la deuxième plaquette 20.The inlet valve 28 in FIG. 5 does not have the layers of oxides 54, 56 and 58 of Figure 3 because it is shaped, during its manufacturing, to be naturally, that is to say in its rest position, in closed position. In the absence of layer 54, it is expected that at least the surface of the annular rib 48 facing the second plate 20 and / or at least the surface of the second plate 20 placed opposite the annular rib 48 is treated, for example coated with an anti-adhesion layer, to avoid the connection between the valve 28 in the closed position and the second plate 20.

De façon alternative, on peut réaliser une valve d'entrée 28 avec une membrane 42 en escalier, telle que celle de la figure 5, et comportant certaines ou toutes les couches d'oxyde de silicium 54, 56 et 58 de la figure 3. Si on prévoit une couche 58, celle-ci se limitera, de préférence, à la première portion 42a de la membrane 42.Alternatively, an inlet valve 28 can be made with a membrane 42 in steps, such as that of FIG. 5, and comprising some or all of the silicon oxide layers 54, 56 and 58 in the figure 3. If a layer 58 is provided, it will preferably be limited to the first portion 42a of the membrane 42.

La variante de réalisation illustrée sur la figure 6 correspond à une valve d'entrée 28 anti-retour en position fermée dont la position a été renversée par rapport à celle de la figure 3. En effet, dans ce cas, la membrane 42 se trouve à proximité de la deuxième plaquette 20 et le siège de la valve 28 est formé par la zone annulaire de la face supérieure de la première plaquette 12 faisant face à la nervure annulaire 48 dirigée vers le bas de la figure 6 et placée sur la deuxième extrémité 46 de l'organe mobile 40. Du côté de la première extrémité 45 de l'organe mobile 40, adjacente à la deuxième plaquette 20 et prolongée par la membrane 42, sont disposés les éléments de butée 52 et l'organe mobile se prolonge radialement par la membrane 42.The variant embodiment illustrated in FIG. 6 corresponds to a non-return valve 28 in closed position whose position has been reversed with respect to that of FIG. 3. Indeed, in this case, the membrane 42 is located near the second plate 20 and the seat of the valve 28 is formed by the annular zone of the upper face of the first plate 12 facing the annular rib 48 directed towards the bottom of Figure 6 and placed on the second end 46 of the movable member 40. On the side of the first end 45 of the movable member 40, adjacent to the second plate 20 and extended by the membrane 42, are arranged the stop elements 52 and the movable member is extended radially by the membrane 42.

L'orifice 44 présente les mêmes caractéristiques et peut être réalisé de la même façon que dans le cas des modes de réalisation présentés précédemment.The orifice 44 has the same characteristics and can be made of the same way as in the case of the embodiments presented previously.

Du fait de l'agencement inversé de la valve d'entrée 28 de cette variante de réalisation, afin que la sortie de l'orifice 44 (adjacente à la première extrémité 45 de l'organe mobile 40) soit en communication de fluide avec la chambre de pompage 24 délimitée entre la plaquette intermédiaire 18 et la première plaquette 12, un orifice supplémentaire 64, similaire à l'orifice 44, traverse toute l'épaisseur de la plaquette intermédiaire 18 en aval de la valve d'entrée 28.Due to the reverse arrangement of the inlet valve 28 of this alternative embodiment, so that the outlet of the orifice 44 (adjacent to the first end 45 of the movable member 40) is in communication with fluid with the pumping chamber 24 delimited between the wafer intermediate 18 and the first plate 12, an additional orifice 64, similar to hole 44, crosses the entire thickness of the wafer intermediate 18 downstream of the inlet valve 28.

Concernant le fonctionnement de la micropompe comprenant une valve d'entrée 28 selon un des modes de réalisation qui viennent d'être décrits, il reste identique à celui d'une micropompe du type de celles qui sont décrites dans les demandes européennes précitéesRegarding the operation of the micropump comprising a inlet valve 28 according to one of the embodiments which have just been described, it remains identical to that of a micropump of the type of those which are described in the aforementioned European applications

Afin de montrer les performances accrues de la micropompe selon l'invention en comparaison de celles de micropompes de l'art antérieur, voici un exemple chiffré obtenu avec le mode de réalisation des figures 1 à 5 et un orifice 44 en forme de double pyramides inversées. Cet orifice 44 présente un volume mort égal à 15 10-9 l, le volume mort délimité sous la valve 28, c'est-à-dire entre la membrane 42 et la première plaquette 12, est de 34 10-9 l (à titre de comparaison le volume équivalent pour la valve d'entrée de la figure 7A de la demande EP 90 810272.6 serait supérieur à 500 10-9 l) et le volume unitaire de pompage est de 150 10-9 l. Avec une telle valve d'entrée, on obtient un taux de compression de la micropompe, correspondant au rapport entre le volume unitaire de pompage et le volume mort total, supérieur à 1.In order to show the increased performance of the micropump according to the invention in comparison with that of micropumps of the prior art, here is a numerical example obtained with the embodiment of Figures 1 to 5 and an orifice 44 in the form of double inverted pyramids . This orifice 44 has a dead volume equal to 15 10 -9 l, the dead volume defined under the valve 28, that is to say between the membrane 42 and the first plate 12, is 34 10 -9 l (at By way of comparison, the equivalent volume for the inlet valve of FIG. 7A of application EP 90 810272.6 would be greater than 500 10 -9 l) and the unit pumping volume is 150 10 -9 l. With such an inlet valve, a compression rate of the micropump is obtained, corresponding to the ratio between the unit pumping volume and the total dead volume, greater than 1.

Ce résultat est très supérieur à celui obtenu avec des micropompes micro-usinées pour liquide de l'art antérieur, annoncées comme auto-amorçantes, et qui présentent, au mieux, un taux de compression de fordre de 0,1.This result is much higher than that obtained with micropumps micro-machined for liquid of the prior art, advertised as self-priming, and which have, at best, a compression ratio of fordre 0.1.

Claims (17)

  1. A fluid flow device such as a micropump (10; 100) comprising at least a first plate (12), a second plate (20), an intermediate plate (18) disposed between said first and second plates (12, 20), a pump chamber (24) defined by said first plate (12) and said intermediate plate (18), and inlet and outlet control members (28, 30) communicating with said pump chamber (24), some inlet and outlet ducts (14, 16) passing through one of said first and second plates (12, 20), said inlet control member (28) being a non-return valve made up of a moving member (40) and a membrane-forming portion (42) connecting said moving member (40) to the remainder of said intermediate plate (18), interposed between the inlet duct (14) and the pump chamber (24), and, by virtue of its resilience, enabling said valve (28) to move between a closed position and an open position, said moving member (40) having an orifice (44) passing therethrough between its first and second ends (45, 46), said valve (28) being shaped in such a manner that, in said open position, the moving member does not prevent liquid from flowing from said orifice (44) towards said pump chamber (24), and the second end (46) of the moving member (40) being shaped in such a manner that, in said closed position, it provides sealed contact with that one of the plates (12, 20) that forms the seat of the valve,
       the device being characterised in that the moving member is situated in the major portion of the thickness of the intermediate plate (18), in that the membrane-forming portion is situated close to the other one of the plates (12, 20), and in that said orifice (44) presents a volume that is less than the volume of the pump chamber (24).
  2. A device according to claim 1, characterised in that the first end (45) of the moving member adjacent to said membrane-forming portion (42) is provided with at least one abutment element (52) designed to limit the movement of said valve (28) from the closed position towards the open position, the free end of said abutment element coming into contact with the plate (12, 20) situated close to the membrane-forming portion (42) in said open position without said abutment element (52) preventing liquid from flowing from said orifice (44) towards said pump chamber (24).
  3. A device according to claim 2, characterised in that said moving member (40) has an outside shape that is substantially cylindrical and circular in section, or that is in the form of a truncated cone.
  4. A device according to any one of claims 1 to 3, characterised in that said orifice (44) is cylindrical in shape.
  5. A device according to any one of claims 1 to 3, characterised in that said orifice (44) has a shape that is made up of two square-based pyramids whose bases constitute the ends of said orifice, with the central zone of said orifice belonging to both pyramids.
  6. A device according to any one of the preceding claims, characterised in that said orifice (44) presents a volume that is no greater than one-fifth of the unit pumping volume.
  7. A device according to claim 6, characterised in that said intermediate plate (18) is made of silicon, and in that the valve (28) further comprises a first layer (54) of silicon oxide covering at least the surface of the second end (46) of the moving member that can come into contact with said plate (12, 20) forming the seat of the valve, thereby preventing said valve (28) and said plate (12, 20) sticking together when the valve is in the closed position.
  8. A device according to claim 7, characterised in that the valve (28) also has a second layer (56) of silicon oxide extending at least over the outside surface of the valve (28) in the zone of the membrane-forming portion (42) which is adjacent to the moving member (40) and which faces towards the plate (12, 20) forming the seat of the valve so as to generate pre-stress constraining the valve (28) to take up the closed position against said plate (12, 20) when the valve is in its rest position.
  9. A device according to any one of the preceding claims, characterised in that said intermediate plate (18) is of substantially constant thickness lying in the range 0.3 mm to 0.5 mm.
  10. A device according to any one of the preceding claims, characterised in that said membrane-forming portion (42) is of substantially constant thickness lying in the range 10 µm to 50 µm.
  11. A device according to any one of the preceding claims, characterised in that said membrane-forming portion (42) has a setback (60) in its surface facing towards the plate (12, 20) situated close to the membrane-forming portion (42) and defining a first portion (42a) of said plate (12, 20) closer than a second portion (42b) contiguous with said moving member (40).
  12. A device according to claim 11, characterised in that said setback (60) is circular and centred around said orifice (44), said first and second portions (42a, 42b) of said membrane-forming portion (42) forming concentric rings.
  13. A device according to claim 11 or 12, characterised in that the surface of said first portion (42a) facing towards said plate (12, 20) situated close to the membrane-forming portion (42) and the free ends of said abutment forming elements (52) are equidistant from said plate (12, 20).
  14. A device according to any one of the preceding claims, characterised in that the maximum distance between the membrane-forming portion (42) and the closest plate (12, 20) lies in the range 3 µm to 20 µm.
  15. A device according to any one of the preceding claims, characterised in that the ratio of the maximum distance between the membrane-forming portion (42) and the closest plate (12, 20) over the thickness of the intermediate plate (18) is less than 1/20.
  16. A device according to any one of the preceding claims, characterised in that said membrane-forming portion (42), the first end of the moving member and the outlet from the orifice (44) are adjacent to the first plate (12), and in that the outlet from the orifice (44) opens out directly into the pump chamber (24).
  17. A device according to any one of claims 1 to 15, characterised in that said membrane-forming portion (42), the first end of the moving member and the outlet from the orifice (44) are adjacent to the second plate (20), and in that the outlet from the orifice (44) communicates with said pump chamber by means of an additional orifice (64) passing through the entire thickness of the intermediate plate (18).
EP98951326A 1997-08-20 1998-08-19 Micro pump comprising an inlet control member for its self-priming Expired - Lifetime EP1003973B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR9710497 1997-08-20
FR9710497 1997-08-20
PCT/EP1998/005471 WO1999009321A1 (en) 1997-08-20 1998-08-19 Micro pump comprising an inlet control member for its self-priming

Publications (2)

Publication Number Publication Date
EP1003973A1 EP1003973A1 (en) 2000-05-31
EP1003973B1 true EP1003973B1 (en) 2003-04-16

Family

ID=9510392

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98951326A Expired - Lifetime EP1003973B1 (en) 1997-08-20 1998-08-19 Micro pump comprising an inlet control member for its self-priming

Country Status (8)

Country Link
US (1) US6390791B1 (en)
EP (1) EP1003973B1 (en)
JP (1) JP2001515183A (en)
CN (1) CN1097168C (en)
AU (1) AU9739898A (en)
CA (1) CA2301878A1 (en)
DE (1) DE69813569T2 (en)
WO (1) WO1999009321A1 (en)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000314381A (en) * 1999-03-03 2000-11-14 Ngk Insulators Ltd Pump
JP4776139B2 (en) 2000-05-25 2011-09-21 デビオテック エスエイ Micromachined fluidic device and manufacturing method thereof
US6627159B1 (en) * 2000-06-28 2003-09-30 3M Innovative Properties Company Centrifugal filling of sample processing devices
US8097471B2 (en) * 2000-11-10 2012-01-17 3M Innovative Properties Company Sample processing devices
JP2003003952A (en) * 2001-06-22 2003-01-08 Noiberuku Kk Fluid discharge device
GB0123054D0 (en) * 2001-09-25 2001-11-14 Randox Lab Ltd Passive microvalve
US7025324B1 (en) * 2002-01-04 2006-04-11 Massachusetts Institute Of Technology Gating apparatus and method of manufacture
US7135147B2 (en) * 2002-07-26 2006-11-14 Applera Corporation Closing blade for deformable valve in a microfluidic device and method
US7452509B2 (en) * 2002-07-26 2008-11-18 Applied Biosystems Inc. Microfluidic device including displaceable material trap, and system
US7198759B2 (en) * 2002-07-26 2007-04-03 Applera Corporation Microfluidic devices, methods, and systems
US7201881B2 (en) * 2002-07-26 2007-04-10 Applera Corporation Actuator for deformable valves in a microfluidic device, and method
DE50304618D1 (en) * 2003-03-11 2006-09-21 Fraunhofer Ges Forschung NORMAL DOUBLE CLOSED MICRO VALVE
DE10334243B4 (en) * 2003-07-28 2013-11-28 Robert Bosch Gmbh Micromechanical method for producing a flexible layer element
DE10334240A1 (en) * 2003-07-28 2005-02-24 Robert Bosch Gmbh Method for producing a micromechanical component, preferably for fluidic applications, and micropump with a pump membrane made of a polysilicon layer
US7284966B2 (en) * 2003-10-01 2007-10-23 Agency For Science, Technology & Research Micro-pump
JP4572534B2 (en) * 2003-12-18 2010-11-04 パナソニック電工株式会社 Electrostatic drive type semiconductor micro valve
DE10360709A1 (en) * 2003-12-19 2005-10-06 Bartels Mikrotechnik Gmbh Micropump and glue-free process for bonding two substrates
DE102004042578A1 (en) * 2004-09-02 2006-03-23 Roche Diagnostics Gmbh Micropump for pumping liquids with low flow rates in pressure / suction operation
DE102004042987A1 (en) * 2004-09-06 2006-03-23 Roche Diagnostics Gmbh Push-pull operated pump for a microfluidic system
WO2007106557A2 (en) 2006-03-14 2007-09-20 University Of Southern California Mems device for delivery of therapeutic agents
WO2007111049A1 (en) * 2006-03-29 2007-10-04 Murata Manufacturing Co., Ltd. Micropump
US8202267B2 (en) * 2006-10-10 2012-06-19 Medsolve Technologies, Inc. Method and apparatus for infusing liquid to a body
US20080161754A1 (en) * 2006-12-29 2008-07-03 Medsolve Technologies, Inc. Method and apparatus for infusing liquid to a body
EP2125606A1 (en) * 2007-02-22 2009-12-02 Sterling Investments LC Micro fluid transfer system
DE102007035721B4 (en) * 2007-07-30 2019-02-07 Robert Bosch Gmbh Microvalve, method of manufacturing a microvalve and micropump
DE102007045637A1 (en) * 2007-09-25 2009-04-02 Robert Bosch Gmbh Microdosing device for dosing small amounts of a medium
US9308124B2 (en) 2007-12-20 2016-04-12 University Of Southern California Apparatus and methods for delivering therapeutic agents
US8708961B2 (en) * 2008-01-28 2014-04-29 Medsolve Technologies, Inc. Apparatus for infusing liquid to a body
CN101520035B (en) * 2008-02-26 2013-03-20 研能科技股份有限公司 Fluid conveying device
CN101520041B (en) * 2008-02-26 2013-03-20 研能科技股份有限公司 Large flow rate fluid conveying device
WO2009137780A2 (en) 2008-05-08 2009-11-12 Replenish Pumps, Llc Implantable pumps and cannulas therefor
US9849238B2 (en) 2008-05-08 2017-12-26 Minipumps, Llc Drug-delivery pump with intelligent control
US9162024B2 (en) 2008-05-08 2015-10-20 Minipumps, Llc Drug-delivery pumps and methods of manufacture
US8197235B2 (en) 2009-02-18 2012-06-12 Davis David L Infusion pump with integrated permanent magnet
US8353864B2 (en) 2009-02-18 2013-01-15 Davis David L Low cost disposable infusion pump
US8017409B2 (en) 2009-05-29 2011-09-13 Ecolab Usa Inc. Microflow analytical system
MX2012002063A (en) 2009-08-18 2012-08-01 Minipumps Llc Electrolytic drug-delivery pump with adaptive control.
KR101851117B1 (en) 2010-01-29 2018-04-23 마이크로닉스 인코포레이티드. Sample-to-answer microfluidic cartridge
DE102010032799B4 (en) * 2010-04-09 2013-11-21 Albert-Ludwigs-Universität Freiburg Micro valve with elastically deformable valve lip, manufacturing process and micropump
CN107654358B (en) * 2012-04-19 2020-02-21 株式会社村田制作所 Fluid control device
KR20150096788A (en) 2012-12-21 2015-08-25 마이크로닉스 인코포레이티드. Low elasticity films for microfluidic use
JP2016509206A (en) 2012-12-21 2016-03-24 マイクロニクス， インコーポレイテッド Portable fluorescence detection system and microassay cartridge
US10065186B2 (en) 2012-12-21 2018-09-04 Micronics, Inc. Fluidic circuits and related manufacturing methods
WO2014182831A1 (en) 2013-05-07 2014-11-13 Micronics, Inc. Methods for preparation of nucleic acid-containing samples using clay minerals and alkaline solutions
EP2994750B1 (en) 2013-05-07 2020-08-12 PerkinElmer Health Sciences, Inc. Microfluidic devices and methods for performing serum separation and blood cross-matching
WO2014182847A1 (en) 2013-05-07 2014-11-13 Micronics, Inc. Device for preparation and analysis of nucleic acids
US10684662B2 (en) 2015-04-20 2020-06-16 Hewlett-Packard Development Company, L.P. Electronic device having a coolant
US10100822B2 (en) 2015-04-20 2018-10-16 Hewlett-Packard Development Company, L.P. Pump having freely movable member
WO2016171659A1 (en) 2015-04-20 2016-10-27 Hewlett-Packard Development Company, L.P. Pump having freely movable member
ITUB20151781A1 (en) * 2015-07-02 2017-01-02 Milano Politecnico MICROPUMP WITH ELECTROSTATIC IMPLEMENTATION
TWI580878B (en) * 2016-07-19 2017-05-01 科際精密股份有限公司 One way valve assembly
WO2018046078A1 (en) * 2016-09-07 2018-03-15 Robert Bosch Gmbh Micropumps
JP7200535B2 (en) 2018-08-17 2023-01-10 セイコーエプソン株式会社 Structure, Diaphragm Compressor, Cooling Machine, Projector, and Method for Manufacturing Structure
JP7226221B2 (en) * 2019-09-24 2023-02-21 株式会社島津製作所 micro valve
EP4028164A4 (en) * 2019-10-18 2022-10-05 Healtell (Guangzhou) Medical Technology Co., Ltd. Microfluidic chip pumps and methods thereof

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH679555A5 (en) * 1989-04-11 1992-03-13 Westonbridge Int Ltd
CA2033181C (en) * 1989-06-14 2000-10-24 Harald T. G. Van Lintel Two valve micropump with improved outlet
US5069419A (en) * 1989-06-23 1991-12-03 Ic Sensors Inc. Semiconductor microactuator
US5277556A (en) * 1990-07-10 1994-01-11 Westonbridge International Limited Valve and micropump incorporating said valve
DE69111591T2 (en) * 1990-08-31 1996-02-29 Westonbridge International Ltd., Wellington Quay, Dublin VALVE WITH POSITION DETECTOR AND MICROPUMP WITH IT.
DE4035852A1 (en) * 1990-11-10 1992-05-14 Bosch Gmbh Robert MULTI-LAYER MICROVALVE
JP3718724B2 (en) * 1993-12-28 2005-11-24 デバイオティック エス・エー Micro pump
CH689836A5 (en) * 1994-01-14 1999-12-15 Westonbridge Int Ltd Micropump.
US5529279A (en) * 1994-08-24 1996-06-25 Hewlett-Packard Company Thermal isolation structures for microactuators
US5542821A (en) * 1995-06-28 1996-08-06 Basf Corporation Plate-type diaphragm pump and method of use
JP3726285B2 (en) * 1995-07-27 2005-12-14 セイコーエプソン株式会社 MICROVALVE AND MANUFACTURING METHOD THEREOF, MICRO PUMP USING THE SAME, MANUFACTURING METHOD THEREOF, AND DEVICE USING THE MICRO PUMP
US5785295A (en) * 1996-08-27 1998-07-28 Industrial Technology Research Institute Thermally buckling control microvalve
US6116863A (en) * 1997-05-30 2000-09-12 University Of Cincinnati Electromagnetically driven microactuated device and method of making the same

Also Published As

Publication number Publication date
AU9739898A (en) 1999-03-08
JP2001515183A (en) 2001-09-18
CN1097168C (en) 2002-12-25
DE69813569T2 (en) 2004-04-08
EP1003973A1 (en) 2000-05-31
CA2301878A1 (en) 1999-02-25
CN1271407A (en) 2000-10-25
DE69813569D1 (en) 2003-05-22
WO1999009321A1 (en) 1999-02-25
US6390791B1 (en) 2002-05-21

Similar Documents

Publication Publication Date Title
EP1003973B1 (en) Micro pump comprising an inlet control member for its self-priming
EP1283957B1 (en) Micromachined fluidic device and method for making same
EP0739451B1 (en) Micropump
EP0349377B1 (en) Microelectric switch valve with one single diaphragm
EP0737273B1 (en) Micropump
EP0951617B1 (en) Micropump with a built-in intermediate part
FR2921992A1 (en) VALVE WITH BALANCED PRESSURE VALVE.
FR2952628A1 (en) PROCESS FOR MANUFACTURING AT LEAST ONE DEFORMABLE MEMBRANE MICROPUMP AND DEFORMABLE MEMBRANE MICROPUMP
WO2011018163A1 (en) Method for repairing a wall consisting of a plurality of layers
FR2786270A1 (en) METERED INJECTION DEVICE FOR COMPENSATING SLOW VARIATION IN LENGTH
WO2009098314A1 (en) Passive flow regulator for infusion of medicaments
FR2599109A1 (en) MAGNET DIAPHRAGM
EP3488929B1 (en) Injection device for a fluid sample
FR2764204A1 (en) CHROMATOGRAPHY COLUMN, END ARRANGEMENT AND MANUFACTURING METHOD THEREOF
EP0999421B1 (en) Filtration apparatus and process for a cooling circuit
WO1991001464A1 (en) Anti-return valve, particularly for micropump and micropump provided with such a valve
WO2006056967A9 (en) Mechanical microfluidic device, method for producing an intermediate stack and this microfluidic device, and a micropump
FR2971574A1 (en) VALVE FOR CONTROLLING A FLUID
CH684209A5 (en) Integrated valve and micropump comprising such a valve
WO2010139913A1 (en) Fluid circulation member, and fluid circulation assembly including at least one of such a member
CH683634A5 (en) Valve fitted in micro-pump
WO1997033094A1 (en) Micro-machined membrane valve
EP1499449B1 (en) Fluid product dispensing pump
EP4098605A1 (en) Electromechanical microsystem
EP2932206B1 (en) Pump provided with an assembly for measuring the temperature or flow rate of a fluid

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20000228

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): CH DE FR GB IT LI NL

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Designated state(s): CH DE FR GB IT LI NL

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REF Corresponds to:

Ref document number: 69813569

Country of ref document: DE

Date of ref document: 20030522

Kind code of ref document: P

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: DIETLIN & CIE SA

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)
PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20040119

REG Reference to a national code

Ref country code: GB

Ref legal event code: 732E

REG Reference to a national code

Ref country code: CH

Ref legal event code: PUE

Owner name: DEBIOTECH SA

Free format text: WESTONBRIDGE INTERNATIONAL LIMITED#DOLLARD HOUSE, WELLINGTON QUAY#DUBLIN 2 (IE) -TRANSFER TO- DEBIOTECH SA#AVENUE DE SEVELIN 28#1004 LAUSANNE (CH)

NLS Nl: assignments of ep-patents

Owner name: DEBIOTECH S.A.

Effective date: 20051102

REG Reference to a national code

Ref country code: FR

Ref legal event code: TP

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 20120821

Year of fee payment: 15

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20130821

Year of fee payment: 16

Ref country code: CH

Payment date: 20130821

Year of fee payment: 16

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20130821

Year of fee payment: 16

REG Reference to a national code

Ref country code: NL

Ref legal event code: V1

Effective date: 20140301

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20140301

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20140821

Year of fee payment: 17

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20140826

Year of fee payment: 17

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 69813569

Country of ref document: DE

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20140819

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20140831

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20140831

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20150303

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20140819

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20150819

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20160429

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20150831