EP0993238A1 - Electrical insulation and cooling material for a high-voltage supply device - Google Patents

Electrical insulation and cooling material for a high-voltage supply device Download PDF

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Publication number
EP0993238A1
EP0993238A1 EP99307849A EP99307849A EP0993238A1 EP 0993238 A1 EP0993238 A1 EP 0993238A1 EP 99307849 A EP99307849 A EP 99307849A EP 99307849 A EP99307849 A EP 99307849A EP 0993238 A1 EP0993238 A1 EP 0993238A1
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EP
European Patent Office
Prior art keywords
material according
poly
voltage supply
particulate ceramic
supply device
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99307849A
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German (de)
French (fr)
Inventor
Hans W. A. Jedlitschka
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GE Medical Systems SCS
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GE Medical Systems SCS
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Publication of EP0993238A1 publication Critical patent/EP0993238A1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/02—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances
    • H01B3/12—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of inorganic substances ceramics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
    • H01B3/30—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
    • H01B3/44—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes vinyl resins; acrylic resins
    • H01B3/441—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes vinyl resins; acrylic resins from alkenes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
    • H01B3/30—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
    • H01B3/42—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes polyesters; polyethers; polyacetals
    • H01B3/427—Polyethers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
    • H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
    • H01B3/30—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
    • H01B3/44—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes vinyl resins; acrylic resins
    • H01B3/443—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes vinyl resins; acrylic resins from vinylhalogenides or other halogenoethylenic compounds
    • H01B3/445—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes vinyl resins; acrylic resins from vinylhalogenides or other halogenoethylenic compounds from vinylfluorides or other fluoroethylenic compounds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/02—Constructional details
    • H05G1/025—Means for cooling the X-ray tube or the generator
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/02—Constructional details
    • H05G1/04—Mounting the X-ray tube within a closed housing

Definitions

  • the present invention relates to materials for insulating and for cooling high-voltage (HV) supply devices, in particular for the supply of X-ray tubes, and to the high-voltage supply devices incorporating these materials.
  • HV high-voltage
  • the invention relates to novel insulation and cooling materials for high-voltage supply devices having an enhanced thermal conductivity in order to improve the dissipation of the heat generated in the device during its operation.
  • X-ray tubes comprise a filament cathode which emits a beam of electrons towards an anode. Under the action of the bombardment by the electron beam, the anode emits a beam of X-rays.
  • the electrons are accelerated by an intense electric field produced between the cathode and the anode.
  • the anode is raised to a very high positive potential with respect to the cathode. This potential may exceed 150 kV. High-voltage supply devices are used to produce these potentials.
  • the active components of the high-voltage supply devices are enclosed and supported in a first ribbed casing or surround made of an electrically insulating material and the first casing containing the active components is itself contained in a second casing which is made of metal and is earthed.
  • the internal space of the first casing containing the active components as well as the space between the first casing and the second casing are filled with an insulating and cooling liquid, generally an oil.
  • the active components of the high-voltage supply device in the first casing such as the components of the high-voltage transformer, the rectifiers of the voltage doubler and all the conducting elements at various potentials, are mechanically held in place and electrically insulated from each other by being housed in different compartments in this first casing made of highly insulating material, such as electrically insulating plastics.
  • the free space in this first casing is also filled with an insulating and cooling liquid such as an oil.
  • the oil-filled communicating free spaces inside the first casing and between the first casing and the earthed second casing constitute what is commonly called a high-voltage space.
  • the power necessary to operate an X-ray tube may be up to 25 kW to 100 kW for a few tenths of a second. Even when the high-voltage supply device has a very high efficiency, the power delivered by the device is limited by the temperature rise in the high-voltage space due to electrical losses in the active components. These losses may represent 6% of the output power. Typical power losses are of the order of several kilowatts.
  • An embodiment of the present invention therefore provides insulation and cooling materials for a high-voltage supply device having an enhanced thermal conductivity while maintaining the required electrical properties.
  • An embodiment of the invention also to provides a high-voltage supply device in which the oil-filled high-voltage space around the high-voltage active elements comprises a surround for insulating and for supporting the active components which is made of insulation and cooling material of the disclosed invention.
  • an insulation and cooling material is produced for a high-voltage supply device, comprising a composite of at least one thermoplastic polymer and of at least one particulate ceramic filler so that the material has a thermal conductivity of at least 0.9 W/m.K.
  • the invention also relates to a high-voltage supply device that includes a surround for insulating and supporting the active elements, which is made of an insulation and cooling material according to the invention.
  • a high-voltage supply device to which the present invention may be applied is described in U.S. Patent Application No. 09/168,843.
  • the high-voltage comprising the active components are placed in housings of a modular support, the side walls of which are formed by elements having overlapping complementary inclined surfaces providing both electrical insulation and thermal conduction.
  • the description refers to the single figure which shows a diagrammatic sectional view of a high-voltage supply device according to an embodiment of the invention.
  • the figure shows diagrammatically a high-voltage device 1 which conventionally comprises active components 10 immersed in oil and supported and insulated by one or more insulating surrounds 11 made of solid insulating material.
  • the electrical-insulation and cooling material of the surround 11 comprises a composite of at least one thermoplastic polymer and of at least one particulate ceramic filler so that the material has a thermal conductivity of at least 0.9 W/m.K.
  • the insulating surround 11 may be a multiple surround consisting of mutually overlapping elementary surrounds separated by spaces filled with insulation oil.
  • the insulating oils which are generally used in high-voltage supply devices have, in the absence of any applied electric field, thermal conductivities of about 0.115 W/m.K, it has been found that these same oils, because of the movement of the oil due for example to the application of the high electric fields present in the high-voltage supply devices or any other means, had very much higher thermal conductivities, these possibly being 30 to 100 times higher depending on the geometry of the device. It follows that, for thermal dissipation, the solid insulating material of the surrounds 11 is a determinant factor.
  • thermoplastic polymer making it possible to obtain the desired thermal conductivity of at least 0.9 W/m.K, which does not degrade the other desirable properties of the insulation and cooling material, such as the dielectric strength and the dielectric constant, may be used in the composite of the invention.
  • the dielectric strength should be greater than 50 kV/mm and the dielectric constant between 2 and 4.
  • the insulating material should be such that it allows easy conversion, carried out on an industrial scale, for example by moulding, injection-moulding or extrusion, or any other conventional industrial process.
  • any conventional processing aid may be included in the material.
  • polypropylenes such as polytetrafluoroethylenes (PTFE), polychlorotrifluoroethylenes (PCTFE) and poly(vinylidene fluorides) (PVDF), poly(amideimides) (PAT), poly(etherimides) (PET), poly(ethersulphides) (PES), poly(phenyl-sulphides) (PPS) and mixtures thereof.
  • PTFE polytetrafluoroethylenes
  • PCTFE polychlorotrifluoroethylenes
  • PVDF poly(vinylidene fluorides)
  • PAT poly(amideimides)
  • PET poly(etherimides)
  • PET poly(ethersulphides)
  • PPS poly(phenyl-sulphides)
  • the preferred polymers are polypropylenes, poly(etherimides), poly(tetrafluoroethylenes) and poly(phenylsulphides) and poly(etherimide)/poly(phenylsulphide) mixtures.
  • the particulate ceramic fillers useful in the formulation of the composites of the invention are all ceramics giving the composite the required thermal conductivity without degrading the other properties of the insulation and cooling material and in particular the electrical-insulation properties.
  • the preferred particulate ceramic fillers are alumina, aluminum nitride, boron nitride, barium sulphate and beryllium oxide, and mixtures thereof.
  • Boron nitride, aluminum nitride and mixtures thereof are more particularly recommended.
  • the amount of particulate ceramic filler of the composite is generally at least 40% by weight with respect to the total weight of the composite and is generally between 40 and 80% by weight, preferably from 40 to 60% by weight.
  • the particulate ceramic filler generally has a particle size of between 1 and 100 ⁇ m, preferably between 10 and 60 ⁇ m.
  • the particles of the ceramic filler may optionally be coated with a layer of another material that does not impair the thermal-conduction and electrical-insulation properties, such as a layer of silicone conferring lubrication on the particles.
  • An insulation and cooling material according to the embodiment of the invention was prepared, by simple mechanical mixing, which comprises, by weight, 30% of poly(phenylsulphide), 30% of poly(etherimide), 25% of aluminum nitride powder and 15% of boron nitride powder.
  • the material was injection-molded, a disc-specimen 60 mm in diameter and 4 mm in thickness was produced and the properties below were determined:

Abstract

Insulation and cooling material for high-voltage supply devices is a composite of at least one thermoplastic polymer and of at least one particulate ceramic filler so that the matieral has a thermal conductivity of at least 0.9 W/M.K. The thermoplastic polymer may be polypropylenes, poly (etherimides), poly(phenylsulphides) and poly(etherimide)/poly(phenyl-sulphide) mixtures. The particulate ceramic fillers may be alumina, aluminum nitride, boron nitride, barium suplhate and beryllium oxide and mixtures thereof.
The high-voltage supply device is intended for X-ray tubes.

Description

  • The present invention relates to materials for insulating and for cooling high-voltage (HV) supply devices, in particular for the supply of X-ray tubes, and to the high-voltage supply devices incorporating these materials.
  • More particularly, the invention relates to novel insulation and cooling materials for high-voltage supply devices having an enhanced thermal conductivity in order to improve the dissipation of the heat generated in the device during its operation.
  • As is well known, X-ray tubes comprise a filament cathode which emits a beam of electrons towards an anode. Under the action of the bombardment by the electron beam, the anode emits a beam of X-rays. In order to obtain a high-energy electron beam, the electrons are accelerated by an intense electric field produced between the cathode and the anode. For this purpose, the anode is raised to a very high positive potential with respect to the cathode. This potential may exceed 150 kV. High-voltage supply devices are used to produce these potentials.
  • Generally speaking, the active components of the high-voltage supply devices are enclosed and supported in a first ribbed casing or surround made of an electrically insulating material and the first casing containing the active components is itself contained in a second casing which is made of metal and is earthed. The internal space of the first casing containing the active components as well as the space between the first casing and the second casing are filled with an insulating and cooling liquid, generally an oil.
  • More specifically, the active components of the high-voltage supply device in the first casing, such as the components of the high-voltage transformer, the rectifiers of the voltage doubler and all the conducting elements at various potentials, are mechanically held in place and electrically insulated from each other by being housed in different compartments in this first casing made of highly insulating material, such as electrically insulating plastics. The free space in this first casing is also filled with an insulating and cooling liquid such as an oil.
  • The oil-filled communicating free spaces inside the first casing and between the first casing and the earthed second casing constitute what is commonly called a high-voltage space.
  • The power necessary to operate an X-ray tube may be up to 25 kW to 100 kW for a few tenths of a second. Even when the high-voltage supply device has a very high efficiency, the power delivered by the device is limited by the temperature rise in the high-voltage space due to electrical losses in the active components. These losses may represent 6% of the output power. Typical power losses are of the order of several kilowatts.
  • In order to avoid thermal deterioration of the sensitive elements because of these power losses, it would be desirable to maintain the high-voltage space at a relatively low temperature.
  • An embodiment of the present invention therefore provides insulation and cooling materials for a high-voltage supply device having an enhanced thermal conductivity while maintaining the required electrical properties.
  • An embodiment of the invention also to provides a high-voltage supply device in which the oil-filled high-voltage space around the high-voltage active elements comprises a surround for insulating and for supporting the active components which is made of insulation and cooling material of the disclosed invention.
  • In an embodiment of the invention, an insulation and cooling material is produced for a high-voltage supply device, comprising a composite of at least one thermoplastic polymer and of at least one particulate ceramic filler so that the material has a thermal conductivity of at least 0.9 W/m.K.
  • The invention also relates to a high-voltage supply device that includes a surround for insulating and supporting the active elements, which is made of an insulation and cooling material according to the invention.
  • A high-voltage supply device to which the present invention may be applied is described in U.S. Patent Application No. 09/168,843. In brief, the high-voltage comprising the active components are placed in housings of a modular support, the side walls of which are formed by elements having overlapping complementary inclined surfaces providing both electrical insulation and thermal conduction.
  • The description refers to the single figure which shows a diagrammatic sectional view of a high-voltage supply device according to an embodiment of the invention.
  • The figure shows diagrammatically a high-voltage device 1 which conventionally comprises active components 10 immersed in oil and supported and insulated by one or more insulating surrounds 11 made of solid insulating material.
  • These active components 10 and the supporting and insulating surrounds 11 are themselves enclosed in a ribbed casing 12, for example made of aluminum, which is grounded.
  • The free spaces 13, 14 between the active components 10 and the insulating surround 11 and between the insulating surround 11 and the grounded casing 12, respectively, communicate with each other and are filled with insulation oil.
  • The electrical-insulation and cooling material of the surround 11 comprises a composite of at least one thermoplastic polymer and of at least one particulate ceramic filler so that the material has a thermal conductivity of at least 0.9 W/m.K.
  • The insulating surround 11 may be a multiple surround consisting of mutually overlapping elementary surrounds separated by spaces filled with insulation oil.
  • Although the insulating oils which are generally used in high-voltage supply devices have, in the absence of any applied electric field, thermal conductivities of about 0.115 W/m.K, it has been found that these same oils, because of the movement of the oil due for example to the application of the high electric fields present in the high-voltage supply devices or any other means, had very much higher thermal conductivities, these possibly being 30 to 100 times higher depending on the geometry of the device. It follows that, for thermal dissipation, the solid insulating material of the surrounds 11 is a determinant factor.
  • Any thermoplastic polymer making it possible to obtain the desired thermal conductivity of at least 0.9 W/m.K, which does not degrade the other desirable properties of the insulation and cooling material, such as the dielectric strength and the dielectric constant, may be used in the composite of the invention. In particular, the dielectric strength should be greater than 50 kV/mm and the dielectric constant between 2 and 4.
  • Furthermore, the insulating material should be such that it allows easy conversion, carried out on an industrial scale, for example by moulding, injection-moulding or extrusion, or any other conventional industrial process.
  • In order to facilitate the conversion, any conventional processing aid may be included in the material.
  • Among the polymers useful for formulating the composites of the present invention, mention may be made of polypropylenes, fluoropolymers such as polytetrafluoroethylenes (PTFE), polychlorotrifluoroethylenes (PCTFE) and poly(vinylidene fluorides) (PVDF), poly(amideimides) (PAT), poly(etherimides) (PET), poly(ethersulphides) (PES), poly(phenyl-sulphides) (PPS) and mixtures thereof.
  • The preferred polymers are polypropylenes, poly(etherimides), poly(tetrafluoroethylenes) and poly(phenylsulphides) and poly(etherimide)/poly(phenylsulphide) mixtures.
  • The particulate ceramic fillers useful in the formulation of the composites of the invention are all ceramics giving the composite the required thermal conductivity without degrading the other properties of the insulation and cooling material and in particular the electrical-insulation properties.
  • The preferred particulate ceramic fillers are alumina, aluminum nitride, boron nitride, barium sulphate and beryllium oxide, and mixtures thereof.
  • Boron nitride, aluminum nitride and mixtures thereof are more particularly recommended.
  • The amount of particulate ceramic filler of the composite is generally at least 40% by weight with respect to the total weight of the composite and is generally between 40 and 80% by weight, preferably from 40 to 60% by weight.
  • The particulate ceramic filler generally has a particle size of between 1 and 100 µm, preferably between 10 and 60 µm.
  • The particles of the ceramic filler may optionally be coated with a layer of another material that does not impair the thermal-conduction and electrical-insulation properties, such as a layer of silicone conferring lubrication on the particles.
    • EXAMPLE
  • An insulation and cooling material according to the embodiment of the invention was prepared, by simple mechanical mixing, which comprises, by weight, 30% of poly(phenylsulphide), 30% of poly(etherimide), 25% of aluminum nitride powder and 15% of boron nitride powder.
  • The material was injection-molded, a disc-specimen 60 mm in diameter and 4 mm in thickness was produced and the properties below were determined:
  • Thermal conductivity (75°C): > 0.96 W/m.K
  • Breakdown strength: > 70.5 kV/mm
  • Dielectric constant: 3.4 (1 kHz, 75°C).
  • Various modifications in structure and/or function and/or steps may be made by one skilled in the art to the disclosed embodiments without departing from the scope and extent of the invention.

Claims (11)

  1. Material for a high-voltage supply device, comprising a composite of at least one thermoplastic polymer and of at least one particulate ceramic filler so that the material has a thermal conductivity of at least 0.9 W/m.K.
  2. Material according to claim 1, wherein the composite comprises at least 40% by weight, with respect to the total weight of the composite, of particulate ceramic filler.
  3. Material according to claim 2, wherein the particulate ceramic filler represents 40 to 80%, preferably 40 to 60% by weight of the composite.
  4. Material according to any one of claims 1 to 3, wherein the thermoplastic polymer is chosen from among polypropylenes, poly(tetrafluoroethylenes) and poly(etherimides).
  5. Material according to any one of claims 1 to 4, wherein the particulate ceramic filler is chosen from among alumina, aluminum nitride, boron nitride and mixtures thereof.
  6. Material according to claim 5, wherein the particulate ceramic filler is chosen from among aluminum nitride, boron nitride and mixtures thereof.
  7. Material according to any one of claims 1 to 6, wherein the particulate ceramic filler has a particle size of between 10 and 60 µm.
  8. Material according to any one of claims 1 to 7, wherein the material has a dielectric strength of at least 50 kV/mm.
  9. Material according to claim 8, wherein the material has a dielectric strength greater than 50 kv/mm and a dielectric constant between 2 and 4.
  10. High-voltage supply device comprising high-voltage active components (10) supported and electrically insulated in the device by means of a surround (11), wherein the surround is made of the composite material according to any one of claims 1 to 8.
  11. Supply device according to claim 9, wherein the surround is a multiple surround formed from several mutually overlapping elementary surrounds separated by an insulating oil.
EP99307849A 1998-10-05 1999-10-05 Electrical insulation and cooling material for a high-voltage supply device Withdrawn EP0993238A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9812443A FR2784261B1 (en) 1998-10-05 1998-10-05 INCREASED ELECTRICAL INSULATION AND COOLING MATERIAL FOR THERMAL CONDUCTIVITY AND APPLICATION TO THE INSULATION OF A HIGH VOLTAGE SUPPLY DEVICE
FR9812443 1998-10-05

Publications (1)

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EP0993238A1 true EP0993238A1 (en) 2000-04-12

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EP99307849A Withdrawn EP0993238A1 (en) 1998-10-05 1999-10-05 Electrical insulation and cooling material for a high-voltage supply device

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EP (1) EP0993238A1 (en)
JP (1) JP2000123635A (en)
KR (1) KR20000028811A (en)
CN (1) CN1218007C (en)
FR (1) FR2784261B1 (en)
IL (1) IL131930A0 (en)

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WO2003049138A2 (en) * 2001-12-04 2003-06-12 X-Ray Optical Systems, Inc. Method and device for cooling and electrically insulating a high-voltage, heat-generating component such as an x-ray tube
WO2004112055A1 (en) * 2003-06-18 2004-12-23 Philips Intellectual Property & Standards Gmbh High voltage insulating materials
US7197114B2 (en) * 2002-09-26 2007-03-27 Ge Medical Systems Global Technology Company, Llc X-rays emitter and X-ray apparatus and method of manufacturing an X-ray emitter
WO2009037358A1 (en) * 2007-09-20 2009-03-26 Abb Research Ltd An electric insulation device and an electric device provided therewith
EP2042558A1 (en) * 2007-09-20 2009-04-01 ABB Research Ltd. An electric insulation device and an electric device provided therewith
US7519159B2 (en) 2001-12-04 2009-04-14 X-Ray Optical Systems, Inc. Method and device for cooling and electrically insulating a high voltage, heat-generating component such as an x-ray tube for analyzing fluid streams
US8717732B2 (en) 2009-12-04 2014-05-06 Abb Research Ltd. High voltage surge arrester
US9335427B2 (en) 2013-11-22 2016-05-10 General Electric Company High voltage shielding to enable paschen region operation for neutron detection systems

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JP4956746B2 (en) * 2004-12-28 2012-06-20 国立大学法人京都工芸繊維大学 Charged particle generator and accelerator
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US8847721B2 (en) * 2009-11-12 2014-09-30 Nikon Corporation Thermally conductive coil and methods and systems
US11646242B2 (en) 2018-11-29 2023-05-09 Qorvo Us, Inc. Thermally enhanced semiconductor package with at least one heat extractor and process for making the same
US20200235040A1 (en) 2019-01-23 2020-07-23 Qorvo Us, Inc. Rf devices with enhanced performance and methods of forming the same
US20200235066A1 (en) * 2019-01-23 2020-07-23 Qorvo Us, Inc. Rf devices with enhanced performance and methods of forming the same
CN113632209A (en) 2019-01-23 2021-11-09 Qorvo美国公司 RF semiconductor device and method for manufacturing the same
US11646289B2 (en) 2019-12-02 2023-05-09 Qorvo Us, Inc. RF devices with enhanced performance and methods of forming the same
US11923238B2 (en) 2019-12-12 2024-03-05 Qorvo Us, Inc. Method of forming RF devices with enhanced performance including attaching a wafer to a support carrier by a bonding technique without any polymer adhesive

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Cited By (11)

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WO2003049138A2 (en) * 2001-12-04 2003-06-12 X-Ray Optical Systems, Inc. Method and device for cooling and electrically insulating a high-voltage, heat-generating component such as an x-ray tube
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KR20000028811A (en) 2000-05-25
JP2000123635A (en) 2000-04-28
CN1218007C (en) 2005-09-07
FR2784261B1 (en) 2001-07-27
IL131930A0 (en) 2001-03-19
CN1256300A (en) 2000-06-14
FR2784261A1 (en) 2000-04-07

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