EP0942172A1 - Vacuum pump with multiple driven shafts - Google Patents

Vacuum pump with multiple driven shafts Download PDF

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Publication number
EP0942172A1
EP0942172A1 EP99101291A EP99101291A EP0942172A1 EP 0942172 A1 EP0942172 A1 EP 0942172A1 EP 99101291 A EP99101291 A EP 99101291A EP 99101291 A EP99101291 A EP 99101291A EP 0942172 A1 EP0942172 A1 EP 0942172A1
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EP
European Patent Office
Prior art keywords
rotor
vacuum pump
shaft
pump according
bell
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Granted
Application number
EP99101291A
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German (de)
French (fr)
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EP0942172B1 (en
Inventor
Christopher Mark Rippl
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009—Shaft sealings specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F04C29/023—Lubricant distribution through a hollow driving shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Definitions

  • the invention relates to a multi-shaft vacuum pump according to the preamble of first claim.
  • Multi-shaft vacuum pumps of the type described here are considered dry Pump systems especially in the chemical industry and in semiconductor technology a wide range of applications. Dry pump systems are characterized by that their scoops no oil for lubrication and sealing, reduction of Dead volume or included for other purposes. This enables them to to create a completely hydrocarbon-free vacuum. To achieve optimal Pump properties can have several pump stages connected in series in one Housing.
  • the drive motor is located outside the pump housing.
  • a shaft bushing for that Coupling to the main shaft requires a shaft bushing.
  • the shaft bushing with a more or less expensive sealing.
  • the invention has set itself the task of a dry multi-shaft vacuum pump to develop, which no longer has the disadvantages mentioned. In front everything should be aimed at a compact design with optimal pump properties which is space-saving and enables easy installation. Other components, such as seals, sealing gas devices and oil supplies, are to be optimally adapted to the new pump concept.
  • the rotors fill up a large part of the pump volume. This room is not used due to the massive construction of the rotors since then.
  • Through the bell-shaped design of at least one rotor it becomes possible to drive the system fully integrated into the interior of a rotor and the one that has not been used since Recycle space. This reduces the geometric dimensions of the Pump considerably.
  • the bearings are encapsulated from the scooping area, and no shaft bushings are required.
  • the Supply pressure is above the range in which the sealing material blocks occurs. Because the gas is distributed in the seal and on the internal surface flows out into the gap between the sealing body and the rotor, creates a gas cushion, which causes gas exchange between the gearbox and Scooping space is prevented.
  • the pump according to the invention has a compact design with optimal pump properties Construction, which is space-saving and enables easy assembly.
  • Other components such as power supply, seals, coolant supply, Purge gas facilities and oil supply were the pump concept optimally adapted.
  • a pump housing 1 which has an intake flange 2 and a gas outlet opening 3 is provided, the main rotor 4, the control rotor 5 in bearings 31, 33 and 32, 34 worn.
  • the outer profile of the main rotor 4 is 50, that it has two working pistons 6 which rotate in the scooping chamber 8.
  • the profile of the control rotor 5 corresponds to these working pistons 6 two recesses 7.
  • the rotor parts 13 are on the inner surface of the bell-shaped Main rotor 4 attached.
  • the stator parts 12 of the drive system are fixedly mounted within the rotor opposite the rotor shaft 13. Camps 31, 33 and 32, 34 are mounted on pins 9 and 10 inside the rotors. These pins are firmly connected to the housing 1 via flanges 17 and 18.
  • a gear arrangement consisting of gears 14 and 15, which in Gearbox 19 are housed, the rotor movement of the main rotor 4th transferred to the control rotor 5.
  • non-contact seals 22 available. These are called threaded shaft pumps designed to counteract the backflows between the stages.
  • sealing gas seals are made of porous Material and allow through the material selection and shape a metered Supply of sealing gas.
  • Oil is delivered to the bearing points 31, 33 and 32, 34 with the help of Threaded shaft pumps 20 and 21, which on the inside of the control rotor 5th are attached and designed symmetrically so that they are in the axial direction pump in the opposite direction and the oil is discharged in the middle. About drilling 42 and 43 in the pins 9 and 10, the oil is fed to the bearings.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

The pump has a housing (1) with two cooperating rotors (4,5). At least one rotor is bell-shaped. The drive system is formed as an external rotor motor, and its rotor parts (13) are located on the inner surface of the bell-shaped rotor. The stator parts (12) are also located inside the stator opposite to the rotor parts. The rotors are supported on bearings (31,33,32,34), which are carried on stationary journals (9,10) inside the rotors. A bore in one journal supplies cooling medium to a pipe system (38), which cools the pump section containing the drive system.

Description

Die Erfindung betrifft eine Mehrwellenvakuumpumpe nach dem Oberbegriff des ersten Patentanspruches.The invention relates to a multi-shaft vacuum pump according to the preamble of first claim.

Mehrwellenvakuumpumpen der hier beschriebenen Art finden als trockene Pumpsysteme besonders in der chemischen Industrie und in der Halbleitertechnik ein breites Einsatzgebiet. Trockene Pumpsysteme zeichnen sich dadurch aus, daß ihre Schöpfräume kein Öl zur Schmierung und Abdichtung, Reduzierung von Totvolumen oder zu sonstigen Zwecken enthalten. Dadurch sind sie in der Lage, ein völlig kohlenwasserstofffreies Vakuum zu erzeugen. Zum Erreichen optimaler Pumpeigenschaften können mehrere, in Serie geschaltete Pumpstufen, in einem Gehäuse untergebracht sein.Multi-shaft vacuum pumps of the type described here are considered dry Pump systems especially in the chemical industry and in semiconductor technology a wide range of applications. Dry pump systems are characterized by that their scoops no oil for lubrication and sealing, reduction of Dead volume or included for other purposes. This enables them to to create a completely hydrocarbon-free vacuum. To achieve optimal Pump properties can have several pump stages connected in series in one Housing.

Dem Stand der Technik entsprechend, rotieren bei Mehrwellenvakuumpumpen zwei oder mehr Kolben in einem Pumpengehäuse. Die Kolben befinden sich auf Wellen, die in Lagerschilden beiderseits der Wellenenden oder auch nur auf einer Seite der Wellenenden fixiert sind. Die Drehbewegung der Kolben wird über Getriebe so synchronisiert, daß ein gleichmäßiges Abwälzen ohne Berührung unter gleichzeitiger Einhaltung von minimalen Spalten erfolgen kann. Die Lagerstellen und Getriebe müssen durch geeignete Abdichtungen vom Schöpfraum getrennt sein, um zu verhindern, daß zum einen Öl oder sonstige Betriebsmittel in den Schöpfraum gelangen und zum anderen, daß abzupumpende schädliche Gase in die Getriebe und Lagerräume strömen und dort Schmiermittel verunreinigen oder zersetzen können. Durch die Verwendung von Sperrgas kann die Abdichtung noch effektiver gestaltet werden.According to the state of the art, rotate in multi-shaft vacuum pumps two or more pistons in one pump housing. The pistons are on Shafts in end shields on either side of the shaft ends or only on one Side of the shaft ends are fixed. The rotary motion of the pistons is controlled by gears synchronized so that even rolling without touching under minimal columns can be observed at the same time. The bearings and gearboxes must be separated from the pumping chamber by suitable seals to prevent oil or other operating resources from entering the Reach the other and that harmful gases to be pumped out the gearboxes and storage areas flow and contaminate lubricants or can decompose. By using sealing gas, the seal can be made even more effective.

Der Antriebsmotor ist außerhalb des Pumpengehäuses angebracht. Für dessen Ankopplung an die Hauptwelle ist eine Wellendurchführung erforderlich. Entsprechend dem Einsatz der Pumpe muß die Wellendurchführung mit einer mehr oder weniger aufwendigen Abdichtung versehen sein.The drive motor is located outside the pump housing. For that Coupling to the main shaft requires a shaft bushing. Corresponding the use of the pump, the shaft bushing with a more or less expensive sealing.

Ein wesentlicher Nachteil der seither bekannten Pumpen dieser Art besteht in der aufwendigen Bauweise. Dies kommt besonders in der Baugröße, der großen Anzahl von Gehäuseteilen und in einer komplizierten Montage zum Ausdruck. Aber auch weitere wichtige Bauteile, wie Abdichtungen zwischen den einzelnen Stufen, Sperrgaseinrichtungen und Ölversorgungen, weisen bei den herkömmlichen Bauweisen oft Unzulänglichkeiten auf und sind verbesserungsbedürftig.A major disadvantage of the pumps of this type known since then is that complex construction. This comes especially in the size, the large number of housing parts and in a complicated assembly. But also other important components, such as seals between the individual stages, Purge gas devices and oil supplies, show the conventional Construction methods often show shortcomings and are in need of improvement.

Die Erfindung hat sich die Aufgabe gestellt, eine trockene Mehrwellenvakuumpumpe zu entwickeln, welche die angeführten Nachteile nicht mehr aufweist. Vor allem soll bei optimalen Pumpeigenschaften eine kompaktere Bauweise angestrebt werden, welche platzsparend ist und eine einfache Montage ermöglicht. Weitere Bauteile, wie Abdichtungen, Sperrgaseinrichtungen und Ölversorgungen, sollen dem neuen Pumpenkonzept optimal angepaßt werden.The invention has set itself the task of a dry multi-shaft vacuum pump to develop, which no longer has the disadvantages mentioned. In front everything should be aimed at a compact design with optimal pump properties which is space-saving and enables easy installation. Other components, such as seals, sealing gas devices and oil supplies, are to be optimally adapted to the new pump concept.

Die Aufgabe wird durch die kennzeichnenden Merkmale des 1. Patentanspruches gelöst. Die Ansprüche 2 - 9 stellen weitere Ausgestaltungsformen der Erfindung dar.The task is characterized by the characterizing features of the first claim solved. Claims 2-9 represent further embodiments of the invention represents.

Die Rotoren füllen einen großen Teil des Pumpenvolumens aus. Dieser Raum wird durch die seitherige massive Bauweise der Rotoren nicht genutzt. Durch die glockenförmige Bauart mindestens eines Rotors wird es möglich, das Antriebssystem vollständig in das Innere eines Rotors zu integrieren und den seither ungenutzten Raum zu verwerten. Dies reduziert die geometrischen Abmessungen der Pumpe erheblich. Die Lagerstellen sind gegenüber dem Schöpfraum abgekapselt, und es werden keine Wellendurchführungen benötigt. Außerdem ergibt sich eine Anzahl zusätzlicher Vorteile, welche durch weitere erfindungsgemäße Merkmale charakterisiert sind. So können der elektrische Anschluß für das Antriebssystem und die Kühlmittelversorgung durch Bohrungen in den Zapfen des Hauptrotors erfolgen. The rotors fill up a large part of the pump volume. This room is not used due to the massive construction of the rotors since then. Through the bell-shaped design of at least one rotor, it becomes possible to drive the system fully integrated into the interior of a rotor and the one that has not been used since Recycle space. This reduces the geometric dimensions of the Pump considerably. The bearings are encapsulated from the scooping area, and no shaft bushings are required. There is also a Number of additional advantages, which are further features of the invention are characterized. So the electrical connection for the drive system and the coolant supply through holes in the pin of the main rotor respectively.

Die glockenförmige Bauweise bedingt eine Konstruktion, die große Rotordurchmesser zur Folge hat. Im Falle einer mehrstufigen Pumpe, bei der die Stufen axial hintereinander angeordnet sind, stellt sich das Problem der Abdichtung zwischen den einzelnen Stufen. Zum Beispiel scheiden Radialwellendichtungen aus, da wegen der großen Durchmesser hohe Geschwindigkeiten an den Grenzflächen auftreten, was zu unzulässigen Temperaturen und Verschleißerscheinungen führt. Außerdem ist es wünschenswert, der Rückströmung zwischen den Stufen entgegenzuwirken. Um diesen Umständen Rechnung zu tragen, werden zwischen den Stufen berührungsfreie Dichtungen eingesetzt. Diese sind als Gewindewellenpumpen ausgebildet und haben so die Eigenschaft, ein Druckverhältnis zu erzeugen, welches der Rückströmung entgegenwirkt.The bell-shaped construction requires a construction, the large rotor diameter has the consequence. In the case of a multi-stage pump in which the stages are axial are arranged one behind the other, the problem of sealing arises between the individual levels. For example, radial shaft seals are ruled out because because of the large diameter, high speeds at the interfaces occur, which leads to impermissible temperatures and signs of wear. It is also desirable to counteract the backflow between the stages. In order to take these circumstances into account, between the Non-contact seals are used. These are called threaded shaft pumps trained and thus have the property of generating a pressure ratio which counteracts the backflow.

Um sicherzustellen, daß kein Öl in den Schöpfraum und, umgekehrt, kein Prozeßgas in den Getrieberaum gelangt, ist es erforderlich, Sperrgas zwischen Getrieberaum und angrenzendem Schöpfraum einzulassen. Ein kritisches Problem ist hierbei die Dosierung. Da als Sperrgas in der Regel Inertgas verwendet wird, ist man bemüht, den Gasverbrauch niedrig zu halten. Andererseits soll kein Risiko eingegangen werden, durch zu geringe Gasmengen die Absperrfunktion zu gefährden. Um diese Forderungen zu erfüllen, waren bisher aufwendige Inertgasaufbereitungseinrichtungen (Druckregelung, Einstellung und Überwachung) notwendig. Erfindungsgemäß kann durch die Verwendung von porösem Material als Werkstoff für die Dichtkörper der Sperrgasdichtungen der Sperrgasverbrauch optimal eingestellt werden. Dieser ist von der Wandstärke der Dichtung und von der Permeabilität des Werkstoffes abhängig. Dabei muß beachtet werden, daß der Versorgungsdruck oberhalb des Bereiches liegt, in dem im Dichtwerkstoff Verblockung auftritt. Dadurch, daß sich das Gas in der Dichtung verteilt und auf der inneren Oberfläche in den Spalt zwischen Dichtungskörper und Rotor ausströmt, entsteht ein Gaspolster, wodurch ein Gasaustausch zwischen Getrieberaum und Schöpfraum verhindert wird. To ensure that no oil enters the scoop and, conversely, no process gas enters the gearbox, it is necessary to use sealing gas between the gearbox and admit the adjoining creative space. A critical problem is the dosage. Since inert gas is generally used as the sealing gas, one tries to keep gas consumption low. On the other hand, there is no risk are entered into, jeopardizing the shut-off function by insufficient gas quantities. In order to meet these requirements, complex inert gas processing devices have so far been used (Pressure control, setting and monitoring) necessary. According to the invention, the use of porous material as Material for the sealing body of the sealing gas seals the sealing gas consumption optimal can be set. This depends on the wall thickness of the seal and the Permeability of the material depends. It must be noted that the Supply pressure is above the range in which the sealing material blocks occurs. Because the gas is distributed in the seal and on the internal surface flows out into the gap between the sealing body and the rotor, creates a gas cushion, which causes gas exchange between the gearbox and Scooping space is prevented.

Für die Versorgung der Lagerstellen mit Öl werden symmetrisch gestaltete Gewindewellenpumpen, welche auf der Innenseite des Steuerrotors angebracht sind, verwendet. Zur weiteren Beförderung des Öles sind erfindungsgemäß Bohrungen innerhalb der Zapfen angebracht. Dadurch wird auch für diese Bauteile eine optimale Raumausnutzung bewirkt.To supply the bearings with oil, symmetrically designed threaded shaft pumps, which are attached to the inside of the control rotor, used. According to the invention, bores are for further transport of the oil attached inside the pegs. This also makes it an optimal one for these components Space utilization causes.

Die erfindungsgemäße Pumpe weist bei optimalen Pumpeigenschaften eine kompakte Bauweise auf, welche platzsparend ist und eine einfache Montage ermoglicht. Weitere Bauteile, wie Stromversorgung, Abdichtungen, Kühlmittelversorgung, Sperrgaseinrichtungen und Ölversorgung, wurden dem Pumpenkonzept optimal angepaßt.The pump according to the invention has a compact design with optimal pump properties Construction, which is space-saving and enables easy assembly. Other components, such as power supply, seals, coolant supply, Purge gas facilities and oil supply were the pump concept optimally adapted.

Anhand der Abbildungen 1 und 2 soll die Erfindung am Beispiel einer Zweiwellenvakuumpumpe näher erläutert werden. Dabei ist die eine Welle als Arbeitswelle, im folgenden

Figure 00040001
Hauptrotor" genannt, und die zweite Welle als Steuerwelle, im folgenden Steuerrotor" genannt, ausgebildet.

  • Abbildung 1 zeigt einen Querschnitt durch das Pumpsystem.
  • Abbildung 2 zeigt einen Schnitt längs der beiden Rotoren einer vierstufigen Pumpe.
    • With reference to Figures 1 and 2, the invention will be explained in more detail using the example of a two-shaft vacuum pump. One wave is a working wave, in the following
    Figure 00040001
    Main rotor ", and the second shaft as the control shaft, hereinafter Called control rotor ".
  • Figure 1 shows a cross section through the pump system.
  • Figure 2 shows a section along the two rotors of a four-stage pump.

    • In einem Pumpengehäuse 1, welches mit einem Ansaugflansch 2 und einer Gasaustrittsöffnung 3 versehen ist, werden der Hauptrotor 4 der Steuerrotor 5 in Lagern 31, 33 und 32, 34 getragen. Das äußere Profil des Hauptrotors 4 ist 50 gestaltet, daß es zwei Arbeitskolben 6 aufweist, welche im Schöpfraum 8 umlaufen. Korrespondierend zu diesen Arbeitskolben 6 bildet das Profil des Steuerrotors 5 zwei Ausnehmungen 7. Durch das Zusammenwirken von Hauptrotor 4 und Steuerrotor 5 entsteht auf an sich bekannte Art und Weise der Pumpeffekt. Beide Rotoren sind als glockenförmige Hohlkörper ausgebildet. Diese Bauweise ermöglicht das Unterbringen von weiteren Bauteilen im Inneren der Rotoren. So ist das Antriebssystem im Inneren des Hauptrotors 4 installiert. Dieses ist als Außenläufermotor ausgebildet. Dabei sind dessen Rotorteile 13 an der Innenfläche des glokkenförmigen Hauptrotors 4 angebracht. Die Statorteile 12 des Antriebssystems sind innerhalb des Rotors gegenüber der Rotorwelle 13 fest montiert. Die Lager 31, 33 und 32, 34 sind im Inneren der Rotoren auf Zapfen 9 und 10 angebracht. Diese Zapfen sind über Flansche 17 und 18 mit dem Gehäuse 1 fest verbunden. Durch eine Getriebeanordnung, bestehend aus Zahnrädern 14 und 15, welche im Getrieberaum 19 untergebracht sind, wird die Rotorbewegung vom Hauptrotor 4 auf den Steuerrotor 5 übertragen. Die elektrischen Versorgungsleitungen 37 für die Statorteile 12 des Antriebssystems sowie die Versorgung des Kühlsystems 38 mit Kühlmittel erfolgen durch eine Bohrungen im Zapfen 9 des Hauptrotors 4.In a pump housing 1, which has an intake flange 2 and a gas outlet opening 3 is provided, the main rotor 4, the control rotor 5 in bearings 31, 33 and 32, 34 worn. The outer profile of the main rotor 4 is 50, that it has two working pistons 6 which rotate in the scooping chamber 8. The profile of the control rotor 5 corresponds to these working pistons 6 two recesses 7. By the interaction of the main rotor 4 and control rotor 5 creates the pump effect in a manner known per se. Both rotors are designed as bell-shaped hollow bodies. This construction enables the placement of further components inside the rotors. That's the drive system installed inside the main rotor 4. This is as an external rotor motor educated. The rotor parts 13 are on the inner surface of the bell-shaped Main rotor 4 attached. The stator parts 12 of the drive system are fixedly mounted within the rotor opposite the rotor shaft 13. Camps 31, 33 and 32, 34 are mounted on pins 9 and 10 inside the rotors. These pins are firmly connected to the housing 1 via flanges 17 and 18. By a gear arrangement consisting of gears 14 and 15, which in Gearbox 19 are housed, the rotor movement of the main rotor 4th transferred to the control rotor 5. The electrical supply lines 37 for the stator parts 12 of the drive system and the supply of the cooling system 38 with coolant through holes in the pin 9 of the main rotor 4th

    Im Falle einer mehrstufigen Ausführung, welche in Abbildung 2 dargestellt ist, sind zwischen den einzelnen Pumpstufen, die axial hintereinander angeordnet sind, berührungsfreie Dichtungen 22 vorhanden. Diese sind als Gewindewellenpumpen so ausgebildet, daß sie den Rückströmungen zwischen den Stufen entgegenwirken.In the case of a multi-stage version, which is shown in Figure 2, are arranged axially one behind the other between the individual pump stages are non-contact seals 22 available. These are called threaded shaft pumps designed to counteract the backflows between the stages.

    Zur Abdichtung zwischen Getrieberaum 19 und angrenzendem Schöpfraum 8 wird Sperrgas über den Sperrgaseinlaß 23, die Ringkanäle 24 und 25 und die Sperrgasdichtungen 26 und 27 zugeführt. Die Sperrgasdichtungen sind aus porösem Material und gestatten durch die Materialauswahl und die Formgebung eine dosierte Zuführung von Sperrgas.For sealing between the gear chamber 19 and the adjacent scooping chamber 8 Sealing gas via the sealing gas inlet 23, the ring channels 24 and 25 and the sealing gas seals 26 and 27 fed. The sealing gas seals are made of porous Material and allow through the material selection and shape a metered Supply of sealing gas.

    Die Förderung von Öl zu den Lagerstellen 31, 33 und 32, 34 erfolgt mit Hilfe von Gewindewellenpumpen 20 und 21, welche auf der Innenseite des Steuerrotors 5 angebracht sind und symmetrisch gestaltet sind, so daß sie in axialer Richtung entgegengesetzt pumpen und der Ölaustritt jeweils in der Mitte erfolgt. Über Bohrungen 42 und 43 in den Zapfen 9 und 10 wird das Öl den Lagerstellen Zugeführt.Oil is delivered to the bearing points 31, 33 and 32, 34 with the help of Threaded shaft pumps 20 and 21, which on the inside of the control rotor 5th are attached and designed symmetrically so that they are in the axial direction pump in the opposite direction and the oil is discharged in the middle. About drilling 42 and 43 in the pins 9 and 10, the oil is fed to the bearings.

    Claims (9)

    Mehrwellenvakuumpumpe, bei welcher in einem Pumpengehäuse (1) mindestens zwei Rotoren (4 und 5) so zusammenwirken, daß durch ihre berührungslose Bewegung Schöpfräume (8) entstehen, in welchen das zu pumpende Medium gefördert wird, dadurch gekennzeichnet, daß mindestens ein Rotor (4) eine glockenförmige Bauart aufweist, wobei das Antriebssystem als Außenläufermotor ausgebildet ist, derart, daß dessen Rotorteile (13) an der Innenfläche des glockenförmigen Rotors (4) angebracht sind und die Statorteile (12) jenen gegenüber innerhalb des glockenförmigen Rotors (4) fest montiert sind.Multi-shaft vacuum pump, in which at least in a pump housing (1) two rotors (4 and 5) interact so that their contactless Movement scoops (8) arise in which the pumped Medium is conveyed, characterized in that at least one rotor (4) has a bell-shaped design, the drive system as an external rotor motor is designed such that its rotor parts (13) on the inner surface of the bell-shaped rotor (4) and the stator parts (12) are those opposite are fixedly mounted inside the bell-shaped rotor (4). Mehrwellenvakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, daß die glockenförmigen Rotoren (4 und 5) durch Lager (31, 33 und 32, 34), welche im Inneren der Rotoren auf feststehende Zapfen (9 und 10) angebracht sind, getragen werden.Multi-shaft vacuum pump according to claim 1, characterized in that the bell-shaped rotors (4 and 5) by bearings (31, 33 and 32, 34), which in Inside the rotors are attached to fixed pins (9 and 10) become. Mehrwellenvakuumpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß die elektronischen Versorgungsleitungen (37) für das Antriebssystem, dessen Statorteilen (12) durch eine Bohrung in dem Zapfen (9) des Hauptrotors (4) zugeführt werden.Multi-shaft vacuum pump according to claim 1 or 2, characterized in that the electronic supply lines (37) for the drive system, whose stator parts (12) through a hole in the pin (9) of the main rotor (4) can be fed. Mehrwellenvakuumpumpe nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß ein Leitungssystem (38) zur Kühlung desjenigen Teils der Pumpe, in welchem das Antriebssystem integriert ist, durch eine Bohrung in dem Zapfen (9) des Hauptrotors (4) mit Kühlmittel versorgt wird.Multi-shaft vacuum pump according to one of the preceding claims, characterized characterized in that a conduit system (38) for cooling that part of the Pump, in which the drive system is integrated, through a hole in the pin (9) of the main rotor (4) is supplied with coolant. Mehrwellenvakuumpumpe nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß sie aus mehreren Pumpstufen besteht, welche axial hintereinander angeordnet sind.Multi-shaft vacuum pump according to one of the preceding claims, characterized characterized in that it consists of several pump stages, which are axially one behind the other are arranged. Mehrwellenvakuumpumpe nach Anspruch 5, dadurch gekennzeichnet, daß zwischen den Pumpstufen berührungsfreie Dichtungen (22) vorhanden sind, welche als Gewindewellenpumpen ausgebildet sind, derart, daß sie den Rückströmungen zwischen den Stufen entgegenwirken.Multi-shaft vacuum pump according to claim 5, characterized in that there are non-contact seals (22) between the pump stages, which are designed as threaded shaft pumps, in such a way that they prevent the backflow counteract between the stages. Mehrwellenvakuumpumpe nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß zwischen dem Getrieberaum (19) und dem angrenzenden Schöpfraum (9) ein Sperrgaseinlaß (23) angeordnet ist, welcher über Ringkanäle (24 und 25) mit Sperrgasdichtungen (26 und 27) verbunden ist, die aus porösem Material als Werkstoff bestehen.Multi-shaft vacuum pump according to one of the preceding claims, characterized characterized in that between the gear space (19) and the adjacent Scooping space (9) a sealing gas inlet (23) is arranged, which via annular channels (24 and 25) with sealing gas seals (26 and 27) is connected, which porous material as a material. Mehrwellenvakuumpumpe nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß zur Förderung von Öl zu den Lagerstellen an der Innenseite des Steuerrotors (5) Gewindewellenpumpen (20 und 21) angebracht sind, welche symmetrisch gestaltet sind, so daß sie in axialer Richtung entgegengesetzt pumpen und der Ölaustritt in der Mitte der jeweiligen Gewindewellenpumpe erfolgt.Multi-shaft vacuum pump according to one of the preceding claims, characterized characterized in that to convey oil to the bearings on the inside the control rotor (5) threaded shaft pumps (20 and 21) are attached, which are designed symmetrically so that they are opposed in the axial direction pump and the oil outlet in the middle of the respective threaded shaft pump he follows. Mehrwellenvakuumpumpe nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß die Ölversorgung der Lagerstellen über Bohrungen (42 und 43) in den Zapfen (9 und 10) erfolgt.Multi-shaft vacuum pump according to one of the preceding claims, characterized characterized in that the oil supply to the bearing points via bores (42 and 43) in the pins (9 and 10).
    EP99101291A 1998-03-07 1999-01-25 Vacuum pump with multiple driven shafts Expired - Lifetime EP0942172B1 (en)

    Applications Claiming Priority (2)

    Application Number Priority Date Filing Date Title
    DE19809957A DE19809957A1 (en) 1998-03-07 1998-03-07 Multi-shaft vacuum pump
    DE19809957 1998-03-07

    Publications (2)

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    EP0942172A1 true EP0942172A1 (en) 1999-09-15
    EP0942172B1 EP0942172B1 (en) 2004-09-29

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    US (1) US6241490B1 (en)
    EP (1) EP0942172B1 (en)
    JP (1) JP4282809B2 (en)
    AT (1) ATE278110T1 (en)
    DE (2) DE19809957A1 (en)

    Families Citing this family (8)

    * Cited by examiner, † Cited by third party
    Publication number Priority date Publication date Assignee Title
    US6729863B2 (en) * 1999-03-22 2004-05-04 Werner Rietschle Gmbh & Co. Kg Rotary pump having high and low pressure ports in the housing cover
    US20050095160A1 (en) * 2003-10-29 2005-05-05 Heng-I Lin Pump
    US20140161655A1 (en) * 2011-07-08 2014-06-12 Edward L. Simonds Pump
    JP6418838B2 (en) * 2014-07-31 2018-11-07 エドワーズ株式会社 Dry pump and exhaust gas treatment method
    MX2019012043A (en) 2017-04-07 2020-02-10 Stackpole Int Engineered Products Ltd Epitrochoidal vacuum pump.
    DE102018001519A1 (en) * 2018-02-27 2019-08-29 Ralf Steffens Storage and drive for an R718 compressor
    US11519409B2 (en) 2018-04-27 2022-12-06 Carrier Corporation Screw compressor with external motor rotor
    KR102453438B1 (en) * 2020-06-15 2022-10-12 주식회사 한중엔시에스 Vacuum pump with integrated reservoir

    Citations (4)

    * Cited by examiner, † Cited by third party
    Publication number Priority date Publication date Assignee Title
    GB809445A (en) * 1954-02-27 1959-02-25 Heraeus Gmbh W C Improvements in or relating to rotary high vacuum pumps
    EP0472933A2 (en) * 1990-08-01 1992-03-04 Matsushita Electric Industrial Co., Ltd. Fluid rotating apparatus
    FR2668209A1 (en) * 1990-10-18 1992-04-24 Hitachi Koki Kk Molecular suction pump
    US5674051A (en) * 1994-07-11 1997-10-07 Matsushita Electric Industrial Co., Ltd. Positive displacement pump having synchronously rotated non-circular rotors

    Family Cites Families (11)

    * Cited by examiner, † Cited by third party
    Publication number Priority date Publication date Assignee Title
    DE2359456A1 (en) * 1973-11-29 1975-06-05 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR VACUUM PUMP WITH GAS BEARED ROTOR
    GB2088957B (en) * 1980-12-05 1984-12-12 Boc Ltd Rotary positive-displacement fluidmachines
    SE424760B (en) * 1980-12-12 1982-08-09 Sullair Tech Ab METHOD OF AN OIL INJECTED SCREW COMPRESSOR FOR BALANCING AXIAL FORCES OF ATMINSTONE ONE OF THE COMPRESSOR'S ROTORS, FOR SEALING THE SPACES BETWEEN ROTOR HOUSES AND ROTORS 'SHOES, AND FOR COOLING AND LUBRICATION.
    US4551073A (en) * 1982-05-12 1985-11-05 Walter Schwab Pump for liquid and gaseous fluids, especially blood
    US4457680A (en) * 1983-04-27 1984-07-03 Paget Win W Rotary compressor
    JPS62243982A (en) * 1986-04-14 1987-10-24 Hitachi Ltd 2-stage vacuum pump and operating method thereof
    DE58905785D1 (en) * 1989-07-20 1993-11-04 Leybold Ag GAS FRICTION PUMP WITH AT LEAST ONE OUTLET THREAD LEVEL.
    DE4238271A1 (en) * 1992-11-13 1994-05-19 Leybold Ag Twin-shaft vacuum pump
    DE4244063A1 (en) * 1992-12-24 1994-06-30 Balzers Pfeiffer Gmbh Roots vacuum pump
    US5346361A (en) * 1993-04-15 1994-09-13 Goulds Pumps, Incorporated Air seal for pump with vertical shaft
    BE1010822A3 (en) * 1996-12-23 1999-02-02 Atlas Copco Airpower Nv MACHINE WITH LIQUID AND ROTORS bearing lubrication of the bearings.

    Patent Citations (4)

    * Cited by examiner, † Cited by third party
    Publication number Priority date Publication date Assignee Title
    GB809445A (en) * 1954-02-27 1959-02-25 Heraeus Gmbh W C Improvements in or relating to rotary high vacuum pumps
    EP0472933A2 (en) * 1990-08-01 1992-03-04 Matsushita Electric Industrial Co., Ltd. Fluid rotating apparatus
    FR2668209A1 (en) * 1990-10-18 1992-04-24 Hitachi Koki Kk Molecular suction pump
    US5674051A (en) * 1994-07-11 1997-10-07 Matsushita Electric Industrial Co., Ltd. Positive displacement pump having synchronously rotated non-circular rotors

    Also Published As

    Publication number Publication date
    DE19809957A1 (en) 1999-09-09
    US6241490B1 (en) 2001-06-05
    DE59910616D1 (en) 2004-11-04
    ATE278110T1 (en) 2004-10-15
    JPH11294358A (en) 1999-10-26
    EP0942172B1 (en) 2004-09-29
    JP4282809B2 (en) 2009-06-24

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