EP0913666A3 - Interference measurement apparatus and probe used for interference measurement apparatus - Google Patents

Interference measurement apparatus and probe used for interference measurement apparatus Download PDF

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Publication number
EP0913666A3
EP0913666A3 EP98203527A EP98203527A EP0913666A3 EP 0913666 A3 EP0913666 A3 EP 0913666A3 EP 98203527 A EP98203527 A EP 98203527A EP 98203527 A EP98203527 A EP 98203527A EP 0913666 A3 EP0913666 A3 EP 0913666A3
Authority
EP
European Patent Office
Prior art keywords
section
measurement
reflected
beam splitter
mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP98203527A
Other languages
German (de)
French (fr)
Other versions
EP0913666A2 (en
Inventor
Makoto Fujino
Nobuo Hori
Shigenori Nagano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Topcon Corp
Original Assignee
Topcon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Topcon Corp filed Critical Topcon Corp
Publication of EP0913666A2 publication Critical patent/EP0913666A2/en
Publication of EP0913666A3 publication Critical patent/EP0913666A3/en
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/0201—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal phase variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

An simlified optical configuration is acheved and, a direction discrimination function and a high resolving detection function are performed by one light receiving section. A TE mode emitted from an optical waveguide section 3 transmits through a beam splitter 5 and is guided to a measurement optical path. A TM mode emitted from the optical waveguide is reflected by the beam splitter 5 and is guided to a reference optical path. First and second 1/4 wave plates 10 and 11 are inserted in the respective optical paths, and the TE and TM modes are acted by a 1/2 wave plate while travelling forward and backward on the reference and measurement optical paths. A reference light (TM mode) is reflected by a reference reflection section 8 and transmits through the beam splitter section 5. A measurement light (TE mode) is reflected by a measurement reflection section 9 and is reflected by the beam splitter section 5. By a polarization member 12, only direction components of the polarization member 12 are extracted from the TM and TE modes, and both waves interfere, whereby a displacement is measured by a displacement measurement section 7.
EP98203527A 1997-10-31 1998-10-19 Interference measurement apparatus and probe used for interference measurement apparatus Withdrawn EP0913666A3 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP314586/97 1997-10-31
JP9314586A JPH11132718A (en) 1997-10-31 1997-10-31 Interference measuring device and probe for interference measuring device
JP31458697 1997-10-31

Publications (2)

Publication Number Publication Date
EP0913666A2 EP0913666A2 (en) 1999-05-06
EP0913666A3 true EP0913666A3 (en) 2000-12-06

Family

ID=18055086

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98203527A Withdrawn EP0913666A3 (en) 1997-10-31 1998-10-19 Interference measurement apparatus and probe used for interference measurement apparatus

Country Status (3)

Country Link
US (2) US6233370B1 (en)
EP (1) EP0913666A3 (en)
JP (1) JPH11132718A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006112903A (en) * 2004-10-14 2006-04-27 Olympus Corp Ultraviolet light source unit, interferometer using it, and adjusting method of interferometer
JP5733910B2 (en) * 2010-05-19 2015-06-10 国立大学法人 新潟大学 Surface shape measuring method and measuring apparatus
CN104799801B (en) * 2015-03-25 2016-04-20 清华大学深圳研究生院 A kind of endoscope and method for optical information processing
JP2020124297A (en) * 2019-02-01 2020-08-20 株式会社ニデック Oct optical system adjustment method, attachment for reference, and oct device
JP7335598B2 (en) * 2019-09-20 2023-08-30 国立大学法人東京農工大学 LASER INTERFERENCE DISPLACEMENT METHOD AND DISPLACEMENT MEASUREMENT METHOD
WO2023073873A1 (en) * 2021-10-28 2023-05-04 日本電信電話株式会社 Sound measurement device, sound measurement method, and program

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4652129A (en) * 1983-07-28 1987-03-24 Cise - Centro Informazioni Studi Esperienze S.P.A. Interferometric detector with fibre-optic sensor
US4909629A (en) * 1987-07-07 1990-03-20 Kabushiki Kaisha Topcon Light interferometer
DE4336318A1 (en) * 1993-10-25 1995-04-27 Zeiss Carl Jena Gmbh Arrangement for frequency shifting of light, in particular in an interferrometric measuring system
US5504722A (en) * 1993-01-27 1996-04-02 Nippon Telegraph And Telephone Corporation Magneto-optic information storage system utilizing a TE/TM mode controlling laser diode

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4691984A (en) * 1985-09-26 1987-09-08 Trw Inc. Wavelength-independent polarization converter
JPS6412204A (en) * 1987-07-07 1989-01-17 Topcon Corp Optical ic interferometer
JP2655647B2 (en) 1987-07-07 1997-09-24 株式会社トプコン Optical integrated circuit interferometer
JP2691899B2 (en) 1987-09-30 1997-12-17 株式会社トプコン Interferometer
JPH04331333A (en) * 1991-05-02 1992-11-19 Canon Inc Wavelength change measuring device
US5867615A (en) * 1997-07-22 1999-02-02 The United States Of America As Represented By The Secretary Of The Air Force Compact straight channel fiber optic intensity modular

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4652129A (en) * 1983-07-28 1987-03-24 Cise - Centro Informazioni Studi Esperienze S.P.A. Interferometric detector with fibre-optic sensor
US4909629A (en) * 1987-07-07 1990-03-20 Kabushiki Kaisha Topcon Light interferometer
US5504722A (en) * 1993-01-27 1996-04-02 Nippon Telegraph And Telephone Corporation Magneto-optic information storage system utilizing a TE/TM mode controlling laser diode
DE4336318A1 (en) * 1993-10-25 1995-04-27 Zeiss Carl Jena Gmbh Arrangement for frequency shifting of light, in particular in an interferrometric measuring system

Also Published As

Publication number Publication date
US20010014191A1 (en) 2001-08-16
JPH11132718A (en) 1999-05-21
US6233370B1 (en) 2001-05-15
EP0913666A2 (en) 1999-05-06

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