EP0851720B1 - Non-transferred arc plasmatron - Google Patents

Non-transferred arc plasmatron Download PDF

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Publication number
EP0851720B1
EP0851720B1 EP97810823A EP97810823A EP0851720B1 EP 0851720 B1 EP0851720 B1 EP 0851720B1 EP 97810823 A EP97810823 A EP 97810823A EP 97810823 A EP97810823 A EP 97810823A EP 0851720 B1 EP0851720 B1 EP 0851720B1
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EP
European Patent Office
Prior art keywords
plasma
neutrodes
channel
gas
neutrode
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EP97810823A
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German (de)
French (fr)
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EP0851720A1 (en
Inventor
Klaus Dr. Landes
Jochen Dipl.-Ing. Zierhut
Ralf Dipl.-Phys. Hartmann
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Oerlikon Metco AG
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Sulzer Metco AG
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles
    • H05H1/3431Coaxial cylindrical electrodes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles
    • H05H1/3463Oblique nozzles

Definitions

  • the invention relates to an indirect plasmatron for treatment of surfaces according to claim 1.
  • plasma generators are made with one a nozzle flowing, electrically non-current-carrying plasma jet referred to, the arc, as opposed to direct Plasmatrons, is not transferred to the workpiece.
  • Plasmatrons are used to generate very high temperature plasmas, which are in the range of up to several 10,000 Kelvin can.
  • the device has an elongated plasma chamber, which is limited by a one-piece body. on the one The front of the plasma chamber is the anode and on the other arranged the cathode.
  • the device outlet nozzle or the plasma chamber is slit-shaped and runs parallel to the longitudinal axis of the plasma chamber.
  • each electrode from a chamber is surrounded, via which an inert gas can be supplied, the thermal stress on the electrodes can be reduced by the latter is flushed with an inert gas, for example argon become.
  • an inert gas for example argon
  • the shape and position of the arc to be influenced.
  • This is for a plasmatron in which the Plasma jet outlet opening parallel to the longitudinal axis of the plasma channel runs, very important because the arc through the gas flow running transversely to the burner axis into a curved Form is forced. Without the effect of a magnetic field the arc is deflected and curved to the extent that it is subject to strong fluctuations and even tears off.
  • Through the Magnetic arrangements can prevent this by using the magnetic fields exert a force on the arc, which the by the flow of the plasma gas exerted on the arc Counteracts force.
  • placement and field strength of the magnets used can depend on operating parameters such as for example, gas volume and gas velocity are taken into account and the arc in a predetermined position being held.
  • the plasmatron consists essentially of a central neutrode arrangement 1, on each side of which there is an electrode body 2, 3, an insulation body 4, 5 and a connecting element 6, 7 connect.
  • the connection elements 6, 7 are used for receiving of electrodes 9, 10, in the present example the left one Electrode 9 the cathode and the right electrode 10 the anode represents.
  • the neutrode arrangement 1 has a plurality of plate-shaped trained neutrodes la to li, which have a plasma channel 8 limit.
  • the two electrodes 9, 10 are coaxial with Longitudinal axis L of the plasma channel 8 is arranged.
  • To the electrical To increase the longitudinal resistance of the neutrode arrangement 1 are individual neutrodes 1a to 1i electrically isolated from each other. Isolation between the neutrodes 1a to 1i inserted insulating washers, which favor a clear Representation are not shown.
  • the neutrode arrangement 1 is on both sides of the electrode body 2, 3 delimited, on the outside of which the insulation body 4, 5 and the connecting element 6, 7.
  • Both electrode bodies 2, 3 are made of an insulating material.
  • Both the neutrodes 1a to 1i are used to cool the plasmatron as well as the two electrode bodies 2, 3 with cooling water channels 16, 21, 31 provided.
  • the two electrodes 9, 10 are also over cooling water channels 38, 39 attached to one inside externally provided cooling water circuit connected.
  • the two electrode bodies 2, 3 each have a central one bore 11, 12 narrowing towards plasma channel 8, into which the respective electrode 9, 10 protrudes in such a way that between the electrode 9, 10 and the bore wall a cavity in Form of an annular channel 19, 20 is formed.
  • These two ring channels 19, 20 are arranged in the insulation bodies 4, 5 Bores 23, 24 each connected to a connection channel 14, 15, through which a gas G can be supplied.
  • 1a shows a front view of the indirect plasmatron. Out this representation it can be seen that the plasma jet outlet opening 40 across the width of five neutrodes 1c to 1g extends.
  • FIG. 2 shows a cross section through the plasmatron or Neutrode 1a along the line A-A in Fig. 1.
  • the neutrode la with a central Cross bore 26 is provided, which is a part of the plasma channel forms and serves to guide the arc.
  • the last neutrodes 1a, 1i of the neutrode stack also the two neutrodes 1b adjoining the inside, 1h each with a hole that part of the plasma channel 8 (Fig. 1) form and stabilization of the arc to serve. All neutrodes are for cooling with cooling channels 16 provided, which is connected to a cooling water circuit become.
  • the neutrode 1c shown in FIG. 3 is instead of one central transverse bore with a slot-shaped recess 33 provided, which also part of the plasma channel 8th (Fig. 1) forms.
  • the recess 33 leading to the outside forms at the same time, part of the plasma jet outlet opening, which in the present example extend over the width of five neutrodes 1c to 1g provided with such recesses 33 (Fig. 1a) extends.
  • the inside of the recess 33 will by a, seen in cross section, semicircular Wall 34 limited. In the center of this semicircular training Wall 34 opens the plasma gas channel 18 into the recess 33.
  • FIG. 3a shows a front view of the section shown in FIG. 3 Neutrode 1c. From this illustration, both the Recess 33 as well as the mouth of the plasma gas channel 18 can be seen.
  • the neutrode 1d shown in FIG. 4 largely corresponds that of Figure 3, with two additional permanent magnets 36, 37 are provided, of which one magnet below and the other are arranged above the recess 33.
  • the North-south axes A of the respective magnets 36 and 37 coincide and run at least approximately under a right one Angle to the longitudinal axis L of the plasma channel 8, the magnets 36, 37, seen in the flow direction of the plasma jet, after the longitudinal axis L of the plasma channel 8 are arranged.
  • This placement will cause the magnetic fields to hit the Arc opposite to the flow of the plasma gas Apply force, causing the arc to be in a predetermined Situation is stabilized.
  • each is unequal Poles of the individual magnets 36, 37 lie opposite one another; thus N-S or S-N.
  • the number of those neutrodes that have a permanent magnet pair can be provided by different operating parameters, such as. Arc current, amount of plasma gas, plasma gas velocity, as well as the geometrical dimensions of the neutrode arrangement etc. are made dependent. As another variation option can use magnets with different field strengths be used. In practice, it has proven useful, about two or three neutrodes with magnets, this number should not be restrictive in any way. Important is also that the neutrodes, in the proposed arrangement the magnet, made of a non-magnetizable material, preferably made of copper or a copper alloy are. The advantage of permanent over electromagnets is u. a. in that no external energy supply is necessary is that the structure can be made more compact and simpler can and that a more targeted influencing of the arc is possible.
  • connection channels 14, 15 become coaxial to the longitudinal axis of the plasma channel 8 an inert gas is supplied, which via the ring channel 19, 20 of the respective electrode body 2, 3 from two sides in flows the plasma channel 8.
  • This gas flows around the two electrodes 9, 10, which has a positive effect on their cooling.
  • this gas shields the electrodes 9, 10 from the actual one Plasma beam, which is particularly important then can if a reactive via the central plasma gas channels 18 Gas is supplied.
  • the base point of the arc which is applied to the electrodes 9, 10, especially that at the anode 10 varies, namely are enlarged, which decreased in a selective manner thermal stress on the electrodes 9, 10 precipitates.
  • the provision of a plurality of central plasma gas channels 18 provided neutrodes 1c to 1g enables the shape of the emerging plasma jet by changing the amount of gas and the gas velocity from plasma gas channel to plasma gas channel 18 is varied.
  • the arc can be stabilized within the plasma channel 8 become. Among other things, this in a constant operating voltage and therefore a constant burner output, a very quiet operation and increased electrode life noticeable.
  • the geometric dimension of the plasmatron in the simplest way can be changed by, for example, the number and / or the Training of neutrodes is changed. For example instead of five with a slot-shaped recess. Neutrodes whose seven are used, increasing the width of the emerging plasma jet would be changed accordingly. It is also conceivable, for example, that neutrodes are used, whose slot-shaped recess is designed differently, or that neutrodes are used, their for arc stabilization provided holes designed differently are.

Abstract

The generator has an elongated plasma channel (8) formed by a set of neutrodes (1). The electrodes (8,10) required for generating the arc are coaxially with the plasma channel's longitudinal axis (L). The neutrode arrangement contains a number of mutually electrically isolated, plate-shaped neutrodes. The neutrode arrangement has a slot-shaped plasma beam outlet opening (40) which runs parallel to the longitudinal axis of the plasma channel. Each electrode is enclosed by a hollow chamber via which an inert gas is fed. The magnetic field of at least one permanent magnet arrangement (36,37) exerts a force on the arc opposite to the flow of the plasma gas.

Description

Die Erfindung betrifft ein indirektes Plasmatron zur Behandlung von Oberflächen gemäss dem Anspruch 1.The invention relates to an indirect plasmatron for treatment of surfaces according to claim 1.

Als indirekte Plasmatrons werden Plasmaerzeuger mit einem aus einer Düse ausströmenden, elektrisch nicht stromführenden Plasmastrahl bezeichnet, wobei der Lichtbogen, im Gegensatz zu direkten Plasmatrons, nicht auf das Werkstück übertragen wird.As indirect plasmatrons, plasma generators are made with one a nozzle flowing, electrically non-current-carrying plasma jet referred to, the arc, as opposed to direct Plasmatrons, is not transferred to the workpiece.

Plasmatrons dienen der Erzeugung von Plasmen sehr hoher Temperatur, die im Bereich von bis zu mehreren 10'000 Kelvin liegen kann.Plasmatrons are used to generate very high temperature plasmas, which are in the range of up to several 10,000 Kelvin can.

Herkömmliche, indirekte Plasmatrons verfügen üblicherweise über eine Düse, aus der ein im wesentlichen kegelförmiger Plasmastrahl austritt (siehe z.B. EP-A-0 500 491). Die mit einem solchen Plasmatron auf einem Substrat beaufschlagte Fläche weist demzufolge einen kreisrunden Umriss auf. Dies ist in vielen Fällen jedoch unerwünscht, insbesondere dann, wenn grosse, rechteckige Flächen mit dem Plasmatron erwärmt oder beschichtet werden sollen.Conventional, indirect plasma patrons usually have a nozzle from which a substantially conical plasma jet emerges (see e.g. EP-A-0 500 491). The one with such a plasmatron on one The surface exposed to the substrate consequently has a circular shape Outline on. However, in many cases this is undesirable, especially when large, rectangular areas with the Plasmatron should be heated or coated.

Ein weiterer Nachteil, der den bekannten Plasmatrons anhaftet, besteht darin, dass die beaufschlagte Fläche relativ klein ist, da die Öffnung der Austrittsdüse einen beschränkten Durchmesser aufweist und ein vorbestimmter Abstand zwischen Düse und Substrat eingehalten werden muss.Another disadvantage that is inherent in the well-known plasmatrons, consists in the fact that the area exposed is relatively small, because the opening of the outlet nozzle has a limited diameter has and a predetermined distance between the nozzle and Substrate must be observed.

Aus der US-Patentschrift Nr. 5 239 161 ist ein Verfahren sowie eine Vorrichtung zum Beschichten von Substratoberflächen durch Plasmaspritzen bekannt, mittels welchem bzw. welcher die vorgängig erwähnten Nachteile weitgehend behoben werden können. Die Vorrichtung weist dazu eine längliche Plasmakammer auf, welche von einem einteiligen Körper begrenzt wird. Auf der einen Stirnseite der Plasmakammer ist die Anode und auf der anderen die Kathode angeordnet. Die Auslassdüse der Vorrichtung bzw. der Plasmakammer ist schlitzförmig ausgebildet und verläuft parallel zur Längsachse der Plasmakammer. Durch diese Merkmale soll erreicht werden, dass der austretende Plasmastrahl eine im wesentlichen rechteckige Kontur besitzt und relativ breit ist.From U.S. Patent No. 5,239,161 is a method as well a device for coating substrate surfaces Plasma spraying is known, by means of which the previous mentioned disadvantages can be largely remedied. For this purpose, the device has an elongated plasma chamber, which is limited by a one-piece body. on the one The front of the plasma chamber is the anode and on the other arranged the cathode. The device outlet nozzle or the plasma chamber is slit-shaped and runs parallel to the longitudinal axis of the plasma chamber. Through this Characteristics should be achieved that the emerging plasma jet has a substantially rectangular contour and relative is wide.

Obwohl die Grundidee eines solchen Brenners an und für sich interessant ist, hat sich in der Praxis gezeigt, dass die Vorrichtung keinen zuverlässigen Betrieb ermöglicht und dass insbesondere gravierende Probleme bei der Stabilisierung des Lichtbogens und der Lebensdauer des Plasmabrenners auftreten.Although the basic idea of such a burner is interesting in and of itself has been shown in practice that the device does not allow reliable operation and that in particular serious problems in stabilizing the Arc and the life of the plasma torch occur.

Es ist daher die Aufgabe der Erfindung, ein indirektes Plasmatron derart zu verbessern, dass ein stabiler Lichtbogen aufrechterhalten werden kann und dass die Lebensdauer der Elektroden, insbesondere der Anode, erhöht wird, wobei das Plasmatron sehr flexibel einsetzbar sein soll.It is therefore the object of the invention to provide an indirect plasmatron to improve in such a way that a stable arc is maintained and that the life of the electrodes, especially the anode, is increased, the plasmatron should be very flexible.

Diese Aufgabe wird durch ein indirektes Plasmatron gelöst, welches die im Anspruch 1 in Kombination aufgeführten Merkmale aufweist.This task is solved by an indirect plasmatron, which the features listed in combination in claim 1 having.

Durch den kaskadierten Aufbau des indirekten Plasmatrons, dessen Neutrodenanordnung aus einer Mehrzahl von plattenförmigen Neutroden besteht, die gegeneinander isoliert sind, wird sichergestellt, dass der Lichtbogen den Weg durch den Plasmakanal wählt und nicht sukzessive von Neutrode zu Neutrode fliesst. Ein kaskadierter Aufbau der Neutrodenanordnung ermöglicht darüber hinaus, die Breite des Neutrodenstapels und damit die Breite der Austrittsöffnung den Anforderungen entsprechend zu variieren.Due to the cascaded structure of the indirect plasmon, its Neutrode arrangement from a plurality of plate-shaped Neutrodes, which are isolated from each other, ensures that the arc made its way through the plasma channel chooses and does not flow successively from neutrode to neutrode. A cascaded structure of the neutrode arrangement enables this addition, the width of the neutrode stack and thus the Width of the outlet opening according to the requirements vary.

Durch das weitere Merkmal, dass jede Elektrode von einer Kammer umgeben ist, über welche ein Inertgas zuführbar ist, kann die thermische Belastung der Elektroden reduziert werden, indem letztere von einem Inert-Gas, beispielsweise Argon, umspült werden. Dies bewirkt einerseits eine verbesserte Kühlung der Elektroden und ermöglicht zum anderen die Beeinflussung des Lichtbogenansatzes an den Elektroden, indem die Fläche des Bogenansatzes durch die Wahl des Gases verändert werden kann. Um einen möglichst diffusen, grossen Fusspunkt zu erhalten, hat sich Argon sehr bewährt.By the further feature that each electrode from a chamber is surrounded, via which an inert gas can be supplied, the thermal stress on the electrodes can be reduced by the latter is flushed with an inert gas, for example argon become. On the one hand, this causes an improved cooling of the Electrodes and on the other allows influencing the Arc approach to the electrodes by the area of the arc approach can be changed by the choice of gas. Around to get a diffuse, large base point argon has proven itself very well.

Schliesslich kann durch den Einsatz eines oder mehrerer Permanentmagneten-Paare die Form und die Position des Lichtbogens beeinflusst werden. Dies ist bei einem Plasmatron, bei dem die Plasmastrahl-Austrittsöffnung parallel zur Längsachse des Plasmakanals verläuft, sehr wichtig, da der Lichtbogen durch die quer zur Brennerachse verlaufende Gasströmung in eine gekrümmte Form gezwungen wird. Ohne die Wirkung eines Magnetfeldes wird der Lichtbogen jeweils soweit ausgelenkt und gekrümmt, dass er starken Schwankungen unterliegt und sogar abreisst. Durch die Magnetanordnungen kann dies verhindert werden, indem die Magnetfelder auf den Lichtbogen eine Kraft ausüben, die der durch die Strömung des Plasmagases auf den Lichtbogen ausgeübten Kraft entgegenwirkt. Durch die Anzahl, Plazierung und Feldstärke der eingesetzten Magnete kann auf Betriebsparameter wie beispielsweise Gasmenge und Gasgeschwindigkeit Rücksicht genommen werden und der Lichtbogen in einer vorbestimmten Position gehalten werden.Finally, by using one or more pairs of permanent magnets the shape and position of the arc to be influenced. This is for a plasmatron in which the Plasma jet outlet opening parallel to the longitudinal axis of the plasma channel runs, very important because the arc through the gas flow running transversely to the burner axis into a curved Form is forced. Without the effect of a magnetic field the arc is deflected and curved to the extent that it is subject to strong fluctuations and even tears off. Through the Magnetic arrangements can prevent this by using the magnetic fields exert a force on the arc, which the by the flow of the plasma gas exerted on the arc Counteracts force. By the number, placement and field strength of the magnets used can depend on operating parameters such as for example, gas volume and gas velocity are taken into account and the arc in a predetermined position being held.

Durch die in einem bevorzugten Ausführungsbeispiel vorgeschlagene Ausbildungsform des indirekten Plasmatrons, bei der die in einzelnen Neutroden angeordneten Öffnungen an eine erste Gasquelle anschliessbar sind, und die die Elektroden umgebenden Hohlräume an eine zweite Gasquelle anschliessbar sind, kann eine Trennung zwischen dem die Elektroden umströmenden Gas und dem eigentlichen Plasmagas erreicht werden. Dies hat beispielsweise den Vorteil, dass ein reaktives Gas über die in den Neutroden angeordneten Öffnungen zugeführt werden kann, ohne dass dies negative Auswirkungen auf die Lebensdauer der Elektroden hätte, da die Elektroden mit einem inerten Gas umspült werden können, und dadurch abgeschirmt werden.By the proposed in a preferred embodiment Form of training of the indirect plasmatron, in which the in individual neutrodes arranged openings to a first gas source can be connected, and those surrounding the electrodes Cavities can be connected to a second gas source Separation between the gas flowing around the electrodes and the actual plasma gas can be reached. For example, this has the advantage of being a reactive gas over those in the neutrodes arranged openings can be fed without this has a negative impact on the life of the electrodes because the electrodes are flushed with an inert gas can be shielded.

Nachfolgend soll ein Ausführungsbeispiel der Erfindung anhand von Zeichnungen näher erläutert werden. In diesen Zeichnungen zeigt:

Fig. 1
einen Längsschnitt durch das indirekte Plasmatron;
Fig. 1a
eine Frontansicht des indirekten Plasmatrons;
Fig. 2
einen ersten Querschnitt durch das indirekte Plasmatron entlang der Linie A-A in Fig. 1;
Fig. 3
einen zweiten Querschnitt durch das indirekte Plasmatron entlang der Linie B-B in Fig. 1;
Fig. 3a
eine Frontansicht einer Neutrode, und
Fig. 4
einen dritten Querschnitt durch das indirekte Plasmatron entlang der Linie C-C in Fig. 1.
An exemplary embodiment of the invention is to be explained in more detail below with reference to drawings. In these drawings:
Fig. 1
a longitudinal section through the indirect plasmatron;
Fig. 1a
a front view of the indirect plasmatron;
Fig. 2
a first cross section through the indirect plasmatron along the line AA in Fig. 1;
Fig. 3
a second cross section through the indirect plasmatron along the line BB in Fig. 1;
Fig. 3a
a front view of a neutrode, and
Fig. 4
3 shows a third cross section through the indirect plasmatron along the line CC in FIG. 1.

Fig. 1 zeigt ein schematisch dargestelltes, indirektes Plasmatron, anhand dessen die im Zusammenhang mit der Erfindung wesentlichen Merkmale näher erläutert werden sollen. Das Plasmatron besteht im wesentlichen aus einer zentralen Neutrodenanordnung 1, an die sich auf beiden Seiten je ein Elektrodenkörper 2, 3, ein Isolationskörper 4, 5 und ein Anschlusselement 6, 7 anschliessen. Die Anschlusselemente 6, 7 dienen der Aufnahme der Elektroden 9, 10, wobei im vorliegenden Beispiel die linke Elektrode 9 die Kathode und die rechte Elektrode 10 die Anode darstellt.1 shows a schematically represented, indirect plasmatron, based on which the essential in connection with the invention Features to be explained in more detail. The plasmatron consists essentially of a central neutrode arrangement 1, on each side of which there is an electrode body 2, 3, an insulation body 4, 5 and a connecting element 6, 7 connect. The connection elements 6, 7 are used for receiving of electrodes 9, 10, in the present example the left one Electrode 9 the cathode and the right electrode 10 the anode represents.

Die Neutrodenanordnung 1 weist eine Vielzahl von plattenförmig ausgebildeten Neutroden la bis li auf, welche einen Plasmakanal 8 begrenzen. Die beiden Elektroden 9, 10 sind koaxial zur Längsachse L des Plasmakanals 8 angeordnet. Um den elektrischen Längs-Widerstand der Neutrodenanordnung 1 zu erhöhen, sind die einzelnen Neutroden 1a bis 1i elektrisch gegeneinander isoliert. Als Isolation dienen zwischen die Neutroden 1a bis 1i eingefügte Isolierscheiben, welche zugunsten einer übersichtlichen Darstellung nicht eingezeichnet sind.The neutrode arrangement 1 has a plurality of plate-shaped trained neutrodes la to li, which have a plasma channel 8 limit. The two electrodes 9, 10 are coaxial with Longitudinal axis L of the plasma channel 8 is arranged. To the electrical To increase the longitudinal resistance of the neutrode arrangement 1 are individual neutrodes 1a to 1i electrically isolated from each other. Isolation between the neutrodes 1a to 1i inserted insulating washers, which favor a clear Representation are not shown.

Die Neutrodenanordnung 1 wird auf beiden Seiten vom Elektrodenkörper 2, 3 begrenzt, an den sich nach aussen jeweils der Isolationskörper 4, 5 sowie das Anschlusselement 6, 7 anschliesst. The neutrode arrangement 1 is on both sides of the electrode body 2, 3 delimited, on the outside of which the insulation body 4, 5 and the connecting element 6, 7.

Beide Elektrodenkörper 2, 3, sind aus einem Isoliermaterial gefertigt.Both electrode bodies 2, 3 are made of an insulating material.

Zur Kühlung des Plasmatrons sind sowohl die Neutroden 1a bis 1i wie auch die beiden Elektrodenkörper 2, 3 mit Kühlwasserkanälen 16, 21, 31 versehen. Auch die beiden Elektroden 9, 10 sind über in ihrem Innern angebrachte Kühlwasserkanäle 38, 39 an einen extern vorgesehenen Kühlwasserkreislauf angeschlossen.Both the neutrodes 1a to 1i are used to cool the plasmatron as well as the two electrode bodies 2, 3 with cooling water channels 16, 21, 31 provided. The two electrodes 9, 10 are also over cooling water channels 38, 39 attached to one inside externally provided cooling water circuit connected.

Von den neun Neutroden 1a bis 1i sind deren fünf 1c bis 1g mit einen zentral in den Plasmakanal 8 mündenden Plasmagaskanal 18 versehen.Of the nine neutrodes 1a to 1i, five of them are 1c to 1g a plasma gas channel 18 opening centrally into the plasma channel 8 Mistake.

Die beiden Elektrodenkörper 2, 3 weisen je eine zentrale, sich zum Plasmakanal 8 hin verengende Bohrung 11, 12 auf, in welche die jeweilige Elektrode 9, 10 derart hineinragt, dass zwischen der Elektrode 9, 10 und der Bohrungswandung ein Hohlraum in Form eines Ringkanals 19, 20 gebildet wird. Diese beiden Ringkanäle 19, 20 sind über in den Isolationskörpern 4, 5 angeordnete Bohrungen 23, 24 mit je einem Anschlusskanal 14, 15 verbunden, über welchen ein Gas G zugeführt werden kann.The two electrode bodies 2, 3 each have a central one bore 11, 12 narrowing towards plasma channel 8, into which the respective electrode 9, 10 protrudes in such a way that between the electrode 9, 10 and the bore wall a cavity in Form of an annular channel 19, 20 is formed. These two ring channels 19, 20 are arranged in the insulation bodies 4, 5 Bores 23, 24 each connected to a connection channel 14, 15, through which a gas G can be supplied.

Fig. 1a zeigt eine Frontansicht des indirekten Plasmatrons. Aus dieser Darstellung ist ersichtlich, dass sich die Plasmastrahl-Austrittsöffnung 40 über die Breite von fünf Neutroden 1c bis 1g erstreckt. 1a shows a front view of the indirect plasmatron. Out this representation it can be seen that the plasma jet outlet opening 40 across the width of five neutrodes 1c to 1g extends.

Figur 2 zeigt einen Querschnitt durch das Plasmatron bzw. eine Neutrode 1a entlang der Linie A-A in Fig. 1. Anhand dieser Darstellung ist ersichtlich, dass die Neutrode la mit einer zentralen Querbohrung 26 versehen ist, welche einen Teil des Plasmakanals bildet und der Führung des Lichtbogens dient. Neben den jeweils letzten Neutroden 1a, 1i des Neutrodenstapels sind auch die beiden sich nach innen anschliessenden Neutroden 1b, 1h mit je einer Bohrung versehen, welche einen Teil des Plasmakanals 8 (Fig. 1) bilden und der Stabilisierung des Lichtbogens dienen. Sämtliche Neutroden sind zur Kühlung mit Kühlkanälen 16 versehen, welche an einem Kühlwasserkreislauf angeschlossen werden. Über die Bohrungen 27 können die einzelnen Neutroden, unter Dazwischenfügen von Isolierplatten, miteinander verbunden und zu der Neutrodenanordnung zusammengefügt werden. Auf die Darstellung der notwendigen Verbindungselemente sowie allenfalls vorhandener Dichtelemente wurde bewusst verzichtet.Figure 2 shows a cross section through the plasmatron or Neutrode 1a along the line A-A in Fig. 1. Using this illustration it can be seen that the neutrode la with a central Cross bore 26 is provided, which is a part of the plasma channel forms and serves to guide the arc. Next are the last neutrodes 1a, 1i of the neutrode stack also the two neutrodes 1b adjoining the inside, 1h each with a hole that part of the plasma channel 8 (Fig. 1) form and stabilization of the arc to serve. All neutrodes are for cooling with cooling channels 16 provided, which is connected to a cooling water circuit become. The individual neutrodes, with the interposition of insulating plates, connected to each other and be combined to form the neutrode arrangement. On the Representation of the necessary connecting elements as well as if necessary existing sealing elements were deliberately omitted.

Die in der Fig. 3 dargestellte Neutrode 1c ist anstelle einer zentralen Querbohrung mit einer schlitzförmigen Ausnehmung 33 versehen, welche ebenfalls einen Teil des Plasmakanals 8 (Fig. 1) bildet. Die nach aussen führende Ausnehmung 33 bildet gleichzeitig auch einen Teil der Plasmastrahl-Austrittsöffnung, welche sich im vorliegenden Beispiel über die Breite von fünf mit solchen Ausnehmungen 33 versehenen Neutroden 1c bis 1g (Fig. 1a) erstreckt. Die Innenseite der Ausnehmung 33 wird durch eine, im Querschnitt gesehen, halbkreisfömig ausgebildete Wandung 34 begrenzt. Im Zentrum dieser halbkreisfömig ausgebildeten Wandung 34 mündet der Plasmagaskanal 18 in die Ausnehmung 33.The neutrode 1c shown in FIG. 3 is instead of one central transverse bore with a slot-shaped recess 33 provided, which also part of the plasma channel 8th (Fig. 1) forms. The recess 33 leading to the outside forms at the same time, part of the plasma jet outlet opening, which in the present example extend over the width of five neutrodes 1c to 1g provided with such recesses 33 (Fig. 1a) extends. The inside of the recess 33 will by a, seen in cross section, semicircular Wall 34 limited. In the center of this semicircular training Wall 34 opens the plasma gas channel 18 into the recess 33.

Fig. 3a zeigt eine Frontansicht der in Fig. 3 geschnitten dargestellten Neutrode 1c. Aus dieser Darstellung sind sowohl die Ausnehmung 33 wie auch die Mündung des Plasmagaskanals 18 ersichtlich.FIG. 3a shows a front view of the section shown in FIG. 3 Neutrode 1c. From this illustration, both the Recess 33 as well as the mouth of the plasma gas channel 18 can be seen.

Die in der Figur 4 dargestellte Neutrode ld entspricht weitgehend derjenigen der Figur 3, wobei zusätzlich zwei Permanentmagnete 36, 37 vorgesehen sind, wovon der eine Magnet unterhalb und der andere oberhalb der Ausnehmung 33 angeordnet sind. Die Nord-Süd-Achsen A der jeweiligen Magnete 36 bzw. 37 fallen zusammen und verlaufen zumindest annähernd unter einem rechten Winkel zur Längsachse L des Plasmakanals 8, wobei die Magnete 36, 37, in Strömungsrichtung des Plasmastrahls gesehen, nach der Längsachse L des Plasmakanals 8 angeordnet sind. Durch diese Platzierung wird bewirkt, dass die Magnetfelder auf den Lichtbogen eine der Strömung des Plasmagases entgegengerichtete Kraft ausüben, wodurch der Lichtbogen in einer vorbestimmten Lage stabilisiert wird. Es versteht sich, dass jeweils ungleiche Pole der einzelnen Magnete 36, 37 einander gegenüberliegen; also N-S bzw. S-N. The neutrode 1d shown in FIG. 4 largely corresponds that of Figure 3, with two additional permanent magnets 36, 37 are provided, of which one magnet below and the other are arranged above the recess 33. The North-south axes A of the respective magnets 36 and 37 coincide and run at least approximately under a right one Angle to the longitudinal axis L of the plasma channel 8, the magnets 36, 37, seen in the flow direction of the plasma jet, after the longitudinal axis L of the plasma channel 8 are arranged. By this placement will cause the magnetic fields to hit the Arc opposite to the flow of the plasma gas Apply force, causing the arc to be in a predetermined Situation is stabilized. It is understood that each is unequal Poles of the individual magnets 36, 37 lie opposite one another; thus N-S or S-N.

Die Anzahl derjenigen Neutroden, die mit einem Permanentmagneten-Paar versehen sind, kann von verschiedenen Betriebsparametern, wie z.B. Bogenstrom, Plasmagasmenge, Plasmagasgeschwindigkeit, sowie auch von geometrischen Abmessungen der Neutrodenanordnung usw. abhängig gemacht werden. Als weitere Variationsmöglichkeit können Magnete mit unterschiedlicher Feldstärke verwendet werden. In der Praxis hat sich bewährt, etwa zwei oder drei Neutroden mit Magneten zu versehen, wobei diese Zahl keinesfalls einschränkenden Charakter aufweisen soll. Wichtig ist zudem, dass die Neutroden, bei der vorgeschlagenen Anordnung der Magnete, aus einem nichtmagnetisierbaren Material, vorzugsweise aus Kupfer oder einer Kupferlegierung, gefertigt sind. Der Vorteil von Permanent- gegenüber Elektromagneten besteht u. a. darin, dass keine externe Energiezufuhr notwendig ist, dass der Aufbau kompakter und einfacher gestaltet werden kann und dass eine gezieltere Beeinflussung des Lichtbogens möglich ist.The number of those neutrodes that have a permanent magnet pair can be provided by different operating parameters, such as. Arc current, amount of plasma gas, plasma gas velocity, as well as the geometrical dimensions of the neutrode arrangement etc. are made dependent. As another variation option can use magnets with different field strengths be used. In practice, it has proven useful, about two or three neutrodes with magnets, this number should not be restrictive in any way. Important is also that the neutrodes, in the proposed arrangement the magnet, made of a non-magnetizable material, preferably made of copper or a copper alloy are. The advantage of permanent over electromagnets is u. a. in that no external energy supply is necessary is that the structure can be made more compact and simpler can and that a more targeted influencing of the arc is possible.

Nachfolgend sollen einige Erläuterungen zur Wirkungsweise eines mit den erfindungsgemässen Merkmalen versehenen Plasmatrons angefügt werden. Da die prinzipielle Funktionsweise von gattungsgemässen Plasmatrons jedoch bekannt ist, wird nur auf die im Zusammenhang mit der Erfindung wesentlichen Merkmale und Betriebsparameter eingegangen: Below are some explanations of how a with the plasmatrons provided with the features according to the invention become. Since the basic functioning of generic Plasmatrons is known, however, is only available on the Connection with the invention essential features and operating parameters received:

Über die in den beiden Anschlusselementen 6, 7 ausgebildeten Anschlusskanäle 14, 15 wird koaxial zur Längsachse des Plasmakanals 8 ein inertes Gas zugeführt, welches über den Ringkanal 19, 20 des jeweiligen Elektrodenkörpers 2, 3 von zwei Seiten in den Plasmakanal 8 strömt. Dieses Gas umspült die beiden Elektroden 9, 10, was sich positiv auf deren Kühlung auswirkt. Zudem schirmt dieses Gas die Elektroden 9, 10 gegenüber dem eigentlichen Plasmastrahl ab, was insbesondere dann wichtig sein kann, wenn über die zentralen Plasmagaskanäle 18 ein reaktives Gas zugeführt wird.About the trained in the two connection elements 6, 7 Connection channels 14, 15 become coaxial to the longitudinal axis of the plasma channel 8 an inert gas is supplied, which via the ring channel 19, 20 of the respective electrode body 2, 3 from two sides in flows the plasma channel 8. This gas flows around the two electrodes 9, 10, which has a positive effect on their cooling. In addition this gas shields the electrodes 9, 10 from the actual one Plasma beam, which is particularly important then can if a reactive via the central plasma gas channels 18 Gas is supplied.

Durch die Wahl des die Elektroden 9, 10 umspülenden Gases kann der Fusspunkt des an den Elektroden 9, 10 ansetzenden Lichtbogens, insbesondere desjenigen an der Anode 10, variiert, namentlich vergrössert, werden, was sich in einer punktuell verringerten thermischen Belastung der Elektroden 9, 10 niederschlägt.By the choice of the gas flowing around the electrodes 9, 10 the base point of the arc which is applied to the electrodes 9, 10, especially that at the anode 10, varies, namely are enlarged, which decreased in a selective manner thermal stress on the electrodes 9, 10 precipitates.

Durch das Vorsehen von getrennten Gaszufuhrkanälen 14, 15, 18, eröffnen sich zudem neue Möglichkeiten. Beispielsweise kann, wie bereits vorgängig erwähnt, über die beiden seitlich in den Plasmakanal mündenden Kanäle 14, 15 ein inertes Gas zugeführt werden, währenddem über die zentralen Plasmagaskanäle 18 der Neutroden 1c bis 1g ein reaktives Gas zugeführt werden kann, ohne dass dies negative Auswirkungen auf die Standzeiten der Elektroden 9, 10 hätte. Durch die Zufuhr eines reaktiven Gases kann ausserdem ein zusätzlicher Leistungsgewinn realisiert werden.By providing separate gas supply channels 14, 15, 18, new opportunities also open up. For example, as already mentioned above, over the two laterally in the An inert gas is supplied to the channels 14, 15 leading to the plasma channel be while the central plasma gas channels 18 of the A reactive gas can be supplied to neutrodes 1c to 1g, without this having a negative impact on the service life of the Electrodes 9, 10 would have. By supplying a reactive gas an additional performance gain can also be realized.

Ein weiterer Leistungsgewinn kann durch die Verwendung von brennbaren Gasen, beispielsweise Butan, erreicht werden, die durch die zentralen Plasmagaskanäle 18 zugeführt werden. Damit steht zusätzlich zu dem vorgängig erwähnten Leistungsgewinn die chemische Energie des exothermen Reaktionsprozesses zur Verfügung.Another benefit can be gained by using flammable gases, such as butane, can be achieved are supplied through the central plasma gas channels 18. In order to stands in addition to the previously mentioned performance gain chemical energy of the exothermic reaction process is available.

Das Vorsehen einer Mehrzahl von mit zentralen Plasmagaskanälen 18 versehenen Neutroden 1c bis 1g ermöglicht es, die Form des austretenden Plasmastrahls zu verändern, indem ggf. die Gasmenge und die Gasgeschwindigkeit von Plasmagaskanal zu Plasmagaskanal 18 variiert wird.The provision of a plurality of central plasma gas channels 18 provided neutrodes 1c to 1g enables the shape of the emerging plasma jet by changing the amount of gas and the gas velocity from plasma gas channel to plasma gas channel 18 is varied.

Durch die spezifische Anordnung der Permanentmagnete 36, 37 kann der Lichtbogen innerhalb des Plasmakanals 8 stabilisiert werden. Dies macht sich u.a. in einer konstanten Betriebsspannung und damit einer konstanten Brennerleistung, einem sehr leisen Betrieb sowie einer erhöhten Lebensdauer der Elektroden bemerkbar.Due to the specific arrangement of the permanent magnets 36, 37 the arc can be stabilized within the plasma channel 8 become. Among other things, this in a constant operating voltage and therefore a constant burner output, a very quiet operation and increased electrode life noticeable.

Durch den kaskadierten Aufbau der Neutrodenanordnung kann die geometrische Abmessung des Plasmatrons auf einfachste Weise verändert werden, indem beispielsweise die Anzahl und/oder die Ausbildung der Neutroden verändert wird. Beispielsweise könnten anstelle von fünf mit einer schlitzförmigen Ausnehmung versehenen. Neutroden deren sieben verwendet werden, wodurch die Breite des austretenden Plasmastrahls entsprechend verändert würde. Denkbar ist beispielsweise auch, dass Neutroden Verwendung finden, deren schlitzförmige Ausnehmung anders gestaltet ist, oder dass Neutroden verwendet werden, deren zur Lichtbogenstabilisierung vorgesehene Bohrungen unterschiedlich ausgestaltet sind.Due to the cascaded structure of the neutrode arrangement, the geometric dimension of the plasmatron in the simplest way can be changed by, for example, the number and / or the Training of neutrodes is changed. For example instead of five with a slot-shaped recess. Neutrodes whose seven are used, increasing the width of the emerging plasma jet would be changed accordingly. It is also conceivable, for example, that neutrodes are used, whose slot-shaped recess is designed differently, or that neutrodes are used, their for arc stabilization provided holes designed differently are.

Claims (11)

  1. Indirect plasmatron for treating surfaces, having the following features:
    an elongated plasma channel (8) is provided which is formed by a neutrode arrangement (1);
    the electrodes (9, 10) required to generate the arc are arranged coaxially with the longitudinal axis (L) of the plasma channel (8);
    the neutrode arrangement (1) comprises a plurality of electrically mutually insulated, plate-shaped neutrodes, (1a to 1i);
    characterized in that:
    the neutrode arrangement (1) is provided with a slot-shaped plasma jet outlet opening (40), which latter runs parallel to the longitudinal axis (L) of the plasma channel (8);
    each electrode (9, 10) is surrounded by a cavity (19, 20) via which an inert gas can be fed, and
    at least one permanent magnet arrangement (36, 37) is provided, whose magnetic field exerts on the arc a force directed opposite to the flow of the plasma gas.
  2. Indirect plasmatron according to Claim 1, characterized in that at least individual neutrodes (1c-1g) are provided with a channel (18) for feeding a gas into the plasma channel (8).
  3. Indirect plasmatron according to Claim 2, characterized in that the longitudinal axis of the channel (18) for feeding a gas runs at least approximately at a rightangle to the longitudinal axis (L) of the plasma channel (8).
  4. Indirect plasmatron according to one of the preceding claims, characterized in that the neutrodes (1a-1i) consist of a non-magnetizable material, preferably of copper or a copper alloy, and in that at least one neutrode (1d) is provided with a permanent magnet pair (36, 37).
  5. Indirect plasmatron according to Claim 4, characterized in that the north-south axes of the respective magnets (36; 37) of a neutrode coincide and run at least approximately at a rightangle to the longitudinal axis (L) of the plasma channel (8), it being the case that, seen in the direction of flow of the plasma jet, the magnets (36, 37) are arranged downstream of the longitudinal axis (L) of the plasma channel (8).
  6. Indirect plasmatron according to one of Claims 2 to 5, characterized in that at least three neutrodes (1a-1i) are provided, and in that at least one neutrode (1c-1g) is provided with a channel (18) for feeding a gas into the plasma channel (8).
  7. Indirect plasmatron according to one of Claims 2 to 6, characterized in that the channels (18) arranged in individual neutrodes (1c-1g) can be connected to a first gas source, while the cavities (19, 20) surrounding the electrodes can be connected to a second gas source.
  8. Indirect plasmatron according to one of the preceding claims, characterized in that, for the purpose of forming the plasma channel (8) and the plasma jet outlet opening (40), a plurality of the neutrodes (1c-1g) are each provided with one slot-shaped cutout (33), the channels (18) opening centrally into the respective cutout (33) for the purpose of feeding a gas.
  9. Indirect plasmatron according to one of the preceding claims, characterized in that the neutrode arrangement (1) has neutrodes (1a, 1b, 1h, 1i) which laterally border the plasma jet outlet opening (40), are provided with a bore (26), form a part of the plasma channel (8) and stabilize the arc in a predetermined position.
  10. Indirect plasmatron according to one of the preceding claims, characterized in that the anode (10) has an essentially planar end face to which the arc attaches.
  11. Indirect plasmatron according to one of the preceding claims, characterized in that the cathode (9) has a conical or frustoconical tip to which the arc attaches.
EP97810823A 1996-12-23 1997-11-03 Non-transferred arc plasmatron Expired - Lifetime EP0851720B1 (en)

Applications Claiming Priority (3)

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CH317196 1996-12-23
CH3171/96 1996-12-23
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ATE185465T1 (en) 1999-10-15
US5944901A (en) 1999-08-31

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