EP0838834A1 - Verfahren und Vorrichtung zum Zusammenbau eines flachen Bildschirms - Google Patents
Verfahren und Vorrichtung zum Zusammenbau eines flachen Bildschirms Download PDFInfo
- Publication number
- EP0838834A1 EP0838834A1 EP97410119A EP97410119A EP0838834A1 EP 0838834 A1 EP0838834 A1 EP 0838834A1 EP 97410119 A EP97410119 A EP 97410119A EP 97410119 A EP97410119 A EP 97410119A EP 0838834 A1 EP0838834 A1 EP 0838834A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- plates
- plate
- joint
- spacers
- assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/26—Sealing together parts of vessels
- H01J9/261—Sealing together parts of vessels the vessel being for a flat panel display
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2209/00—Apparatus and processes for manufacture of discharge tubes
- H01J2209/38—Control of maintenance of pressure in the vessel
- H01J2209/385—Gettering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2329/00—Electron emission display panels, e.g. field emission display panels
- H01J2329/86—Vessels
- H01J2329/8625—Spacing members
Definitions
- the present invention relates to a flat display screen. It applies more particularly to the assembly of two plates constituting the bottom and the surface of the screen, and between which there is an internal space isolated from the outside.
- a flat screen consists of two plates spaced external generally rectangular, for example glass.
- a plate constitutes the surface of the screen while the other constitutes the bottom of the screen generally provided with means of emission.
- These two plates are assembled by means of a sealing joint.
- FED field effect screen
- VFD fluorescent vacuum display
- Figure 1 shows schematically and in section, the classic structure of a microtip screen.
- Such a microtip screen is essentially constituted, on a first substrate 1, for example made of glass, of a microtip cathode and a grid.
- a first substrate for example made of glass
- a microtip cathode and a grid In Figure 1, the whole cathode / grid is designated by the common reference 2.
- the cathode / grid 2 is placed opposite a cathodoluminescent anode 3 produced on a second transparent substrate 4, by example in glass, which constitutes the surface of the screen.
- the cathode / grid 2 and the anode 3 are produced separately on the two substrates, or plates, 1 and 4 then assembled by means of a peripheral sealing joint 5.
- An empty space 6 is formed between the two plates 1 and 4 to allow circulation electrons emitted from the cathode to anode 3.
- spacers 7 intended to define the empty space 6.
- These spacers 7 usually consist of glass beads regularly distributed so that the space 6 between the plates 1 and 4 is constant.
- the cathode / grid 2 is then subjected to a treatment thermal vacuum intended to cause degassing of the cathode and an evaporation of the glue from the spacers 7.
- a similar but not necessarily vacuum treatment is applied at the anode 3.
- a pumping tube 8 on the free face of the first plate 1.
- This tube 8 is, for example, made of glass and is sealed, by one of its open ends, in line with a hole in the plate 1 to establish communication with space 6.
- This tube 8 will be used in particular thereafter to create a vacuum in space 6.
- the tube 8 is placed in a corner of the plate 1 out of its useful surface.
- the two plates 1 and 4 are then assembled by pressing one against the other, the cathode / grid 2 being in look at the anode 3, and subjecting the assembly to a temperature allowing the fusion of the bead 5.
- the structure obtained is then subjected, via the tube 8, to a pumping which acts to degass the space 6.
- This degassing is necessary, in particular, due to the gases emitted by the fuse glass bead 5 during the sealing of the plates.
- the tube 8 is then closed at its free end after y having introduced a dirt trap element 9, commonly called “getter”.
- the role of this getter 9 is to absorb pollution likely to appear during subsequent operation of the screen.
- the tube 8 has been shown closed, i.e. once the screen is finished.
- Figure 2 is a side view illustrating a process classic vacuum assembly of a microtip screen.
- plates 1 and 4 are maintained under vacuum from their respective degassing heat treatments and are placed one against the other with the interposition of a 5 'fuse glass gasket.
- the peripheral seal, or frame, of 5 'fusible glass has irregular surfaces before assembly of contact with plates 1 and 4.
- the assembly is maintained in pressure, for example, by means of pliers 10.
- the assembly as shown in Figure 2 is then subjected to a temperature allowing the softening of the 5 'frame while remaining lower than its melting temperature. At such a temperature of softening, leaks 12 linked to the irregular surfaces of the 5 'frame are intended to allow evacuation of the gases emitted by the fusible glass frame inside the screen before the glass assembles the two plates tightly during its fusion.
- This fusion of the 5 ′ frame is obtained by carrying the assembly at a temperature above the melting temperature of the 5 'frame, which then causes, under the effect of the clamps, a crushing of the 5 'frame and assembly of the screen, the distance between the plates being fixed by the spacers.
- a disadvantage of such a process is that it does not completely eliminate the gases emitted by the 5 'cord. Indeed, the fusible glass continues to be degassed when raised from its softening temperature at its melting temperature.
- the present invention aims to overcome the drawbacks conventional assembly methods for a flat display screen, by proposing an assembly method and device vacuum which optimizes the elimination of the gases emitted, inside the screen, by the sealing joint during assembly of the screen.
- the material of the temporary holding spacers has a significantly higher melting temperature than melting temperature of the sealing joint.
- the material of the temporary spacers has a coefficient of thermal expansion close to that of the material constituting the sealing joint.
- said elements to be assembled consist of two plates parallels respectively constituting the bottom and the surface of a flat display screen, an internal space being provided between the two plates by means of spacers permanently attached to one of said plates before assembly.
- the first element consists of a flat screen plate of display, the second element consisting of an enclosure suitable for defining, with said plate, a space for receiving a impurity trapping element communicating with the interior of the screen.
- each temporary spacing means consists of two plates, each bearing against the internal face of a plate and separated from each other by a fusible spacer.
- the device also includes localized heating means fuse spacers.
- a feature of the present invention is allow a fusion of a screen sealing joint without the two plates to be assembled are both in contact with gasket.
- the degassing of the material constituting the seal of sealing can be done in full before this material in fusion assembles, in a leaktight manner, the two plates one to the other.
- Figures 3A and 3B illustrate, respectively, by a top view and a sectional view of a flat display screen, a first embodiment of the assembly process according to the present invention.
- the method according to the invention applies to a plate 1 on which a cathode / grid (not shown) was made previously and to a plate 4 on which an anode (not shown) was previously performed.
- the method according to the invention concerns the vacuum assembly of plates 1 and 4 at a distance fixed by spacers (7, figure 1).
- Plates 1 and 4 are previously subjected to treatments of degassing of the respective elements which they support before to be assembled, under vacuum, by the implementation of the process according to the invention.
- a sealing joint 20 is deposited, preferably in fusible glass, on the inner periphery of a screen plate to be assembled (for example, the anode plate 4).
- the seal 20 is, for example, consisting of rods, glued to the plate 4 and distributed to form a peripheral frame external to an area active 21 of the screen, or consists of sintered glass deposited on plate 4.
- This step of depositing the sealing joint 20 is similar to the preparatory stage for assembling the screen of the conventional method described in relation to FIGS. 1 and 2.
- Des spacers, for example, glass beads (not shown) have been previously glued to the surface of one of the plates 1 and 4 to guarantee the regularity of the inter-electrode space after screen assembly.
- spacers temporary 22 is distributed on the internal face of the plate 4, for example, between the active zone 21 and the seal 20.
- the spacers 22 have a height greater than the height of the joint 20 as deposited on the plate 4, that is to say before assembly.
- These spacers 22 are, for example, made of balls of glass arranged at the four corners of the screen.
- a characteristic of this mode of implementation is that the glass constituting the balls 22 has a temperature higher than the melting temperature of the constituent glass seal 20.
- the cathode plate 1 is then attached to the plate anode 4 and the structure is obtained before assembly shown in Figures 3A and 3B.
- one begins by carrying, under vacuum, the assembly thus formed at a higher temperature at the melting point of the joint 20 but less than the melting temperature of the spacers 22.
- the assembly is then maintained at this temperature for the time necessary for degassing integral of the sealing joint 20.
- the whole is brought to a temperature allowing the melting of the balls 22, which causes, by means of a suitable mechanical pressure (for example, pliers 10), crushing balls 22 and the tight closure of the periphery of the screen thanks to the gasket 20.
- a suitable mechanical pressure for example, pliers 10
- the height of the inter-electrode space is defined by the height of spacers whose temperature is even higher.
- An advantage of the present invention according to this mode of implementation is that the gases that remain inside of the screen and which come from the degassing of the glass elements are limited to those resulting from the fusion of the balls 22. Thus, we reduce considerably the quantity of degassing product contained in inside the assembled screen.
- the glass constituting the seal 20 has a softening temperature included between about 300 and 350 ° C and a melting temperature between between about 450 and 500 ° C.
- the glass constituting the spacers temporary 22 has a softening temperature included between about 400 and 450 ° C and a melting temperature between about 550 and 600 ° C.
- An advantage of providing, for seal 20, a temperature of melting above the softening temperature of balls 22 is that this further reduces the amount of gas present at inside the screen after assembly. Indeed, the balls 22 are then subjected to a pre-degassing during degassing of the joint 20 at its melting temperature.
- the spacers 22 are distributed at the outside of the cord 20, which further reduces the amount of gas inside the screen after assembly.
- the screen either made on plates 1 and 4 of significantly larger sizes to the useful surface of the screen in order to spread the balls 22 of seal 20 and thus minimize the amount of gas inside of the screen, due to the melting of the balls 22.
- the screen is then intersected, after assembly, between the joint 20 and the balls 22 to give it its final size, for example with a diamond saw.
- the spacers (not shown) distributed between plates 1 and 4 have a height of 0.2 mm.
- the seal 20 of fusible glass has a height of 0.4 mm before heat treatment.
- the balls or temporary spacers 22 present, before treatment thermal, a height of the order of 0.8 to 1.2 mm.
- Figure 4 shows, in cross section, a screen display plate according to a second implementation of the present invention.
- the method of the invention is applied to the sealing of an enclosure 30 attached to the outer surface of a screen plate and defining, with this plate, an internal space 31 for receiving an element of trapping of impurities or getter 32.
- the enclosure 30 is affixed to the right of an orifice 33 for communication with the inter-electrode space 6.
- the enclosure 30 can have various shapes and varied as stretched in a direction of the screen or in square in two directions of the screen.
- a sealing joint for example, a glass frame fuse 20 'is arranged at the periphery of the orifice 32.
- Des temporary spacers 22 ' for example balls, high greater than the height of the frame 20 'are distributed in number preferably limited outside the frame 20 '.
- Temperature for melting the material, for example glass, constituting the spacers 22 ' is higher than the melting temperature of the 20 'frame.
- plates 1 and 4 may have been previously assembled conventionally, the inter-electrode space 6 being degassed during assembly of the enclosure 30 on the plate 4.
- plates 1 and 4 can be assembled simultaneously by implementing the method according to the first mode of implementation described in relation to FIGS. 3A and 3B.
- FIG. 5 represents an embodiment of a device assembly according to the present invention.
- Such a device consists of two plates 41 and 42 intended to support the anode plate 4 and the cathode plate 1 of a flat display screen to be assembled.
- One of the two stages (for example, stage 42) has removable means 43 for suspending one of the plates (for example, plate 1).
- This assembly device is intended to implement a variant of the process illustrated in FIGS. 3A and 3B.
- temporary spacers 44 of a material having a melting temperature higher than that of the sealing joint 20 affixed to the internal surface of a plates are distributed at the outside of plates 1 and 4 between plates 41 and 42.
- the spacers 44 (for example, fusible glass beads) are each framed by two plates 45, for example made of glass, bearing on the internal faces of the plates 41 and 42.
- Two plates 45 associated with a fusible spacer 44 constitute a temporary and single-use means for spreading the plates 1 and 4.
- the combined thickness of two associated plates 45 is, according to the invention, at most equal to the thickness of the plates 1 and 4 to assemble.
- the whole is brought to a higher temperature at the melting temperature of the seal 20 to allow its degassing.
- the spacers 44 are of a height substantially greater than the height of the joint 20 and a temperature of fusion significantly higher than the melting temperature of the joint 20, they maintain a sufficient distance between the plate 1 and the gasket 20 to allow the evacuation of gases from the joint fusion 20.
- the temperature is increased until fusion of the struts 44 which are crushed by means of mechanical pressure (not shown) tightening the plates 41 and 42 against each other, which causes the assembly plates 1 and 4 with definition of the inter-electrode space by means of conventional spacers (not shown).
- the cathode 1 is detached from the supports 43 which makes it possible to extract the assembled screen of the assembly device.
- Platelets 45 sealed by the spacers 44 are themselves extracted from the assembly device insofar as these plates 45 do not are not fixed on the plates 41 and 42.
- An advantage of the assembly device according to the invention and the method of implementing the method associated therewith is that the temporary spacers 44 can be enough away from the screen to be assembled to prevent any presence of gas, due to the fusion of these spacers 44, inside of the screen.
- Another advantage is that the mode of implementation correspondent of the process according to the invention does not require any additional surface of plates 1 and 4 compared to a screen classic to arrange temporary spacers.
- Another advantage of this mode of implementation is that it offers greater freedom in material and size temporary spacers 44. Indeed, the constituent glass balls 44 no longer need to have a coefficient of expansion thermal close to that of seal 20. In addition, as the balls 44 no longer degas inside the screen, they can be larger, which further improves the degassing of the seal 20 by increasing the gap between the plates 1 and 4 during this degassing.
- the balls 44 can have a height between 2 and 4 mm, the pads 45 having a thickness of the order of 0.2 to 1 mm.
- the fusion of the spacers 44 is obtained by localized heating means at these spacers.
- the means of localized heating systems consist of resistors heaters 46 housed in the thickness of at least one of the plates (for example, plate 41) at the plates 45.
- these resistors 46 are surrounded laterally thermal insulation 47 to minimize thermal propagation to the screen. In this case, the temperature of the assembly can be descended, while remaining above the temperature of fusion of the cord 20, before causing the fusion of the spacers 44 by localized heating means.
- An advantage of the present invention is that it minimizes the gases present inside the screen and due to degassing of the elements assembly, while allowing vacuum assembly of the screen and without requiring, after assembly, pumping from outside.
- constituent materials of the gasket sealing and temporary spacers are chosen to be compatible with the constituent materials of elements 1 and 4 (or 4 and 30) to be assembled, spacers defining the space internal 6 and, where appropriate, disposable inserts 45.
- their melting temperatures must be lower at the softening temperatures of the elements to be assembled, spacers and any pads.
- the assembly structure is first brought to a temperature about 380 ° C for one hour. Then there is a pre-degassing of the seal 20 or 20 'at its softening temperature. Then, the temperature is raised to approximately 430 ° C. for one hour. This temperature allows the fusion of the joint 20 or 20 'and complete degassing of the glass constituting the seal 20 or 20 'in same time as a partial degassing of the spacers 22, 22 'or 44 at their softening temperature. Finally, we bring the temperature at about 470 ° C for one hour to cause melting spacers 22, 22 'or 44 and thus the assembly of the screen. Note, however, that the temperatures indicated in the this description is purely indicative. Indeed, the temperatures used depend on the softening temperatures and melting of the constituent materials of the sealing joint and temporary spacers, as well as their respective thicknesses. These softening and fusion also depend on the degree of vacuum under which takes place assembly.
- FIGS. 6A and 6B illustrate a third mode of implementation of the method according to the invention. These figures represent, respectively in top view and in cross section, a front display flat panel assembly.
- the sealing joint carried by one of the plates is consisting of two bars 50 of the same thickness and two bars 51 having a thickness greater than that of Bars 50.
- the bars 50 are arranged in the longitudinal direction of the screen and the length of the bars 51 is such that there remains, before assembly, a space 52 to each corner of the screen between the ends of the bars 51 and those of the bars 50.
- the bars 50 and 51 are made of the same fusible glass, the temperature difference of fusion between bars 50 and 51 coming only of their difference in thickness.
- the present invention is capable of various variants and modifications which will appear to the man of art.
- the choice of the respective thicknesses of the seal and temporary spacers depend on the height of the spacers fixing the inter-electrode distance.
- the fusible glass strips used to form the peripheral seal may have irregular surfaces as in conventional assembly processes or to be smooth surfaces.
- the number of temporary spacers distributed around the periphery of the screen depends, in particular, on the size of it and the pressure exerted by the means of mechanical pressure.
- the temperatures of respective softening and melting of the sealing joint and spacers allow, the temperature at which is worn together to degas the joint can be higher than its melting temperature all remaining lower at the melting temperature of the spacers. This maximizes the degassing of the seal before closing.
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9613282 | 1996-10-25 | ||
FR9613282A FR2755294A1 (fr) | 1996-10-25 | 1996-10-25 | Procede et dispositif d'assemblage d'un ecran plat de visualisation |
Publications (1)
Publication Number | Publication Date |
---|---|
EP0838834A1 true EP0838834A1 (de) | 1998-04-29 |
Family
ID=9497199
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP97410119A Withdrawn EP0838834A1 (de) | 1996-10-25 | 1997-10-24 | Verfahren und Vorrichtung zum Zusammenbau eines flachen Bildschirms |
Country Status (4)
Country | Link |
---|---|
US (1) | US5921837A (de) |
EP (1) | EP0838834A1 (de) |
JP (1) | JPH10134719A (de) |
FR (1) | FR2755294A1 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1078386A1 (de) * | 1998-05-14 | 2001-02-28 | Candescent Technologies Corporation | Dichtungsmaterila und herstellungsverfahren desselben |
US6237526B1 (en) * | 1999-03-26 | 2001-05-29 | Tokyo Electron Limited | Process apparatus and method for improving plasma distribution and performance in an inductively coupled plasma |
WO2001088942A1 (en) * | 2000-05-17 | 2001-11-22 | Motorola Inc. | A method for sealing display devices |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3465634B2 (ja) * | 1998-06-29 | 2003-11-10 | 富士通株式会社 | プラズマディスプレイパネルの製造方法 |
FR2809864A1 (fr) * | 2000-05-30 | 2001-12-07 | Pixtech Sa | Outillage de pose d'espaceurs dans un ecran plat de visualisation |
CN101582363A (zh) * | 2008-05-14 | 2009-11-18 | 清华大学 | 真空器件的封接方法 |
TWI381492B (zh) * | 2008-05-23 | 2013-01-01 | Hon Hai Prec Ind Co Ltd | 真空器件的封接方法 |
CN101587808B (zh) * | 2008-05-23 | 2011-06-08 | 清华大学 | 真空器件的封接装置以及封接方法 |
CN101587807B (zh) * | 2008-05-23 | 2011-05-04 | 清华大学 | 真空器件的封接装置以及封接方法 |
CN101609773B (zh) * | 2008-06-18 | 2012-05-16 | 清华大学 | 真空器件的封接方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2183692A1 (de) * | 1972-05-08 | 1973-12-21 | Ibm | |
FR2232030A1 (de) * | 1973-06-04 | 1974-12-27 | Burroughs Corp | |
US3919452A (en) * | 1973-10-23 | 1975-11-11 | Vitta Corp | Precision bonding system |
US4125307A (en) * | 1974-08-26 | 1978-11-14 | Owens-Illinois, Inc. | Method of making a gaseous discharge display panel with spacer beads in seal frame |
US4139250A (en) * | 1975-10-27 | 1979-02-13 | U.S. Philips Corporation | Gas discharge display panel and method of manufacturing the same |
US4407658A (en) * | 1981-03-02 | 1983-10-04 | Beckman Instruments, Inc. | Gas discharge display device sealing method for reducing gas contamination |
FR2704672A1 (fr) * | 1993-04-26 | 1994-11-04 | Futaba Denshi Kogyo Kk | Enveloppe hermétique pour panneau d'affichage d'images, panneau d'affichage d'images et méthode pour la production dudit panneau. |
FR2727568A1 (fr) * | 1994-11-30 | 1996-05-31 | Pixel Int Sa | Assemblage d'un ecran plat de visualisation |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2882116A (en) * | 1956-09-20 | 1959-04-14 | Eitel Mccullough Inc | Method of making electron tubes |
JPH0311524A (ja) * | 1989-06-08 | 1991-01-18 | Nec Kagoshima Ltd | 蛍光表示管の真空気密封止方法 |
US5697825A (en) * | 1995-09-29 | 1997-12-16 | Micron Display Technology, Inc. | Method for evacuating and sealing field emission displays |
-
1996
- 1996-10-25 FR FR9613282A patent/FR2755294A1/fr not_active Withdrawn
-
1997
- 1997-10-22 JP JP9306333A patent/JPH10134719A/ja not_active Withdrawn
- 1997-10-23 US US08/956,843 patent/US5921837A/en not_active Expired - Fee Related
- 1997-10-24 EP EP97410119A patent/EP0838834A1/de not_active Withdrawn
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2183692A1 (de) * | 1972-05-08 | 1973-12-21 | Ibm | |
FR2232030A1 (de) * | 1973-06-04 | 1974-12-27 | Burroughs Corp | |
US3919452A (en) * | 1973-10-23 | 1975-11-11 | Vitta Corp | Precision bonding system |
US4125307A (en) * | 1974-08-26 | 1978-11-14 | Owens-Illinois, Inc. | Method of making a gaseous discharge display panel with spacer beads in seal frame |
US4139250A (en) * | 1975-10-27 | 1979-02-13 | U.S. Philips Corporation | Gas discharge display panel and method of manufacturing the same |
US4407658A (en) * | 1981-03-02 | 1983-10-04 | Beckman Instruments, Inc. | Gas discharge display device sealing method for reducing gas contamination |
FR2704672A1 (fr) * | 1993-04-26 | 1994-11-04 | Futaba Denshi Kogyo Kk | Enveloppe hermétique pour panneau d'affichage d'images, panneau d'affichage d'images et méthode pour la production dudit panneau. |
FR2727568A1 (fr) * | 1994-11-30 | 1996-05-31 | Pixel Int Sa | Assemblage d'un ecran plat de visualisation |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1078386A1 (de) * | 1998-05-14 | 2001-02-28 | Candescent Technologies Corporation | Dichtungsmaterila und herstellungsverfahren desselben |
EP1078386A4 (de) * | 1998-05-14 | 2005-09-07 | Candescent Tech Corp | Dichtungsmaterila und herstellungsverfahren desselben |
EP2073245A3 (de) * | 1998-05-14 | 2009-08-05 | Canon Kabushiki Kaisha | Dichtmaterial-Fritterahmen für Flachbildschirmanzeigen |
US6237526B1 (en) * | 1999-03-26 | 2001-05-29 | Tokyo Electron Limited | Process apparatus and method for improving plasma distribution and performance in an inductively coupled plasma |
WO2001088942A1 (en) * | 2000-05-17 | 2001-11-22 | Motorola Inc. | A method for sealing display devices |
US6459198B1 (en) | 2000-05-17 | 2002-10-01 | Motorola, Inc. | Seal and method of sealing devices such as displays |
Also Published As
Publication number | Publication date |
---|---|
FR2755294A1 (fr) | 1998-05-01 |
US5921837A (en) | 1999-07-13 |
JPH10134719A (ja) | 1998-05-22 |
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Legal Events
Date | Code | Title | Description |
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