EP0836719A4 - System and method for on-site mixing of ultra-high-purity chemicals for semiconductor processing - Google Patents

System and method for on-site mixing of ultra-high-purity chemicals for semiconductor processing

Info

Publication number
EP0836719A4
EP0836719A4 EP96919439A EP96919439A EP0836719A4 EP 0836719 A4 EP0836719 A4 EP 0836719A4 EP 96919439 A EP96919439 A EP 96919439A EP 96919439 A EP96919439 A EP 96919439A EP 0836719 A4 EP0836719 A4 EP 0836719A4
Authority
EP
European Patent Office
Prior art keywords
ultra
semiconductor processing
purity chemicals
site mixing
site
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP96919439A
Other languages
German (de)
French (fr)
Other versions
EP0836719A1 (en
Inventor
Joe G Hoffman
R Scot Clark
Allen H Jones Jr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide America Corp
Original Assignee
Startec Ventures Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/US1995/007649 external-priority patent/WO1996039358A1/en
Application filed by Startec Ventures Inc filed Critical Startec Ventures Inc
Priority claimed from PCT/US1996/010389 external-priority patent/WO1996039651A1/en
Publication of EP0836719A1 publication Critical patent/EP0836719A1/en
Publication of EP0836719A4 publication Critical patent/EP0836719A4/en
Ceased legal-status Critical Current

Links

EP96919439A 1995-06-05 1996-06-05 System and method for on-site mixing of ultra-high-purity chemicals for semiconductor processing Ceased EP0836719A4 (en)

Applications Claiming Priority (9)

Application Number Priority Date Filing Date Title
PCT/US1995/007649 WO1996039358A1 (en) 1995-06-05 1995-06-05 Point-of-use ammonia purification for electronic component manufacture
WOPCT/US95/07649 1995-06-05
US1810495P 1995-07-07 1995-07-07
US49956295A 1995-07-07 1995-07-07
US499562 1995-07-07
US1782896P 1996-03-08 1996-03-08
US61272996A 1996-03-08 1996-03-08
PCT/US1996/010389 WO1996039651A1 (en) 1995-06-05 1996-06-05 System and method for on-site mixing of ultra-high-purity chemicals for semiconductor processing
US612729 2003-07-02

Publications (2)

Publication Number Publication Date
EP0836719A1 EP0836719A1 (en) 1998-04-22
EP0836719A4 true EP0836719A4 (en) 1999-08-18

Family

ID=27486686

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96919439A Ceased EP0836719A4 (en) 1995-06-05 1996-06-05 System and method for on-site mixing of ultra-high-purity chemicals for semiconductor processing

Country Status (1)

Country Link
EP (1) EP0836719A4 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4091834A (en) * 1975-11-14 1978-05-30 Sandoz Ltd. Apparatus for automatically preparing solution of controlled concentration
WO1992016306A2 (en) * 1991-03-19 1992-10-01 Startec Ventures, Inc. Manufacture of high precision electronic components with ultra-high purity liquids

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4091834A (en) * 1975-11-14 1978-05-30 Sandoz Ltd. Apparatus for automatically preparing solution of controlled concentration
WO1992016306A2 (en) * 1991-03-19 1992-10-01 Startec Ventures, Inc. Manufacture of high precision electronic components with ultra-high purity liquids

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO9639651A1 *

Also Published As

Publication number Publication date
EP0836719A1 (en) 1998-04-22

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