EP0807924B1 - Transducteur à son ou ultrason - Google Patents

Transducteur à son ou ultrason Download PDF

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Publication number
EP0807924B1
EP0807924B1 EP97105884A EP97105884A EP0807924B1 EP 0807924 B1 EP0807924 B1 EP 0807924B1 EP 97105884 A EP97105884 A EP 97105884A EP 97105884 A EP97105884 A EP 97105884A EP 0807924 B1 EP0807924 B1 EP 0807924B1
Authority
EP
European Patent Office
Prior art keywords
sound
webs
diaphragms
ultrasonic sensor
excitation frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP97105884A
Other languages
German (de)
English (en)
Other versions
EP0807924A3 (fr
EP0807924A2 (fr
Inventor
Manfred Eckert
Karl Flögel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of EP0807924A2 publication Critical patent/EP0807924A2/fr
Publication of EP0807924A3 publication Critical patent/EP0807924A3/fr
Application granted granted Critical
Publication of EP0807924B1 publication Critical patent/EP0807924B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • B06B1/0618—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile of piezo- and non-piezoelectric elements, e.g. 'Tonpilz'
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K13/00—Cones, diaphragms, or the like, for emitting or receiving sound in general

Definitions

  • the invention relates to a sound or ultrasonic sensor for sending and / or receiving sound or ultrasound.
  • Ultrasonic sensors are e.g. as a transmitter and / or Receiver for distance measurement based on the sounder principle used, especially for measuring a level, e.g. in a container, or to measure a level, e.g. in a channel or on a conveyor belt.
  • a pulse sent by the sound or ultrasonic sensor is reflected on the surface of the product.
  • the Duration of the pulse from the sensor to the surface and back is determined and from this the fill level or the fill height certainly.
  • Such sound or ultrasonic sensors are used in many Industries, e.g. in the food industry, the Water and wastewater industry and in chemistry. Sound or ultrasonic sensors are particularly useful in chemistry of high chemical resistance required which can be used in a wide temperature range. In the food industry is also required to: such sensor preferably flush-mounted and therefore light are to be cleaned.
  • the sensors In all mentioned areas of application it is necessary that the sensors have a radiation characteristic with a small opening angle or a large main sound lobe and have low sonic lobes.
  • the sensor here comprises a conical, metallic one Radiating element and a basic body.
  • a converter element serves between the radiating element and the base body clamped piezoelectric element that too Thickness oscillations is excited.
  • the radiation characteristic of the sensor is essentially by the diameter of the front surface and the frequency certainly.
  • the sine of the opening angle behaves the emitted sound lobe like the quotient from the Wavelength of the emitted sound or ultrasound wave and the diameter of the front surface of the radiating element.
  • a large diameter must therefore be used.
  • the possible Size of the diameter is limited, however, that the Front surface above a certain diameter additionally executes bending vibrations.
  • the opening angle the sound lobe is therefore always of a minimum size.
  • a disadvantage of such a sound or ultrasonic sensor is that by using the elastomer matching layer the temperature range in which the sensor can be used, is restricted. For one, elastomers are only one lower temperature range can be used than metals, for others the speed of sound is strong in elastomers temperature dependent. Outside one by the elastomer The adaptation layer is thus a predetermined temperature range ineffective.
  • a metallic radiating element has one in comparison the matching layer higher mechanical resistance on and can be used in a wide temperature range.
  • the transducer element consists of two piezoelectric ones Elements through which the sensor causes axial vibrations is excited. With a suitable choice of This excites the membrane in resonance added.
  • the amplitude of the vibration of the membrane is at the center of the Maximum membrane and decreases towards the edge.
  • the diameter of the membrane is not arbitrary enlargeable because the membrane is given a given thickness and a given excitation frequency above a certain one Executes higher-order diameter bending waves. This can e.g. by using a stiffer membrane be avoided. Through a more rigid membrane, however the sensitivity of the sound or ultrasonic sensor greatly reduced on receipt.
  • the membrane has very high fatigue stresses exposed, it is required a very mechanical high quality material, e.g. Titanium. Such However, materials are expensive.
  • the invention consists of a sound or Ultrasonic sensor for sending and / or receiving sound or Ultrasound with a radiating element that is flat Has front surface, and with a transducer element, the Transducer element the front surface in such vibrations due to an excitation frequency that the entire Front surface almost in-phase deflections with almost equally large amplitude parallel to the surface normal of the Executes front surface, which is characterized in that concentric webs are arranged on the front surface, that between two adjacent webs concentric gap exists and that a disc, esp. made of metal, the sound or ultrasonic sensor flush with the front completes, which is firmly connected to the webs and the not connected to the webs, serving as membranes Has segments.
  • the Membranes bending vibrations, their resonance frequencies are greater than or equal to the excitation frequency.
  • the resonance frequency of the bending vibration of the middle circular membrane larger than or equal to the excitation frequency and the resonance frequencies of the remaining membranes 51 rise from the inside to the outside.
  • the resonance frequencies of the bending vibration of the membranes are identical and significantly larger than each other the excitation frequency and each membrane and each adjoining areas connected to the webs the disc 5 swing in phase.
  • the gaps have a depth that is minor is greater than a maximum deflection of the column final membranes.
  • Such Sound or ultrasonic sensor a smooth surface has and is therefore particularly easy to clean that he a metallic, chemically very stable and mechanically robust, radiation surface that he at Temperatures of up to 150 ° C can be used and that its Polar pattern is adjustable.
  • Fig. 1 is an embodiment of a Sound or ultrasonic sensor according to the invention for Sending and / or receiving sound or ultrasound shown.
  • This consists of a base body 2, one Radiating element 3 and one between the base body 2 and the radiating element 3 clamped cylindrical Transducer element 1.
  • the transducer element 1 leads Thick vibrations in the axial direction and thus stimulates the sound or ultrasonic sensor to axial vibrations.
  • the transducer element 1 consists of two annular disk-shaped piezoelectric elements 1a, 1b which are arranged one on top of the other and have an opposite polarization in the axial direction, symbolically represented by arrows. Between the two piezoelectric elements 1a, 1b, an annular disk-shaped electrode 11 common to both elements 1a, 1b is arranged. On the side facing away from the common electrode 11, each element 1a, 1b has a further counter-electrode 12a, 12b, likewise in the form of an annular disk.
  • the electrode 11 and the two counter electrodes 12a, 12b are connected to an AC voltage source, also not shown, via connecting lines, not shown.
  • the counter electrodes 12a are, 12b at the same potential U 1 and the electrode 11 on a relative to the potential U 1 180 ° phase-shifted potential U. 2
  • the transducer element 1 thus constructed has two circular ones End faces 13 and 14. Bordering on the end face 13 the base body 2. This is a cylinder with one central, axial, continuous inner bore 21.
  • the Base body 2 consists of a material of high density, for. B. made of steel and causes a reduction in emitted in the opposite direction Sound energy.
  • the radiating element 3 adjoins the end face 14. This is a truncated cone-shaped component, e.g. out Aluminum.
  • the circular surface of the truncated cone that the has a larger diameter, is from the transducer element 1 turned away and forms a flat front surface 34.
  • Das Radiating element 3 points towards the transducer element Side a central axial bore 31 with a Internal thread 311, which is a bit in axial Extends into the truncated cone.
  • a clamping device 4 is provided, through which the transducer element 1 in the axial direction, that is perpendicular to its end faces 13, 14, between the base body 2 and the radiating element 3 is clamped.
  • the embodiment is the jig 4 Clamping bolt from the side facing away from the converter element forth into the central inner bore 4 of the base body 2 is introduced, the transducer element 1 completely penetrates and into the internal thread 311 of the bore 31 of the Radiating element 3 is screwed so that Transducer element 1 is biased.
  • Concentric annular webs 32 are arranged on a front surface of the radiation element 3 facing away from the converter element. There is an annular disk-shaped gap 33 between each two adjacent webs 32.
  • This special geometry is produced, for example, by turning the annular disk-shaped gaps 32 out of an initially frustoconical radiating element 3. Since the radiating element 3 preferably consists of a metal, in particular aluminum, this is a very inexpensive and simple manufacturing process.
  • the sound or ultrasonic sensor is flush with the front closed by a preferably metallic disc 5, e.g. Made of aluminum or stainless steel, which are firmly attached to the Web 32 connected, esp. Is welded.
  • the Exposed segments of the disc 5 thus form a circular or annular disk-shaped membranes 51 on the edge due to the non-positive connection with the webs 32 are clamped.
  • the sound or ultrasonic sensor is, for example, in a, not shown in Fig. 1, cylindrical arranged at one end open housing, the between the housing and the sound or ultrasonic sensor existing cavities with an electrically non-conductive Are filled with elastomer.
  • the flat front surface 34 of the radiation element 3 is thus by the excitation frequency of the AC voltage in such a way Vibrations offset that the entire front surface 34 almost in-phase deflections with almost the same size Amplitude parallel to the surface normal on the front surface 34 executes.
  • the converter element 1 preferably driven with an excitation frequency that corresponds to the resonance frequency of the compound transducer.
  • the Length L of the compound transducer in the axial direction corresponds to an integer multiple of half Wavelength to that by weighted averaging determining fictitious wavelength that sound or Ultrasound of the excitation frequency in the composite oscillator having.
  • This vibration is mediated by the webs 32 on the Membranes 51 transferred.
  • the membranes 51 lead because they on Bending vibrations are firmly connected to the webs 32 at the edge out. Due to these bending vibrations there is one good adaptation of the ultrasonic sensor to air.
  • There is an increase in amplitude, i.e. the Vibration amplitude of the membranes 51 is larger than that the webs 32.
  • the amplitude increase is maximum if the excitation frequency with the resonance frequency of the respective membrane 51 matches.
  • the deflection of the respective membrane 51 is that of them adjacent webs 32 opposite.
  • the resonance frequency of the respective membrane 51 is decisive by their mean radius and their Stiffness determined. With equidistant spacing webs of the same width in the radial direction would be the Resonance frequency of the outer membranes 51 consequently lower than that of the inner ones. By reducing the Distance between two adjacent webs 32 in a radial Direction increases the resonance frequency between the Web 51 arranged webs.
  • the resonance frequency of all membranes 51 is preferably above the excitation frequency. This will make the appearance excluded from higher order bending waves.
  • the radiation pattern of the sound or Ultrasonic sensor is characterized by the distances between the Web 32 in the radial direction, that is, by the vote the resonance frequencies of the bending vibrations of the individual Membranes 51 on top of each other and on the drive frequency, adjustable. The following are two examples of this specified.
  • a sound or ultrasonic sensor with a suitable for distance measurement according to the sonar principle Radiation characteristics achieved by the dimensions so be set that the resonant frequency of the circular middle membrane 51 equal to or larger than that Drive frequency is and the resonance frequencies of the others annular disk-shaped membranes 51 are matched so that a membrane 51 with a smaller outer radius has a lower resonance frequency than a membrane 51 with a larger outer radius.
  • the circular middle Membrane 51 has the lowest resonance frequency.
  • the increase in amplitude and thus the radiated Sound energy thus takes along the pane 5 from the inside to the outside.
  • the amplitude distribution along one Diagonals of the disc 5 approximately corresponds to one Gaussian curve.
  • the sound energy emitted by side lobes is considerably lower than with a pure piston oscillator without webs 32 and without washer 5.
  • the radiation is almost in phase achieved all areas of the disc 5 by the Resonance frequencies of the membranes 51 all the same and clearly, e.g. 10%, are greater than the excitation frequency. Then there is almost no phase shift between the Vibration of the individual membranes 51 and to them adjacent with the respective adjacent webs 32 connected areas of the disc 5.
  • transducer element 1 does not reverberate.
  • the distance between the membranes 51 and Front surface 34 of the radiating element 3, that is the depth of the Column 33, preferably dimensioned so that it is slight is greater than the maximum deflection of column 33 final membranes 51.
  • the compression of the in the Columns 33 contained air due to the bending vibrations of the Membranes 51 cause damping through which the Ringing of the senor is significantly reduced.
  • a reduction in reverberation is also achieved by placing a damping material 6, e.g. on Foam, is introduced.
  • a damping material 6 e.g. on Foam
  • Such a foam can For example, be glued to the radiation element 3. Esp. is the formation of a ring in the columns 33 revolving waves through the damping material 6 locked out.
  • the sound or ultrasonic sensor is through the preferably metallic disc 5 completed. So that is it can be used at high temperatures up to approx. 150 ° C.
  • the Temperature range is only by the temperature range restricted, in which the converter element 1 can be used. By extending the distance between the Transducer element 1 and disc 5 are even larger Temperature ranges attainable. It should be noted here that the length L of the compound transducer in the axial direction integer multiples of half a wavelength, of those to be determined by weighted averaging fictional wavelength, the sound or ultrasound of the Has excitation frequency in the composite oscillator, equivalent.
  • the webs 32 and the disk 5 preferably made of metal occur only small temperature-related frequency deviations.
  • the sound or ultrasonic sensor is very chemical resistant and mechanically very robust. It is suitable particularly good for applications in the food industry, because the medium-touched disc 5 is flat and therefore good to is clean.
  • the invention is not for use in the described sensor is limited, but is rather at all sound or ultrasonic sensors can be used, the one Have radiating element with a flat front surface, the through the converter element 1 due to an excitation frequency is vibrated such that the entire Front surface almost in-phase deflections with almost equally large amplitude parallel to the surface normal of the Execute the front surface.
  • Fig. 2 shows a further embodiment for one such sound or ultrasonic sensor.
  • Transducer element 1 is only a single disk-shaped one piezoelectric element. With this converter element 1 is also a disk-shaped cover plate 7 same diameter firmly connected.
  • the cover plate 7 is as well as the radiation element 3 of the one in FIG. 1 illustrated embodiment to vibrations such stimulated that their entire circular transducer-facing Front surface almost in-phase deflections with almost equally large amplitude parallel to the surface normal of the Front surface.
  • the sound or ultrasonic sensor is, for example, in a, not shown in Fig. 2, cylindrical arranged at one end open housing, the between the housing and the sound or ultrasonic sensor existing cavities with an electrically non-conductive Are filled with elastomer.
  • FIG. 2 offers compared to that in Fig. 1 illustrated embodiment the advantage that it has a very low height and that a single piezoelectric element is sufficient to the sound or To stimulate ultrasonic transducers.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Thermotherapy And Cooling Therapy Devices (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)

Claims (6)

  1. Capteur à sons ou à ultrasons destiné à émettre et/ou à recevoir des sons ou des ultrasons
    muni d'un élément rayonnant (3) qui possède une surface frontale plane (34), et
    muni d'un élément transducteur (1),
    l'élément transducteur (1) mettant la surface frontale (34) en vibration sous l'effet d'une fréquence d'excitation de manière à ce que la surface frontale (34) exécute des déviations quasiment de même phase et avec une amplitude quasiment identique parallèlement à la normale de la surface frontale (34),
    caractérisé en ce
    que des montants concentriques (32) sont disposés sur la surface frontale (34),
    qu'il existe à chaque fois une fente concentrique (33) entre deux montants voisins (32) et
    qu'un disque (5), notamment en métal, ferme le capteur à sons ou à ultrasons à fleur à l'avant, lequel est relié à demeure avec les montants (32) et présente entre eux des segments non reliés avec les montants (32) et faisant office de membranes (51).
  2. Dispositif selon la revendication 1, caractérisé en ce que les membranes (51) effectuent des vibrations alternées dont la fréquence de résonance est supérieure ou égale à la fréquence d'excitation.
  3. Dispositif selon la revendication 2, caractérisé en ce que la fréquence de résonance des vibrations alternées de la membrane centrale (51) est supérieure ou égale à la fréquence d'excitation et que les fréquences de résonance des autres membranes (51) augmentent de l'intérieur vers l'extérieur.
  4. Dispositif selon la revendication 1, caractérisé en ce que les fréquences de résonances des vibrations alternées des membranes (51) sont égales entre elles et nettement supérieurs à la fréquence d'excitation et que chaque membrane (51) et les zones du disque 5 reliés aux montants (32) qui viennent à chaque fois s'y raccorder vibrent en phase.
  5. Dispositif selon la revendication 1, caractérisé en ce qu'un matériau amortisseur (6), notamment une mousse, est inséré dans les fentes (33).
  6. Dispositif selon la revendication 1, caractérisé en ce que les fentes (33) présentent une profondeur qui est légèrement supérieure à une excursion maximale des membranes (51) qui séparent les fentes (33).
EP97105884A 1996-05-18 1997-04-10 Transducteur à son ou ultrason Expired - Lifetime EP0807924B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19620133A DE19620133C2 (de) 1996-05-18 1996-05-18 Schall- oder Ultraschallsensor
DE19620133 1996-05-18

Publications (3)

Publication Number Publication Date
EP0807924A2 EP0807924A2 (fr) 1997-11-19
EP0807924A3 EP0807924A3 (fr) 1999-06-02
EP0807924B1 true EP0807924B1 (fr) 2002-12-11

Family

ID=7794713

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97105884A Expired - Lifetime EP0807924B1 (fr) 1996-05-18 1997-04-10 Transducteur à son ou ultrason

Country Status (5)

Country Link
US (1) US5726952A (fr)
EP (1) EP0807924B1 (fr)
CA (1) CA2203583C (fr)
DE (2) DE19620133C2 (fr)
HU (1) HU216670B (fr)

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DE19758243A1 (de) * 1997-12-30 1999-07-15 Endress Hauser Gmbh Co Schallwandlersystem
DE10156259A1 (de) * 2001-11-09 2003-05-22 Valeo Schalter & Sensoren Gmbh Ultraschallsensor und Verfahren zur Herstellung eines Ultraschallsensors
US7117738B2 (en) * 2003-10-02 2006-10-10 Denso Corporation Liquid level detecting apparatus
AT413890B (de) * 2004-02-27 2006-07-15 Univ Wien Tech Verfahren und sensorvorrichtung zur gewinnung von informationen über die position eines objekts mit einem ultraschallsensor
DE102004020895B4 (de) * 2004-04-28 2012-05-24 Endress + Hauser Gmbh + Co. Kg Vorrichtung zur Bestimmung und/oder Überwachung des Füllstandes eines Mediums
DE102005056895A1 (de) * 2005-11-28 2007-05-31 Endress + Hauser Gmbh + Co. Kg Vorrichtung zur Ermittlung und Überwachung des Füllstands eines Füllguts in einem Behälter gemäß der Laufzeitmessmethode
KR20130080860A (ko) 2006-01-31 2013-07-15 파나소닉 주식회사 초음파 탐촉자
DE102006058926B4 (de) * 2006-12-12 2020-09-24 Endress+Hauser SE+Co. KG Vorrichtung zur Bestimmung und/oder Überwachung einer Prozessgröße
FR2931016B1 (fr) * 2008-05-07 2010-08-13 Ixsea Antenne acoustique a circuits imprimes integres
KR101593994B1 (ko) * 2009-09-04 2016-02-16 삼성전자주식회사 고출력 초음파 트랜스듀서
US8797830B2 (en) * 2011-02-02 2014-08-05 General Monitors, Inc. Explosion-proof acoustic source for hazardous locations
DE102012201884A1 (de) 2012-02-09 2013-08-14 Robert Bosch Gmbh Schallwandler
TWI487886B (zh) * 2014-03-26 2015-06-11 Univ Nat Kaohsiung Applied Sci Integrated Sensing Device with Ultrasonic Transducer and Microphone and Its Method
US9506833B2 (en) 2014-03-26 2016-11-29 General Monitors, Inc. Ultrasonic gas leak detectors and testing methods
GB201408833D0 (en) * 2014-05-19 2014-07-02 Skoogmusic Ltd Control apparatus
DE102015113561A1 (de) 2015-08-17 2017-02-23 Endress + Hauser Flowtec Ag Ultraschallwandler zum Einsatz in Ultraschall- Durchflussmessgeräten zur Messung der Durchflussgeschwindigkeit oder dem Volumendurchfluss von Medien in einer Rohrleitung sowie ein Verfahren zur Herstellung eines solchen Ultraschallwandlers
US10632499B2 (en) * 2016-12-09 2020-04-28 Sensus USA, Inc. Thickness mode transducers and related devices and methods
DE102018200324A1 (de) * 2018-01-11 2019-07-11 Robert Bosch Gmbh Ultraschallsensor und Fluidtank mit Ultraschallsensor

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Also Published As

Publication number Publication date
HU9700904D0 (en) 1997-07-28
HU216670B (hu) 1999-08-30
DE19620133C2 (de) 2001-09-13
CA2203583A1 (fr) 1997-11-18
HUP9700904A3 (en) 1998-12-28
CA2203583C (fr) 2000-02-08
EP0807924A3 (fr) 1999-06-02
EP0807924A2 (fr) 1997-11-19
DE19620133A1 (de) 1997-11-27
US5726952A (en) 1998-03-10
DE59708924D1 (de) 2003-01-23
HUP9700904A2 (hu) 1998-04-28

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