EP0535861A3 - Method for making planar optical waveguides and resulting devices - Google Patents
Method for making planar optical waveguides and resulting devices Download PDFInfo
- Publication number
- EP0535861A3 EP0535861A3 EP19920308692 EP92308692A EP0535861A3 EP 0535861 A3 EP0535861 A3 EP 0535861A3 EP 19920308692 EP19920308692 EP 19920308692 EP 92308692 A EP92308692 A EP 92308692A EP 0535861 A3 EP0535861 A3 EP 0535861A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- optical waveguides
- planar optical
- resulting devices
- making planar
- making
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
- C03C17/04—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass by fritting glass powder
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Optical Integrated Circuits (AREA)
- Glass Melting And Manufacturing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US76850691A | 1991-09-30 | 1991-09-30 | |
US768506 | 1991-09-30 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0535861A2 EP0535861A2 (en) | 1993-04-07 |
EP0535861A3 true EP0535861A3 (en) | 1994-06-08 |
EP0535861B1 EP0535861B1 (en) | 1998-02-18 |
Family
ID=25082697
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19920308692 Expired - Lifetime EP0535861B1 (en) | 1991-09-30 | 1992-09-24 | Method for making planar optical waveguides |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0535861B1 (en) |
JP (1) | JP3283922B2 (en) |
DE (1) | DE69224454T2 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2759465B1 (en) * | 1996-04-30 | 1999-04-30 | Corning Inc | METHOD FOR FORMING AN OPTICAL CIRCUIT |
JP3928331B2 (en) * | 2000-05-09 | 2007-06-13 | 住友電気工業株式会社 | Optical waveguide device and manufacturing method thereof |
JP2002162526A (en) * | 2000-11-24 | 2002-06-07 | Shin Etsu Chem Co Ltd | Optical waveguide and method for producing the same |
GB2383127B (en) * | 2001-12-12 | 2004-10-20 | Proimmune Ltd | Device and method for investigating analytes in liquid suspension or solution |
US9434642B2 (en) | 2007-05-21 | 2016-09-06 | Corning Incorporated | Mechanically flexible and durable substrates |
CZ307839B6 (en) * | 2018-02-23 | 2019-06-12 | České vysoké učenà technické v Praze | Device for producing self-supporting flexible polymeric optical multimode planar waveguides |
CN109669237B (en) * | 2018-12-13 | 2020-12-15 | 吉林华微电子股份有限公司 | Semiconductor silicon-based optical waveguide device and preparation method thereof |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2089594A5 (en) * | 1970-05-25 | 1972-01-07 | Ibm | |
US3934061A (en) * | 1972-03-30 | 1976-01-20 | Corning Glass Works | Method of forming planar optical waveguides |
WO1992000189A1 (en) * | 1990-06-29 | 1992-01-09 | Photonic Integration Research, Inc. | Apparatus and method of forming optical waveguides on metalized substrates |
-
1992
- 1992-09-24 DE DE1992624454 patent/DE69224454T2/en not_active Expired - Fee Related
- 1992-09-24 EP EP19920308692 patent/EP0535861B1/en not_active Expired - Lifetime
- 1992-09-30 JP JP26045692A patent/JP3283922B2/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2089594A5 (en) * | 1970-05-25 | 1972-01-07 | Ibm | |
US3934061A (en) * | 1972-03-30 | 1976-01-20 | Corning Glass Works | Method of forming planar optical waveguides |
WO1992000189A1 (en) * | 1990-06-29 | 1992-01-09 | Photonic Integration Research, Inc. | Apparatus and method of forming optical waveguides on metalized substrates |
Also Published As
Publication number | Publication date |
---|---|
DE69224454T2 (en) | 1998-07-30 |
DE69224454D1 (en) | 1998-03-26 |
EP0535861B1 (en) | 1998-02-18 |
EP0535861A2 (en) | 1993-04-07 |
JP3283922B2 (en) | 2002-05-20 |
JPH05297236A (en) | 1993-11-12 |
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