EP0411345A3 - Feeding and dosing equipment for the lapping mixture in polishing machines for lapping, grinding or polishing - Google Patents

Feeding and dosing equipment for the lapping mixture in polishing machines for lapping, grinding or polishing Download PDF

Info

Publication number
EP0411345A3
EP0411345A3 EP19900113032 EP90113032A EP0411345A3 EP 0411345 A3 EP0411345 A3 EP 0411345A3 EP 19900113032 EP19900113032 EP 19900113032 EP 90113032 A EP90113032 A EP 90113032A EP 0411345 A3 EP0411345 A3 EP 0411345A3
Authority
EP
European Patent Office
Prior art keywords
lapping
polishing
grinding
feeding
mixture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19900113032
Other languages
German (de)
Other versions
EP0411345B1 (en
EP0411345A2 (en
Inventor
Klaus Biebesheimer
Alexander Dipl.-Ing. Hofsess
Dieter Dr. Simpfendoerfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Diskus Werke Frankfurt am Main AG
Original Assignee
Diskus Werke Frankfurt am Main AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19893925274 external-priority patent/DE3925274A1/en
Priority claimed from DE19904016335 external-priority patent/DE4016335A1/en
Application filed by Diskus Werke Frankfurt am Main AG filed Critical Diskus Werke Frankfurt am Main AG
Publication of EP0411345A2 publication Critical patent/EP0411345A2/en
Publication of EP0411345A3 publication Critical patent/EP0411345A3/en
Application granted granted Critical
Publication of EP0411345B1 publication Critical patent/EP0411345B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
EP90113032A 1989-07-31 1990-07-07 Feeding and dosing equipment for the lapping mixture in polishing machines for lapping, grinding or polishing Expired - Lifetime EP0411345B1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE3925274 1989-07-31
DE19893925274 DE3925274A1 (en) 1989-07-31 1989-07-31 Supply and dispensing mechanism for lapping mixt.
DE19904016335 DE4016335A1 (en) 1989-07-31 1990-05-21 FEEDING AND DOSING DEVICE FOR THE LAPPING MIXTURE FOR FINISHING MACHINES FOR LAPPING, FINISHING OR POLISHING
DE4016335 1990-05-21

Publications (3)

Publication Number Publication Date
EP0411345A2 EP0411345A2 (en) 1991-02-06
EP0411345A3 true EP0411345A3 (en) 1991-04-10
EP0411345B1 EP0411345B1 (en) 1993-09-22

Family

ID=25883566

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90113032A Expired - Lifetime EP0411345B1 (en) 1989-07-31 1990-07-07 Feeding and dosing equipment for the lapping mixture in polishing machines for lapping, grinding or polishing

Country Status (3)

Country Link
US (1) US5109631A (en)
EP (1) EP0411345B1 (en)
DE (1) DE59002816D1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5762543A (en) * 1995-11-30 1998-06-09 Speedfam Corporation Polishing apparatus with improved product unloading
US5967882A (en) * 1997-03-06 1999-10-19 Keltech Engineering Lapping apparatus and process with two opposed lapping platens
US5910041A (en) * 1997-03-06 1999-06-08 Keltech Engineering Lapping apparatus and process with raised edge on platen
US6149506A (en) * 1998-10-07 2000-11-21 Keltech Engineering Lapping apparatus and method for high speed lapping with a rotatable abrasive platen
US6048254A (en) * 1997-03-06 2000-04-11 Keltech Engineering Lapping apparatus and process with annular abrasive area
US5993298A (en) * 1997-03-06 1999-11-30 Keltech Engineering Lapping apparatus and process with controlled liquid flow across the lapping surface
US6120352A (en) * 1997-03-06 2000-09-19 Keltech Engineering Lapping apparatus and lapping method using abrasive sheets
DE69811420T2 (en) * 1997-03-31 2003-07-17 Nippei Toyama Corp., Tokio/Tokyo Grinding machine and process
US6102777A (en) * 1998-03-06 2000-08-15 Keltech Engineering Lapping apparatus and method for high speed lapping with a rotatable abrasive platen
JP3909619B2 (en) * 1998-05-19 2007-04-25 独立行政法人理化学研究所 Apparatus and method for mirror processing of magnetic disk substrate
IT1396287B1 (en) * 2009-09-28 2012-11-16 Biesse Spa CONTINUOUS DISTRIBUTOR
KR101660898B1 (en) * 2014-08-13 2016-09-28 주식회사 엘지실트론 Apparatus for supplying slurry and polishing apparatus including the same
EP3835393A1 (en) 2019-12-13 2021-06-16 Warezak, Tomasz Brown coal pellets

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE507816A (en) * 1951-05-19
DE2346325A1 (en) * 1973-09-14 1975-03-27 Waldrich Werkzeugmasch DOSING DEVICE FOR LIQUIDS CONTAINING GRANULATED SOLIDS, IN PARTICULAR LEAK LIQUID
DE2440978A1 (en) * 1974-08-27 1976-03-18 Jmj Werkzeugmaschinen Gmbh PROCESS AND MACHINE FOR PLAN, PLANPARALLEL AND OUTDOOR ROUND LAPS

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US267783A (en) * 1882-11-21 Island
US1476863A (en) * 1922-01-17 1923-12-11 Floyd C Weaver Machine for making true plane surfaces
US2973605A (en) * 1959-11-09 1961-03-07 Carman Lab Inc Lapping machine

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE507816A (en) * 1951-05-19
DE2346325A1 (en) * 1973-09-14 1975-03-27 Waldrich Werkzeugmasch DOSING DEVICE FOR LIQUIDS CONTAINING GRANULATED SOLIDS, IN PARTICULAR LEAK LIQUID
DE2440978A1 (en) * 1974-08-27 1976-03-18 Jmj Werkzeugmaschinen Gmbh PROCESS AND MACHINE FOR PLAN, PLANPARALLEL AND OUTDOOR ROUND LAPS

Also Published As

Publication number Publication date
US5109631A (en) 1992-05-05
EP0411345B1 (en) 1993-09-22
EP0411345A2 (en) 1991-02-06
DE59002816D1 (en) 1993-10-28

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