EP0375033A1 - Object holder for positioning an object in a radiation beam - Google Patents
Object holder for positioning an object in a radiation beam Download PDFInfo
- Publication number
- EP0375033A1 EP0375033A1 EP89203173A EP89203173A EP0375033A1 EP 0375033 A1 EP0375033 A1 EP 0375033A1 EP 89203173 A EP89203173 A EP 89203173A EP 89203173 A EP89203173 A EP 89203173A EP 0375033 A1 EP0375033 A1 EP 0375033A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- supporting plate
- transporter
- supporting
- object holder
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/26—Stages; Adjusting means therefor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/003—Alignment of optical elements
- G02B7/004—Manual alignment, e.g. micromanipulators
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
Definitions
- the invention relates to an object holder for positioning an object in a radiation beam, comprising an X-Y translation mechanism.
- an X-Y translation mechanism is constructed so that an X-transporter for translation in an X-direction carries a carriage for translation across the X-transporter in an Y-direction, the X-transporter acting as a reference and supporting face for the Y-transporter or vice versa.
- This is understandable because, considering the desirable low-friction movements, it is difficult to prevent a given play for each of the guides. This is extremely undesirable, however, in object carriers where angular orientation of an object is co-decisive for the accuracy of measurements to be performed.
- each of the two translatory movements separately refers directly to a supporting face of a supporting plate in a translation mechanism in accordance with the invention, a simple and inexpensive movement mechanism is achieved which offers extremely accurate positioning, notably because of the spring force coupling, and in which undesirable rotation and tilting are minimized.
- the spring force, or rather the pressure exerted towards the supporting plate is realized by way of a magnetic force of attraction, notably by means of permanent magnets which are coupled to the X-transporter and to a support for the object table, which magnets preferably bear on the supporting face of the supporting plate via intermediate spacer which are preferably ductile to some extent.
- a desirable air gap is thus also achieved.
- a rotation of the object table is added to the X-Y translation; this is comparatively simply achieved by mounting the supporting plate so as to be rotatable about an axis extending transversely of its supporting face.
- Driving can be realized by mounting a motor-driven rotation mechanism on a rear side of the supporting plate (with respect to the object table), the axis of rotation preferably extending through the centre of a substantially circular supporting plate.
- An object tilting mechanism for tilting the supporting face of the supporting plate can also be added to the supporting plate. If the angles of tilt need not be very large, for example no more than approximately plus and minus 10 o , use can be made of a shaft in the form of a cylindrical bush which is partly open in the lateral direction, so that at that area a free passage is realized for a radiation beam extending parallel to the supporting plate.
- An object holder as shown in the Figure comprises a supporting plate 2 on which an X-guide 6 is mounted, preferably by way of a bracket 4 connected to the rear side.
- An X-transporter 8 is displaceable along the X-guide, for example in known manner by means of rollers 9, over a distance of up to, for example 50 mm or more.
- the X-transporter 8 is driven by a motor 10 via a transmission 12. In order to save space, the motor 10 is arranged parallel to the X-guide, but this is irrelevant for the invention.
- the X-transporter 8 On a side which faces the supporting plate 2 the X-transporter 8 is provided with preferably three magnets 16 (for kinematic reasons), which magnets bear on the supporting plate via intermediate spacers 18 and are pressed against the supporting plate by the magnetic force produced by the magnets. It is thus achieved that the X-transporter always moves exactly parallel to the supporting face 14.
- the flatness of the supporting plate 2 at the area of the supporting face determines the accuracy of displacement.
- Such a plate being made of a magnetic material in order to realize the magnetic pressing force, can be worked so as to be flat in an extremely accurate as well as comparatively inexpensive manner. A layer against corrosion of notably the supporting face can be locally provided.
- the X-transporter supports an Y-guide 20 for guiding an Y-transporter 22 which is displaceable along the Y-guide, via wheels (not shown), in exactly the same way as the X-transporter.
- the Y-transporter is also pressed against the supporting face 14 of the supporting plate 2 by way of magnets 16 and spacers 18 (not separately shown). Therefore, also the Y-transporter will always move parallel to the supporting face 14 and rotation or tilting errors will not be summed.
- the Y-transporter is driven by a motor 24 which drives a spindle 28 via a transmission 26.
- the Y-transporter supports an object table 30 on which an object, for example a wafer can be mounted, for example on supporting points 32.
- the object table 30 is rotatable about an axis 36 extending transversely of the supporting face 14.
- the supporting plate supports a gearwheel 38 which is driven by a motor 40, via a spindle 42 which is supported by a holder 44 and which realizes a rotation of, for example up to 360 o .
- an object arranged on the object table can be rotated into any desirable X-Y position in the radiation beam path.
- the rotary shaft 34 of the supporting plate is connected to a support 46 for the object holder. Via this support, the object holder can be mounted on or in an apparatus, for example an X-ray analysis apparatus, a wafer inspection apparatus and the like.
- the rotary shaft 34 is coupled via a bracket 50.
- the bracket 50 is tiltable, together with the supporting table and the X-Y translation mechanism, through an angle of, for example plus and minus 10 o with respect to a vertical zero position of the supporting plate.
- bushes 52 for tilting are provided with lateral apertures 54.
- An object carrier in accordance with the invention can be successively used in X-ray analysis apparatus, in wafer inspection apparatus and the like where an object carrier of the described kind can be mounted on or in such an apparatus by means of the support 46. An object to be examined may then also be accommodated in a space to be evacuated.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Machine Tool Units (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Sampling And Sample Adjustment (AREA)
- Microscoopes, Condenser (AREA)
Abstract
Description
- The invention relates to an object holder for positioning an object in a radiation beam, comprising an X-Y translation mechanism.
- In known object holders an X-Y translation mechanism is constructed so that an X-transporter for translation in an X-direction carries a carriage for translation across the X-transporter in an Y-direction, the X-transporter acting as a reference and supporting face for the Y-transporter or vice versa. This results in a comparatively complex translation mechanism where errors in the second translation constitute a sum of errors in both translation systems and where an undesirable rotary movement and tilting can readily occur during the last translation motion. This is understandable because, considering the desirable low-friction movements, it is difficult to prevent a given play for each of the guides. This is extremely undesirable, however, in object carriers where angular orientation of an object is co-decisive for the accuracy of measurements to be performed.
- It is the object of the invention to mitigate these drawbacks; to achieve this, an object holder of the kind set forth in accordance with the invention is constructed as described in the characterizing part of Claim 1.
- Because each of the two translatory movements separately refers directly to a supporting face of a supporting plate in a translation mechanism in accordance with the invention, a simple and inexpensive movement mechanism is achieved which offers extremely accurate positioning, notably because of the spring force coupling, and in which undesirable rotation and tilting are minimized.
- In a preferred embodiment in accordance with the invention the spring force, or rather the pressure exerted towards the supporting plate, is realized by way of a magnetic force of attraction, notably by means of permanent magnets which are coupled to the X-transporter and to a support for the object table, which magnets preferably bear on the supporting face of the supporting plate via intermediate spacer which are preferably ductile to some extent. In addition to a smooth sliding contact, a desirable air gap is thus also achieved.
- In a further preferred embodiment, a rotation of the object table is added to the X-Y translation; this is comparatively simply achieved by mounting the supporting plate so as to be rotatable about an axis extending transversely of its supporting face. Driving can be realized by mounting a motor-driven rotation mechanism on a rear side of the supporting plate (with respect to the object table), the axis of rotation preferably extending through the centre of a substantially circular supporting plate.
- An object tilting mechanism for tilting the supporting face of the supporting plate can also be added to the supporting plate. If the angles of tilt need not be very large, for example no more than approximately plus and
minus 10o, use can be made of a shaft in the form of a cylindrical bush which is partly open in the lateral direction, so that at that area a free passage is realized for a radiation beam extending parallel to the supporting plate. - Some preferred embodiments in accordance with the invention will be described in detail hereinafter with reference to the drawing.
- The sole Figure of the drawing shows an object holder in accordance with the invention whereto a rotation mechanism as well as a tilting device, have been added.
- An object holder as shown in the Figure comprises a supporting plate 2 on which an X-guide 6 is mounted, preferably by way of a
bracket 4 connected to the rear side. An X-transporter 8 is displaceable along the X-guide, for example in known manner by means ofrollers 9, over a distance of up to, for example 50 mm or more. The X-transporter 8 is driven by amotor 10 via atransmission 12. In order to save space, themotor 10 is arranged parallel to the X-guide, but this is irrelevant for the invention. On a side which faces the supporting plate 2 the X-transporter 8 is provided with preferably three magnets 16 (for kinematic reasons), which magnets bear on the supporting plate viaintermediate spacers 18 and are pressed against the supporting plate by the magnetic force produced by the magnets. It is thus achieved that the X-transporter always moves exactly parallel to the supportingface 14. The flatness of the supporting plate 2 at the area of the supporting face determines the accuracy of displacement. Such a plate, being made of a magnetic material in order to realize the magnetic pressing force, can be worked so as to be flat in an extremely accurate as well as comparatively inexpensive manner. A layer against corrosion of notably the supporting face can be locally provided. If desirable, in order to achieve an adjustable pressing force use can also be made of magnets to be energized by coils, a minimum energization being substained in order to prevent the transporter from coming loose from the supporting plate; this can alternatively be ensured by a permanent sub-magnet. The X-transporter supports an Y-guide 20 for guiding an Y-transporter 22 which is displaceable along the Y-guide, via wheels (not shown), in exactly the same way as the X-transporter. The Y-transporter is also pressed against the supportingface 14 of the supporting plate 2 by way ofmagnets 16 and spacers 18 (not separately shown). Therefore, also the Y-transporter will always move parallel to the supportingface 14 and rotation or tilting errors will not be summed. Rotations about an axis transversely of the supporting plate are determined as a function of the degree of straightness of the guides; such straightness can also be comparatively simply realized. The Y-transporter is driven by amotor 24 which drives aspindle 28 via atransmission 26. The Y-transporter supports an object table 30 on which an object, for example a wafer can be mounted, for example on supportingpoints 32. - In the embodiment shown the object table 30 is rotatable about an axis 36 extending transversely of the supporting
face 14. To this end, the supporting plate supports agearwheel 38 which is driven by amotor 40, via aspindle 42 which is supported by aholder 44 and which realizes a rotation of, for example up to 360o. As a result of this construction, an object arranged on the object table can be rotated into any desirable X-Y position in the radiation beam path. To this end, therotary shaft 34 of the supporting plate is connected to asupport 46 for the object holder. Via this support, the object holder can be mounted on or in an apparatus, for example an X-ray analysis apparatus, a wafer inspection apparatus and the like. When the object table is mounted so as to be tiltable about anaxis 48 parallel to the supporting face as shown, therotary shaft 34 is coupled via abracket 50. Using a drive motor not shown, thebracket 50 is tiltable, together with the supporting table and the X-Y translation mechanism, through an angle of, for example plus andminus 10o with respect to a vertical zero position of the supporting plate. In order to offer free passage to a radiation beam,bushes 52 for tilting are provided with lateral apertures 54. An object carrier in accordance with the invention can be successively used in X-ray analysis apparatus, in wafer inspection apparatus and the like where an object carrier of the described kind can be mounted on or in such an apparatus by means of thesupport 46. An object to be examined may then also be accommodated in a space to be evacuated.
Claims (7)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL8803101 | 1988-12-19 | ||
NL8803101A NL8803101A (en) | 1988-12-19 | 1988-12-19 | OBJECT HOLDER FOR POSITIONING AN OBJECT IN A BEAM. |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0375033A1 true EP0375033A1 (en) | 1990-06-27 |
EP0375033B1 EP0375033B1 (en) | 1994-06-29 |
Family
ID=19853397
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP89203173A Expired - Lifetime EP0375033B1 (en) | 1988-12-19 | 1989-12-13 | Object holder for positioning an object in a radiation beam |
Country Status (5)
Country | Link |
---|---|
US (1) | US5001351A (en) |
EP (1) | EP0375033B1 (en) |
JP (1) | JPH02223844A (en) |
DE (1) | DE68916525T2 (en) |
NL (1) | NL8803101A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1993006514A1 (en) * | 1991-09-24 | 1993-04-01 | Eastman Kodak Company | Adjustable mount for cylindrical lens |
WO1993006515A1 (en) * | 1991-09-24 | 1993-04-01 | Eastman Kodak Company | Adjustable mount for cylindrical lens with independent rotational feature |
EP0604345A1 (en) * | 1992-12-23 | 1994-06-29 | International Business Machines Corporation | Tiltable optical microscope stage |
DE4325450A1 (en) * | 1993-07-29 | 1995-02-02 | Bacher Graphische Geraete Gmbh | Table-adjusting device |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6093989A (en) * | 1990-06-04 | 2000-07-25 | Joffe; Benjamin | Advanced magnetically-stabilized couplings and bearings, for use in mechanical drives |
US5331861A (en) | 1990-06-04 | 1994-07-26 | Benjamin Joffe | Rotating drive magnetically coupled for producing linear motion |
US5986372A (en) * | 1990-06-04 | 1999-11-16 | Joffe; Benjamin | Advanced magnetically-stabilized couplings and bearings, for use in mechanical drives |
JP2573072Y2 (en) * | 1991-11-13 | 1998-05-28 | 理学電機株式会社 | Liquid crystal sample mounting device for X-ray diffractometer |
JPH07115056A (en) * | 1993-10-15 | 1995-05-02 | Canon Inc | Vertical substrate stage device |
EP4012390A1 (en) * | 2020-12-11 | 2022-06-15 | Malvern Panalytical B.V. | Sample mounting system for an x-ray analysis apparatus |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1876176A (en) * | 1930-12-16 | 1932-09-06 | Charles F Sulzner | Location finder for microscopes |
GB1323300A (en) * | 1970-04-14 | 1973-07-11 | Heidenhain Johannes Dr | Device for the measurable displacement of an object |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1789019B1 (en) * | 1968-09-23 | 1972-04-27 | Siemens Ag | METHOD OF GENERATING A STEREO IMAGE BY USING ELECTRON BEAM MICROSCOPY |
DE1950327B2 (en) * | 1969-09-30 | 1972-07-06 | Siemens AG, 1000 Berlin u. 8000 München | BODY BLAST DEVICE WITH MAGNETIC MEANS FOR TRANSVERSAL ADJUSTMENT OF PARTS |
JPS55165628A (en) * | 1979-06-12 | 1980-12-24 | Fujitsu Ltd | Apparatus for electron-beam irradiation |
JPS5961132A (en) * | 1982-09-30 | 1984-04-07 | Fujitsu Ltd | Electron beam exposing device |
US4627009A (en) * | 1983-05-24 | 1986-12-02 | Nanometrics Inc. | Microscope stage assembly and control system |
-
1988
- 1988-12-19 NL NL8803101A patent/NL8803101A/en not_active Application Discontinuation
-
1989
- 1989-12-07 US US07/447,964 patent/US5001351A/en not_active Expired - Fee Related
- 1989-12-13 EP EP89203173A patent/EP0375033B1/en not_active Expired - Lifetime
- 1989-12-13 DE DE68916525T patent/DE68916525T2/en not_active Expired - Fee Related
- 1989-12-19 JP JP1327498A patent/JPH02223844A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1876176A (en) * | 1930-12-16 | 1932-09-06 | Charles F Sulzner | Location finder for microscopes |
GB1323300A (en) * | 1970-04-14 | 1973-07-11 | Heidenhain Johannes Dr | Device for the measurable displacement of an object |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN, vol. 7, no. 117 (P-198)[1262], 21st May 1983; & JP-A-58 37 615 (FUJITSU K.K.) * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1993006514A1 (en) * | 1991-09-24 | 1993-04-01 | Eastman Kodak Company | Adjustable mount for cylindrical lens |
WO1993006515A1 (en) * | 1991-09-24 | 1993-04-01 | Eastman Kodak Company | Adjustable mount for cylindrical lens with independent rotational feature |
EP0604345A1 (en) * | 1992-12-23 | 1994-06-29 | International Business Machines Corporation | Tiltable optical microscope stage |
DE4325450A1 (en) * | 1993-07-29 | 1995-02-02 | Bacher Graphische Geraete Gmbh | Table-adjusting device |
Also Published As
Publication number | Publication date |
---|---|
US5001351A (en) | 1991-03-19 |
JPH02223844A (en) | 1990-09-06 |
EP0375033B1 (en) | 1994-06-29 |
DE68916525T2 (en) | 1995-02-02 |
NL8803101A (en) | 1990-07-16 |
DE68916525D1 (en) | 1994-08-04 |
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