EP0342446B1 - Ultrasonic device - Google Patents

Ultrasonic device Download PDF

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Publication number
EP0342446B1
EP0342446B1 EP89108097A EP89108097A EP0342446B1 EP 0342446 B1 EP0342446 B1 EP 0342446B1 EP 89108097 A EP89108097 A EP 89108097A EP 89108097 A EP89108097 A EP 89108097A EP 0342446 B1 EP0342446 B1 EP 0342446B1
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EP
European Patent Office
Prior art keywords
sound
liquid
ultrasonic
liquid container
lambda
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EP89108097A
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German (de)
French (fr)
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EP0342446A2 (en
EP0342446A3 (en
Inventor
Martin Walter
Dieter Weber
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Martin Walter Ultraschalltechnik GmbH
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Martin Walter Ultraschalltechnik GmbH
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Priority to AT89108097T priority Critical patent/ATE93752T1/en
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Publication of EP0342446A3 publication Critical patent/EP0342446A3/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B3/00—Methods or apparatus specially adapted for transmitting mechanical vibrations of infrasonic, sonic, or ultrasonic frequency

Definitions

  • Devices of this type are required, in particular, for ultrasonic cleaning, the high tensile and compressive forces occurring in an ultrasound-excited liquid bath, in particular the mechanism of cavitation, effecting very good cleaning of the immersed workpieces.
  • the introduction of the ultrasonic vibrations is effected in known devices of this type in that the ultrasonic vibrators are glued with their sound-emitting cone onto a wall or the bottom of such a liquid container and thereby set this wall or the bottom into vibrations which in turn apply these vibrations the liquid passes on.
  • Such cleaning baths have proven particularly useful for workpieces of complex shapes, but are also used with advantage in precision mechanical units.
  • the workpieces to be cleaned or the workpieces on which the ultrasonic vibrations are supposed to act are only exposed to these ultrasonic vibrations for a short period of time.
  • the cavitation effect can therefore be metered through this period.
  • this does not apply to the wall of the liquid container, which is exposed to the constant cavitation effect is.
  • This leads to "cavitation pitting", which leads to the container wall becoming leaky after some time.
  • the cavitation pitting is of course particularly noticeable on the wall on which the ultrasound transmitter is attached. This wall acts as a sound-transmitting membrane, so it must transmit all the forces that ultimately lead to cavitation.
  • the ultrasound transmitters are each held by means of a retaining ring which lies directly on the lambda / 2 oscillator and form a one-piece unit with the sound-emitting cone, and in that they are inserted into the liquid container by means of this retaining ring, or that the ultrasound transmitters are each held by means of a retaining ring which forms the end of a sleeve surrounding the counterweight, the retaining ring lying directly on the lambda / 2 oscillator and a one-piece unit with both the sound-emitting element Form cones as well as with the sleeve and that they are then inserted into the liquid container by means of this sleeve.
  • the ultrasound transmitters with their sound-emitting cone glued to a wall, the membrane, of the liquid container, but they are inserted into the liquid container in such a way that the sound-emitting cone protrudes directly into the liquid.
  • the cavitation which then naturally occurs will now not remove the membrane or the wall of the liquid container, but the sound-emitting cone.
  • the sound-emitting cone is made of solid metal, so that the abrasion caused by the cavitation on the sound-emitting cone is negligible in practice.
  • This special mounting of the ultrasound transmitter is possible in that an oscillation node is formed in the piezoelectric plates with the oscillation amplitude zero; the maximum vibration amplitude results on the front surface of the sound-emitting cone.
  • the retaining ring is attached to the base of the sound-radiating cone, where it lies against the piezoelectric plate, this retaining ring is still close to the node, i.e. at a point where the noise-radiating cone is only slightly Vibration amplitude swings. This retaining ring is thereby also caused to vibrate, but with a very slight amplitude, so that there is hardly any fear of cavitation. However, the desired sound transmission to the liquid is practically not affected, since this is now carried out directly via the sound-emitting cone.
  • the proposed encapsulation of the entire ultrasound transmitter has yet another advantage. It is namely now possible in the manner according to the invention to have the sound-radiating cones protruding into the liquid container protrude to different degrees into the liquid container, thereby avoiding the formation of standing waves in the liquid. This is particularly the case if, according to the invention, the end faces of the sound-emitting cones are each immersed in the liquid with a difference of lambda / 4. "Dead zones" that are not exposed to sound are definitely avoided in this way.
  • the ultrasonic transducer consists of the two push-pull piezoelectric plates (1, 2), between which an electrode (3) is inserted as a voltage supply.
  • a counterweight (4) and, on the other hand, a sound-emitting cone (5) are connected to the two piezoelectric plates (1, 2). All these parts are held together by means of a screw (6).
  • a retaining ring (17) is screwed onto the sound-emitting cone (5) and forms a one-piece unit with the sleeve (8).
  • the sleeve (8) encloses the entire remaining part of the ultrasonic vibrator and is closed on the underside by a base (9) with screw socket (10).
  • the screw connection (10) not only feeds the leads to the ultrasonic vibrator, it also fixes the entire ultrasonic vibrator to the inside of the container with the interposition of a seal. As a result, not only is the sensitive part of the transducer completely protected against the ingress of liquid, but the transducer can also be easily replaced.
  • Device for introducing ultrasonic vibrations into a liquid by means of ultrasonic transducers which are arranged on the bottom and / or the flushed wall of a liquid container and, as a lambda / 2 oscillator, consist of two push-pull piezoelectric plates, between which an electrode is inserted, which is inserted by means of a Bolzens are connected on the one hand to a sound-emitting cone and on the other hand to a counterweight.
  • Devices of this type are required, in particular, for ultrasonic cleaning, the high tensile and compressive forces occurring in an ultrasound-excited liquid bath, in particular the mechanism of cavitation, effecting very good cleaning of the immersed workpieces.
  • the introduction of the ultrasonic vibrations is effected in known devices of this type in that the ultrasonic vibrators are glued with their sound-emitting cone onto a wall or the bottom of such a liquid container and thereby set this wall or the bottom into vibrations which in turn apply these vibrations the liquid passes on.
  • Such cleaning baths have proven particularly useful for workpieces of complex shapes, but are also used with advantage in precision mechanical units.
  • the workpieces to be cleaned or the workpieces on which the ultrasonic vibrations are supposed to act are only exposed to these ultrasonic vibrations for a short period of time.
  • the cavitation effect can therefore be metered through this period.
  • this does not apply to the wall of the liquid container, which is exposed to the constant cavitation effect.
  • This leads to "cavitation pitting", which leads to the container wall becoming leaky after some time.
  • the cavitation pitting is of course particularly noticeable on the wall on which the ultrasound transmitter is attached. This wall acts as a sound-transmitting membrane, so it must transmit all the forces that ultimately lead to cavitation.
  • the object of the invention is to provide a device which avoids this cavitation pitting on the liquid container walls or the membrane. This is achieved in the manner according to the invention by either holding the ultrasound transmitters in each case by means of a retaining ring which lies directly against the lambda / 2 oscillator and an integral unit with the sound-emitting cone form, and that they are inserted into the liquid container by means of this retaining ring, or that the ultrasound transmitters are each held by means of a retaining ring which forms the end of a sleeve surrounding the counterweight, the retaining ring abutting directly on the lambda / 2 transducer and being an integral one Form unit with both the sound-emitting cone and with the sleeve and that they are then inserted into the liquid container by means of this sleeve.
  • the ultrasound transmitters with their sound-emitting cone glued to a wall, the membrane, of the liquid container, but they are inserted into the liquid container in such a way that the sound-emitting cone protrudes directly into the liquid.
  • the cavitation which then naturally occurs will now not remove the membrane or the wall of the liquid container, but the sound-emitting cone.
  • the sound-emitting cone is made of solid metal, so that the application to the sound-emitting cone caused by the cavitation is negligible in practice.
  • This special mounting of the ultrasound transmitter is possible in that an oscillation node is formed in the piezoelectric plates with the oscillation amplitude zero; the maximum vibration amplitude results on the front surface of the sound-emitting cone.
  • the retaining ring is attached to the base of the sound-emitting cone, where it lies against the piezoelectric plate, then this retaining ring is still close to the node, i.e. at a point where the sound-emitting cone vibrates only with a small vibration amplitude. This retaining ring is thereby also caused to vibrate, but with a very slight amplitude, so that there is hardly any fear of cavitation. However, the desired sound transmission to the liquid is practically not affected, since this is now carried out directly via the sound-emitting cone.
  • US-A-29 10 390 shows an ultrasound transmitter which is surrounded by a sleeve which is welded into the wall of the liquid container.
  • the front of this sleeve is formed by a cylindrical, sound-emitting element fitted into the sleeve, to the rear of which the actual ultrasonic oscillator is attached.
  • This sound-emitting element vibrates at the ultrasonic frequency in the sleeve and is held in this position by an inserted O-ring.
  • the o-ring is also designed to prevent liquid from entering the can.
  • the ultrasonic vibrations not only destroy the material of the sleeve and the sound-emitting element, but of course also the material of the O-ring, so that after a short time, as with the cavitation pitting already discussed, liquid reaches the ultrasonic vibrators , and destroyed it.
  • the sound-radiating element protrudes only slightly over the inner wall into the interior of the liquid container, which means that the sound is radiating element in this position transmits very strong vibrations to the wall of the liquid container. Of course, this causes the cavitation pitting mentioned at the beginning.
  • the sound-emitting cone is made of corrosion-resistant material.
  • the counterweight is surrounded by a sleeve which can be closed by a bottom on the underside except for an opening for the transducer feed lines.
  • This provides a device which can be screwed onto the inner wall of the liquid container by a screw connection which seals at the bottom, so that the entire ultrasonic oscillator is sealed in the liquid and can act directly on the liquid.
  • This device also has the advantage that if an ultrasonic oscillator fails, it is not difficult to replace this oscillator.
  • Encapsulating the entire ultrasonic transducer has yet another advantage. It is now possible to let the sound-emitting cones projecting into the liquid container protrude into the liquid container to different extents, thereby causing standing waves to form in the Liquid is avoided. This is particularly the case if, according to a further feature of the invention, the end faces of the sound-emitting cones are each immersed in the liquid with a difference of lambda / 4. "Dead zones" that are not exposed to sound are definitely avoided in this way.
  • a retaining ring (7) is screwed onto the sound-emitting cone (5), which is used to insert the ultrasonic vibrator into a liquid container.
  • This retaining ring can be welded into the ultrasonic container or otherwise attached to it so that the sound-emitting cone (5) protrudes into the liquid.
  • Fig. 2 shows the same transducer inserted in a sleeve (8).
  • the same fastening of the sound-emitting cone (5) can be found by means of a comprehensive retaining ring (17) which, in this illustration, forms a one-piece unit with the bushing (8).
  • the bushing (8) encloses the entire remaining part of the ultrasonic vibrator and is closed on the underside by a base (9) with a screw connection (10).
  • the screw connection (10) not only feeds the leads to the ultrasonic vibrator, it also fixes the entire ultrasonic vibrator to the inside of the container with the interposition of a seal.
  • the transducer can also be easily replaced.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Surgical Instruments (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Control And Other Processes For Unpacking Of Materials (AREA)
  • Gloves (AREA)

Abstract

For the purpose of inducing ultrasonic oscillations in a liquid in a container, ultrasonic oscillators are fixed on the outside of the wall serving as a membrane. Due to localised cavitation erosion this wall becomes untight, which leads to the destruction of the entire device. In order to prevent this it is proposed to attach a mounting ring on the ultrasonic oscillator near to the oscillation node, which mounting ring permits the ultrasonic oscillator to be inserted into the container so that it acts directly on the liquid with its sound-emitting cone, it being possible for the end faces of the sound-emitting cones to dip into the liquid at a distance of lambda/4 for the purpose of completely irradiating the liquid acoustically. <IMAGE>

Description

Beschreibung für folgende Vertragsstaaten : AT, BE, CH, LI, ES, FR, GB, IT, NL, SEDescription for the following contracting states: AT, BE, CH, LI, ES, FR, GB, IT, NL, SE

Vorrichtung zum Einleiten von Ultraschallschwingungen in eine Flüssigkeit mittels Ultraschallgebern, die am Boden und/oder der umspülten Wandung eines Flüssigkeitsbehälters angeordnet sind und als lambda/2-Schwinger aus zwei im Gegentakt schwingenden piezoelektrischen Platten bestehen, zwischen denen eine Elektrode eingefügt ist, die mittels eines Bolzens einerseits mit einem schallabstrahlenden Kegel und andererseits mit einem Gegengewicht verbunden sind, wobei die Ultraschallgeber jeweils mittels eines Halteringes gehalten sind, der den Abschluß einer das Gegengewicht umgebenden Büchse bildet, wobei der Haltering unmittelbar an dem lambda/2-Schwinger anliegt und eine einstückige Einheit sowohl mit dem schallabstrahlenden Kegel wie auch mit der Büchse bildet und daß sie mittels dieser Büchse in den Flüssigkeitsbehälter eingefügt sind. Eine solche Vorrichtung wird z.B. in US-A- 29 10 390 beschrieben.Device for introducing ultrasonic vibrations into a liquid by means of ultrasonic transducers, which are arranged on the bottom and / or the flushed wall of a liquid container and, as a lambda / 2 oscillator, consist of two push-pull piezoelectric plates, between which an electrode is inserted, which is inserted by means of a Bolts are connected on the one hand to a sound-emitting cone and on the other hand to a counterweight, the ultrasound transmitters being held in each case by means of a retaining ring are, which forms the end of a sleeve surrounding the counterweight, the retaining ring abuts directly on the lambda / 2 transducer and forms an integral unit with both the sound-emitting cone and the sleeve and that they are inserted into the liquid container by means of this sleeve . Such a device is described for example in US-A-29 10 390.

Derartige Vorrichtungen werden insbesondere bei der Ultraschallreinigung benötigt, wobei die in einem ultraschallerregten Flüssigkeitsbad auftretenden hohen Zug- und Druckkräfte, insbesondere der Mechanismus der Kavitation, eine sehr gute Reinigung der eingetauchten Werkstücke bewirken. Das Einleiten der Ultraschallschwingungen wird bei bekannten Vorrichtungen dieser Art dadurch bewirkt, daß die Ultraschallschwinger mit ihrem schallabstrahlenden Kegel auf eine Wandung beziehungsweise den Boden eines solchen Flüssigkeitsbehälters aufgeklebt werden und dadurch diese Wandung beziehungsweise den Boden in Schwingungen versetzen, die (der) wiederum diese Schwingungen an die Flüssigkeit weitergibt. Derartige Reinigungsbäder haben sich insbesondere für kompliziert geformte Werkstücke bewährt, werden jedoch auch mit Vorteil bei feinmechanischen Aggregaten angewendet.Devices of this type are required, in particular, for ultrasonic cleaning, the high tensile and compressive forces occurring in an ultrasound-excited liquid bath, in particular the mechanism of cavitation, effecting very good cleaning of the immersed workpieces. The introduction of the ultrasonic vibrations is effected in known devices of this type in that the ultrasonic vibrators are glued with their sound-emitting cone onto a wall or the bottom of such a liquid container and thereby set this wall or the bottom into vibrations which in turn apply these vibrations the liquid passes on. Such cleaning baths have proven particularly useful for workpieces of complex shapes, but are also used with advantage in precision mechanical units.

Die zu reinigenden Werkstücke beziehungsweise die Werkstücke, auf die die Ultraschallschwingungen einwirken sollen, werden hierbei nur eine kurze Zeitdauer diesen Ultraschallschwingungen ausgesetzt. Die Kavitationswirkung ist daher durch diese Zeitdauer dosierbar. Dies trifft jedoch nicht für die Wandung des Flüssigkeitsbehälters zu, die steter Kavitationswirkung ausgesetzt ist. Hierdurch kommt es zu einem "Kavitationslochfraß", der dazu führt, daß nach einiger Zeit die Behälterwandung undicht wird. Der Kavitationslochfraß macht sich selbstverständlich insbesondere an der Wandung bemerkbar, an der der Ultraschallgeber aufgesetzt ist. Diese Wandung wirkt als schallübertragende Membrane, muß also die gesamten Kräfte, die letztendlich auch zu der Kavitation führen, übertragen. Wird diese Membrane jedoch undicht, gelangt Feuchtigkeit zu den auf die Wandung aufgeklebten Ultraschallgebern, womit ein Lösen dieser Ultraschallschwinger und damit eine Zerstörung der Anlage verbunden ist. Eine dickere Membrane, die diesen Kavitationslochfraß hinauszögern würde, ist nicht einsetzbar, da mit der Dicke der Membrane die abgegebene Schalleistung beziehungsweise der Wirkungsgrad der gesamten Einrichtung deutlich zurückgeht.The workpieces to be cleaned or the workpieces on which the ultrasonic vibrations are supposed to act are only exposed to these ultrasonic vibrations for a short period of time. The cavitation effect can therefore be metered through this period. However, this does not apply to the wall of the liquid container, which is exposed to the constant cavitation effect is. This leads to "cavitation pitting", which leads to the container wall becoming leaky after some time. The cavitation pitting is of course particularly noticeable on the wall on which the ultrasound transmitter is attached. This wall acts as a sound-transmitting membrane, so it must transmit all the forces that ultimately lead to cavitation. However, if this membrane leaks, moisture reaches the ultrasound transducers glued to the wall, which means that these ultrasound transducers are released and the system is destroyed. A thicker membrane, which would delay this cavitation pitting, cannot be used, since the thickness of the membrane significantly reduces the sound output or the efficiency of the entire device.

Dieser Kavitationslochfraß an den Flüssigkeitsbehälter-Wandungen beziehungsweise der Membrane wird in bekannter Weise dadurch vermieden, daß die Ultraschallgeber jeweils mittels eines Halteringes gehalten sind, der unmittelbar an dem lambda/2-Schwinger anliegt und eine einstückige Einheit mit dem schallabstrahlenden Kegel bilden, und daß sie mittels dieses Halterings in den Flüssigkeitsbehälter eingefügt sind, oder daß die Ultraschallgeber jeweils mittels eines Halteringes gehalten sind, der den Abschluß einer das Gegengewicht umgebenden Büchse bildet, wobei der Haltering unmittelbar an dem lambda/2-Schwinger anliegt und eine einstückige Einheit sowohl mit dem schallabstrahlenden Kegel wie auch mit der Büchse bilden und daß sie sodann mittels dieser Büchse in den Flüssigkeitsbehälter eingefügt sind.This cavitation pitting on the liquid container walls or the membrane is avoided in a known manner in that the ultrasound transmitters are each held by means of a retaining ring which lies directly on the lambda / 2 oscillator and form a one-piece unit with the sound-emitting cone, and in that they are inserted into the liquid container by means of this retaining ring, or that the ultrasound transmitters are each held by means of a retaining ring which forms the end of a sleeve surrounding the counterweight, the retaining ring lying directly on the lambda / 2 oscillator and a one-piece unit with both the sound-emitting element Form cones as well as with the sleeve and that they are then inserted into the liquid container by means of this sleeve.

Nicht mehr also wie bisher werden die Ultraschallgeber mit ihrem schallabstrahlenden Kegel auf eine Wandung, die Membrane, des Flüssigkeitsbehälters aufgeklebt, sondern sie werden so in den Flüssigkeitsbehälter eingefügt, daß der schallabstrahlende Kegel direkt in die Flüssigkeit hineinragt. Die sich dann selbstverständlich auch einstellende Kavitation wird nunmehr nicht die Membrane beziehungsweise die Wandung des Flüssigkeitsbehälters abtragen, sondern den schallabstrahlenden Kegel. Der schallabstrahlende Kegel besteht jedoch aus massivem Metall, so daß der durch die Kavitation bewirkte Abtrag am schallabstrahlenden Kegel in der Praxis vernachlässigbar ist. Möglich ist diese besondere Halterung des Ultraschallgebers dadurch, daß sich bei den piezoelektrischen Platten ein Schwingungs-Knotenpunkt bildet mit der Schwingungsamplitude null; die maximale Schwingungsamplitude ergibt sich an der Stirnfläche des schallabstrahlenden Kegels. Wird der Haltering, wie nach der Erfindung angegeben, am Fußpunkt des schallabstrahlenden Kegels, dort wo er an der piezoelektrischen Platte anliegt, angebracht, so liegt dieser Haltering noch in der Nähe des Knotenpunktes, also an einer Stelle, wo der schallabstrahlende Kegel nur mit geringer Schwingungsamplitude schwingt. Dieser Haltering wird dadurch zwar auch noch zum Schwingen angeregt, jedoch mit einer ganz geringfügigen Amplitude, so daß dort auch kaum Kaviationseinwirkungen zu befürchten sind. Die erwünschte Schallübertragung an die Flüssigkeit jedoch wird praktisch nicht beeinträchtigt, da diese nun direkt über den schallabstrahlenden Kegel erfolgt.No longer, as before, are the ultrasound transmitters with their sound-emitting cone glued to a wall, the membrane, of the liquid container, but they are inserted into the liquid container in such a way that the sound-emitting cone protrudes directly into the liquid. The cavitation which then naturally occurs will now not remove the membrane or the wall of the liquid container, but the sound-emitting cone. However, the sound-emitting cone is made of solid metal, so that the abrasion caused by the cavitation on the sound-emitting cone is negligible in practice. This special mounting of the ultrasound transmitter is possible in that an oscillation node is formed in the piezoelectric plates with the oscillation amplitude zero; the maximum vibration amplitude results on the front surface of the sound-emitting cone. If, as stated according to the invention, the retaining ring is attached to the base of the sound-radiating cone, where it lies against the piezoelectric plate, this retaining ring is still close to the node, i.e. at a point where the noise-radiating cone is only slightly Vibration amplitude swings. This retaining ring is thereby also caused to vibrate, but with a very slight amplitude, so that there is hardly any fear of cavitation. However, the desired sound transmission to the liquid is practically not affected, since this is now carried out directly via the sound-emitting cone.

Durch die vorgeschlagene Kapselung des gesamten Ultraschallgebers ist jedoch noch ein weiterer Vorteil verbunden. Es ist jetzt nämlich in erfindungsgemäßer Weise möglich, die in den Flüssigkeitsbehälter hineinragenden schallabstrahlenden Kegel unterschiedlich weit in den Flüssigkeitsbehälter hineinragen zu lassen, wodurch die Ausbildung stehender Wellen in der Flüssigkeit vermieden wird. Dies insbesondere dann, wenn dem Erfindungsmerkmal nach die Stirnflächen der schallabstrahlenden Kegel jeweils mit einer Differenz von lambda/4 in die Flüssigkeit eintauchen. "Tote Zonen", die nicht beschallt werden, werden auf diese Art und Weise mit Sicherheit vermieden.The proposed encapsulation of the entire ultrasound transmitter has yet another advantage. It is namely now possible in the manner according to the invention to have the sound-radiating cones protruding into the liquid container protrude to different degrees into the liquid container, thereby avoiding the formation of standing waves in the liquid. This is particularly the case if, according to the invention, the end faces of the sound-emitting cones are each immersed in the liquid with a difference of lambda / 4. "Dead zones" that are not exposed to sound are definitely avoided in this way.

Auf der Zeichnung ist ein Ausführungsbeispiel der Vorrichtung dargestellt.In the drawing, an embodiment of the device is shown.

Der Ultraschallgeber besteht aus den beiden im Gegentakt schwingenden piezoelektrischen Platten (1, 2), zwischen denen eine Elektrode (3) als Spannungszuführung eingefügt ist. An die beiden piezoelektrischen Platten (1, 2) schließen sich einerseits ein Gegengewicht (4) und andererseits ein schallabstrahlender Kegel (5) an. Mittels einer Schraube (6) sind alle diese Teile zusammengehalten.The ultrasonic transducer consists of the two push-pull piezoelectric plates (1, 2), between which an electrode (3) is inserted as a voltage supply. A counterweight (4) and, on the other hand, a sound-emitting cone (5) are connected to the two piezoelectric plates (1, 2). All these parts are held together by means of a screw (6).

Nahe der Auflagefläche des schallabstrahlenden Kegels (5) an die piezoelektrische Platte (2) ist an den schallabstrahlenden Kegel (5) ein Haltering (17) angedreht, der eine einstückige Einheit mit der Büchse (8) bildet. Die Büchse (8) umschließt den gesamten restlichen Teil des Ultraschallschwingers und ist unterseitig durch einen Boden (9) mit Schraubstutzen (10) abgeschlossen. Durch den Schraubstutzen (10) werden nicht nur die Zuleitungen zu dem Ultraschallschwinger hindurchgeführt, sondern es wird damit auch der gesamte Ultraschallschwinger an einer Behälterinnenwandung unter Zwischenlage einer Dichtung befestigt. Dadurch ist nicht nur der empfindliche Schwingerteil vollkommen gegen Eindringen von Flüssigkeit geschützt, sondern auch ein Auswechseln des Schwingers unschwer möglich.Near the contact surface of the sound-emitting cone (5) on the piezoelectric plate (2), a retaining ring (17) is screwed onto the sound-emitting cone (5) and forms a one-piece unit with the sleeve (8). The sleeve (8) encloses the entire remaining part of the ultrasonic vibrator and is closed on the underside by a base (9) with screw socket (10). The screw connection (10) not only feeds the leads to the ultrasonic vibrator, it also fixes the entire ultrasonic vibrator to the inside of the container with the interposition of a seal. As a result, not only is the sensitive part of the transducer completely protected against the ingress of liquid, but the transducer can also be easily replaced.

Beschreibung für folgenden Vertragsstaat : DEDescription for the following contracting state: DE

Vorrichtung zum Einleiten von Ultraschallschwingungen in eine Flüssigkeit mittels Ultraschallgebern, die am Boden und/oder der umspülten Wandung eines Flüssigkeitsbehälters angeordnet sind und als lambda/2-Schwinger aus zwei im Gegentakt schwingenden piezoelektrischen Platten bestehen, zwischen denen eine Elektrode eingefügt ist, die mittels eines Bolzens einerseits mit einem schallabstrahlenden Kegel und andererseits mit einem Gegengewicht verbunden sind.Device for introducing ultrasonic vibrations into a liquid by means of ultrasonic transducers, which are arranged on the bottom and / or the flushed wall of a liquid container and, as a lambda / 2 oscillator, consist of two push-pull piezoelectric plates, between which an electrode is inserted, which is inserted by means of a Bolzens are connected on the one hand to a sound-emitting cone and on the other hand to a counterweight.

Derartige Vorrichtungen werden insbesondere bei der Ultraschallreinigung benötigt, wobei die in einem ultraschallerregten Flüssigkeitsbad auftretenden hohen Zug- und Druckkräfte, insbesondere der Mechanismus der Kavitation, eine sehr gute Reinigung der eingetauchten Werkstücke bewirken. Das Einleiten der Ultraschallschwingungen wird bei bekannten Vorrichtungen dieser Art dadurch bewirkt, daß die Ultraschallschwinger mit ihrem schallabstrahlenden Kegel auf eine Wandung beziehungsweise den Boden eines solchen Flüssigkeitsbehälters aufgeklebt werden und dadurch diese Wandung beziehungsweise den Boden in Schwingungen versetzen, die (der) wiederum diese Schwingungen an die Flüssigkeit weitergibt. Derartige Reinigungsbäder haben sich insbesondere für kompliziert geformte Werkstücke bewährt, werden jedoch auch mit Vorteil bei feinmechanischen Aggregaten angewendet.Devices of this type are required, in particular, for ultrasonic cleaning, the high tensile and compressive forces occurring in an ultrasound-excited liquid bath, in particular the mechanism of cavitation, effecting very good cleaning of the immersed workpieces. The introduction of the ultrasonic vibrations is effected in known devices of this type in that the ultrasonic vibrators are glued with their sound-emitting cone onto a wall or the bottom of such a liquid container and thereby set this wall or the bottom into vibrations which in turn apply these vibrations the liquid passes on. Such cleaning baths have proven particularly useful for workpieces of complex shapes, but are also used with advantage in precision mechanical units.

Die zu reinigenden Werkstücke beziehungsweise die Werkstücke, auf die die Ultraschallschwingungen einwirken sollen, werden hierbei nur eine kurze Zeitdauer diesen Ultraschallschwingungen ausgesetzt. Die Kavitationswirkung ist daher durch diese Zeitdauer dosierbar. Dies trifft jedoch nicht für die Wandung des Flüssigkeitsbehälters zu, die steter Kavitationswirkung ausgesetzt ist. Hierdurch kommt es zu einem "Kavitationslochfraß", der dazu führt, daß nach einiger Zeit die Behälterwandung undicht wird. Der Kavitationslochfraß macht sich selbstverständlich insbesondere an der Wandung bemerkbar, an der der Ultraschallgeber aufgesetzt ist. Diese Wandung wirkt als schallübertragende Membrane, muß also die gesamten Kräfte, die letztendlich auch zu der Kavitation führen, übertragen. Wird diese Membrane jedoch undicht, gelangt Feuchtigkeit zu den auf die Wandung aufgeklebten Ultraschallgebern, womit ein Lösen dieser Ultraschallschwinger und damit eine Zerstörung der Anlage verbunden ist. Eine dickere Membrane, die diesen Kavitationslochfraß hinauszögern würde, ist nicht einsetzbar, da mit der Dicke der Membrane die abgegebene Schalleistung beziehungsweise der Wirkungsgrad der gesamten Einrichtung deutlich zurückgeht.The workpieces to be cleaned or the workpieces on which the ultrasonic vibrations are supposed to act are only exposed to these ultrasonic vibrations for a short period of time. The cavitation effect can therefore be metered through this period. However, this does not apply to the wall of the liquid container, which is exposed to the constant cavitation effect. This leads to "cavitation pitting", which leads to the container wall becoming leaky after some time. The cavitation pitting is of course particularly noticeable on the wall on which the ultrasound transmitter is attached. This wall acts as a sound-transmitting membrane, so it must transmit all the forces that ultimately lead to cavitation. Will this membrane However, leaking, moisture reaches the ultrasound transducers glued to the wall, which involves loosening these ultrasound transducers and thus destroying the system. A thicker membrane, which would delay this cavitation pitting, cannot be used, since with the thickness of the membrane, the sound output or the efficiency of the entire device decreases significantly.

Um diesem Übelstand abzuhelfen, ist es auch bereits, beispielsweise nach der US-A-33 31 589, bekanntgeworden, einen Ultraschallgeber in den Deckel eines solchen Flüssigkeitsbehälters einzufügen derart, daß der schallabstrahlende Kegel von oben in die Flüssigkeit eintaucht. Abgesehen davon, daß die Reinigungswirkung derartiger Vorrichtungen, bedingt durch die einseitige Beschallung, ungenügend ist, ist auch die Bedienung einer solchen Anlage, da zum Beschicken des Flüssigkeitsbehälters stets der mit dem beziehungsweise den Ultraschallgebern bestückte Deckel abgenommen werden muß, äußerst umständlich, zeitraubend und damit lohnintensiv. Außerdem können sowohl die Zuleitungen zu den Ultraschallgebern wie auch diese selbst bei diesen Manipulationen beschädigt werden.In order to remedy this problem, it has also become known, for example according to US Pat. No. 3,331,589, to insert an ultrasound transmitter into the lid of such a liquid container in such a way that the sound-emitting cone is immersed in the liquid from above. Apart from the fact that the cleaning effect of such devices is inadequate due to the one-sided sonication, the operation of such a system is also extremely cumbersome, time-consuming and therefore extremely difficult since the lid equipped with the ultrasound transducer or ultrasound sensors must always be removed to load the liquid container labor intensive. In addition, both the feed lines to the ultrasound transmitters and even these can be damaged during these manipulations.

Aufgabe der Erfindung ist es, eine Vorrichtung anzugeben, die diesen Kavitationslochfraß an den Flüssigkeitsbehälter-Wandungen beziehungsweise der Membrane vermeidet. Erreicht wird dies in erfindungsgemäßer Weise dadurch, entweder daß die Ultraschallgeber jeweils mittels eines Halteringes gehalten sind, der unmittelbar an dem lambda/2-Schwinger anliegt und eine einstückige Einheit mit dem schallabstrahlenden Kegel bilden, und daß sie mittels dieses Halterings in den Flüssigkeitsbehälter eingefügt sind, oder daß die Ultraschallgeber jeweils mittels eines Halteringes gehalten sind, der den Abschluß einer das Gegengewicht umgebenden Büchse bildet, wobei der Haltering unmittelbar an dem lambda/2-Schwinger anliegt und eine einstückige Einheit sowohl mit dem schallabstrahlenden Kegel wie auch mit der Büchse bilden und daß sie sodann mittels dieser Büchse in den Flüssigkeitsbehälter eingefügt sind.The object of the invention is to provide a device which avoids this cavitation pitting on the liquid container walls or the membrane. This is achieved in the manner according to the invention by either holding the ultrasound transmitters in each case by means of a retaining ring which lies directly against the lambda / 2 oscillator and an integral unit with the sound-emitting cone form, and that they are inserted into the liquid container by means of this retaining ring, or that the ultrasound transmitters are each held by means of a retaining ring which forms the end of a sleeve surrounding the counterweight, the retaining ring abutting directly on the lambda / 2 transducer and being an integral one Form unit with both the sound-emitting cone and with the sleeve and that they are then inserted into the liquid container by means of this sleeve.

Nicht mehr also wie bisher werden die Ultraschallgeber mit ihrem schallabstrahlenden Kegel auf eine Wandung, die Membrane, des Flüssigkeitsbehälters aufgeklebt, sondern sie werden so in den Flüssigkeitsbehälter eingefügt, daß der schallabstrahlende Kegel direkt in die Flüssigkeit hineinragt. Die sich dann selbstverständlich auch einstellende Kavitation wird nunmehr nicht die Membrane beziehungsweise die Wandung des Flüssigkeitsbehälters abtragen, sondern den schallabstrahlenden Kegel. Der schallabstrahlende Kegel besteht jedoch aus massivem Metall, so daß der durch die Kavitation bewirkte Antrag am schallabstrahlenden Kegel in der Praxis vernachlässigbar ist. Möglich ist diese besondere Halterung des Ultraschallgebers dadurch, daß sich bei den piezoelektrischen Platten ein Schwingungs-Knotenpunkt bildet mit der Schwingungsamplitude null; die maximale Schwingungsamplitude ergibt sich an der Stirnfläche des schallabstrahlenden Kegels. Wird der Haltering, wie nach der Erfindung angegeben, am Fußpunkt des schallabstrahlenden Kegels, dort wo er an der piezoelektrischen Platte anliegt, angebracht, so liegt dieser Haltering noch in der Nähe des Knotenpunktes, also an einer Stelle, wo der schallabstrahlende Kegel nur mit geringer Schwingungsamplitude schwingt. Dieser Haltering wird dadurch zwar auch noch zum Schwingen angeregt, jedoch mit einer ganz geringfügigen Amplitude, so daß dort auch kaum Kaviationseinwirkungen zu befürchten sind. Die erwünschte Schallübertragung an die Flüssigkeit jedoch wird praktisch nicht beeinträchtigt, da diese nun direkt über den schallabstrahlenden Kegel erfolgt.No longer, as before, are the ultrasound transmitters with their sound-emitting cone glued to a wall, the membrane, of the liquid container, but they are inserted into the liquid container in such a way that the sound-emitting cone protrudes directly into the liquid. The cavitation which then naturally occurs will now not remove the membrane or the wall of the liquid container, but the sound-emitting cone. However, the sound-emitting cone is made of solid metal, so that the application to the sound-emitting cone caused by the cavitation is negligible in practice. This special mounting of the ultrasound transmitter is possible in that an oscillation node is formed in the piezoelectric plates with the oscillation amplitude zero; the maximum vibration amplitude results on the front surface of the sound-emitting cone. If, as stated according to the invention, the retaining ring is attached to the base of the sound-emitting cone, where it lies against the piezoelectric plate, then this retaining ring is still close to the node, i.e. at a point where the sound-emitting cone vibrates only with a small vibration amplitude. This retaining ring is thereby also caused to vibrate, but with a very slight amplitude, so that there is hardly any fear of cavitation. However, the desired sound transmission to the liquid is practically not affected, since this is now carried out directly via the sound-emitting cone.

Eine ähnliche Einrichtung ist zwar in der US-A-29 10 390 beschrieben, die einen Ultraschallgeber zeigt, der von einer Büchse umgeben ist, die in die Flüssigkeitsbehälterwandung eingeschweißt ist. Die Vorderseite dieser Büchse wird von einem zylindrischen, in die Büchse eingepaßten, schallabstrahlenden Element gebildet, an dessen Rückseite der eigentliche Ultraschallschwinger angebracht ist. Dieses schallabstrahlende Element schwingt mit der Ultraschallfrequenz in der Büchse und ist durch einen eingelegten O-Ring in dieser Stellung gehalten. Der O-Ring soll außerdem das Eindringen von Flüssigkeit in die Büchse verhindern. Wie die Praxis gezeigt hat, zerstören jedoch die Ultraschallschwingungen nicht nur das Material der Büchse und des schallabstrahlenden Elements, sondern selbstverständlich auch das Material des O-Rings, so daß nach kurzer Zeit, wie auch bei dem bereits besprochenen Kavitationslochfraß, Flüssigkeit an die Ultraschallschwinger kommt, und diese damit zerstört. Außerdem ragt das schallabstrahlende Element nur geringfügig über die Innenwandung in das Innere des Flüssigkeitsbehälters hinein, was bedeutet, daß das schallab strahlende Element in dieser Lage sehr stark Schwingungen auf die Wandung des Flüssigkeitsbehälters überträgt. Dadurch wird selbstverständlich wiederum der eingangs erwähnte Kavitationslochfraß hervorgerufen.A similar device is described in US-A-29 10 390, which shows an ultrasound transmitter which is surrounded by a sleeve which is welded into the wall of the liquid container. The front of this sleeve is formed by a cylindrical, sound-emitting element fitted into the sleeve, to the rear of which the actual ultrasonic oscillator is attached. This sound-emitting element vibrates at the ultrasonic frequency in the sleeve and is held in this position by an inserted O-ring. The o-ring is also designed to prevent liquid from entering the can. As practice has shown, however, the ultrasonic vibrations not only destroy the material of the sleeve and the sound-emitting element, but of course also the material of the O-ring, so that after a short time, as with the cavitation pitting already discussed, liquid reaches the ultrasonic vibrators , and destroyed it. In addition, the sound-radiating element protrudes only slightly over the inner wall into the interior of the liquid container, which means that the sound is radiating element in this position transmits very strong vibrations to the wall of the liquid container. Of course, this causes the cavitation pitting mentioned at the beginning.

Da auf den in erfindungsgemäßer Weise in den Flüssigkeitsbehälter eingefügten schallabstrahlenden Kegel nicht nur die Kavitation einwirkt, sondern auch die möglicherweise in der Flüssigkeit vorhandenen korrodierenden Chemikalien, wird nach der Erfindung weiterhin vorgeschlagen, daß der schallabstrahlende Kegel aus korrosionsfestem Material ist.Since not only cavitation acts on the sound-emitting cone inserted into the liquid container according to the invention, but also the corrosive chemicals possibly present in the liquid, it is further proposed according to the invention that the sound-emitting cone is made of corrosion-resistant material.

Die weitere Möglichkeit, die allerdings etwas raumaufwendiger ist, ist durch die Erfindung dadurch gegeben, daß das Gegengewicht von einer Büchse umgeben ist, die durch einen Boden unterseitig bis auf eine Öffnung für die Schwingerzuleitungen verschlossen werden kann. Dadurch ist eine Vorrichtung gegeben, die durch eine bodenseitig abdichtende Schraubverbindung auf die Innenwandung des Flüsigkeitsbehälters aufgeschraubt werden kann, wodurch sich also der gesamte Ultraschallschwinger abgedichtet in der Flüssigkeit befindet und unmittelbar auf die Flüssigkeit einwirken kann. Diese Vorrichtung hat zudem noch den Vorteil, daß bei Ausfall eines Ultraschallschwingers ein Austausch dieses Schwingers unschwer möglich ist.The other possibility, which is somewhat more space-consuming, is given by the invention in that the counterweight is surrounded by a sleeve which can be closed by a bottom on the underside except for an opening for the transducer feed lines. This provides a device which can be screwed onto the inner wall of the liquid container by a screw connection which seals at the bottom, so that the entire ultrasonic oscillator is sealed in the liquid and can act directly on the liquid. This device also has the advantage that if an ultrasonic oscillator fails, it is not difficult to replace this oscillator.

Mit der Kapselung des gesamten Ultraschallgebers ist jedoch noch ein weiterer Vorteil verbunden. Es ist jetzt nämlich möglich, die in den Flüssigkeitsbehälter hineirragenden schallabstrahlenden Kegel unterschiedlich weit in den Flüssigkeitsbehälter hineinragen zu lassen, wodurch die Ausbildung stehender Wellen in der Flüssigkeit vermieden wird. Dies insbesondere dann, wenn einem weiteren Erfindungsmerkmal nach die Stirnflächen der schallabstrahlenden Kegel jeweils mit einer Differenz von lambda/4 in die Flüssigkeit eintauchen. "Tote Zonen", die nicht beschallt werden, werden auf diese Art und Weise mit Sicherheit vermieden.Encapsulating the entire ultrasonic transducer has yet another advantage. It is now possible to let the sound-emitting cones projecting into the liquid container protrude into the liquid container to different extents, thereby causing standing waves to form in the Liquid is avoided. This is particularly the case if, according to a further feature of the invention, the end faces of the sound-emitting cones are each immersed in the liquid with a difference of lambda / 4. "Dead zones" that are not exposed to sound are definitely avoided in this way.

Auf der Zeichnung sind Ausführungsbeispiele der erfindungsgemäßen Vorrichtung dargestellt, und zwar zeigen:

Fig. 1
einen Ultraschallschwinger mit Haltering im Schnitt und
Fig. 2
einen Ultraschallschwinger mit Büchse.
Exemplary embodiments of the device according to the invention are shown in the drawing, namely:
Fig. 1
an ultrasonic transducer with a holding ring in section and
Fig. 2
an ultrasonic transducer with a rifle.

Der Ultraschallgeber nach Fig. 1 besteht aus den beiden im Gegentakt schwingenden piezoelektrischen Platten (1, 2), zwischen denen eine Elektrode (3) als Spannungszuführung eingefügt ist. An die beiden piezoelektrischen Platten (1, 2) schließen sich einerseits ein Gegengewicht (4) und andererseits ein schallabstrahlender Kegel (5) an. Mittels einer Schraube (6) sind alle diese Teile zusammengehalten.1 consists of the two push-pull piezoelectric plates (1, 2), between which an electrode (3) is inserted as a voltage supply. A counterweight (4) and, on the other hand, a sound-emitting cone (5) are connected to the two piezoelectric plates (1, 2). All these parts are held together by means of a screw (6).

Nahe der Auflagefläche des schallabstrahlenden Kegels (5) an die piezoelektrische Platte (2) ist an den schallabstrahlenden Kegel (5) ein Haltering (7) angedreht, der zum Einfügen des Ultraschallschwingers in einen Flüssigkeitsbehälter dient. Dieser Haltering kann in den Ultraschallbehälter eingeschweißt oder sonstwie an ihn angebracht werden so, daß der schallabstrahlende Kegel (5) in die Flüssigkeit hineinragt.Near the bearing surface of the sound-emitting cone (5) on the piezoelectric plate (2), a retaining ring (7) is screwed onto the sound-emitting cone (5), which is used to insert the ultrasonic vibrator into a liquid container. This retaining ring can be welded into the ultrasonic container or otherwise attached to it so that the sound-emitting cone (5) protrudes into the liquid.

Fig. 2 zeigt den gleichen Schwinger, eingefügt in eine Büchse (8). Auch hier findet sich wieder die gleiche Befestigung des schallabstrahlenden Kegels (5) mittels eines umfassenden Halteringes (17), der bei dieser Darstellung eine einstückige Einheit mit der Büchse (8) bildet. Die Büchse (8) umschließt den gesamten restlichen Teil des Ultraschallschwingers und ist unterseitig durch einen Boden (9) mit Schraubstutzen (10) abgeschlossen. Durch den Schraubstutzen (10) werden nicht nur die Zuleitungen zu dem Ultraschallschwinger hindurchgeführt, sondern es wird damit auch der gesamte Ultraschallschwinger an einer Behälterinnenwandung unter Zwischenlage einer Dichtung befestigt. Dadurch ist nicht nur der empfindliche Schwingerteil vollkommen gegen Eindringen von Flüssigkeit geschützt, sondern auch ein Auswechseln des Schwingers unschwer möglich.Fig. 2 shows the same transducer inserted in a sleeve (8). Here, too, the same fastening of the sound-emitting cone (5) can be found by means of a comprehensive retaining ring (17) which, in this illustration, forms a one-piece unit with the bushing (8). The bushing (8) encloses the entire remaining part of the ultrasonic vibrator and is closed on the underside by a base (9) with a screw connection (10). The screw connection (10) not only feeds the leads to the ultrasonic vibrator, it also fixes the entire ultrasonic vibrator to the inside of the container with the interposition of a seal. As a result, not only is the sensitive part of the transducer completely protected against the ingress of liquid, but the transducer can also be easily replaced.

Claims (4)

  1. A device for introducing ultrasonic vibrations into a liquid by means of ultrasonic generators which are arranged at the bottom and/or the wetted wall of a liquid container and which as lambda/2-vibrators comprise two piezoelectric plates (1, 2) which vibrate in push-pull relationship and between which is inserted an electrode (3) which is connected by means of a pin (6) on the one hand to a sound-radiating cone and on the other hand to a counterweight, characterised in that the ultrasonic generators are each held by means of a holding ring (7) which bears directly against the lambda/2-vibrator (1, 2, 3) and form an integral unit with the sound-radiating cone (5) and that they are inserted by means of said holding ring (7) into the liquid container.
  2. A device for introducing ultrasonic vibrations into a liquid by means of ultrasonic generators which are arranged at the bottom and/or the wetted wall of a liquid container and which as lambda/2-vibrators comprise two piezoelectric plates (1, 2) which vibrate in push-pull relationship and between which is inserted an electrode (3) which is connected by means of a pin (6) on the one hand to a sound-radiating cone and on the other hand to a counterweight, characterised in that the ultrasonic generators are each held by means of a holding ring (17) which forms the closure of a case (8) surrounding the counterweight (4), wherein the holding ring bears directly against the lambda/2-vibrator (1, 2, 3) and form an integral unit both with the sound-radiating cone (5) and also with the case (8) and that they are inserted by means of said case (8) into the liquid container.
  3. A device according to claim 1 or claim 2 characterised in that the sound-radiating cone (5) is of corrosion-resistant material.
  4. A device according to claim 1 or claim 2 characterised in that the ultrasonic generators are so inserted into the liquid container that the end faces of the sound-radiating cones (5) project into the liquid to different extents, are specifically at the spacing of lambda/4.
EP89108097A 1988-05-14 1989-05-05 Ultrasonic device Expired - Lifetime EP0342446B1 (en)

Priority Applications (1)

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AT89108097T ATE93752T1 (en) 1988-05-14 1989-05-05 ULTRASONIC DEVICE.

Applications Claiming Priority (2)

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DE3816567A DE3816567A1 (en) 1988-05-14 1988-05-14 ULTRASONIC DEVICE
DE3816567 1988-05-14

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EP0342446A2 EP0342446A2 (en) 1989-11-23
EP0342446A3 EP0342446A3 (en) 1990-08-22
EP0342446B1 true EP0342446B1 (en) 1993-09-01

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EP (1) EP0342446B1 (en)
AT (1) ATE93752T1 (en)
DE (2) DE3816567A1 (en)
ES (1) ES2045244T3 (en)
FI (1) FI99090C (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9006989D0 (en) * 1990-03-28 1990-05-23 Atomic Energy Authority Uk Sonochemical apparatus
CN103464360A (en) * 2013-09-22 2013-12-25 江苏三恒科技股份有限公司 Ultrasonic transducer for far distance measurement applied to coal mine environment
FR3029816B1 (en) 2014-12-15 2016-12-30 Cedrat Tech MODULAR AND IMMERSIBLE ULTRASONIC TUBULAR TRANSDUCER

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0341505A2 (en) * 1988-05-10 1989-11-15 Martin Walter Ultraschalltechnik GmbH Ultrasonic device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1129615A (en) * 1955-07-29 1957-01-23 Realisations Ultrasoniques Sa Device for transmitting elastic waves from a solid medium to a liquid medium
US2910390A (en) * 1956-06-29 1959-10-27 Hermes Sonic Corp Machine for cleaning small parts
US3331589A (en) * 1965-02-08 1967-07-18 Frederick G Hammitt Vibratory unit with seal
US3885172A (en) * 1971-12-01 1975-05-20 Continental Can Co Sonic transducer
JPS562478Y2 (en) * 1974-08-30 1981-01-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0341505A2 (en) * 1988-05-10 1989-11-15 Martin Walter Ultraschalltechnik GmbH Ultrasonic device

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DE3816567A1 (en) 1989-11-16
EP0342446A2 (en) 1989-11-23
ES2045244T3 (en) 1994-01-16
FI892287A (en) 1989-11-15
FI892287A0 (en) 1989-05-11
FI99090B (en) 1997-06-30
EP0342446A3 (en) 1990-08-22
FI99090C (en) 1997-10-10
ATE93752T1 (en) 1993-09-15
DE58905416D1 (en) 1993-10-07

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