EP0340433A3 - Tunnel module for creating a clean space by the laminar flow technique - Google Patents

Tunnel module for creating a clean space by the laminar flow technique Download PDF

Info

Publication number
EP0340433A3
EP0340433A3 EP19890104834 EP89104834A EP0340433A3 EP 0340433 A3 EP0340433 A3 EP 0340433A3 EP 19890104834 EP19890104834 EP 19890104834 EP 89104834 A EP89104834 A EP 89104834A EP 0340433 A3 EP0340433 A3 EP 0340433A3
Authority
EP
European Patent Office
Prior art keywords
creating
tunnel module
opening
laminar flow
clean space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19890104834
Other languages
German (de)
French (fr)
Other versions
EP0340433B1 (en
EP0340433A2 (en
Inventor
Herbert Eidam
Gerhard Frankenberger
Karl-Heinz Velde
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Grenzebach GmbH and Co KG
Original Assignee
Babcock BSH AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Babcock BSH AG filed Critical Babcock BSH AG
Priority to AT89104834T priority Critical patent/ATE83307T1/en
Publication of EP0340433A2 publication Critical patent/EP0340433A2/en
Publication of EP0340433A3 publication Critical patent/EP0340433A3/en
Application granted granted Critical
Publication of EP0340433B1 publication Critical patent/EP0340433B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/24—Means for preventing or suppressing noise
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
  • Building Environments (AREA)

Abstract

A tunnel module consists of an upper part (1), which is downwardly delimited by high-performance filters (15), and two side walls (3, 4). The upper part (1) has three chambers (9, 10, 11) which are divided by two intermediate bottoms (7, 8) and lie on top of one another, a fan (16) and a return air opening (14). The chambers (9, 10, 11) are interconnected by means of openings (12, 13) arranged on alternate sides in the intermediate bottoms (7, 8), the opening (12) of the upper intermediate bottom (7) and the return air opening (14) being situated on opposite sides. In order to produce a low-turbulence airflow, which is provided with a high static pressure content, in the lower chamber (11) in front of the high-performance filters (15), with low energy expenditure, the fan (16) is arranged in the central chamber (10) below the opening (12) of the upper intermediate bottom (7). <IMAGE>
EP89104834A 1988-04-30 1989-03-17 Tunnel module for creating a clean space by the laminar flow technique Expired - Lifetime EP0340433B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT89104834T ATE83307T1 (en) 1988-04-30 1989-03-17 TUNNEL MODULE FOR CONSTRUCTING A CLEAN ROOM WITH LAMINAR FLOW TECHNOLOGY.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE8805774U DE8805774U1 (en) 1988-04-30 1988-04-30 Tunnel module for setting up a clean room using laminar flow technology
DE8805774U 1988-04-30

Publications (3)

Publication Number Publication Date
EP0340433A2 EP0340433A2 (en) 1989-11-08
EP0340433A3 true EP0340433A3 (en) 1991-11-21
EP0340433B1 EP0340433B1 (en) 1992-12-09

Family

ID=6823584

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89104834A Expired - Lifetime EP0340433B1 (en) 1988-04-30 1989-03-17 Tunnel module for creating a clean space by the laminar flow technique

Country Status (5)

Country Link
EP (1) EP0340433B1 (en)
JP (1) JPH0229529A (en)
AT (1) ATE83307T1 (en)
DE (2) DE8805774U1 (en)
ES (1) ES2036732T3 (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3836147C2 (en) * 1988-10-23 1996-03-21 Ltg Lufttechnische Gmbh Clean room ceiling
DE9116423U1 (en) * 1991-07-08 1992-09-17 Babcock-BSH AG vormals Büttner-Schilde-Haas AG, 4150 Krefeld Module for building a cleanroom ceiling
DE4124808A1 (en) * 1991-07-26 1993-01-28 Prettl Rolf Air supply module - for maintaining controlled positive pressure within enclosure, partic. clean-room environment by adjustment of inlet flow area
DK183691A (en) * 1991-11-08 1993-05-09 Novenco As VENTILATION AND FILTER MODULE FOR CLEANING ROOM VENTILATION
DE4238595C2 (en) * 1992-11-16 1996-04-11 Kessler & Luch Gmbh Modular ventilation unit with integrated fan and connected filter frame, especially for clean room purposes
FR2700203A1 (en) * 1993-01-04 1994-07-08 Cherrier Gerard Laminar flow air diffusor
DE4320162C2 (en) * 1993-06-18 1995-11-16 Krantz Tkt Gmbh Module for a clean room ceiling
DE19538040C2 (en) * 1995-10-13 1998-08-13 Jenoptik Jena Gmbh Device for generating a cleaned, low-turbulence air stream to supply local clean rooms
DE19545252A1 (en) * 1995-11-24 1997-05-28 Helmut Kaeufer Modular and flexible plant for processing extremely hazardous materials
JP4547873B2 (en) * 2003-06-16 2010-09-22 ソニー株式会社 Pixel circuit, display device, and driving method of pixel circuit
DE202010000030U1 (en) 2010-01-13 2010-03-25 Hürner-Funken GmbH Fan filter unit
DE102010001319A1 (en) * 2010-01-28 2011-08-18 YIT Germany GmbH, 80992 Air outlet with a housing and a ceiling sail with air passage
DE102011106512A1 (en) * 2011-06-15 2013-01-03 Steinbeis GmbH & Co. für Technologietransfer vertreten durch STZ EURO Steinbeis-Transferzentrum Energie- Umwelt-Reinraumtechnik Filter device for filtering air introduced into clean room, has filter comprising air outlet surface, and deflection device arranged at housing between filter and flow straightener and deflecting air leaving from air outlet surface
CN103075765A (en) * 2013-01-18 2013-05-01 吴定汉 Air purifier
FI20165583A (en) * 2016-07-13 2018-01-14 Framery Oy Ventilation system and procedure
CN110594884B (en) * 2018-05-24 2024-07-12 湖南匡为科技有限公司 Mute air purifying device
FI128691B (en) * 2018-06-07 2020-10-15 Framery Oy Ventilation system and method
EE05856B1 (en) * 2019-01-18 2023-06-15 Silen Oü Mobile cabin with a ventilation system and a method for ventilating of it

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2029610A (en) * 1933-01-21 1936-02-04 Campbell Metal Window Corp Window ventilator
US3418915A (en) * 1966-08-18 1968-12-31 Farr Co Clean air ceiling module
US4409889A (en) * 1981-11-02 1983-10-18 Burleson Maurice L Modular clean room
FR2560672A1 (en) * 1984-03-02 1985-09-06 Gms Sa Modular room with controlled atmosphere
GB2157765A (en) * 1984-04-17 1985-10-30 Environmental Air Control For use in clean air environments

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3824909A (en) * 1970-04-08 1974-07-23 Cgt Corp Distribution system for clean rooms
NL163422C (en) * 1970-05-06 1980-09-15 Pielkenrood Vinitex Bv COMPOSITION FOR SEPARATING A DUST-FREE SECTION FROM A ROOM.
DE2104234C3 (en) * 1971-01-29 1973-10-31 Ceag Dominit Ag, 4600 Dortmund Plant for the production of clean air
DE2138985A1 (en) * 1971-08-04 1973-02-15 Buettner Schilde Haas Ag VENTILATION DEVICE
US3895570A (en) * 1973-09-27 1975-07-22 Baker Company Inc Air-insulated work station
DE3108678A1 (en) * 1981-03-07 1983-01-20 Glatt Maschinen- Und Apparatebau Ag, Pratteln CLEANROOM CABIN
DE3330536C2 (en) * 1983-08-24 1985-08-22 Fläkt AB, Nacka Ceiling construction for clean rooms
KR920007809B1 (en) * 1984-10-11 1992-09-17 가부시기가이샤 히다찌 세이사꾸쇼 Clean room
JPS61101733A (en) * 1984-10-24 1986-05-20 Shimizu Constr Co Ltd Unit type clean room
JPS62182540A (en) * 1986-02-04 1987-08-10 Nitta Kk Air cleaning device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2029610A (en) * 1933-01-21 1936-02-04 Campbell Metal Window Corp Window ventilator
US3418915A (en) * 1966-08-18 1968-12-31 Farr Co Clean air ceiling module
US4409889A (en) * 1981-11-02 1983-10-18 Burleson Maurice L Modular clean room
FR2560672A1 (en) * 1984-03-02 1985-09-06 Gms Sa Modular room with controlled atmosphere
GB2157765A (en) * 1984-04-17 1985-10-30 Environmental Air Control For use in clean air environments

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN, Band 10, Nr. 281 (M-520)[2337], 25. September 1986; & JP-A-61 101 733 (SHIMIZU) 20-05-1986 *
PATENT ABSTRACTS OF JAPAN, Band 12, Nr. 27 (M-662)[2874], 27. Januar 1988; & JP-A-62 182 540 (NITTA) 10-08-1987 *

Also Published As

Publication number Publication date
DE8805774U1 (en) 1988-06-23
JPH0229529A (en) 1990-01-31
ES2036732T3 (en) 1993-06-01
EP0340433B1 (en) 1992-12-09
DE58902933D1 (en) 1993-01-21
JPH0449018B2 (en) 1992-08-10
ATE83307T1 (en) 1992-12-15
EP0340433A2 (en) 1989-11-08

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